PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE

A method is provided, comprising creating at least one crack at a point on an edge of a stack of at least a substrate and a superstrate; propagating the crack along the periphery; and moving the superstrate relative to the substrate to complete separation of the superstrate from the substrate. 1. A method , comprising:creating at least one crack at a point on an edge of a stack of at least a substrate and a superstrate for initiating separation between the substrate and the superstrate;propagating the crack along the periphery; andmoving the superstrate relative to the substrate to complete separation of the superstrate from the substrate.2. The method of claim 1 , further comprising introducing a positive fluid pressure between the substrate and the superstrate at the point on the edge to create the crack.3. The method of claim 2 , wherein the positive fluid pressure includes a flow of clean dry air claim 2 , helium claim 2 , or nitrogen.4. The method of claim 1 , further comprising:retaining the superstrate in a superstrate chuck with a negative fluid pressure; andapplying a high flow of negative fluid pressure to a peripheral zone on the superstrate to propagate the crack along the edge of the stack.5. The method of claim 4 , further comprising continuing to introduce the positive fluid pressure to the separated portion while applying the high flow of negative fluid pressure to the peripheral zone on the superstrate.6. The method of claim 1 , further comprising moving the superstrate in a direction away from the substrate with a superstrate chuck.7. The method of claim 1 , further comprising applying a negative fluid pressure to a center zone on the superstrate to complete the separation of the superstrate from the substrate with a superstrate chuck.8. The method of claim 1 , further comprising applying a force at the point on an edge of the superstrate to create the crack.9. The method of claim 8 , further comprising creating another crack by applying a positive ...

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE

A method, comprising retaining a superstrate with a superstrate chuck; applying a pressure to deflect the superstrate toward a substrate, deflection of the superstrate being gradually extended along a radial direction; maintaining a vacuum applied to a perimeter of the superstrate and continuously retaining the superstrate with the chuck while the deflecting the superstrate by the pressure; releasing the vacuum from the perimeter of the superstrate; and releasing the superstrate from the chuck. 1. A method , comprising:retaining a superstrate with a superstrate chuck;applying a pressure to deflect the superstrate toward a substrate, deflection of the superstrate being gradually extended along a radial direction;maintaining a vacuum applied to a perimeter of the superstrate and continuously retaining the superstrate with the chuck while the deflecting the superstrate by the pressure;releasing the vacuum from the perimeter of the superstrate; andreleasing the superstrate from the chuck.2. The method of claim 1 , wherein:the superstrate chuck includes a center zone aligned with the center portion of the superstrate and a series of ring zones, the series of zones including a peripheral ring zone aligned with the perimeter of the superstrate and at least one inner ring zone between the center zone and the peripheral ring zone; and applying the pressure through the center zone and maintaining the vacuum applied through the series of ring zones;', 'releasing the vacuum from the ring zone and applying the pressure through the inner ring zone after the center portion of the superstrate has been deflected by the pressure; and', 'releasing the vacuum from the peripheral ring zone., 'applying the pressure to deflect the superstrate further including3. The method of claim 2 , wherein the series of ring zones includes a plurality of inner ring zones claim 2 , the vacuum is sequentially released from inner zones claim 2 , and the pressure is sequentially applied to superstrate ...

Function connection unit

The disclosure relates to a function connection unit for connecting at least one parameterizable functional module, including at least one functional module connection configured to connect to the at least one parameterizable functional module; a communication interface that is configured to receive first parameter data records, the first parameter data records including parameter data for parameterizing the at least one parameterizable functional module and first parameter indices that index a memory area for the parameter data; and a processor configured to convert the first parameter indices into second parameter indices to obtain second parameter data records, the second parameter indices indexing a predetermined memory area of the at least one parameterizable functional module for storing the parameter data in the at least one parameterizable functional module

METHOD OF FLUID DROPLET OFFSET AND APPARATUS FOR IMPRINT LITHOGRAPHY

An apparatus for imprint lithography is disclosed. The apparatus may include a fluid dispense head comprising at least two fluid dispense ports in a fixed arrangement relative to one another. The fluid dispense head can moves relative to the substrate in a translating direction. The apparatus may further include a logic element configured to determine a substrate fluid droplet pattern. The apparatus can dispense the formable material form a first part of the substrate fluid droplet pattern. The apparatus may be configured to move the fluid dispense head in an offset direction after an instruction to dispense the formable material is executed. The apparatus may dispense the formable material to form a second part of the substrate fluid droplet pattern. The first part of the fluid droplet pattern and the second part of the fluid droplet pattern can be dispensed during a first pass. 1. An apparatus for imprint lithography comprising:a fluid dispense head comprising at least two fluid dispense ports, wherein the at least two fluid dispense ports are in a fixed arrangement relative to one another;a stage configured to hold a substrate, wherein the stage and the fluid dispense head are adapted to move the substrate and the at least two fluid dispense ports relative to each other; and transmit information to move the substrate relative to the fluid dispense head in a translating direction while performing the following steps:', 'transmit information to dispense a formable material onto the substrate to form a first part of the substrate fluid droplet pattern;', 'transmit information to move the fluid dispense head in an offset direction, wherein the offset direction is different than the translating direction, wherein the apparatus is configured to move the fluid dispense head after an instruction to dispense the formable material is executed; and', 'transmit information to dispense the formable material onto the substrate to form a second part of the substrate fluid ...

SUPERSTRATE CHUCK, METHOD OF USE, AND METHOD OF MANUFACTURING AN ARTICLE

A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced. 1. A light transmitting chuck for retaining a superstrate or a template , comprising a geometric structure formed on a surface of the chuck , wherein the geometric structure includes at least one of a rounded edge portion and a roughened surface portion , such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.2. The chuck of claim 1 , wherein the geometric structure includes a parallel surface portion parallel with the surface of the chuck and the roughened surface portion extending from the surface of the chuck to the parallel surface portion.3. The chuck of claim 1 , wherein the roughened edge portion includes a first roughened edge around the parallel surface portion and a second roughened edge around the surface of the chuck.4. The chuck of claim 1 , wherein the geometric structure comprises a plurality of lands extending from the surface to define a plurality of zones of the chuck.5. The chuck of claim 1 , wherein the geometric structure comprises at least a channel recessed from the surface of the chuck.6. The chuck of claim 1 , wherein the geometric structure comprises at least a port extending through the chuck.7. The chuck of claim 1 , wherein surface of the chuck is a support surface of the superstrate or the template.8. A method claim 1 , comprising:retaining a superstrate or a template with a light transmitting chuck comprising a geometric structure, the geometric structure comprising at least one of a rounded edge portion and a roughened surface portion;advancing the ...

SUPERSTRATE AND METHODS OF USING THE SAME

An apparatus may include a superstrate. The superstrate can include a body having a diameter. The body may fit within a projected square. The projected square may have a length equal to the diameter of the body. The body within the projected square may produce an open area between an exterior edge of the body and the projected square. The superstrate may further include a first projection extending from the exterior edge of the body within the open area. 1. A superstrate comprising:a body having a diameter, wherein the body fits within a projected square, wherein the projected square has a length equal to the diameter of the body; anda first projection extending from the body within the projected square.2. The superstrate of claim 1 , wherein a length of the first projection from the body is greater than zero and is less than or equal to r√{square root over (2)}−r claim 1 , where r is a radius of the body.3. The superstrate of claim 1 , wherein the first projection is a circle.4. The superstrate of claim 1 , wherein the first projection exists in one of four areas between the projected square and the body.5. The superstrate of claim 4 , wherein the first projection occupies less than or equal to ¼the area of the projected square minus the area of the body.6. The superstrate of claim 1 , further comprising a second projection in one of four areas between the projected square and the body claim 1 , wherein the second projection is in an area not occupied by the first projection.7. The superstrate of claim 6 , wherein a length of the second projection from the body is greater than zero and is less than or equal to r√{square root over (2)}−r claim 6 , where r is a radius of the body.8. The superstrate of claim 6 , further comprising:a third projection in one of four areas between the projected square and the body, wherein the third projection is in an area not occupied by either the first projection or second projection.9. The superstrate of claim 8 , further comprising ...

PLANARIZATION APPARATUS, PLANARIZATION PROCESS, AND METHOD OF MANUFACTURING AN ARTICLE

A superstrate for planarizing a substrate. The superstrate includes a body having a first side having a contact surface and a second side having a central portion and a peripheral portion surrounding the central portion. The peripheral portion includes a recessed region. 1. A superstrate for planarizing a substrate , comprising:a body having a first side having a contact surface; anda second side having a central portion and a peripheral portion surrounding the central portion, the peripheral portion including a recessed region.2. The superstrate of claim 1 , wherein recessed region is concentric with the body3. The superstrate of claim 1 , wherein the recessed region includes a stepped down surface extending circumferentially throughout the peripheral portion of the second side.4. The superstrate of claim 1 , wherein the recessed region includes a tapered down surface extending circumferentially throughout the peripheral portion of the second side.5. The superstrate of claim 1 , wherein the first side includes a mesa extending therefrom and wherein the contact surface is provided on the mesa.6. The superstrate of wherein an edge of the mesa is at a radial width from the edge of the body.7. The superstrate of claim 6 , wherein the recessed region of the second side has a radial width wider than the radial width from the edge of the mesa to the edge of the body.8. The superstrate of claim 6 , wherein the recessed region of the second side has a radial width equal to the radial width from the edge of the mesa to the edge of the body.9. The superstrate of claim 1 , wherein the recessed region further comprises a trench extending circumferentially between the central portion and an edge of the second side.10. A method claim 1 , comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'retaining the superstrate of with a chuck at the second side of the superstrate;'}applying pressure to bend the superstrate with a curvature, wherein the curvature extends towards an ...

Practical and Safe Needle Biopsy Device

The invention relates to incision biopsy of the tissue that is collected in the tissue aspiration reservoir ( 19 ) that is administered by forward motion of the cutting inner edge ( 21 ), after the aspiration of the fluid material into the inner needle inlet ( 22 ) and the conveying space ( 23 ), and from there into the outlet ( 27 ) and the hollow of injection syringe ( 17 ) as a result of the vacuum that is created by opening of the notch ( 13 ) at the tip of the outer needle ( 10 ), with backward motion of the cutting inner needle ( 20 ) that is connected with the moveable piston that is positioned in the hollow ( 11 ) of the outer needle ( 10 ) that is connected with the said injection syringe body ( 16 ).

Planarization process, apparatus and method of manufacturing an article

A method is provided, comprising creating at least one crack at a point on an edge of a stack of at least a substrate and a superstrate; propagating the crack along the periphery; and moving the superstrate relative to the substrate to complete separation of the superstrate from the substrate.

Aspiration incision biopsy needle

The present invention relates to an aspiration incision biopsy needle which enables to take soft tissue specimens and/or cystic fluids, tissue aspirates and blood for determining the reasons of anomalous nodules and masses (tumors) in the organs of the human body. The objective of the invention is to provide a biopsy needle; which allows performing closed biopsy in all tissues that contain lesions such as organ, mass, LAP; particularly thyroid, breast, lymph node, cystic lesion, and cutaneous/subcutaneous lesions; whose application time is short; which may collect sufficient amount of tissue specimen from the target tissue at one time; enables to perform a plurality of incisions within the tissue at the same session; enables to use the syringe with one hand; includes a check valve; enables to realize whether or not the needle is in the vein; reduces the risk of bleeding and invasive complication.

Thermally improved reciprocating hermetic compressor

The present invention relates to a reciprocating hermetic compressor (1) for use in a refrigeration appliance, comprises a cylinder block (2) having a compression chamber (3), a cylinder head (4) having a suction chamber (5) and an exhaust chamber (6), each being in fluid connection with the compression chamber (3) through a valve plate (7) interposed between the cylinder block (2) and the cylinder head (4), an exhaust silencer, separately provided from the cylinder head (4), for attenuating pressure pulsation of refrigerant received from the exhaust chamber (6), a metal exhaust tube (8) for guiding the refrigerant from the exhaust chamber (6) to the exhaust silencer and a metal coupling (9) for fluidly connecting the exhaust chamber (6) with the exhaust tube (8).

Planarization process, apparatus and method of manufacturing an article

A planarization apparatus comprising a superstrate chuck is provided. The superstrate includes a plurality of inner lands protruding from a surface of the superstrate chuck and a peripheral land protruding from the surface of the superstrate chuck along a periphery of the superstrate chuck and encircling the inner lands therein. The peripheral land has a height smaller than a height of each of the inner lands. The peripheral land has a width sufficiently larger than a width of each of the inner lands such that a pressure leakage through the peripheral land is controlled to be less than a threshold.

平坦化プロセス、装置、及び物品製造方法

【課題】スーパーストレートチャックを備える平坦化装置が提供される。【解決手段】スーパーストレートチャック２８は、スーパーストレートチャックの表面から突出する１つ以上の内側ランドと、スーパーストレートチャックの周縁に沿って前記スーパーストレートチャックの表面から突出し、前記内側ランドを取り囲む周辺ランド３１４０と、を備える。周辺ランド３１４０は、内側ランドの各々の高さよりも小さい高さを有する。周辺ランド３１４０は、周辺ランドによって一方の側に境界付けられた間隙を通るガスの流量が所定の閾値未満に制御される程度に、内側ランドの各々の幅よりも大きい幅を有する。【選択図】図３

Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same

An apparatus includes a first substrate chuck configured to hold a first substrate, a second substrate chuck configured to hold a second substrate, and a dispenser configured to dispense a formable material onto the first substrate while the first substrate overlies the first substrate chuck and to dispensing the formable material onto the second substrate while the second substrate overlies the second substrate chuck. A method of forming a planarization layer on a substrate can use the apparatus. A method of making an article can include the method of forming the planarization layer.

Thermally improved reciprocating hermetic compressor

The present invention relates to a reciprocating hermetic compressor (1) for use in a refrigeration appliance, comprises a cylinder block (2) having a compression chamber (3), a cylinder head (4) having a suction chamber (5) and an exhaust chamber (6), each being in fluid connection with the compression chamber (3) through a valve plate (7) interposed between the cylinder block (2) and the cylinder head (4), an exhaust silencer, separately provided from the cylinder head (4), for attenuating pressure pulsation of refrigerant received from the exhaust chamber (6), a metal exhaust tube (8) for guiding the refrigerant from the exhaust chamber (6) to the exhaust silencer and a metal coupling (9) for fluidly connecting the exhaust chamber (6) with the exhaust tube (8).

Superstrate chuck, method of use, and method of manufacturing an article

A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.

Planarization process, apparatus and method of manufacturing an article

Bi̇r yakit depo koruma aparati

Bu buluş, araçların yakıt doldurulan yakıt deposu (A) ağzına monte edilen ve söz konusu ağızdan depo içerisinde bulunan yakıtın alınmasını engelleyen yakıt depo koruma aparatı (1) ile ilgilidir.

Compresor hermético alternativo mejorado térmicamente

Un compresor hermético alternativo (1) para uso en un aparato de refrigeración, en particular un refrigerador doméstico, que comprende un bloque (2) de cilindro con una cámara de compresión (3), una cabeza (4) de cilindro con una cámara de succión (5) y una cámara de evacuación (6) separadas y conectadas ambas, en relación de circulación de fluido, con la cámara de compresión (3) merced a una placa de válvula (7) situada entre el bloque (2) de cilindro y la cabeza (4) de cilindro, y un silenciador de evacuación separado de la cabeza (4) de cilindro, cuya función consiste en atenuar la pulsación de presión del refrigerante recibido de la cámara de evacuación (6), caracterizado por - un tubo de evacuación (8) de metal destinado a dirigir el refrigerante desde la cámara de evacuación (6) hasta el silenciador de evacuación, - un acoplador (9) de metal destinado a conectar, en relación de circulación de fluido, la cámara de evacuación (6) con el tubo de evacuación (8) de metal, comprendiendo dicho acoplador (9): - un cuerpo de metal que atraviesa completamente un orificio pasante (10) practicado en una parte de la pared (11) de la cabeza (4) del cilindro, - una parte hueca formada en el cuerpo de metal, que define una trayectoria de flujo de refrigerante desde la cámara de evacuación (6) hasta el tubo de evacuación (8), - una primera parte de fijación, prevista de manera enteriza con el cuerpo, que a vuelta de rosca asegura el cuerpo en la cabeza (4) del cilindro, y - una segunda parte de fijación, prevista de manera enteriza con el cuerpo, que mediante una unión soldada conecta herméticamente una abertura del tubo de evacuación (6) con la parte hueca.

Toplotno izboljšan hermetični batni kompresor