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Применить Всего найдено 19. Отображено 19.
13-09-2022 дата публикации

Beam-steering system based on a MEMS-actuated vertical-coupler array

Номер: US0011441353B2
Автор: Xiaosheng Zhang, Ming Chiang A Wu, Andrew S Michaels, Johannes Henriksson
Принадлежит: The Regents of the University of California

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 1
12-09-2017 дата публикации

Integrated micro/nanogenerator and method of fabricating the same

Номер: US0009762151B2
Автор: Haixia Zhang, Xiaosheng Zhang, Mengdi Han, Fuyun Zhu, ZHANG HAIXIA, ZHANG XIAOSHENG, HAN MENGDI, ZHU FUYUN, Zhang Haixia, Zhang Xiaosheng, Han Mengdi, Zhu Fuyun
Принадлежит: PEKING UNIVERSITY, UNIV BEIJING

The present disclosure discloses an integrated micro/nanogenerator and a method of fabricating the same The integrated micro/nanogenerator has a structure comprising a conducting layer, a PET layer, a PDMS layer, a micro-nano hierarchical PDMS array and a metal film layer, the conducting layer being manufactured on a surface of the PET layer, the PET layer being made of polyethylene terephthalate; the PDMS layer being made of polydimethylsiloxane, and the micro-nano hierarchical PDMS array being manufactured on a surface of the PDMS layer. The method comprises steps of: 1) fabricating a micro-scale structure on a substrate through a combination of lithography and chemical etching or physical etching; 2) fabricating a nano-scale structure with high density and high depth-to-width ratio directly on a surface of the micro-scale structure through a mask-free optimized deep reactive ion etching process; 3) using a PDMS casting film transfer process by adjusting and controlling process parameters, by means of using the mold of mirco-nano hierarchical array structure as a template; 4) fabricating a conducting layer on a surface of the PET layer by using an evaporation or sputtering or chemical vapor deposition process; 5) bonding the PDMS layer and the PET layer through high temperature bonding or normal temperature physical pressing; and 6) assembling in sequence and packaging the bonded structure obtained in step 5), the metal film layer, and another bonded structure obtained in step 5).

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Номер записи: 2
10-10-2023 дата публикации

Beam-steering system based on a MEMS-actuated vertical-coupler array

Номер: US0011781379B2
Автор: Xiaosheng Zhang, Ming Chiang A Wu, Andrew S Michaels, Johannes Henriksson
Принадлежит: The Regents of the University of California

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 3
24-12-2015 дата публикации

INTEGRATED MICRO/NANOGENERATOR AND METHOD OF FABRICATING THE SAME

Номер: US20150372620A1
Автор: HAN Mengdi, Zhang Haixia, Zhang Xiaosheng, Zhu Fuyun
Принадлежит:

The present disclosure discloses an integrated micro/nanogenerator and a method of fabricating the same The integrated micro/nanogenerator has a structure comprising a conducting layer, a PET layer, a PDMS layer, a micro-nano hierarchical PDMS array and a metal film layer, the conducting layer being manufactured on a surface of the PET layer, the PET layer being made of polyethylene terephthalate; the PDMS layer being made of polydimethylsiloxane, and the micro-nano hierarchical PDMS array being manufactured on a surface of the PDMS layer. The method comprises steps of: 1) fabricating a micro-scale structure on a substrate through a combination of lithography and chemical etching or physical etching; 2) fabricating a nano-scale structure with high density and high depth-to-width ratio directly on a surface of the micro-scale structure through a mask-free optimized deep reactive ion etching process; 3) using a PDMS casting film transfer process by adjusting and controlling process parameters, by means of using the mold of mirco-nano hierarchical array structure as a template; 4) fabricating a conducting layer on a surface of the PET layer by using an evaporation or sputtering or chemical vapor deposition process; 5) bonding the PDMS layer and the PET layer through high temperature bonding or normal temperature physical pressing; and 6) assembling in sequence and packaging the bonded structure obtained in step 5), the metal film layer, and another bonded structure obtained in step 5). 1. An integrated micro/nanogenerator , the generator has a structure comprising a conducting layer , a PET layer , a PDMS layer , a micro-nano hierarchical PDMS array and a metal film layer , the conducting layer being manufactured on a surface of the PET layer from a metal or semiconductor material having good electrical conductivity; the PET layer being made of polyethylene terephthalate; the PDMS layer being made of polydimethylsiloxane; the micro-nano hierarchical PDMS array being ...

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Номер записи: 4
10-11-2022 дата публикации

Beam-steering System Based on a MEMS-Actuated Vertical-Coupler Array

Номер: US20220356761A1
Автор: Andrew S MICHAELS, Johannes HENRIKSSON, Ming Chiang A WU, Xiaosheng Zhang
Принадлежит: UNIVERSITY OF CALIFORNIA

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 5
24-11-2022 дата публикации

Lidar with microlens array and integrated photonic switch array

Номер: US20220373688A1
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: Neye Systems Inc

The present disclosure is directed to imaging LiDARs with optical antennas fed by optical waveguides. The optical antennas can be activated through an optical switch network that connects the optical antennas to a laser source to a receiver. A microlens array is positioned between a lens of the LiDAR system and the optical antennas, the microlens array being positioned so as to transform an emission angle from a corresponding optical antenna to match a chief ray angle of the lens. Methods of use and fabrication are also provided.

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Номер записи: 6
28-04-2021 дата публикации

Beam-steering system based on a mems-actuated vertical-coupler array

Номер: EP3811107A2
Автор: Andrew S. MICHAELS, Johannes HENRIKSSON, Ming Chiang A. Wu, Xiaosheng Zhang
Принадлежит: UNIVERSITY OF CALIFORNIA

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 7
26-09-2022 дата публикации

Ｍｅｍｓ作動垂直カプラアレイに基づくビーム誘導システム

Номер: JP2022140574A
Автор: Chiang A Wu Ming, Henriksson Johannes, S Michaels Andrew, Xiaosheng Zhang, アンドリュー・エス・マイケルズ, シャオシェン・ジャン, ミン・チアン・エー・ウ, ヨハンネス・ヘンリクソン
Принадлежит: UNIVERSITY OF CALIFORNIA

【課題】集積された光学的ＭＥＭＳ作動ビーム誘導システムが開示される。【解決手段】ビーム誘導システムは、レンズと、スイッチングネットワークおよび垂直カプラの配列を有するプログラマブル垂直カプラ配列とを含み、ここで、スイッチングネットワークは、それが光を自由空間に効率的に放射するように、垂直カプラを励起することができる。レンズは、励起された垂直カプラから受信された光をコリメートし、垂直カプラ配列の中の励起された垂直カプラの位置によって決定される伝搬方向に沿って出力ビームを案内する。いくつかの実施形態では、垂直カプラは、レンズの収差を補正するように構成される。いくつかの実施形態では、２つ以上の垂直カプラが、複数の出力ビームの誘導を可能にするために励起され得る。いくつかの実施形態では、スイッチングネットワークは非ブロッキングである。【選択図】図１Ａ

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Номер записи: 8
11-01-2024 дата публикации

Beam-steering System Based on a MEMS-Actuated Vertical-Coupler Array

Номер: US20240011353A1
Автор: Andrew S. MICHAELS, Johannes HENRIKSSON, Ming Chiang A. Wu, Xiaosheng Zhang
Принадлежит: UNIVERSITY OF CALIFORNIA

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 9
27-02-2020 дата публикации

Beam-steering system based on a mems-actuated vertical-coupler array

Номер: WO2020040854A2
Автор: Andrew S MICHAELS, Johannes HENRIKSSON, Ming Chiang A. Wu, Xiaosheng Zhang
Принадлежит: The Regents of the University of California

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 10
07-12-2023 дата публикации

Monolithic integration of focal plane switch array lidars with cmos electronics

Номер: US20230393243A1
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: Neye Systems Inc

The present disclosure is directed to imaging LiDARs monolithic integration of focal plane switch array LiDARS with CMOS electronics. The CMOS wafer contains electronic circuits needed to control the focal plane array, e.g., digital addressing circuits and MEMS drivers, as well as circuits to amplify and process the detected signals, e.g., trans-impedance amplifiers (TIA), multi-stage amplifiers, analog-to-digital converters (ADC), digital signal processing (DSP), and circuits to communicate with external systems. Methods of use are also provided.

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Номер записи: 11
21-12-2023 дата публикации

Lidar with split and amplify architecture and integrated protection switches

Номер: WO2023245135A1
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: nEYE Systems, Inc.

The present disclosure is directed to imaging LiDARs with separate transmit (Tx) and receive (Rx) optical antennas fed by different optical waveguides. This pair of optical antennas can be activated at the same time through a dual-channel optical switch network, with the Tx antenna connected to a laser source and the Rx antenna connected to a receiver. The Tx and Rx antennas can be positioned adjacent to each other, so they point to approximately the same far-field angle. No optical alignment between the Tx and Rx is necessary. This LiDAR configuration, referred to herein as pseudo-monostatic LiDAR, eliminates spurious reflections and increases the dynamic range of the LiDAR.

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Номер записи: 12
22-04-2021 дата публикации

Beam-steering System Based on a MEMS-Actuated Vertical-Coupler Array

Номер: US20210116778A1
Автор: Andrew S MICHAELS, Johannes HENRIKSSON, Ming Chiang A WU, Xiaosheng Zhang
Принадлежит: UNIVERSITY OF CALIFORNIA

An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

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Номер записи: 13
22-02-2024 дата публикации

Lidar systems and methods

Номер: WO2024040231A1
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: nEYE Systems, Inc.

The present disclosure is directed to imaging LiDARs that can include a FPSA beam scanner and a time of flight (ToF) detector array. The ToF detector array may comprise an array of single-photon avalanche diodes (SPADs), or an array of avalanche photodiodes (APDs). In one aspect, the ToF detector arrays are disposed on a CMOS integrated circuit wafer, wherein each of the ToF detectors is configured to receive reflected light from the target through a corresponding optical antenna. Methods of use are also provided.

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Номер записи: 14
29-02-2024 дата публикации

Lidar systems and methods

Номер: WO2024044790A2
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: nEYE Systems, Inc.

The present disclosure is directed to imaging LiDARs that can include a FPSA beam scanner and a lens. One or both of the FPSA beam scanner and lens can be moved laterally to increase a lateral resolution of the LiDAR system. Some embodiments can include a microlens disposed between the FPSA beam scanner and the lens. Methods of use are also provided.

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Номер записи: 15
07-03-2024 дата публикации

Monolithic integration of focal plane switch array lidars with cmos electronics

Номер: WO2023235876A3
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: nEYE Systems, Inc.

The present disclosure is directed to imaging LiDARs monolithic integration of focal plane switch array LiDARS with CMOS electronics. The CMOS wafer contains electronic circuits needed to control the focal plane array, e.g., digital addressing circuits and MEMS drivers, as well as circuits to amplify and process the detected signals, e.g., trans-impedance amplifiers (TIA), multi-stage amplifiers, analog-to-digital converters (ADC), digital signal processing (DSP), and circuits to communicate with external systems. Methods of use are also provided.

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Номер записи: 16
07-12-2023 дата публикации

Monolithic integration of focal plane switch array lidars with cmos electronics

Номер: WO2023235876A2
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: nEYE Systems, Inc.

The present disclosure is directed to imaging LiDARs monolithic integration of focal plane switch array LiDARS with CMOS electronics. The CMOS wafer contains electronic circuits needed to control the focal plane array, e.g., digital addressing circuits and MEMS drivers, as well as circuits to amplify and process the detected signals, e.g., trans-impedance amplifiers (TIA), multi-stage amplifiers, analog-to-digital converters (ADC), digital signal processing (DSP), and circuits to communicate with external systems. Methods of use are also provided.

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Номер записи: 17
04-04-2024 дата публикации

Lidar systems and methods

Номер: WO2024044790A3
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Noriaki Kaneda, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: nEYE Systems, Inc.

The present disclosure is directed to imaging LiDARs that can include a FPSA beam scanner and a lens. One or both of the FPSA beam scanner and lens can be moved laterally to increase a lateral resolution of the LiDAR system. Some embodiments can include a microlens disposed between the FPSA beam scanner and the lens. Methods of use are also provided.

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Номер записи: 18
12-11-2024 дата публикации

LiDAR with microlens array and integrated photonic switch array

Номер: US12140676B2
Автор: Kyungmok Kwon, Ming Chiang A. Wu, Tae Joon SEOK, Xiaosheng Zhang
Принадлежит: Neye Systems Inc

The present disclosure is directed to imaging LiDARs with optical antennas fed by optical waveguides. The optical antennas can be activated through an optical switch network that connects the optical antennas to a laser source to a receiver. A microlens array is positioned between a lens of the LiDAR system and the optical antennas, the microlens array being positioned so as to transform an emission angle from a corresponding optical antenna to match a chief ray angle of the lens. Methods of use and fabrication are also provided.

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Номер записи: 19