Substrate supporting device

Mode of execution

Combined with the Figure below the further detailed description of this invention.

Please also refer to Figure 1 and Figure 2, the invention 1st embodiment of the base plate bearing device 100 comprises a substrate support 110 and a plurality of positioned on the substrate support 110 holding module 120. The substrate support 110 is provided with a plurality of 1st through hole 140, the 1st through hole 140 is a long strip. The substrate support 110 is also provided with the arrangement of a plurality of periodic 2nd through hole 150. A plurality of lifting pivot 130 are respectively one-to-one correspondence is set in the 2nd through hole 150 in, and the plurality of lifting pivot 130 at the same time raise or at the same time can be accommodated in the substrate support 110 in, so as to lift the glass substrate to be processed to the substrate support 110 above or on a substrate support 110 of the bearing surface 111 on. The substrate support 110 also is provided with a plurality of periodically arranged holes 160, the hole 160 and the vacuum pump (Figure not shown) is connected with the, when the processing of the glass substrate is the substrate support 110 of the bearing surface 111 is on, the vacuum pump can be utilized the hole 160 with appropriate negative pressure, thus to suck the glass substrate, at this moment, on the glass substrate to be processed is absorbed and fixed in the substrate support 110 of the bearing surface 111 on. The substrate support 110 is arranged at the lower part of a rotary module 170, the rotating module 170 can make the substrate support 110 to rotate.

Please refer to the fig. 3, the clamping module 120 includes a main body part 121, at least one clamping rod 122 (  Pin Clamp), a fixing piece 123, at least a guide rod 124, at least one elastic component 1st 125 and an excitation part 126. In this embodiment, the holding module 120 has two parallel clamping rod 122, two guide rod 124 and two 1st elastic component 125.

Requests at the same time, reference Figure 1, Figure 4 and Figure 5, the clamping rod 122 is arranged on one end of the main body part 121 in, clamping rod 122 and the other end passes through the of the above-mentioned 1st through hole 140, and the clamping rod 122 can be in the above-mentioned 1st through hole 140 parallel to the above-mentioned base plate support the inner edge 110 of the bearing surface 111 direction.

The above-mentioned holding member 123 is fixed to the base plate support 110 is, the above-mentioned guide rod 124 is connected with the holding member 123 are connected, the guide rod 124 passes through the other end of the in the main body part 121 guide through hole 1216 in, the guide bar 124 can be in the guide through hole 1216 along in parallel to the above-mentioned substrate support 110 of the bearing surface 111 direction.

The above-mentioned 1st elastic component 125 is sleeved on the guide bar 124 is, the 1st elastic component 125 is respectively abutted against the two ends of the fixing piece 123 and the main body part 121.

The above-mentioned excitation part 126 can be pivoted in the body part 121 applies a force, so that the main body part 121 along the guide bar 124 extending direction, i.e. along parallel to the above-mentioned substrate support 110 of the bearing surface 111 direction. The excitation part 126 can be made of the cylinder, the motor and the like, in this embodiment, the excitation part 126 in the cylinder.

In order to make the clamping rod 122 can move up and down and rotate the, in the above-mentioned main body part 121 is provided with a linear bushing in 1211 and bearing 1212. The bearing 1212 is clamped in the linear bushing 1211 and the clamping fingers 122 between. Is arranged on the main body part 121 of the clamping rod 122 is provided with an annular protrusion 1221, in this embodiment, two bearing 1212 are arranged on the annular protuberance 1221 above and below, is set up in this annular protrusion 1221 the lower bearing 1212 and a 2nd elastic assembly 1213 are connected, the 2nd elastic assembly 1213 with the other end of the main body part 121 of the tan 1214 is connected.

The main body part 121 of the clamping rod 122 has a the card buckles the hitch 1222, the card fastening 1222 can buckle in the main body part 121 of the tan 1214 is, in this, a word can be used to play a presses down the clamping rod 122, the clamping fingers 122 together with bearing 1212 will move downward, 2nd elastic assembly 1213 at this moment will be compressed, and then the clamping rod 122 to rotate 90 degrees, so as to make the the card buckles the hitch 1222 can buckle in the main body part 121 of the tan 1214 is, at this moment, the clamping rod 122 passes through the above-mentioned 1st through hole 140 contained in the one end of the substrate support 110 in, the clamping rod 122 is in the locked state. The corresponding, clamping rod 122 is not buckled in tan 1214 is on, in other words the clamping rod 122 passes through the above-mentioned 1st through hole 140 is higher than the one end of the support base plate 110 of the bearing surface 111 time, the clamping rod 122 is in the non-locking state.

In the clamping rod 122 is below the sensing sensor 1215, the sensor 1215 for sensing clamping rod 122 the locked state.

The following will explain the working principle of the clamping module:

When the clamping rod 122 is in the non-locking state and excitation member 126 to the main body part 121 applies a force, the body portion 121 together with the clamping rod 122 will move along the guide rod 124 extending direction, the guide rod 124 at the main body part 121 guide through hole 1216 mobile, is sleeved on the guide bar 124 on the elastic component 1st 125 is compressed, at this time, clamping module 120 is in a non-clamping state. When the clamping rod 122 is in the non-locking state and excitation member 126 of the main body part of the lifting 121 when the applied force, 1st elastic component 125 applying an elastic force to the main body part 121 together with the clamping rod 122 along the guide bar 124 extending direction of elastic-return, at this time, clamping module 120 is in the clamping state.

The following will introduce the base plate bearing device 100 the principle of the work of:

Please also refer to fig. 4 and fig. 6, first of all through the sensor 1215 sensing clamping rod 122 locking state, to avoid clamping rod 122 of the glass substrate to be processed and 220 collision; utilize the mechanical arm (not shown in Figure) of the glass substrate to be processed 220 from the substrate carrier (Figure not shown) to take out in; the glass substrate 220 is placed on the above-mentioned lifting pivot 130 (at this moment, the lifting pivot 130 is at the same time raised state) on; the lifting pivot 130 contained in the substrate support 110 in, the glass substrate 220 is placed into substrate support 110 of the bearing surface 111 on; makes use of the vacuum pump (Figure not shown) the hole 160 having appropriate positive pressure, the glass substrate 220 trace floats off in substrate support 110 of the bearing surface 111 on; the clamping module 120 is switched to the holding state, utilizing a plurality of clamping module 120 the glass substrate 220 clamping; and then makes use of the vacuum pump (Figure not shown) the hole 160 with appropriate negative pressure, the glass substrate 220 adsorption to the substrate support 110 of the bearing surface 111 is, thus, completed glass substrate 220 of the clamping action. The clamping rod 122 and the glass substrate 220 by a rolling friction contact with the way, the generation of dust can be avoided.

The glass substrate 220 of the completion of the clamping operation, need to use alignment device 210 of the glass substrate 220 to carry on the para position. Alignment device 210 includes an electric charge coupler 212 and the relative set zoom lens 211, first, the zoom lens 211 successive zoom to detect glass substrate 220 on the locating mark 221, because the holding module 120 to complete the glass substrate 220 after the clamping action, a glass substrate 220 on the location of the mark 221 will be located in the alignment device 210 within the range of detection of the visual field, therefore, using the zoom lens 211 successive zoom to detect glass substrate 220 on the locating mark 211 only the action of 2-3 time, the time required is about 3-4 seconds. The alignment device 210 the result of detection is fed back to the driving device 170 (see Figure 1), and by the driving device 170 the driving substrate support 110 to rotate to angle compensation, thereby completing the glass substrate 220 positioning action. In this, with a clamping module 120 of the base plate bearing device 100 can reach the location accuracy of less than 0.02 mm, therefore, able to reduce the driving device 170 to the substrate support 110 angle of the compensation action, on the other, a glass substrate 220 stacked on the base plate carrier in its positioning in existence ± 3 mm-± 5 mm error, by the holding module 120 will be the elimination of the clamping process.

Please also refer to Figure 7 and Figure 8, of the 2nd embodiment of the present invention base plate carrying device 300 and the 1st embodiment of the base plate bearing device 100 basically the same, the difference lies in: the clamping fingers 322 as a guide screw, the main body part 321 is provided with the clamping rod 322 is matched with the screw hole 323, the clamping rod 322 can be screwed into the screw hole 323 the inner. A plurality of clamping module 320 is arranged on the substrate support 310 different areas of the inside and outside, in order to grasp the different size of the glass substrate to be processed.

Furthermore, the technicians of this field can also be made in the spirit of the present invention other changes. So, these according to the present invention changes the spirit of the, should be included in this invention within the scope of protection requested.