Near-field light generating element, near-field light head, method of manufacturing near-field light generating element, method of manufacturing near-field light head, and playback device

Technical Field

This invention involves a kind of use after the convergence of the beam to the near-field light on the magnetic recording medium recording reproducing various information near-field light generating element, near-field light generating element manufacturing method, near-field optical head, near-field optical head and method of manufacturing the information recording reproducing apparatus.

Background Art

In recent years, in accompanying the computer equipment such as the hard disk of the increase in the capacity of, a single record-plane information recording density has also been increased. For example, the disk in order to increase the recording capacity per unit area, need to improve the surface recording density. However, as the recording density becomes high, each of the bits on the recording medium is the recording area is small. When the bit-size variable hours, 1-bit information of the heat energy of the energy is close to room temperature, the recording of information will be generated due to heat fluctuation (  fluctuation Heat), such as by inversion or disappearance of the problem of thermal demagnetization.

In the commonly used in the in-plane recording, the magnetization direction is towards the in-plane direction of the recording medium is magnetically recording mode, and the mode is easily because of the above-mentioned thermal demagnetization caused to disappear, and the like for recording information. Therefore, in order to solve this kind of adverse circumstances, in recent years the recording medium in the direction perpendicular to the direction of recording magnetization of the perpendicular recording mode signal. This mode is based on the single magnetic pole is close to the recording medium information record magnetism way of the principle of. According to this way, the recording magnetic field is substantially perpendicular to the direction of the recording film. Vertical magnetic field on the recording information, in the recording film, and N S are not extremely easy to produce the circulation, energy is easy to keep stable. Therefore, the vertical recording manner relative to the in-plane recording mode, travels in the thermal demagnetization.

However, in recent years, has been hoped that a more substantial and more high-density information recording reproduction, the impact of the demand, is required that a recording medium realize more high-density. Therefore, in order to each other adjacent to the impact of the magnetic field and the thermal fluctuation suppression in the minimum, to the structure of the relatively strong coercive force as a recording medium. Therefore, the perpendicular recording mode has become difficult to the information recorded in the recording medium.

Therefore, in order to solve the above-mentioned adverse situation, provides the following mixed magnetism of the recording mode of the recording/reproducing head: after the convergence light on a use of the magnetic field of point light or the near-field light on the local heating, so that the coercive force is reduced temporarily, in the period of the writing is performed to the recording medium.

This kind of recording reproducing head using the near-field optical recording/reproducing head (hereinafter referred to as the near-field optical head) is mainly provided with a slider, is disposed on the slide block and is provided with main magnetic pole and auxiliary magnetic pole of the recording element, from a laser that is illuminated by the near-field light near-field light generating element, the near-field light generating element and a laser light source for irradiating the laser light of the laser emitted from the laser light source is guided to the near-field light-generating element of the optical waveguide (for example, refer to Patent document 1). Near-field light generating element is provided with: the reflective to the laser on one side of its dissemination of the core, with the core tightly attached to the sealing of the core and cladding of light beam propagation element, is disposed between the core and the cladding and from the laser to produce the near field light of a metal film. As the diameter of the core is formed from one end side (light incident side) toward the other end side (light outgoing side) perpendicular to the direction of propagation of the laser is gradually reduced the cross-sectional area, the core at the same time in the laser convergence of the one end side of the transmission to the other. And the above-mentioned metal film is disposed on the core to the side of the other end side.

If in use formed on the near-field optical head, near-field light produced at the same time the recording magnetic field is applied, thus the recording medium recording various information. In other words, the laser light emitted from the laser light source by the optical waveguide-injection light beam propagation element. Furthermore, into the light beam in the laser is in the core of the metal film to propagate and reach. In the metal film, of the role of the free electron because the laser and consistent vibration, thus exciting a plasma, the other end of the core to the side of the state of the local presence of near-field light is generated. As a result, a magnetic recording medium by utilizing near-field light localized heating of the magnetic recording layer, so that the coercive force is reduced temporarily.

Furthermore, in the above-mentioned laser irradiation to the recording elements at the same time provide the driving current, to the front end of the near the main magnetic pole of the magnetic recording layer of magnetic recording medium recording magnetic field locally. As a result, the temporary reduction in the coercive force in the magnetic recording layer for recording various information. In other words, through the near-field light in collaboration with the magnetic field, the magnetic recording medium can be recorded.

[Patent literature 1] Japanese opens especially 2008-152897, the

Furthermore, in order to realize further high density recording medium, of the near-field optical need to narrow diameter , further local heating thermomagnetic recording medium of the magnetic recording layer, such as the above-mentioned suppressing the influence of thermal fluctuation phenomenon. In order to reduce diameter near-field light, the width of the narrow metal film may be considered (from the laser propagation direction, and the width of the interface of the core).

At this moment, in the past it was in accordance with the width of the metal film to form a core, therefore the core width (from the laser propagation direction, and the width of the contact surface of the metal film) will be reduced as the metal film is reduced.

However, if the core width is reduced, the laser propagating within the core loss will become large, there is the problem of a sufficient quantity cannot be obtained. In other words, although near-field light can be reduced diameter , however, the light quantity will be reduced.

Content of the invention

Therefore, this invention is to take account of the above-mentioned circumstances, the invention aims at providing a in ensuring the quantity of light can be reduced on the basis of near-field light of the near-field light generating element diameter , near-field light generating element manufacturing method, near-field optical head, near-field optical head and method of manufacturing the information recording reproducing apparatus.

In order to solve the above-mentioned subject, the invention provides the following means.

The invention relates to a near field light generating element the introduction to one end side of the one end side of the light beam to the other convergence and propagation, and, after in the generation of near-field light is issued to the outside, characterized in that it has: the core, the dissemination of the above-mentioned another end side of the above-mentioned light beam; and generating the near-field light, from the above-mentioned core along the above-mentioned one end side of the other end side of the direction of propagation of the beam configuration, the above-mentioned light beam along the interface with the above-mentioned core propagation, from the above-mentioned light beam generating the above-mentioned near-field light, having the above-mentioned core 1 and core 2 core, the section 2 the core with the intermediate partition the above-mentioned paragraph 1 of the core with the above-mentioned near-field light from the opposite side of a portion which covers the above-mentioned paragraph 1 core, observed from the above-mentioned propagation direction, the above-mentioned paragraph 2 the outer end of the core than the above-mentioned near-field light generating part by the outer side of the outer end of the.

According to this structure, section 2 than the end portion on the outer side of the core the outer end of the near-field light generator more close to the outer side, from the propagation direction of the observation, near-field light generating part is formed smaller than the width of the whole of the core of the near field light generating part of the width of the interface. Therefore, the overall compared to core section can be generated with the near-field light generator of the small width of the interface of the near-field light diameter , accompanied by reduced diameter but can also inhibit the light beam produced by the reducing of the efficiency of transmission. Therefore, to ensure that the amount of light can be reduced on the basis of near-field light diameter.

Furthermore, near-field light generating element is also characterized in that, the above-mentioned paragraph 1 core and the section 2 is formed by the same material of the core.

According to this structure, can prevent the section 1 and section 2 the core at an interface of the reflection and absorption of the light beam, one end of the core from one end side to the other side of the spread light beam with high efficiency.

Furthermore, near-field light generating element is also characterized in that, the near-field light generating element with the other in order to make the above-mentioned core with one end surface exposed to the outside of the cladding of the core covers the above-mentioned state, the above-mentioned paragraph 1 core, the above-mentioned paragraph 2 of the above-mentioned clad to the core and, according to the above-mentioned clad, the above-mentioned paragraph 2 core, the above-mentioned the 1 order of the core, which refractive index becomes larger.

According to this structure, can make the in section 2 of the core and cladding interface generating the total reflection of the light beam gradually toward the center (section 1 core) convergence, the propagation efficiency of the light beam can be improved.

Furthermore, near-field light generating element is also characterized in that, viewed from the direction of propagation, the above-mentioned core and the other end is formed a triangular-shaped or trapezoidal-shaped.

According to this structure, in near-field light generating part efficiently reflects the light beam propagating within the core.

Furthermore, near-field light generating element is also characterized in that, in order to through the above-mentioned section 2 from the and the above-mentioned core 1 covered on one side of the core opposite to the above-mentioned section 2 form the shading film of the core.

In this structure, in order to cover the section 2 are formed of the light shielding film, the light beam therefore injection-core will not leak to the outside, the light shielding film and the section 2 of the reflection at an interface of the core at the same time spread toward the other end side. Therefore, the light beam can be efficiently injection-near-field light generator, thus can improve the generating efficiency of near-field light.

Furthermore, near-field light generating element is also characterized in that, the above-mentioned paragraph 1 the core extends along the above-mentioned propagation direction has a plurality of sides, a plurality of above-mentioned the side surface includes: configured with the above near-field light generating element section 1 side; and section 2 side, observed from the above-mentioned propagation direction, the section 2 in the above-mentioned side section 1 along the side of the two sides of the section 1 side is disposed in the direction intersecting the direction of side, observed from the above-mentioned propagation direction, the above-mentioned near-field light generating part is disposed on the outer end of the with the above-mentioned paragraph 1 above-mentioned of the core 2 side of the surface of the same.

According to this structure, the propagating direction from a direction perpendicular to a, subsection 1 core and near-field light generator overlap configuration, therefore, can make the propagation of the core one end side of the other light beam to non-leakage into the near field light generating part. Therefore can improve the efficiency of the generation of the near-field light.

Furthermore, in the present invention relates to a near field light generating element in the method of manufacturing, the near-field light generating element the introduction to one end side of the one end side of the light beam to the other convergence and propagation, and, after in the generation of near-field light is issued to the external, the manufacturing method is characterized in that, the near-field light generating element is provided with: the core, the dissemination of the above-mentioned another end side of the above-mentioned light beam; and generating the near-field light, from the above-mentioned core along the above-mentioned one end side of the other end side of the direction of propagation of the beam configuration, the above-mentioned light beam along the interface with the above-mentioned core propagation, from the above-mentioned light beam generating the above-mentioned near-field light, the manufacturing method comprises the following steps: forming process near-field light generating part, forming the base material of the above-mentioned near-field light generator; section 1 the core is formed, in order to cover the above-mentioned near-field light generator of the above-mentioned way to form section in the core 1 the core base material; patterning process, the above-mentioned paragraph 1 the core base material and the base material of the above-mentioned near-field light generator and patterning is performed, a; section and 2 the core is formed, with the intermediate partition the above-mentioned section 1 and of the core of the above-mentioned near-field light generated from the one side of the opposite covers the above-mentioned paragraph 1 way of the core, forming the above section in the core 2 core.

According to this structure, through the same together with a patterning process to the section 1 and the base material of the core of the base material of the near-field light pattern generator, thus can be formed in the same way, the near-field light generating part 1 the width of the interface of the core. After the patterning process, in order to cover the section 1 are formed of the core section 2 the core, thus can be simply observed from the propagation direction is formed, is smaller than the width of the near-field light generator and of the whole of the core of the interface of the near field light generating part of the width of the near field light generating part. Moreover, in an independent process with, for example, respectively to the section 1 with the near-field light generator of the core of the case of patterning is performed, can be high-precision to the near-field light generating part 1 carry out the positioning of the core.

Furthermore, the invention relates to a method for manufacturing a near field optical head of the present invention to use the above-mentioned near-field light generating element manufacturing method, the fixed direction and rotating the magnetic recording medium to carry out heating, and on the magnetic recording medium is applied recording magnetic field, magnetization conversely produced by this recording information, the manufacturing method is characterized in that, in the above-mentioned near-field light generating part forming process with magnetic pole forming step before, in the magnetic pole formation process, formation of the base material of the magnetic poles of the recording magnetic field, in the above-mentioned patterning process, in the same working procedure to the above-mentioned paragraph 1 the base material of the core part, the above-mentioned near-field light generator of the above-mentioned magnetic pole and the base material of the base material a and patterning is performed.

According to this structure, through the same patterning process that the section 1 of the core, near-field light-generating part and a base material of the magnetic pole and is patterned, therefore, observed from the propagation direction, section 1 the core, near-field light-generating part and the end portion on the outer side of the magnetic pole are is disposed on the same surface. By this, and for example by means of an independent process that the section 1 of the core, near-field light-generating part and different conditions of patterning a magnetic pole, high-precision positioning can be near-field light generator, the core and the magnetic pole. Furthermore, the use of expensive in the case of the positioning device, the core, near-field light-generating unit and the magnetic pole position and, therefore, can reduce the cost of the device.

This kind of circumstances, to pole through the near-field light generating element from the section 1 the core opposite to the side covering near-field light is formed in a manner the generator. Thus high-precision positioning of the near-field light generated from the magnetic pole position and produce the position of the magnetic field, can improve write reliability of the near-field optical head itself, realizing Takashina materialzation.

Furthermore, even if in the near-field light generating part by the plasmon resonance, so as to light beam through the case of near-field light generator, the light beam reflected by the magnetic pole and the return to the same Department to core , therefore, also can make the light beam again-injection near-field light generating part. This can further improve the generating efficiency of near-field light. Also can inhibit the not in the near-field light generating part caused by plasmon resonance, the leakage to the outside of the light beam, therefore, generated near the core can only extremely small point of near-field light.

Furthermore, the invention relates to a near field optical head to rotate on the fixed direction of the magnetic recording medium to carry out heating, and on the magnetic recording medium is applied recording magnetic field, magnetization conversely produced by this recording information, the near-field optical head is characterized in that, with: the slide block, and the surface of the magnetic recording medium relative to the configuration; recording element, disposed on the above-mentioned the same end side of the slide block, has produced the above-mentioned recording magnetic field of the magnetic pole; the above-mentioned invention of the near-field light generating element, the one end side towards the other on the state of the magnetic recording medium side with the above-mentioned recording element fixed adjacent; and introduce into the unit the light beam, its fixed on the slide block, the above-mentioned laterally from the above-mentioned one end into the portion of the light beam.

According to this structure, because of having the above-mentioned the invention of a near-field light-generating element, the above-mentioned so can inhibit the influence of thermal fluctuation phenomenon, etc., carry out stable recording. The near-field optical head itself can improve write reliability, realize Takashina materialzation.

Furthermore, near-field optical head is also characterized in that, the above-mentioned paragraph 1 the core extends along the above-mentioned propagation direction has a plurality of sides, a plurality of above-mentioned the side surface includes: configured with the above near-field light generating element section 1 side; and section 2 side, observed from the above-mentioned propagation direction, the section 2 in the above-mentioned side section 1 along the side of the two sides of the section 1 side of the direction intersecting the direction of the surface of the configuration, the above-mentioned magnetic pole in the insulation in the middle way of the above-mentioned near-field light generator with the above-mentioned paragraph 1 the core of the above section 1 side opposite configuration, from the above-mentioned propagation direction and observation, the above-mentioned magnetic pole is disposed on the outer end of the with the above-mentioned paragraph 1 above-mentioned of the core 2 side of the surface of the same.

According to this structure, with the intermediate pole through the near-field light generating element with the core opposite from one of the side covering near-field light is formed in a manner the generator, therefore, high-precision positioning can be near-field light generation position and the generation of a magnetic field position, near-field optical head itself can improve write reliability, realize Takashina materialzation.

Furthermore, even if in the near-field light generating part by the plasmon resonance, so as to light beam through the case of near-field light generator, the light beam reflected by the magnetic pole and the return to the same Department to core , therefore, also can make the light beam again-injection near-field light generating part. This can further improve the generating efficiency of near-field light. Also can inhibit the not in the near-field light generating part caused by plasmon resonance, the leakage to the outside of the light beam, therefore, generated near the core can only extremely small point of near-field light.

Furthermore, near-field optical head is also characterized in that, in the above-mentioned near-field light generating part is formed between the above-mentioned magnetic pole and to the above-mentioned near-field light generating part between the above-mentioned magnetic pole and between the dividing diaphragm.

According to this structure, when the near-field light generator and the magnetic pole is composed of metal material having conductivity under the situation that is formed, can make the near-field light generating part is electrically insulated from the magnetic pole, and can inhibit the near-field light generator alloying, so will not to the free electron in the near-field light generating part adversely affect the movement of the in. Therefore, it can further improve the generating efficiency of near-field light.

Furthermore, the present invention relates to information recording and reproducing device is characterized in that, with: the above present invention of a near-field optical head; beam, it can be in the surface of the magnetic recording medium is moved in a direction parallel, in order to be able to wind with the surface of the magnetic recording medium of the parallel and vertical to each other 2 the state of free rotation of a shaft, through the tip side supporting the above-mentioned near-field optical head; the light source, its make the above-mentioned beam-injection the above-mentioned light beam into unit; the actuator, the base end side of the support the above-mentioned beam, and make the above-mentioned Liang Dynasty and the upper magnetic surface of the recording medium moving parallel to the direction of; rotation drive portion, the magnetic recording medium in the above-mentioned fixed direction; and the control portion, the control of the above-mentioned recording element and the action of the above-mentioned light source.

According to this structure, because of the above present invention of a near-field optical head, so can improve write reliability, realize Takashina materialzation.

According to the present invention relates to a near field light generating element and method for manufacturing the same, light quantity can be reduced on the basis of near-field light diameter.

According to the present invention relates to a near field optical head and information recording and reproducing apparatus, the above-mentioned thermal fluctuation phenomenon can be suppressed, and the like, carry out stable recording. Therefore, write reliability is high, the high-density record can be, realizing Takashina materialzation.

Description of drawings

Figure 1 is the embodiment of the invention the information recording reproducing apparatus of the Figure structure.

Figure 2 is the amplification of record reproducing head cross section.

Figure 3 is enlarged the recording/reproducing head of the outflow end side of the section of the side of the Figure.

Figure 4 Figure 3 the A to view.

Fig. 5 is chart 3 B view of.

Fig. 6 is 3 C enlarged drawing of the part.

Figure 7 the laser amplified diagram of the periphery of the light source.

Figure 8 is the information recording reproduction device for reproducing recorded information to the map, is equivalent to Figure 3 the amplification profiles.

Figure 9 is the information recording reproduction device for reproducing recorded information to the map, is equivalent to the Figure 5 graph.

Figure 10 is equivalent to the Figure 5 graph, is near-field light generating element used for explaining the method of manufacturing process charts.

Fig. 11 is equivalent to the Figure 5 graph, is near-field light generating element used for explaining the method of manufacturing process charts.

Figure 12 is the section 2 embodiment of a recording/reproducing head of the outflow end side of the section of the side of the Figure.

Fig. 13 is fig. 11 D enlarged drawing of the part.

Fig. 14 is a recording reproducing head profiles of the outflow end side, (a) along the Figure 12 of the profiles E-E line, (b) is along the profiles F-F line, (c) is a cross section along line G-G.

Figure 15 Figure is equivalent to 13 of the profiles, shows the beam propagation element cross section of the other structure.

Figure 16 is equivalent to the Figure 3 graph, shows recording/reproducing head of the other structure.

Figure 17 is amplifying section 3 embodiment of a recording/reproducing head of the outflow end side of the section of the side of the Figure.

Figure 18 Figure 16 to H of view.

Figure 19 shows section 3 of the embodiment of the other structure.

Figure 20 is equivalent to the Figure 5 graph, shows section 4 of the embodiment the plan of record reproducing head.

Fig. 21 is equivalent to the Figure 10 graph, is used for explaining recording reproducing head manufacturing method process diagram.

Figure 22 is equivalent to the Figure 5 graph, shows section 5 of the mode of execution of the plan of record reproducing head.

Figure 23 Figure is equivalent to 12 of the Figure, is used for explaining recording reproducing head manufacturing method process diagram.

Fig. 24 is equivalent to the Figure 5 graph, shows recording/reproducing head of the other structure.

Figure 25 is equivalent to the Figure 5 graph, shows section 6 of the mode of execution of the plan of record reproducing head.

Symbol description

1 information recording reproducing apparatus; 2 recording/reproducing head (near-field optical head); 3 beam; 5 the actuator; 6 a main shaft motor (rotary driving section); 8 the control portion; 20 the slide block; 21 recording element; 23 the core; 23d side (section 2 side); 23g side (section 1 side); 24 cladding; 24a section 1 cladding; 24b section 2 cladding; 26 near-field light generating element; 31 auxiliary magnetic pole; 33 the main magnetic pole; 43 laser light source (light source); 51 metal film (near-field light generator); 51a upper bottom (interface); 51b (the end portion on the outer side) inclined plane; 52 light shielding film; 54 section 1 core; 55 section 2 core; D disk (magnetic recording medium); 123 the core base material; 124a section 1 clad base material; 151 metal film base material; 220,304 magnetic pole base material; 401 sub-diaphragm.

Mode of execution

Then according to the Figure to show that the embodiment of this invention.

Wherein, the embodiment of the information recording reproducing apparatus 1 is R through the near-field light with the recording magnetic field of the recording mode of the collaboration mixed magnetism with vertical recording layer d2 disc (magnetic recording medium) for recording/reproducing is performed by D (see Figure 2).

(Section 1 embodiment)

(Information recording reproducing apparatus)

Figure 1 is the information recording reproducing apparatus of the Figure structure.

As shown in Figure 1, the embodiment of the information recording reproducing apparatus 1 the recording and reproducing head (near-field optical head) 2, supporting recording/reproducing head 2 of the beam 3, the laser (light beam) L (refer to Figure 2) into the recording/reproducing head 2 incident mechanism of the light beam 4, the beam 3 mobile actuator 5, the disc D axis of rotation towards a fixed direction (rotating drive unit) of the motor 6, the structural part of the unified control of the control portion 8, the components contained in the interior of the shell 9.

Housing 9 is formed of metal material such as aluminum for when looking the shape of a quadrilateral, and accommodate the various structure is formed on the inner side of the concave recess of the part 9a. Furthermore, in order to close the recess 9a of the opening of the not shown cover detachably fixed to the housing 9 is. In the recess 9a is provided with a rough center of the spindle motor 6, the spindle motor 6 is provided with a center hole is embedded in, thereby to be fixed in a detachable way disc D. Furthermore, in this embodiment, is of the note for example 3 disks D is fixed to the spindle motor 6 in on. D and is not limited to the number of the disk 3 a.

In the recess 9a is provided with a corner of the actuator 5. The actuator 5 through the bearing 10 is provided with a bracket 11. Bracket 11, for example, by cutting processing to the metallic material to form a, bracket 11 from the through the bearing 10 is fixed on the actuator 5 is of the base end part 11a is arranged in the portion of 3 the upper surface of the disks D, so as to become a 3 layer structure. In other words, bracket observed from the side surfaces 11 of the, form the E-shaped. And in is divided into 3 layers of support 11 of each of the beam is fixed at the tail end 3 of the base end side. Thus the actuator 5 through the bracket 11 to support the beam 3 of the base end side, can be to the disk surface (the surface of the magnetic recording medium) D1 (see Figure 2) parallel to the X, Y direction the beam 3 for scanning movement.

As noted above, beam 3 through the actuator 5 but can and the bracket 11 along the X, Y direction, and, in order to be able to rotate around parallel to the disk D1 and vertical each other the 2 axis (X-axis, Y-axis) in the free rotation side support of the state of the recording/reproducing head 2. And, of the disc when the rotation is stopped D, through the actuator 5 driving the beam 3 and a bracket 11 on D withdraws from the disk.

(Recording/reproducing head)

Figure 2 is the recording and reproducing head the amplifying section, Figure 3 is the record reproducing head side of the outflow end of the section of the Figure.

As shown in Figure 2, Figure 3 shows the, recording/reproducing head 2 is generated by the laser L is the near-field light on the rotated disc R D recording reproducing various information of the head. Recording/reproducing head 2 has: in order to from the disk D1 floatup a predetermined distance with the disk H D the state of the relative configuration of the slide block 20 ; D the information recording for the recording element in the disk 21 ; in reproduction of the recorded disc D the information reproduction element 22 ; and is introduced into the one side of the laser L-dissemination, and R in the generation of the near-field light is issued to the outside after the near-field light generating element 26.

The slide block 20 is composed of quartz glass or transparent material such as AlTiC (porous) form the cuboid shape of the ceramic and the like. The slide block 20 has the opposite side of with the disk relatively D 20a, via the universal joint portions 30 (see Figure 2) is supported from the beam 3 is hung at the end of the. The universal connection portion 30 is only to be limited to movement around the X axis and Y axis displacement of the components. Therefore, the slide block 20 can be parallel to the disc surface as described above around D1 and vertical each other the 2 axis (X-axis, Y-axis) to freely rotate.

Furthermore, the opposing surface 20a is formed with a raised line portions 20b, the raised line portions 20b based on rotary disc D the air flow generated by the viscous, for suspension of the generated pressure. The raised line portions 20b is formed along the length of the extending direction (X direction), and arranged in a manner to separate the interval orbital shape , left and right (Y direction) is formed with 2 a. However, raised line portions 20b is not limited to this kind of situation, by adjusting as long as the designed to make the slide block 20 away from the disk D1 positive pressure and where block 20 close to the disk D1 of the negative pressure, so that the slider 20 for optimal suspension, in the concavo-convex shape can be arbitrary. Furthermore, the raised line portions 20b is referred to as the surface of the ABS (AIR   BEARING   SURFACE: air bearing surface) 20c.

And the slide block 20 through this 2 a raised line portions 20b by from the disk D1 the force of the float. On the other hand, beam 3 in a direction perpendicular to the disk D1 Z of the bending direction, absorbing the slide block 20 lift force. That is to say, the slide block 20 by the beam during floating 3 toward the disk D1 side force. The slide block 20 through the two force balancing, as described above in order to leave the disk D1 H suspended the state of a predetermined distance. And, the slide block 20 through the universal connection portion 30 and around the X axis and Y axis rotation, therefore can always in the state of the attitude stability of the suspension.

And, accompanied by the rotation of disc D in the air flow generated from the slide block 20 of the inflow end side (beam 3 steroidal the X direction) flows into the rear, along the ABS   20c flow, from a slider 20 of the outflow end side (beam 3 terminal side the X direction) to flow out.

As shown in Figure 3, recording element 21 is to make the recording magnetic field in order to record information on the disc D of the component, with: fixed on the slide block 20 side of the outflow end (end surface) of the auxiliary magnetic pole 31 ; by the magnetic circuit 32 and the auxiliary magnetic pole 31 is connected, and the auxiliary magnetic pole 31 perpendicular to the disc D generated between the recording magnetic field of the main magnetic pole 33 ; to the magnetic circuit and 32 as the center of the magnetic circuit is wound on the spiral 32 surrounding a coil 34. That is to say, from a slider 20 of the outflow end side are sequentially configured with auxiliary magnetic pole 31, magnetic circuit 32, coil 34, the main magnetic pole 33.

The two magnetic poles 31, 33 and a magnetic circuit 32 by the magnetic flux density is higher (Bs) of material of high saturation magnetic flux density (such as CoNiFe alloy, CoFe alloy, etc.) of the formation. Furthermore, coil 34 is configured between the adjacent coil, and the magnetic circuit 32 between, and the two magnetic poles 31, 33 separate the interval between, in order to no short-circuit, in this state through the insulator 35 carry out the molding. But also from the control unit 8 to the coil 34 has been modulated according to the information of the current. In other words, magnetic circuit 32 and the coil 34 of the electromagnet is integrally formed. And, the main magnetic pole 33 and auxiliary magnetic pole 31 is designed with the disk relatively D the end face (end face of the Z direction) and the sliding block 20 of the ABS   20c are in the same plane. Furthermore, main magnetic pole 33 of the end portion 33a (information of the laser L) by an insulator 35 to the reproducing element 22 side stress, embedded in the latter section 1 cladding 24a inner. And can also be composed of different material with the base end portion (saturation magnetic flux density higher material) constitute a main magnetic pole 33 of the end portion 33a.

Figure 4 Figure 3 the A to view, Figure 5 is a Figure 3 to B of view.

As shown in fig. 3 to fig. 5 is shown, the beam propagation element 25 to the incident side of the laser L (one end side of the Z direction) toward the slide block 20 and on the injection side (Z direction side of the other end of the) D side towards the state of the disc, is fixed on the adjacent recording element 21 of the main magnetic pole 33 side of the X direction. The light beam propagation element 25 consists of a core with the core 23 and 23 closely cladding 24 form, monolithic into an approximately plate-shaped, wherein, stated core 23 from one end side into the laser L D with the disc relative to the other end side.

The core 23 from one end side to the other side of the one end of the gradually reducing forming, it can be on one side in the interior of the laser L converges gradually while propagation. Specifically, the core 23 from one end side a reflecting surface 23a, light beam focusing 23b, near-field light the Department 23c, the propagation direction of the from the laser L (Z direction) observation, formed in a triangle shape.

Reflecting surface 23a direction different to the direction of the latter is reflected from the optical waveguide 42 into the laser liter In this embodiment, in order to make laser L substantially change the orientation of the 90 degrees of reflection. Through the reflecting surface 23a from the optical waveguide 42 into the laser L in core section 23 repetition of the total reflection, at the same time transmitted to the other end side.

Beam focusing 23b with the from one end side toward the other side of the one end of the cross-sectional area perpendicular to the direction Z (film of the XY direction) is gradually reduced diameter forming part of the way, while the convergence of the laser L to the other side of the one side of one end of the communication. In other words, focusing can be introduced into the light beam 23b of the laser L diameter gradually reduced to a relatively small size.

Near-field light the Department 23c from the light beam focusing is 23b toward the other end of one end of a further diameter reducing forming part of the side. Specifically, in the core 23 in the vicinity of the other end side, of the light in the near-field the Department 23c is based on inclined surface 23h by the diameter reducing forming, the inclined surface 23h is formed, in the inner-propagation relative to the optical axis of the laser L (Z direction) inclined state and the reproducing element 22 relative to the. Through the inclined surface 23h, the core 23 into the other to make a state of the end side.

And, in this embodiment, light beam focusing 23b and near field of the light the Department 23c is formed along the direction of Z is provided with 3 side, wherein the 1 sides 23g is with the main magnetic pole 33 of relatively disposed. In this case, from a side surface 23g the two ends of (the two ends of the Y direction) of the reproducing element 22 and the lateral sides 23g of the Y direction (a direction) extending in a direction crossing a pair of side 23d, therefore, observed from the Z direction, the core 23 is formed as the X direction, of the tail end of the triangular shape is narrowed. Therefore as shown in Figure 5, in a near-field light the Department 23c the other end is exposed outside the end face of side 23e is formed in a triangle shape. Furthermore, the end face 23e is designed and the sliding block 20 of the ABS   20c are in the same plane.

Fig. 6 is 3 C enlarged drawing of the part.

Here, as shown in Figure 5, Figure 6 shows, the embodiment of a core 23 side to constitute the other end of the is of a double-layer structure. Specifically, the core 23 of the other end side of the observation from the Z direction is a triangle-shaped section 1 the core 54 and formed in a cover section 1 the core 54 of the section 2 the core 55 form. This case, section 1 the core 54 in the Z direction is formed in the slide block 20 of the entire side (the side of the outflow end side), a core 23 of the overall (from the above-mentioned reflecting surface 23a to the near field of the light the Department 23c). On the other hand, section 2 core 55 in the Z direction formed covering section 1 the core 54 the other end side, from the light beam focusing the 23b the other end side to the near field of the light the Department 23c. And, section 2 the core 55 is not limited to the forming area of the above-mentioned range, covering may be formed in section 1 the core 54 integral. Furthermore, in fig. 5 in, in section 2 the core 55 of the two ends of the Y direction along the Y direction are formed in the section 1 cladding 24a extending on the base 55a, and at least covers the section 1 the core 23 under the condition of, also can remove the base 55a. In the following description and the, use and the core 23 side 23d, 23g same symbol to illustrate section 1 the core 54 and 2 the core 55 side.

As shown in fig. 3 to fig. 5 illustrated, cladding layer 24 is composed of a refractive index compared to core section 23 of low formed of a material, in order to make the core 23 of one end side and the other end face of the one end side 23e exposed outside the state to be tightly abutted to the core 23 side 23d, 23g, in the core will be 23 sealed in the internal. In particular, the cladding 24 with: is formed in the core 23 and the recording element 21 (main magnetic pole 33) covering between the core 23 side 23g side section 1 cladding 24a; and is formed in the core 23 and reproducing element 22 between covers the side surfaces 23d side section 2 cladding 24b. As above, because the section 1 cladding 24a and 2 cladding 24b to be tightly abutted to the core 23 side 23d, 23g, so will not to the core 23 and the cladding layer 24 produce the interval between. And, in section 1 cladding 24a of the side of the other end of the slide block 20 in the width direction (Y direction) in the median, buried with the above-mentioned main magnetic pole 33 of the end portion 33a, and the end portion 33a from the section 1 cladding layer 24a exposed core 23 side.

Furthermore, the following describe is used as the cladding 24 and core 23 of the combination of materials of an example, this can be considered a combination of, for example: by the quartz (SiO₂) formed core 23 (section 1 the core 54 and 2 the core 55), fluorine doped quartz form a cladding layer 24. In this case, when the laser L is the wavelength of 400 nanometer time, the core 23 has a refractive index of 1.47, cladding layer 24 is smaller than the refractive index of 1.47, therefore is the preferred combination.

Furthermore, account can also be taken of the combination: of the germanium doped quartz formed core 23 (section 1 the core 54 and 2 the core 55), by the quartz (SiO₂) form a cladding layer 24. In this case, when the laser L is the wavelength of 400 nanometer time, the core 23 is greater than the refractive index of 1.47, cladding layer 24 has a refractive index of 1.47, so also is the preferred combination.

In particular the core 23 and the cladding layer 24 of the larger the difference of the refractive index, the laser L enclose the core 23 within the large tank model, therefore, more preferably, the core 23 (section 1 the core 54 and 2 the core 55) the tantalum oxide (Ta₂ O₅: when the wavelength is 550 nanometer, the refractive index is 2.16), cladding 24 adopts a quartz or alumina (Al₂ O₃), and the like, increases the difference of the refractive index of the two. Infrared region in use under the condition of the laser L, the infrared transparent material as silicon (Si: refractive index is about 4) formed a core 23 (section 1 the core 54 and 2 the core 55) are also effective. And in this embodiment, although using the same material to form a section 1 the core 54 and 2 the core 55, however, is not limited to this, can also be made of different materials to form section 1 the core 54 and 2 the core 55. As this kind of circumstances a combination of materials, it is preferred to use a refractive index from the cladding 24 to the section 2 the core 55, section 1 the core 54 increases gradually (refractive index in accordance with the cladding 24, section 2 the core 55, section 1 the core 54 is enlarged in the order) combined. According to this constitution, in the section 2 the core 55 and cladding 24 total reflection at the interface of the laser L gradually toward the center (section 1 the core 54) converging, therefore can improve the propagation efficiency of the laser L.

Here, the core 23 (section 1 the core 54) and the section 1 cladding 24a between (through the section 1 the core 54 and the section 2 the core 55 opposite side) is formed with metal film (near-field light generating unit) 51. Metal film 51 based on the core 23 spreading in the generated near-field light of the laser L R, R the near-field light in the light beam propagation element 25 the other end side with the disk locally between D, for example composed of gold (Au) or platinum (Pt) and so on. Metal film 51 is disposed on the core 23 (section 1 the core 54) to the near-field light the Department 23c side 23g on, and the section 1 cladding 24a and from the section 1 cladding layer 24a exposed main magnetic pole 33 of the end portion 33a contact. Furthermore, metal film 51 is formed, one end of the Z direction side is in the near field of the light the Department 23c and light beam focusing 23b at the boundary portions, and another end side of the core 23 of the end face 23e are in the same plane.

Furthermore, observed from the Z direction, the metal film 51 is formed towards the reproducing element 22, is narrowed gradually at the end of an isosceles trapezoid shape. At this moment, the metal film 51 of the upper bottom (with the core 23 interface) 51a on the Y direction of the width W1 is formed with the section 1 the core 54 side (section 1 side) 23g the width in the Y direction of the W2 equal. Therefore, metal film 51 of the width W1 is formed to be smaller than the core 23 (section 2 core 55) side 23g of the width W3 (removing the base 55a the width of the after). In other words, viewed from the Z direction, section 2 the core 55 is configured such that the outer end of the metal film 51 (the end portion on the outer side) of the inclined plane 51b more positioned at the outer side. And then, the metal film 51 inclined surface 51b is disposed on the and 1 the core 54 side (section 2 side) 23d on the surface of the same. In other words, viewed from the Z direction, section 1 the core 54 and metal film 51 laminated bodyshape become core 23 a shape similar to that of (see Figure 5).

Furthermore, the core 23 (section 2 core 55) with the resolution 2 cladding 24b are formed between the light shielding film 52. The light shielding film 52 is made of aluminum (Al) formed of a material of high reflectance such as, near-field light is formed to cover the Department 23c section 2 core 55 side 23d. In other words, near-field light the Department 23c side 23g by the metallic film 51 covers, side 23d is light shielding film 52 covering. The light shielding film 52 formed in the Z direction than the metal film 51 within a broader scope. Specifically, the light shielding film 52 is formed to one end side in the light beam focusing 23b the other end side, and the other end side is in the with the core 23 of the end face 23e on the surface of the same. In the Z direction and, as long as the metal film is greater than or equal to 51 a of the light shielding film 52 can be. Furthermore, the light shielding film 52 of the two ends of the Y direction can be formed so as to completely cover the section 2 the core 55 the base 55a.

Furthermore, as shown in Figure 3, in the slider 20 of the upper surface of (one end side in the direction Z) fixed arimitsu waveguide 42. The optical waveguide 42 consists of a core 42a and formed as to cover the core 42a cladding 42b form, laser L in core section 42a to propagate. Optical waveguide 42 and the end of the light beam propagation element 25 of the core 23 is connected with the of the one end side, the reflecting surface 23a liter injection laser And, the core 42a and 42b by the with the above-mentioned core 23 and the cladding layer 24 formed of the same material.

On the other hand, as shown in Figure 1, the optical waveguide 42 of the base end side along the beam 3 and the bracket 11 after being LED out, and the laser light source 43 is connected. As shown in Figure 1 and Figure 7, the laser light source 43 and not shown the IC chip and the like together with various electronic parts are mounted on a control substrate 44 on, the control plate 44 is mounted in the support 11 of the base end part 11a side. In particular, laser light source 43 is emitted to the state of the straight line polarized light of laser liter In other words, laser light source 43 and optical waveguide 42 as a straight line polarized light of the laser L to the state of the recording-reproducing head 2 the light beam light incident mechanism 4 to play a role. Furthermore, Figure 7 the laser amplified diagram of the periphery of the light source.

Installed with the laser light source 43 of the control substrate 44 through a flexible flat cable (flexible substrate) 45 with the control portion 8 is connected. By this, the control part 8 to the components sends an electrical signal, control in unison. In particular, from the control unit 8 to control laser light source 43 the timing of the injection laser L.

Reproducing element 22 is the resistance pursuivant disc D perpendicular recording layer d2 (see Figure 2) the conversion of the magnetic field leaking from a magnetic reluctance effect membrane , formed in the middle of the beam propagation element 25 with the recording element 21 opposite to the side of the cladding layer 24 (section 2 cladding 24b) surface. The reproducing element 22 not illustrated, such as via lead wire membrane from the control unit 8 by the bias current. By this, the control part 8 D from the disk can be the leakage of the magnetic field detected as a voltage change, according to the voltage change of signal reproduction.

And, as shown in Figure 2, disc of this embodiment using vertical D D double-layer film disc, the vertical double-layer film disc at least comprises D in the direction perpendicular to the disk D1 has an easy magnetization axis in the direction of the vertical recording layer d2 a high magnetic susceptibility material and the soft magnetic layer d3 this 2 layer. As this kind of disc D, for example by using on the substrate d1 soft magnetic layer is formed sequentially on d3, intermediate layer d4, perpendicular recording layer d2, protective layer d5, lubricating layer d6 structure.

As a substrate d1, for example is an aluminum substrate or glass substrate. Soft magnetic layer d3 gao Touci leads layer is. Intermediate layer d4 is a vertical recording layer d2 crystal control layer. Perpendicular recording layer d2 is a vertical anisotropic magnetic layer, a CoCrPt alloy, for example. Protective layer d5 used for protecting the perpendicular recording layer d2, for example, DLC (diamond-like carbon) film. Lubricating layer d6 for example by using a fluorine-based liquid lubricating material.

(Information recording reproducing method)

The followed by a description of the information recording reproducing apparatus 1 the disc D recording reproducing various the situation of information.

First of all as shown in Figure 1, the spindle motor 6 is driven, the disc D rotate towards a fixed direction. Furthermore, make the actuator 5 work, through the bracket 11 so that the beam 3 in the X, Y direction of the scanning. So can make the recording/reproducing head 2 is located at a desired position on the disc at D. At this time, recording/reproducing head 2 formed in the slide block 20 the opposite side 20a of the 2 a raised line portions 20b by the levitation force, and the beam 3 or the like to predetermined the thrust approaches D side of the disc. Through this force balancing of the two, so that the recording and reproducing head 2as shown in Figure 2 the D from the disk at a predetermined distance from the suspension to the position of the H.

Furthermore, even if the recording/reproducing head 2 D due to the fluctuation of the disc by the wind pressure, can also be through the beam 3 to absorb the displacement of the direction Z, but also can be through the universal connection portion 30 around the X, Y-axis movement, therefore, can absorb the wind pressure caused by bending. Therefore, the recording/reproducing head 2 is suspended in a stable state.

Figure 8 is the information recording reproduction device for reproducing recorded information to the map, is equivalent to Figure 3 the amplification profiles, fig. 9 is equivalent to the Figure 5 graph.

Here, as shown in Figure 8, in the case of the information recording is conducted, the control section 8 so that the laser light source 43 for emitting linear polarized light of the laser L, and the modulation according to the information of the current supplied to the coil 34, the recording element 21 work.

First of all, from the laser light source 43 optical waveguide 42 injection-laser L, the laser L guide to sliding block 20 side. From the laser light source 43 L the laser emitted from the optical waveguide 42 of the core 42a toward the terminal in advance (outlet end) side, to the light beam propagation element 25 of the core 23 in. Propagation to core section 23 of the laser L is reflecting surface 23a in order to roughly 90 degrees reflection, then, the light beam focusing 23b to propagate. Focusing the light beam 23b in core section laser propagating within L 23 and cladding 24 repeatedly between the total reflection occurs, towards D side of the disc in the other end side of the transmission. In particular, because the cladding 24 and core 23 side 23d, 23g closely, the light will not leak into the core 23 of the external. Therefore, the waste can be introduced into the laser L of one side of the condensing side of the one end side to the other for propagation, thus-injection near field of the light the Department 23c.

At this moment, the core 23 is perpendicular to the Z direction of the sectional area of the diameter is gradually reduced the way. Therefore laser focusing the light beam with the L 23b converging gradually spreading in the, smaller diameter.

As shown in Figure 8, Figure 9 illustrated, point-diameter variable small laser L near the photovoltaic-Department 23c. The near-field light the Department 23c is further toward the other end side of the diameter reducing forming, end face 23e is less than or equal to the size of the light wavelength. Such circumstances, the near field of the light the Department 23c of the 2 side 23d is light shielding film 52 of the shielding. Therefore, near-field light into the Department 23c laser L can not be leaked to the section 2 cladding 24b side, the light shielding film 52 near-field light with the Department 23c in reflection on the interface of the propagation. And, when in a near-field light the Department 23c laser propagating within L-injection metal film 51 is, the metal film 51 can be excited in the surface plasmon. The surface plasmon enhanced because of the resonance effect, and along the metal film 51 with the core 23 (near-field light the Department 23c) interface, toward core section 23 spread of the other end side. The side of the one end to the other at all times, a relatively strong light intensity of the near-field optical R drain to the outside. In other words, R can make the near-field light in the light beam propagation element 25 the other end side with the disk locally between D. Therefore, disc D by the near-field light is locally heated R, the temporary reduction of the coercive force.

When a controller 8 to the coil 34 is supplied with current, based on the principle of an electromagnet, current magnetic field will make the magnetic circuit 32 to generate magnetic field, therefore, to the main magnetic pole 33 and the auxiliary magnetic pole 31 D between the disc produce and is perpendicular to the direction of the recording magnetic field. Therefore, from the main magnetic pole 33 generated from the side of the magnetic flux through the disc will be straight perpendicular recording layer D d2 and reaches the soft magnetic layer d3. Therefore, can be in perpendicular recording layer d2 with the direction of magnetization of the D1 recorded under a vertical state. Furthermore, the soft magnetic layer d3 of the magnetic flux via the soft magnetic layer d3 to return to the auxiliary magnetic pole 31. At this time, to return to the auxiliary magnetic pole 31 will not affect the direction of magnetization. Its reason is that, with the disk D1 relative auxiliary magnetic pole 31 larger than the area of the main magnetic pole 33 area, the density of the magnetic flux therefore, will not produce the strength of the magnetization inversion. That is, only the main magnetic pole 33 side recorded.

As a result, near-field light through the R and by the two magnetic poles 31, 33 of the recording magnetic field generated by the collaboration mixed magnetism recording mode of the recording of information. But also through the vertical recording mode for recording, it is not vulnerable to the influence of thermal fluctuation phenomenon, can carry out stable recording. The write reliability can be improved.

Furthermore, in the recording disc D reproduction of the information in case, when the disc D coercive force temporary is reduced, reproducing element 22 to accept from the disk of the vertical recording layer D d2 leaked magnetic field, changes in resistance with its but size. Therefore, reproducing element 22 changes the voltage. By this, the control part 8 can be leakage D from the disk the change of the magnetic field detected as the change of the voltage. And the control portion 8 according to the change of the voltage for signal reproduction, so as to carry out recording on disc reproduction of information in D.

(Recording reproducing head manufacturing method)

Then note has the above-mentioned near-field light generating element 26 of the recording/reproducing head 2 of the manufacturing method. Figure 10, Figure 11 is equivalent to the Figure 5 graph, is near-field light generating element used for explaining the method of manufacturing process charts. In the following description and the, main specify recording/reproducing head 2 in the process of manufacturing the near-field light generating element of the manufacturing process.

In this embodiment, along the Y direction and the Z to party to a continuous there are a plurality of slide block 20 of the forming area of the substrate 120 (for example, AlTiC (porous)), in the substrate 120 of the slide block 20 on the forming region there are formed in sequence a recording element 21, near-field light generating element 26 and reproducing element 22, forming along the Y direction and the Z continuously to a plurality of recording/reproducing head 2, then, in accordance with each of the recording and reproducing head 2 to the forming area of cutting, by the recording/reproducing head 2.

First of all as shown in Figure 10 (a) shown in, on the base plate 120 is formed on the recording element 21, through an insulator 35 for molding. Thereafter, in the insulator 35 of the light beam propagation element 25 and metal film 51 of the base material of the film-forming (article 1 cladding forming process, near-field light generating part forming process and article 1 core forming process). Specifically, on the substrate 120 (insulator 35) in accordance with resolution 1 cladding 24a, metal film 51 (for example 20 nanometer left and right), section 1 the core 54 (about a few μ m) the base material is carried out by the sequence (section 1 clad base material 124a, metal film base material 151 and section 1 the core base material 154) film-forming. And, in the base material 124a, 151,154 after forming, by CMP (Chemical Mechanical   Polishing: chemical mechanical polishing) to the surface, so that they become flat surface.

And, preferably, metal film base material 151 in subsection 1 cladding 124a on the entire surface after forming, in order to only remain a predetermined region of the patterning is performed in advance. In this embodiment, at least in the Z direction, in order to remain in the core base material 123 of the near-field light is equivalent to the Department 23c (see Figure 3) of the area of the (removing equivalent to the reflecting surface 23a and a light beam focusing 23b (see Figure 3) the area of the metal of the base metal 151), the metal film base material 151 is patterned. Such circumstances, the near-field light is equivalent to the Department 23c in the area of the, metal film base material 151 is sandwich section 1 the core base material 154 and section 1 clad base material 124a between, in the in a region outside of the, section 1 the core base material 154 and section 1 clad base material 124a closely. Therefore, can improve the section 1 the core base material 154 and section 1 clad base material 124a the close fit, so can inhibit of the film in the manufacturing process.

Furthermore, in the above-mentioned near-field light generating element 26 (see Figure 2, Figure 3) in, when the in the Z direction in the core 23 of the focusing light beam 23b is also formed on the metal film 51 is, in the light beam focusing 23b of the laser L will be spread by the metallic film 51 absorption lost, the spread of the laser L may reduce efficiency. To this, through only the near-field light generator is equivalent to 23c formed in the area of the metal film 51, can be in the core 23 and the cladding layer 24 under the condition of the total reflection between the laser L propagation to the near field light generating section 23c. So can more laser L guided to the near-field light generating section 23c, can improve the propagation efficiency of the laser L.

Furthermore, as shown in Figure 10 (b) shows, the use of photoresist technology in section 1 the core base material 154 is formed on the mask pattern (not shown), in the mask film pattern section should be removed is set on 1 core base material 154 of the area of the opening, the mask film pattern by reactive ion etching (RIE) (section 1 patterning process). Therefore, in the mask pattern of the area of the opening section 1 the core base material 154 is etched, from the Z direction to form the rectangular-shaped section 1 the base material of the core 154. Furthermore, when viewed from the X direction, section 1 the core base material 154 is formed from one end side toward the other end side, the end narrowed trapezoidal-shaped. And, in section 1 in the patterning process, preferably, the mask film pattern of the area of the opening in the section 1 the core base material 154 is not completely removed, but residual a little (see Figure 10 (b) remaining in the 60).

Then as shown in Figure 10 (c) shows, in argon (Ar), the plasma in section 1 the core base material 154 and metal film base material 151 by sputtering etching (section 2 patterning process). In the section 2 in the patterning process, the shape of rectangular cross-section of the section 1 the core base material 154 when the sputtering etching, section 1 the core base material 154 of a corner portion of the two sides of the Y direction is selectively etched, forming an inclined surface 61. Furthermore, when the etching is continued under this state, the inclined plane 61 relative to the bottom surface of the (equivalent to Figure 5 the side of the in 23g) under the state of a certain angle is etched, thereby forming a Figure 10 (d) is shown in section 1 the base material of the core 154.

Thereafter, when the continue further etching, as shown in Figure 11 (a) shown in, section 1 the core base material 154 under the state of keeping the similarity of the width (the width of the Y direction) and the height (the height of the X direction) is reduced, and the remaining 60 is removed. As a result, forming has 3 a side surface of the cross section of the triangular-shaped section 1 the core 54. As above, in the section 1 is formed in the patterning process of the rectangular-shaped section 1 the core base material 154 by sputtering etching, therefore, observed from the Z direction, the section 1 the core 54 is formed as arbitrary width and height.

Here, remaining in the removal of the 60 later, when the continue further etching, section 1 the core 54 under the state of keeping the similarity is etched, but also metal film base material 151 is also etched. At this moment, as shown in Figure 11 (b) shows, the metal mold base material 151 of the end of the Y direction (equivalent to Figure 5 the inclined surface 51b) is etched to the core 23 side 23d and the side face 23g of the same angle formed by the angle.

Therefore, to form the metal film 51: the upper bottom 51a with the 1 core 54 side 23g the width of the same, and the inclined surface 51b is disposed on the and 1 the core 54 side 23d on the surface of the same. And, in order to completely remove the section 1 the core 54 of the area other than the base metal 151, section 1 clad base material 124a is also slightly etched away. At this moment, in the above-mentioned paragraph 1 in the patterning process, pre-in section 1 the core base material 154 is formed on the remaining 60, therefore, can prevent the section 2 in the patterning process of paragraph 1 clad base material 124a carry out the over-etching.

Furthermore, as shown in Figure 11 (c) is shown, in order to cover the section 1 the core 54 and metal film 51 formed of section 2 core 55 (section 2 core forming process). Specifically, in order to cover the section 1 the core 54 of the whole of the section 2 of the core on the base film (not shown), then in order to only in section 1 the core 54 side residual the other end of the section 2 by patterning the core base material. And, patterning can be, and is in section 1 the core 54 and 1 cladding layer 24a is formed on the entire surface of the section 2 the core base material. The manufacturing processes can be reduced, the improvement of the manufacturing efficiency is realized.

Furthermore, as shown in Figure 11 (d) is shown, in order to cover the core 23 (section 1 the core 54 and 2 the core 55) and metal film 51 are formed of the light shielding film 52 (light shielding film forming process). Specifically, in the core 23 side 23d of the near-field light is equivalent to the Department 23c in the area of the, to the residual light shielding film 52 patterned manner.

Then as shown in Figure 10 (e) illustrated, in order to cover the core 23 (section 1 the core 54 and 2 the core 55) and metal film 52 is formed in such a manner as section 2 cladding 24b (section 2 cladding layer forming process). Thereafter, through the CMP section 2 cladding 24b of the surface grinding, formed as a flat surface. Then in paragraph 2 cladding layer 24b is formed on the reproducing element 22. Therefore, in the base plate 120 is formed on the recording element 21, near-field light generating element 26 and reproducing element 22.

Furthermore, along the Z direction for each slide block 20 under the state of the interval spaced along the Y direction to the substrate 120 for cutting, formed along a direction (Y direction) continuous there are a plurality of slide block 20 of the state (bar) (not shown). Thereafter the rod after cutting (cutting surface) of the side surface of the grinding (grinding process). In the grinding process, using ELG (electro   lapping   guide: electronic lapping guide) positioning of the side surface of a rod. ELG ELG element for the resistance value of the confirmed while grinding, in order to control the grinding amount. In this embodiment, for example, within the regional ELG (the latter sliding in the dicing tape) ELG element formed in, ELG element with a the two ends of which are connected to the bonding pad, through the bonding pad side of one side of the grinding ELG element is electrified. Therefore, the side of the lever element ELG is ground together, ELG element in the Z direction to reduce the width of the, resistance from increasing. At this moment, the resistance of the pre-determined component ELG mutual relationship between the amount of grinding, while monitoring ELG element on one side of the resistance, a resistance value reaches a predetermined value to judge a time for obtaining the desired grinding amount, grinding the end. And, on the element and a bonding pad ELG, detecting the resistance change which belongs to a basic function, therefore does not need to be extremely fine structure.

Thereafter, in accordance with each slide block 20 the size of the, rod is cut off along the Z direction (sliding process).

Thus completed with the above-mentioned near-field light generating element 26 of the recording/reproducing head 2.

As above, in this embodiment, constitute the: metal film 51 of the width W1 is less than the core 23 (section 1 the core 54 and 2 the core 55) side 23g of the width W3.

According to this structure, through the metal film 51 is less than the core 23, it is possible to suppress the core 23 laser propagating within the reducing of the efficiency of the spread of L, R of the near-field light so as to realize the reduction of diameter. Therefore, to ensure that the amount of light to the near-field light on the basis of the R diameter reduced, so can more local D heating to the disc.

Furthermore, with a material formed by section 1 the core 54 and 2 the core 55, can prevent the laser L in section 1 the core 54 and the section 2 the core 55 on the interface of such as by reflection and absorption, can be from the core 23 of the one end side to another end side of the high-efficient dissemination of laser liter

Furthermore, in this embodiment, in order to cover the core 23 side 23d are formed of the light shielding film 52, therefore, into the near field of the light the Department 23c laser L can not be leaked to the section 2 cladding 23b side, but the light shielding film 52 near-field light with the Department 23c to the interface of the side reflection face 23e propagation. By this, the laser L can be efficiently injection-metal film 51, the production of the R improve the efficiency of near-field light.

And in this embodiment constitute, in paragraph 2 in the patterning process, carried out in conjunction with section 1 the core base material 154 the base material, and a metal film 151 after the etching, in order to cover the section 1 the core 54 formed of the section 2 the core 55.

According to this constitution, a patterning process using the same the section 1 the core base material 154 and metal film base material 151 a and patterning is performed, thereby the metal film 51 of the upper bottom 51a of the width W1 is formed with the section 1 the core 54 side 23g width W2 equal. And through section 2 core 55 covering section 1 the core 54, thereby easily forming a smaller than the width of the core 23 (section 1 the core 54 and 2 the core 55) side 23g of the width W3 of the metal film 51.

This kind of circumstances, such as via an independent process that the section 1 the core 54 and metal film 51 compared with the case of patterning is performed, high-precision to the metal film 51 and 1 the core 54 carry out the positioning.

And, the invention of the information recording reproducing apparatus 1 (recording/reproducing head 2) has the above-mentioned near-field light generating element 26, the above-mentioned so can inhibit the influence of thermal fluctuation phenomenon, etc., carry out stable recording. It is possible to correct and high precision recording of information reproducing, realizing Takashina materialzation.

(Section 2 embodiment)

Followed by a description of the article of the invention 2 embodiment. Figure 12 is the section 2 embodiment of a recording reproducing head side of the outflow end of the profiles, Figure 13 is a Figure 11 D enlarged drawing of the part. Furthermore, fig. 14 is a recording reproducing head profiles of the outflow end side, (a) along the Figure 12 of the profiles E-E line, (b) is along the profiles F-F line, (c) is a cross section along line G-G. And, in the following description, for the above-mentioned paragraph 1 in the same manner as to the implementation of the structure of the same symbols, explanation is omitted.

As shown in fig. 12 to fig. 14 shown, this embodiment of a recording/reproducing head 2 in the slider 20 of the outflow end side on the side surface of which are arranged in sequence along the X direction and in a near-field light generating element 26, recording element 21 and reproducing element 22.

This case, recording element 21 in paragraph 2 cladding layer 124b molded in, and the main magnetic pole 33 of the end portion 33a is disposed to cover the core 23 side 23d. In other words, the embodiment of a main magnetic pole 33 of the end portion 33a is also provided with the with the above-mentioned light shielding film 52 (see Figure 5) the role of the same.

According to this structure, the slide block 20 on the side of the, D along the rotating direction of the disc is provided with a near-field light generating element 26, recording element 21 and reproducing element 22. Such circumstances, in the D before the disc near field light generating element 26 R generated after heating the near-field light, the state of the reduction in the coercive force and reliable through the recording element 21 the lower part of the, so to be smooth and high-accuracy recorded D the disc.

And, in the above-mentioned embodiment, the direction from Z to the triangular shape of the core portion 23, however, is not limited to this, may also be as shown in Figure 15, the core will be 23 the other end side (near-field light the Department 23c) Z direction is formed so as to have a trapezoidal shape. In this case, also can be through the above-mentioned paragraph 1 embodiment of a near-field light generating element 26 the same method for manufacturing the core 23. In other words, in the section 2 in the patterning process, in addition to the Y direction two sides of the outside corners, also the Z direction a corner portion of the another end side of the sputtering etching, thereby manufacturing the other end side of the trapezoidal-shaped core 23. Furthermore, fig. 15 is equivalent to Figure 14 the section of the Figure.

As above, the core 23 is formed so as to observe the Z direction is a triangle-shaped or trapezoidal-shaped, thus can in core 23 laser propagating within efficiently reflected to the metal film 51. Furthermore, the core 23 from the Z direction of the sectional shape is not limited to triangular-shaped or trapezoidal-shaped, can be properly design alteration of polygonal shape is a pentagon and the like.

Furthermore, in the above-mentioned embodiments, examples of the light beam propagation element 25 of the core 23 (light beam focusing 23b) from one end side to another end side of the gradually reducing forming, however not limited to this kind of situation, as shown in Figure 16 can also be formed of a straight line shape.

(Section 3 embodiment)

Article of the present invention followed by a description of the 3 embodiments. Figure 17 is amplifying section 3 embodiment of a recording reproducing head side of the outflow end of the profiles, Figure 18 Figure 17 H to the view of the party.

As shown in Figure 17, Figure 18 shown, this embodiment of a recording/reproducing head 2 in the recording element 21 of the coil 34 with the main magnetic pole 33 is arranged between the near-field light generating element 26. The embodiment of a recording element 21 has in section 1 cladding 24a forming molding of the auxiliary magnetic pole 31 and the coil 34, in paragraph 2 cladding 24b of the main magnetic pole forming molding 33, and is disposed on the auxiliary magnetic pole 31 and main magnetic pole 33 of between 135.

Auxiliary magnetic pole 31 is disposed on the reproducing element 22 on, and extending along the X direction is connected with the yoke 135 of one end side. Coil 34 to the yoke 135 as the center is formed a spiral in magnetic yoke 135 around of. Furthermore, the yoke 135 along the Z direction is formed on a through hole 135a, in the through hole 135a has the core section passes through the interior of the the way 23. And, the yoke 135 and the other end (through the core 23 and the auxiliary magnetic pole 31 opposite side) is connected with a main magnetic pole 33.

Furthermore, as mentioned above, the rotation of the disc the D, if the recording/reproducing head 2 through the raised line portions 20b by the levitation force, the NC D from the disc at a predetermined distance from the position of the H (with reference to Figure 2). At this time, the suspension of the slide block 20 attitude for more detailed description, the slide block 20 relative to the disk D1 is not horizontal, but slightly inclined. Specifically, the slide block 20 to most close to the outflow of D to the state of the disc, so that the disk D1 and the sliding block 20 of the ABS   20c maintain the angle formed by the small angle.

Therefore, according to this embodiment, can be in the slider 20 of the outflow end side configuration near-field light generating element 26 and main magnetic pole 33, to most close to the disc so as to the state of the D generating near-field light generating element 26 near-field light of R and main magnetic pole 33 of the magnetic field. Therefore, a smooth and high-accuracy recorded D the disc.

And, in the above-mentioned paragraph 3 embodiment, viewed from the X direction to the near-field light generating element 26 disposed coincident way of auxiliary magnetic pole 31, coil 34 and main magnetic pole 33, form the core 23 in the yoke 135 passes through the interior of the, however not limited to this. Can, for example, as shown in Figure 19, the auxiliary magnetic pole 31 and main magnetic pole 33 bending of the one end side, the coil 34 and the yoke 135 deviate from the X direction from the near-field light generating element 26.

According to this structure, no need of the above-mentioned paragraph 3 causes the core section embodiment of 23 in the yoke 135 and passes through the interior of the processing, therefore the improvement of the manufacturing efficiency can be realized.

(Paragraph 4 embodiment)

Followed by a description of the article of the present invention 4 embodiment. Figure 20 is equivalent to the Figure 5 graph, shows section 4 of the embodiment the plan of record reproducing head. With this embodiment different from the above-mentioned embodiment is characterized in that the, section 1 the core 54 side 23d and metal film 51 inclined surface 51b with the main magnetic pole 33 of the end portion 33a (the latter of the projection 211 inclined surface 211b) of the end portion on the outer side are disposed on the same level. In the following description and, the section 1 in the same manner as to the implementation of the structure of the same symbols and description is omitted.

As shown in Figure 20, the embodiment of a recording/reproducing head 202 of the main magnetic pole 33 of the end portion 33a having buried in subsection 1 cladding 24a of the base 210, from the base 210 toward core section 23 along the X direction of the projection 211.

Observed from the Z direction, the lug 211 formed as toward core section 23 side, of the shape of an isosceles trapezoid narrowed. Specifically, the lug 211 of 211a in the Y direction is formed with the metal film 51 of the lower bottom 51c the width of the same. Moreover, the lug 211 inclined surface 211b is disposed on the and 1 the core 54 side 23d and metal film 51 inclined surface 51b on the surface of the same. In other words, viewed from the Z direction, section 1 the core 54, metal film 51 and lug 211 with laminated bodyshape become 1 core 54 having a shape similar to that of. And in this embodiment, section 2 the core 55 is formed, from the section 1 the core 54 side 23d to the main magnetic pole 33 of the projection 211 inclined surface 211b and the base 210 in the whole range of covers the section 1 the core 54 and main magnetic pole 33.

The embodiment of a recording/reproducing head 202 by the above-mentioned paragraph 1 embodiment of a recording/reproducing head 2 substantially the same as the manufacturing method for manufacturing process. Fig. 21 is equivalent to the Figure 10 graph, is used for explaining recording reproducing head manufacturing method process diagram.

First of all, as shown in Figure 21 (a) is shown, in section 1 clad base material 124a in, to the main magnetic pole 33 of the end portion 33a opening formed in a forming region 124b by patterning the way, in order to pack this opening 124b section in a manner 1 clad base material 124a on the main magnetic pole 33 of the end portion 33a of the base material (hereinafter referred to as the magnetic pole base material 220) for film-forming (magnetic pole forming process). And, section 1 cladding 124a the opening 124b is formed to make the insulator 35 and the insulator 35 in the main magnetic pole of the molding 33 the depth of the base end portion is exposed. Therefore, although there is no illustrated out, however magnetic pole base material 220 in the insulator 35 with the main magnetic pole in the 33 is connected with the base end portion.

Furthermore, as shown in Figure 21 (b) shows, with the above-mentioned paragraph 1 embodiment similarly, the metal film base material 151 and 1 the core base material 154 carried out after forming, with the above-mentioned the 1 same method of patterning process, through the mask pattern (not shown) to the section 1 the core base material 154 reactive ion etching (RIE). At this moment, when viewed from the Z direction to section 1 the core base material 154 to the residue of the rectangular shape of the part of the Y direction of the smaller than the width of the magnetic pole base metal 220 embedded in the section 1 cladding 124a the opening 124b of the part of the width (along the Y direction the opening 124b of the width) of the way, the section 1 the core base material 154 is patterned.

Thereafter, with the section 2 is the same as method of patterning process, sputtering etching, to section 1 the core base material 154, metal film base material 151 and the magnetic pole base material 220 a and etching. After the section 1 is the same as the mode of execution of the process of the process, can be used for producing the above-mentioned fig. 10 shown in a recording/reproducing head 202.

As above, in this embodiment, through the same patterning process that the section 1 the core 54, and a metal film of main magnetic pole 51 and 33 of the end portion 33a and the base material of the patterning, therefore, observed from the Z direction, section 1 the core 54 side 23d, metal film 51 inclined surface 51b and main magnetic pole 33 of the projection 211 inclined surface 211b is disposed on the same plane. By this, and for example by means of an independent process that the section 1 the core 54, metal film 51 and main magnetic pole 33 the case of patterning is performed, can be high-precision to the section 1 the core 54, metal film 51 and main magnetic pole 33 carry out the positioning. And does not need to use expensive positioning device, can be high-precision to the section 1 the core 54, metal film 51 and main magnetic pole 33 carry out the positioning, so can reduce the cost of the device.

Such circumstances, the main magnetic pole 33 of the end portion 33a is formed, through the metal film 51 from the section 1 the core 54 covering a side opposite to the metal film 51. Therefore, high precision can be R of the near-field light generated from the main magnetic pole position and 33 of the position of a magnetic field, the recording/reproducing head 202 own write reliability, realize Takashina materialzation.

Furthermore, even if the metal film 51 is not caused by plasmon resonance condition, the light beam through the metal film 51, through the lug 211 of 211a to the light beam to be reflected and make it to return to the core 23 is, therefore, also can make the light beam re-injection-metal film 51. This can further improve the production of the R the efficiency of near-field light. Also can inhibit the metal film 51 is not caused by plasmon resonance to drain to the outside of the light beam, therefore, can only in the core 23 is generated in the vicinity of R extremely small point of the near-field light.

(Section 5 embodiment)

Article of the present invention followed by a description of the 5 embodiment. Figure 22 is equivalent to the Figure 5 graph, that section 5 of the mode of execution of the plan of record reproducing head.

As shown in Figure 22, this embodiment of a recording/reproducing head 302 in, the main magnetic pole 33 of the end portion 303 disposed in the section 1 cladding layer 24a with the metal film 51 between. Main magnetic pole 33 of the end portion 303 is formed, along the Z direction of the one end side of the insulator 35 in the main magnetic pole of the molding 33 is connected with the base end portion, and another end side of the core 23 of the end face 23e are in the same plane. Furthermore, observed from the Z direction, the end portion 303 is formed toward core section 23 side, of the shape of an isosceles trapezoid narrowed. Specifically, the end portion 303 of the upper bottom 303a in the Y direction is formed with the metal film 51 of the lower bottom 51c the width of the same. And, the end portion 303 of the inclined surface 303b section on 1 core 54 side 23d and metal film 51 inclined surface 51b on the surface of the same. In other words, viewed from the Z direction, section 1 the core 54, metal film 51 and the end portion 303 a of the laminated body 1 the core 54 having a shape similar to that of, and the above-mentioned laminate (and inclined plane) of the whole of the section 2 the core 55 and the light shielding film 52 covering.

Figure 23 Figure is equivalent to 22 of the Figure, is used for explaining recording reproducing head manufacturing method process diagram.

As shown in Figure 23 (a) shown in, in order to make the embodiment of a recording/reproducing head 302, the first section 1 cladding 24a magnetic pole on a base material 304 film-forming (magnetic pole forming process). And, although there is no illustrated out, but the magnetic pole base material 304 through the section 1 cladding 24a and insulator 35 with the main magnetic pole 33 is connected with the base end portion.

Furthermore, as shown in Figure 23 (b) shows, when the with the above-mentioned paragraph 1 embodiment similarly of metal film base material 151 and 1 the core base material 154 after forming, with the above-mentioned the 1 same method of patterning process, through the mask pattern (not shown) to the section 1 the core base material 154 reactive ion etching (RIE). In the section of the embodiment 1 in the patterning process, along the X direction to section 1 the core base material 154, metal film base material 151 and the magnetic pole base material 304 is used to etch a and, therefore, observed from the Z direction, section 1 the core base material 154, metal film base material 151 and the magnetic pole base material 304 remains for being laminated body of the rectangular shape.

Furthermore, as shown in Figure 23 (c) is shown, with the above-mentioned the 2 same method of patterning process by sputtering etching, to section 1 the core base material 154, metal film base material 151 and the magnetic pole base material 304 a and etching. At this time, slightly etching to remove the section 1 cladding 24a until the surface of the, by the complete removal of the magnetic pole base material 304 of the corner and side, forming the end portion 303, the end portion 303 with the 1 core 54 side 23d and metal film 51 inclined surface 51b the same surface (inclined surface 303b).

Thereafter, with the above-mentioned section 1 is the same as the mode of execution of the process of the process, can be used for producing the above-mentioned fig. 22 shows the recording and reproducing head 302.

As above, according to this embodiment, can obtain with the above-mentioned paragraph 4 the same effect of the embodiment, and can be further reduced from the metal film 51 to the near-field light generated from the main magnetic pole and R 33 of the end portion 303 generated magnetic field, capable of dealing with high-density record. Furthermore, in the above-mentioned paragraph 3 embodiment, described in section 2 patterning process complete removal of the magnetic pole base material 304 and the side face of the corner of the structure, however, is not limited to this, may also be as shown in Figure 24, to residual magnetic pole base material 304 the state of the etched end of the side of the.

(Paragraph 6 embodiment)

Followed by a description of the article of this invention 6 embodiment. Figure 25 is equivalent to the Figure 5 graph, shows section 6 of the mode of execution of the plan of record reproducing head.

As shown in Figure 25, in this embodiment of a recording/reproducing head 402 in, the metal film 51 with the main magnetic pole 33 of the end portion 303 in the X direction is formed between two of the divided mutual lack of understanding 401. The diaphragm 401 are preferably made of insulating material, in this embodiment is provided with the above-mentioned core 23 (section 1 the core 54 and 2 the core 55) formed of the same material. Furthermore, different materials in the forming section 1 the core 54 and 2 the core 55 under the condition of, preferably with the section 2 the core 55 formed of the same material as diaphragm 401.

According to this embodiment, can make the metal film 51 with the main magnetic pole 33 of the end portion 303 electrically insulating, but also can inhibit metal film 51 alloying, so will not to the free electron in the metal film 51 in adverse influence on the movement of the. Therefore R can further improve the efficiency of near-field light is generated.

Furthermore, the technological range of the present invention is not limited to the above-mentioned each embodiment, also includes the thrust of the present invention without deviating from the scope of the above-mentioned embodiments is applied to various alteration of the programme. In other words, the above-mentioned embodiment, in the structure of the cited is one example only, appropriate changes can be carried out.

For example, in the above-mentioned embodiment is exemplified in the recording reproducing head suspension of the air suspension type information recording reproducing apparatus, but is not limited to this, as long as relatively disposed with the disc, the disc and a recording/reproducing head can also be contact. In other words, the record of this invention reproduces the head can be compact record reproducing head of slipper type. At this time also the same effect can be obtained.

Furthermore, also the embodiment can be appropriately combined.

Furthermore, further examples of different material are formed integrally with the core 23 and the cladding layer 24 of the light beam propagation element 25, however, can also be formed into a hollow shape. Such circumstances, become the core of the hollow portion of the air, in its the part around the around the cladding. If formed on the light beam propagation element also can propagate laser L and make its-injection near-field light generating element 26.

Furthermore, in the above-mentioned embodiment of the note of this invention is the recording and reproducing head 2 applied perpendicular to the disc D applied to the recording magnetic field of a perpendicular magnetic recording system, however, is not limited to this, but also can be applied to the applied parallel to the disk D the in-plane recording mode of the recording magnetic field.

Also described above in the above section 1 formed in the patterning process of the core 23 remaining of 60 method, however, not to retain the remaining can also be 60, and the complete removal of the core 23 outside the forming area of the core 23.

Can also be a metal film 51 and the section 1 is formed between the clad light shielding film 52. In other words, can be in the core 23 is formed a whole circumference of light shielding film 52. At this moment, the metal film 51 is not caused by plasmon resonance thus through the metal film 51 of the laser reflected to return to the core 23 inner, so can make the re-injection metal film 51. This can further improve the production of the R the efficiency of near-field light.

Furthermore, in the above-mentioned embodiment, by section 1 the core 54 and 2 the core 55 this 2 layer forms the core 23, however, is not limited to this, but also can be composed of 3 layers of the above to form.

Furthermore, in the above-mentioned embodiment is a metallic film of the note 51 width of W1 is formed with the section 1 the core 54 of the width W2 of the equal, however not limited to this, metal film 51 of the width W1 can be less than 2 the core 55 of the width. In other words, can also be the metal film 51 section form than 1 core 54 narrow.

Furthermore, may also be configured as in the slider 20 of the back (and opposing surface 20a the surface of the opposite side) side carrying laser 43, not via optical waveguide 42 and directly into the laser L beam propagation element 25 in.