Glow discharge apparatus
Реферат: 873,024. Discharge tubes. VARIAN ASSOCIATES. Feb. 22, 1960 [March 6, 1959], No. 6197/60. Drawings to Specification. Class 39(1). A glow discharge apparatus such as a getter pump or vacuum gauge has an anode made up of passageways preferably cellular compartments, two cathodes disposed respectively opposite and spaced from the open ends of the cellular compartments and means for producing a magnetic field along the anode cells, the cellular compartments having a diameter or minimum internal dimension in inches falling within in the range of 1.2 to 4.0 times preferably 1.2 to 2.8 times a critical minimum diameter or minimum in- K ternal dimension d, = - where K is a B constant within the range of 150 to 300 inchgauss and B is the magnetic field intensity in gauss. The range 1.2 to 2.8 is taken between the half maximum speed pumping points 2.0 being the maximum, and K may be 220. The anode cells may be circular, rectangular, e.g. square or hexagonal, Figs. 6A, B, C, D (not shown). The anode and the two cathode plates are of Ti, Cr, Zr, Gd or Fe and are preferably of the same material. Operation is D.C. or A.C. The envelope is a stainless steel cup with a disc sealed across it and the anode lead passes out through a "Kovar" (Registered Trade Mark) alumina ceramic insulator seal and has a Mo disc shield to prevent sputtered material from the cathode from depositing on the insulator. The rectangular cathode plates have stainless steel spacer plates with ears struck out therefrom. A horseshoe permanent magnet generates the magnetic field which may be constant, alternating or time varying undirectional, e.g. a fevatron magnetic field. The invention may also be applied to vacuum gauges such as described in U.S.A. Specification 2,197,079 the cathodes being of non-sputterable Al.
Improved cathodes for magnetically-confined glow discharge apparatus
Номер патента: GB949097A. Автор: . Владелец: Varian Associates Inc. Дата публикации: 1964-02-12.