Electrically adjustable optical filter
Номер патента: EP0929830A1
Опубликовано: 21-07-1999
Автор(ы): Altti Torkkeli, Ari Lehto, Martti Blomberg
Принадлежит: Vaisala Oy, Valtion teknillinen tutkimuskeskus
Опубликовано: 21-07-1999
Автор(ы): Altti Torkkeli, Ari Lehto, Martti Blomberg
Принадлежит: Vaisala Oy, Valtion teknillinen tutkimuskeskus
Реферат: The invention relates to an electrically controllable optical interferometer filter with a layered structure made using silicon micromechanical techniques. The filter comprises an essentially planar substrate (1), a first mirror element (15) deposited on said substrate (1) and a second mirror element (12, 17) superimposed on said first mirror element, and an optical resonator cavity (10) formed between said mirror elements (15, 17) with an optical length of about n.μ/2, where n = 1, 2, 3. According to the invention, above said second mirror element (12, 17) is further made a third mirror element (16), and between said third mirror element (16) and said second mirror element (12, 17) is formed a second optical resonator cavity (10) with an optical length of about n.μ/2, where n = 1, 2, 3.
Optical filter device and method for controlling optical filter device
Номер патента: FI130949B1. Автор: Masaki Hirose,Takashi Kasahara,Katsumi Shibayama,Toshimitsu Kawai,Hiroki Oyama,Yumi KURAMOTO. Владелец: Hamamatsu Photonics KK. Дата публикации: 2024-06-13.