09-07-2015 дата публикации
Номер: US20150192528A1
A method and apparatus for determining coplanarity of three-dimensional features on a substrate comprises a support for an object to be inspected in an object plane, a light source for illuminating the object, a first image capturing device having a first sensor and a first tiltable lens, a second image capturing device having a second sensor and a second tiltable lens, and an image processor to determine the coplanarity. Each tiltable lens is movable from a first variable angle to a second variable angle, with respect to its sensor, so that the respective lens plane and its sensor plane substantially intersect at the object plane in accordance with the Scheimpflug principle and the respective image is in focus across the whole field of view and of uniform light intensity. 1. An apparatus for determining coplanarity of three-dimensional features on a substrate of an object , comprising:a support for the object to be inspected where the object has an object plane;a light source for illuminating the object to be inspected;a first image capturing device comprising a first sensor having a first sensor plane and a first tiltable lens having a first lens plane, the first image capturing device being mounted at a first perspective viewing angle with respect to the object plane for capturing a first side view image of the illuminated object;a second image capturing device comprising a second sensor having a second sensor plane and a second tiltable lens having a second lens plane, the second image capturing device being mounted at a second perspective viewing angle with respect to the object plane for capturing a second side view image of the illuminated object; andan image processor for processing the first and the second side view images captured by the first and the second imaging capturing devices to determine the coplanarity of the three-dimensional features on the substrate,wherein the first tiltable lens is movable from a first variable angle to a second variable ...
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