18-03-2021 дата публикации
Номер: US20210083645A1
Принадлежит:
Surface acoustic wave device having mass-loaded electrode. In some embodiments, a surface acoustic wave device for providing resonance of a surface acoustic wave having a wavelength λ can include a quartz substrate and a piezoelectric plate formed from LiTaOor LiNbOdisposed over the quartz substrate. The piezoelectric plate can have a thickness greater than 2λ. The surface acoustic wave device can further include an interdigital transducer electrode formed over the piezoelectric plate. The interdigital transducer electrode can have a mass density p in a range 1.50 g/cm<ρ≤6.00 g/cm, 6.00 g/cm<ρ≤12.0 g/cm, or 12.0 g/cm<ρ≤23.0 g/cm, and a thickness greater than 0.148λ, greater than 0.079λ, or greater than 0.036λ, respectively. 1. A surface acoustic wave device for providing resonance of a surface acoustic wave having a wavelength λ , comprising:a quartz substrate;{'sub': 3', '3, 'a piezoelectric plate formed from LiTaOor LiNbOand disposed over the quartz substrate, the piezoelectric plate having a thickness greater than 2λ; and'}{'sup': 3', '3', '3', '3', '3', '3, 'an interdigital transducer electrode formed over the piezoelectric plate, the interdigital transducer electrode having a mass density ρ in a range 1.50 g/cm<ρ≤6.00 g/cm, 6.00 g/cm<ρ≤12.0 g/cm, or 12.0 g/cm<ρ≤23.0 g/cm, and a thickness greater than 0.148λ, greater than 0.079λ, or greater than 0.036λ, respectively.'}2. The surface acoustic wave device of wherein the interdigital transducer electrode has a metallization ratio (MR) of approximately 0.5 claim 1 , where MR=F/(F+G) claim 1 , the quantity F being a width of an electrode finger and the quantity G being a gap dimension between two electrode fingers.3. The surface acoustic wave device of wherein the interdigital transducer electrode includes aluminum claim 1 , titanium claim 1 , magnesium claim 1 , copper claim 1 , nickel claim 1 , silver claim 1 , molybdenum claim 1 , gold claim 1 , platinum claim 1 , tungsten claim 1 , tantalum claim 1 , hafnium ...
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