Waste liquor sectionalized concentration processing system

06-10-2010 дата публикации
Номер:
CN0101851031A
Принадлежит: Individual
Контакты:
Номер заявки: 13-10-20090335
Дата заявки: 31-03-2009

[1]

Technical Field

[2]

The invention relates to a waste liquid processing system, in particular to a waste liquid segmented concentration processing system.

[3]

Background Art

[4]

Example, the etching process using most of the corrosive liquid-containing, and in order to maintain good cleaning and etch rate, the concentration of the corrosive liquid must be fixed within the concentration range of the control, the generated in the process will contain a large amount of material waste liquid fluorinion, according to the required environmental protection law in the waste water discharged by the semiconductor manufacturing industry, fluorine ion concentration of not higher than 15 PPM, in order to discharge.

[5]

Whereas silica aqueous solution processing process is the process for preparing a chemical-collision theory-degradation phenomena, with reference to Figure 1 as shown, is a schematic diagram-known drug adding reaction hydrofluoric acid waste water, can be clearly informed by fig. in a relatively high concentration of ions in the aqueous solution condition system , the added proportion of the reaction is the normal state, but when the processing to the fixed low ion concentration, treatment agent to increase the proportion of times, considerable wasted, and it is quite expensive price of medicine, the concept of cost is very inconsistent.

[6]

From this it can be seen, the above-mentioned existing waste liquid in the processing system with the use of the structure, is obviously still has inconvenience and defects, and urgently needs to be further improved. In order to solve the above-mentioned existing problems, related manufacturers to seek other none who does not spends solution, but for a long time has not met the design is the development is complete, the structure is not appropriate for ordinary products can solve the above problems, this is obviously related industry is eager to solve the problem. Therefore, how to create a new kind of waste liquid segmented concentration processing system, the current is one of important research and development issues, have become a great need of improving the current goal of the industry.

[7]

In view of the above existing of the defects of the waste liquid processing system, based on the present inventors have engaged in the design and manufacture of such products for many years bounteously practical experience and professional knowledge, the use of the theoretical and cooperating with, actively research and innovation, in order to create a new kind of waste liquid segmented concentration processing system, to improve generally existing waste liquid treatment system, to make it more practical. After years of research, design, manufacture and after repeated after sample and improvements, finally creating an ascertainment with utility value of this invention.

[8]

Content of the invention

[9]

The main purpose of the present invention lies in, existing overcome the defects of the waste liquid treatment system, and to provide a novel segmented concentration of the waste liquid processing system, the technical problem to be solved is to make its effectively reduce and the dosage of waste liquor recovery and re-use, is very suitable for utility.

[10]

The purpose of this invention and to solve the technical problem is to adopt the following technical scheme to achieve. According to the present invention provides a waste liquid segmented concentration processing system, is applied to the high-concentration waste liquid treatment, the processing steps are as follows: step A:a high-concentration waste stream and the waste stream and reaction agents introduced into a high-concentration processing unit, the medicine and the precipitation reaction of high-concentration waste liquid, in order to reduce the concentration of the waste stream to form a low-concentration waste liquid thereof; step B: the low-concentration waste liquid guide to a low-concentration processing unit to carry out the adsorption operation, in order to reduce the waste liquor concentration, and generates a high concentration condensed regenerated liquid; step C: concentrated regeneration liquid of the high-concentration using a de-attaching unit and is attached so as to improve the concentration of the waste, and in to the high-concentration waste liquid and repeatedly A-C steps.

[11]

The purpose of this invention and to solve the technical problem also can adopt the following technical measures to further realize.

[12]

The concentration of the waste liquid of the sub-processing system, wherein the low-concentration processing unit is using a ion exchange resin adsorption material.

[13]

The concentration of the waste liquid of the sub-processing system, wherein the low-concentration processing unit is using a zeolite adsorption material.

[14]

The purpose of this invention and to solve the technical problem also adopts the following technical scheme to realize. According to the present invention provides a waste liquid segmented concentration processing system, a low concentration is applied to the large amount of waste liquid treatment, the processing steps are as follows: step A: the low-concentration waste liquid into the low-concentration processing unit to carry out the adsorption operation, in order to reduce the concentration of the waste stream to form a low-concentration waste stream, and produce a high concentration condensed regenerated liquid; step B: and the high concentration of the regenerating liquid then concentrated using a de-attaching unit after desorption its waste liquor concentration can be improved, and in to the high-concentration waste liquid; step C: and then the high-concentration waste stream and the waste stream and reaction agents into the high-concentration processing unit, the medicine and the precipitation reaction of high-concentration waste liquid, in order to reduce the concentration of the waste stream to form a low-concentration waste liquid, and repeating steps A-C.

[15]

The purpose of this invention and to solve the technical problem also can adopt the following technical measures to further realize.

[16]

The concentration of the waste liquid of the sub-processing system, wherein the low-concentration processing unit is using a ion exchange resin adsorption material.

[17]

The concentration of the waste liquid of the sub-processing system, wherein the low-concentration processing unit is using a zeolite adsorption material.

[18]

Compared with the prior art, the present invention has obvious advantages and beneficial effects. Can be known from the above, in order to achieve the above-mentioned purpose, the present invention provides a waste stream segment concentration processing system, includes a high-concentration waste liquid, a waste liquid of low concentration, a high-concentration processing unit, a low-concentration processing unit, the attaching unit.

[19]

The high-concentration waste stream and the waste stream and reaction agents introduced into a high-concentration processing unit, the medicine and the precipitation reaction of high-concentration waste liquid, in order to reduce the concentration of the waste stream to form a low-concentration waste liquid, and then guided to the low-concentration waste liquid of a low concentration processing unit, to reduce the concentration of the waste emission standards in order to release or recovery of the following; the processing unit by the low concentration will produce a high concentration of the regenerating liquid concentrate, concentrated regeneration liquid of the high-concentration of the attaching unit a is attached can be improved and its waste liquor concentration, the final guide to the high concentration in the waste liquid and repeating the above-mentioned step, and the regeneration of the waste stream so as to achieve reduction of the dosage.

[20]

Via the above-mentioned technical scheme, the concentration of the waste liquid treatment sub-system comprises at least the following advantages and beneficial effect:

[21]

1, this invention will be large quantity and high-concentration waste liquid sub-low concentration waste liquid processing, effectively reduce the consumption of the chemical agent.

[22]

2, the invention can be used for fluid bed to the present processing and chemical coagulation processing flow, and the low-concentration processing unit 40 and the high-concentration waste liquid 10 are connected in series, the low-concentration processing unit 40 with the high concentration produced after the regenerating liquid concentrate the high-concentration waste liquid to 10 in, then passes through the high-concentration processing unit 20 treatment regeneration use, self-into a circulation system can be recycled.

[23]

3, is connected in series by the invention of high-concentration processing unit 20 and the low concentration processing unit 40 according to the actual quantity can be increased or decreased where processing waste liquid.

[24]

4, the invention adopts the low-concentration processing unit 40 a is selected from the sub-exchange resin or zeolite material and adsorbing material, such as natural, therefore has a long service life, without periodic replacement, the characteristics of the high-efficiency absorption effect.

[25]

To sum up, the present invention relates to a waste liquid segmented concentration processing system, the concentration of the inorganic waste liquid processing, not only the low and high-concentration waste liquid treatment sub-concentration waste liquid, and by high, low concentration processing unit, so that it effectively reduce the amount of the medicament, and forms a circulatory system, regeneration of the waste liquid, and to achieve an environment-friendly, energy-saving, cost required for the technical of this invention has a remarkable progress, the positive effect of and has obvious, Makoto is a novel, progress, new practical design.

[26]

The above description is only an overview of the technical scheme of the invention, in order to be able to more clearly understand the technical means of the present invention, and can be implemented in accordance with the content of the specification, and in order to let the invention the above and other purposes, features and advantages can be more clearly understood, the following lifts especially a preferred embodiment, and the Figure, the following is a description in detail.

[27]

Description of drawings

[28]

Figure 1 is a conventional a schematic diagram the degradation curve adding hydrofluoric acid waste water.

[29]

Figure 2 is the invention to be applied to the high-concentration waste liquid a schematic diagram sectional concentration processing system.

[30]

Figure 3 is the concentration of high-concentration fluorinion waste liquid a schematic diagram of sub-processing system of this invention is applied to the fluidized bed.

[31]

Figure 4 to the invention is applied to large water quantity is low-concentration waste liquid a schematic diagram sectional concentration processing system.

[32]

Figure 5 is-low concentration fluorinion waste liquid treatment system a schematic diagram of this invention is used in chemical coagulation, precipitation.

[33]

Mode of execution

[34]

For a further elaboration of the invention in order to achieve a predetermined purpose of invention the technical means and efficacy, the following binding with photos and a preferred embodiment, the waste stream according to the invention, the concentration of the sub-processing system has the specific embodiment, structure, characteristic and its efficacy, as a detailed description.

[35]

The invention in the foregoing and other technical contents, characteristics and effects, in the following with reference to schematic better detailed description of the embodiment of the present will be clear. In order to facilitate the description, in the following embodiment, the same elements with the same number.

[36]

The present invention is directed to the concentration of the inorganic waste liquid processing, not only the high-concentration waste liquid and low-concentration waste liquid segmented processed separately, and the high, low-concentration processing unit, so that it effectively reduce the amount of the medicament, and forms a circulatory system, regeneration of the waste liquid.

[37]

First of all, see Fig. 2, to this invention is applied to the high-concentration waste liquid a schematic diagram sectional concentration processing system, which comprises a high-concentration waste liquid 10, a high-concentration process unit 20, a low-concentration waste stream 30, a low-concentration processing unit 40, and a de-attaching unit 50 the composition, and the above-mentioned various units and the function of the connection relations of the bed a fluidifying the exemplified high-concentration waste liquid hydrofluoric acid processing as the embodiments as described, with reference to Figure 3 is shown, is to the invention is applied to the fluidized bed of high-concentration fluorinion waste liquid a schematic diagram sectional concentration processing system.

[38]

Step A:of the high-concentration waste liquid containing fluorine 10a and the high-concentration waste liquid containing fluorine 10a reaction of medicament 11a together (such as calcium chloride) into a high-concentration processing unit 20a, the medicine 11a and the high-concentration waste liquid containing fluorine 10a fluorinion in the precipitation reaction to form calcium fluoride, in order to reduce the concentration of fluorine ions in the waste liquid to form a low-concentration waste liquid containing fluorine 30a;

[39]

Step B: the low-concentration waste liquid containing fluorine 30a guide to a low-concentration processing unit 40a for adsorption operation, the low-concentration processing unit 40a is to utilize an ion exchange resin or zeolite, the adsorption material, the low-concentration waste liquid containing fluorine 30a fluorinion adsorption out of, the low-concentration waste liquid containing fluorine 30a from the residual fluorine ion adsorption, the concentration of the waste liquid can be reduced to the following standard, at the same time produce a high concentration condensed regenerated liquid, wherein the fluorine-containing ionic low-concentration waste stream 30a fluorinion concentration in through the low-concentration processing unit 40a absorption work after emission standards has been reached, according to the actual requirements of the release or recovery;

[40]

C step of: regenerating the high concentration is concentrated using a de-attaching unit 50a after desorption its waste liquor concentration can be improved, and then guided to this high concentration waste liquid containing fluorine 10a and repeat A-C step, thereby achieving the effect of recycling the waste.

[41]

Furthermore, the invention also can be applied to a large water quantity is low-concentration waste liquid treatment, see Fig. 4, is for the invention applied to the large water quantity is low-concentration waste liquid treatment system a schematic diagram sectional concentration, its constituent element is and Figure 2 the same, also includes the high-concentration waste liquid by 10, the high-concentration processing unit 20, the low-concentration waste stream 30, the low-concentration processing unit 40 and the attaching unit 50 the composition, and the above-mentioned various units and the function of the connecting relationship of the exemplified chemical coagulation, precipitation of a low concentration of hydrofluoric acid waste liquid treatment as the embodiments as described, see Fig. 5, is to this invention is used in chemical coagulation, precipitation of low concentration fluorinion waste liquid a schematic diagram sectional processing system, wherein the high-concentration processing unit 20 for processing chemical coagulation, precipitation, the need to include a fast mixing 21b, a slow mixing 22b, a gelled 23b, a precipitation 24b and a sludge processing 25b and other steps.

[42]

Step A: directly to the low-concentration waste liquid containing fluorine 30b into the low-concentration processing unit 40b carry out adsorption operation, the low-concentration processing unit 40b in the ion exchange resin or zeolite adsorption material, the low-concentration waste liquid containing fluorine 30b residual fluorinion adsorption out in, its waste liquor concentration to reduce the emission standard the following, and generates the high-concentration concentration regenerated liquid, wherein the low-concentration waste liquid containing fluorine 30b fluorinion concentration in through the low-concentration processing unit 40b has been processed to reach the emission standards, according to the actual requirements of the release or recovery;

[43]

Step B: and the high concentration of the regenerating liquid then concentrated using a de-attaching unit 50b after desorption its waste liquor concentration can be improved, and then guided to this high concentration waste liquid containing fluorine 10b in;

[44]

C steps: the waste liquid containing fluorine high concentration of 10b and the reaction of the waste liquid 11b together (such as calcium chloride) into the high-concentration processing unit 20b, the medicine 11b and the high-concentration waste liquid containing fluorine 10b fluorinion in the precipitation reaction to form calcium fluoride, in order to reduce the concentration of fluorine ions in the waste liquid containing fluorine to form the low-concentration waste stream 30b, and repeat steps A-C, thereby achieving the effect of recycling the waste.

[45]

By this invention high-concentration waste liquid can be 10 and the low-concentration waste stream 30 segmented processed, in processing high-concentration waste liquid only 10 adding medicine to 11, in the processing of large but relatively low concentration waste stream 30, , is directly by the low-concentration processing unit 40 adsorption treatment, does not need to be added with the medicament 11 and through the high-concentration processing unit 20, therefore, can effectively reduce the medicament 11 consumption.

[46]

According to this, by the above-mentioned two kinds of one embodiment can be known, the concentration of the waste liquid is sub-processing system has the following advantages:

[47]

1, this invention will be large quantity and high-concentration waste liquid sub-low concentration waste liquid processing, effectively reduce the consumption of the chemical agent.

[48]

2, the invention can be used for fluid bed to the present processing and chemical coagulation processing flow, and the low-concentration processing unit 40 and the high-concentration waste liquid 10 are connected in series, the low-concentration processing unit 40 with the high concentration produced after the regenerating liquid concentrate the high-concentration waste liquid to 10 in, then passes through the high-concentration processing unit 20 treatment regeneration use, self-into a circulation system can be recycled.

[49]

3, is connected in series by the invention of high-concentration processing unit 20 and the low concentration processing unit 40 according to the actual quantity can be increased or decreased where processing waste liquid.

[50]

4, the invention adopts the low-concentration processing unit 40 a is selected from the sub-exchange resin or zeolite material and adsorbing material, such as natural, therefore has a long service life, without periodic replacement, the characteristics of the high-efficiency absorption effect.

[51]

Of the above, the invention is only the better practical example , and non-of the present invention is the restriction on any form, although the invention has been disclosed in a preferred embodiment of the above, however, not used to limit the invention, any familiar with the professional technical personnel, without deviating from the scope of technical scheme of the invention, when the can utilize the above-mentioned disclosed by the technical content of some change or modification is equivalent to the equivalent embodiment of the change, where is not deviated from the technical scheme of the invention the content, according to the invention the technical essence to the above embodiment of any of the simple modification of the, equivalent to change and modification, are still belongs to the within the scope of technical scheme of the invention.



[1]

The invention relates to a waste liquor sectionalized concentration processing system which is used for processing inorganic waste liquor with different concentrations at different sections. The system is used for processing high concentration waste liquor and low concentration waste liquor at different sections, effectively reduces the consumption of chemicals by using the high and the low concentration processing units and constitutes a circulating system to recycle waste liquor, thereby achieving the goals of environmental protection, energy saving and cost saving. The invention utilizes ion exchange resin, natural zeolite or other adsorbing materials, and thus, has the characteristics of long service life, no need of regular change and efficient adsorption effect.



1. A waste liquid segmented concentration processing system, which is applied to treatment of waste liquid of high concentration, which is characterized in that the processing steps are as follows:

Step A:a high-concentration waste stream (10a) and the reaction of the waste liquid (11a) a and introducing into a high-concentration processing unit (20a), by the medicament (11a) and the high-concentration waste stream (10a) precipitation reaction, in order to reduce the concentration of the waste stream to form a low-concentration waste liquid (30a);

Step B: the low-concentration waste liquid (30a) to guide in a low-concentration processing unit (40a) for adsorption operation, in order to reduce the waste liquor concentration, and generates a high concentration of the regenerating liquid concentrate;

C step of: regenerating the high-concentration using a concentrating $coupons (50a) and is attached so as to improve the concentration of the waste, and waste to the high concentration (10a) and repeatedly A-C in steps.

2. The concentration of the waste stream according to Claim 1 sub-processing system, characterized in that wherein the low-concentration processing unit (40a) is using a ion exchange resin adsorption material.

3. The concentration of the waste stream according to Claim 1 sub-processing system, characterized in that wherein the low-concentration processing unit (40a) is to use a zeolite adsorption material.

4. A waste liquid segmented concentration processing system, is applied to the large amount of waste liquid treatment of low concentration, is characterized in that the processing steps are as follows:

Step A: the low-concentration waste liquid (30b) into the low-concentration processing unit (40b) for adsorption operation, in order to reduce the concentration of the waste stream to form a low-concentration waste liquid (30b), and generates a high concentration of the regenerating liquid concentrate;

Step B: and the high concentration of the regenerating liquid then concentrated using a de-attaching unit (50b) after desorption its waste liquor concentration can be improved, and waste to the high concentration (10b) in;

Step C: and then the high-concentration waste stream (10b) and the reaction of the waste liquid (11b) a and introduced into the high-concentration processing unit (20b), the medicament (11b) and the high-concentration waste stream (10b) precipitation reaction, in order to reduce the concentration of the waste stream to form a low-concentration waste liquid (30b), and repeat steps A-C.

5. The concentration of the waste stream according to Claim 4 sub-processing system, characterized in that wherein the low-concentration processing unit (40b) is using a ion exchange resin adsorption material.

6. The concentration of the waste stream according to Claim 4 sub-processing system, characterized in that wherein the low-concentration processing unit (40b) is to use a zeolite adsorption material.