Micromechanical tunable fabry-perot interferometer and a method for producing the same
Номер патента: EP2480867A1
Опубликовано: 01-08-2012
Автор(ы): Martti Blomberg
Принадлежит: Valtion teknillinen tutkimuskeskus
Опубликовано: 01-08-2012
Автор(ы): Martti Blomberg
Принадлежит: Valtion teknillinen tutkimuskeskus
Реферат: The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap (104, 114) in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole (125) or a recess in a substrate (130) at the optical area of the interferometer.
Micromechanical tunable fabry-perot interferometer and a method for producing the same
Номер патента: US20120181647A1. Автор: Martti Blomberg. Владелец: Valtion teknillinen tutkimuskeskus. Дата публикации: 2012-07-19.