30-04-2015 дата публикации
Номер: US20150115331A1
Принадлежит:
The present invention relates to a sensor that uses a sensing mechanism having a combined static charge and a field effect transistor, the sensor including: a substrate; source and drain units formed on the substrate and separated from each other; a channel unit interposed between the source and drain units; a membrane separated from the channel unit, disposed on a top portion and displaced in response to an external signal; and a static charge member formed on a bottom surface of the membrane separately from the channel unit and generating an electric field. Accordingly, since the sensor using a sensing mechanism having a combined static charge and a field effect transistor according to an embodiment of the present invention can measure the displacement or movement of the sensor by measuring a change of the electric field of the channel unit of the field effect transistor by using a static member, the electric field can be formed so as to be proportional to an amount of charge and inversely proportional to a squared distance regardless of the intensity and distribution of an external electric field. Therefore, sensitivity is improved without being affected by an external electric field. 1. A sensor using a sensing mechanism combining an electrostatic unit and an electric field effect transistor , comprising:a substrate;a source part and a drain part formed on the substrate and separated from each other;a channel part formed between the source part and the drain part;a membrane separated from the channel part to be positioned upwardly and reacting to an external signal to generate a displacement; andan electrostatic member formed at a lower surface of the membrane to be separated from the channel part and generating an electric field.2. The sensor of claim 1 , whereinthe channel part and the electrostatic member are positioned to overlap.3. The sensor of claim 2 , whereinthe source part, the channel part, the drain part, and the electrostatic member form an electric ...
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