SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL, METHOD AND APPARATUS FOR MANUFACTURING THE SAME.

SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL, METHOD AND APPARATUS FOR MANUFACTURING THE SAME

Номер патента: US20160343573A1
Опубликовано: 24-11-2016
Автор(ы): HORII Sadayoshi, ITATANI Hideharu, Ogawa Arito
Принадлежит: HITACHI KOKUSAI ELECTRIC INC.
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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