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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Применить Всего найдено 2. Отображено 2.
13-08-2021 дата публикации

Diode chip structure and manufacturing method

Номер: CN113257674A
Принадлежит:

The invention discloses a diode chip manufacturing method. According to the method, at least one epitaxial layer is formed on a substrate; a groove region is formed on the epitaxial layer; ion implantation and diffusion are carried out through a first process condition, so that a first well region corresponding to the transverse PN junction is formed in the groove region, a second well region corresponding to the longitudinal PN junction is formed on the epitaxial layer, and a plurality of third well regions used for terminal ring regions are formed on the epitaxial layer; multiple times of ion implantation and diffusion are conducted under different process conditions so as to longitudinally form doped regions with different concentrations in the three well regions respectively; and a subsequent process is conducted to complete the manufacturing of the diode chip. The invention further discloses a diode chip structure. The technology is simple in process, the manufactured diode chip structure ...

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25-08-2023 дата публикации

3C silicon carbide diode device structure on silicon substrate and preparation method thereof

Номер: CN116646236A
Принадлежит:

The invention discloses a 3C silicon carbide diode device structure on a silicon substrate, which comprises a p-type lightly-doped silicon substrate, and an n-type highly-doped 3C silicon carbide epitaxial layer and an n-type doped 3C silicon carbide drift layer are sequentially arranged above the p-type lightly-doped silicon substrate. And a p-type junction region is arranged at the top of the 3C silicon carbide drift layer. The bottom of the p-type silicon substrate is provided with a groove structure, and the bottom of the groove extends to the n-type 3C silicon carbide epitaxial layer, so that the ohmic contact metal is in contact with the n-type 3C silicon carbide epitaxial layer. A silicon dioxide ILD structure is arranged above the n-type 3C silicon carbide drift layer, the middle of the silicon dioxide ILD structure is open, and Schottky contact metal and pad metal are sequentially filled in the silicon dioxide ILD structure. The pad metal is covered with a passivation layer, and ...

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