액정 주입 상태 검사방법과 액정 주입 상태 검사장치

Hereinafter, the present invention according to appended drawing in the embodiment of liquid crystal injection state inspection device for injecting liquid crystal state inspection method in reference to describe the other. , the present invention refers to in the embodiment number by one or limited endured. In addition, in describing the present invention, publicly known function or setting up specific description is subject matter of invention for the electromotor can be avoided disclosed.

In the embodiment of the present invention also injected liquid crystal cells according to drawing Figure 1 shows a one state and, in the embodiment according to Figure 2 of the present invention injecting liquid crystal state inspection method and liquid crystal injecting state inspection device in one or more state changes in a pressed position facing surface are disclosed.

The reference also 1 and 2 also, in the embodiment of the present invention liquid crystal cell (SG) in one common electrode (GB) upper substrate (GT) at regular intervals spaced by a number of main spacer (MC), said upper substrate (GT) and said lower substrate (GB) (LC) are injected into a black matrix layer 4 on a substrate. The, main spacer (MC) (SC) between said upper and said lower substrate (GT) are parallel with each said subframe is spacer between spaced apart state can be complement (GB).

Not shown but, said liquid crystal cell (SG) can be provided on both sides with a polarizing film. Wherein, said liquid crystal cell (SG) installed at one surface of said liquid crystal cell (SG) surface of the polarization direction of the polarizing film such as a polarizing film can be intersecting. Attached to can be cross at right angles.

For example, each said polarizing film on both sides of said liquid crystal cell (SG) comprises dissolving, carry camera unit (30) of camera unit (31) illuminator unit (36) having said polarizing film is preferably do not become confused.

As another alternative, on both sides of said liquid crystal cell (SG) having said polarizing film does not, carry camera unit (30) of camera unit (31) illuminator unit (36) is inserted to the first said polarizing film preferably is right angles to each other.

Said liquid crystal (LC) residual normal injecting state, as shown in (a) of Figure 1 said both ends of said upper and said lower substrate (GT) each main spacer (MC) (GB) are supported. In addition, said upper substrate and said lower substrate (GB) (GT) between said liquid crystal (LC) without additional mover is filled.

Liquid crystal (LC) introduction of residual exceeds said normal state, said one end of the main spacer (MC) as shown in (b) of Figure 1 said lower substrate (GB) but supported, said liquid crystal (LC) said other end of the extension main spacer (MC) spaced in said upper substrate (GT) due to excess injection. The, said upper substrate (GT) and said lower substrate (GB) additional mover cannot be between, said tab of said liquid crystal (LC) said main spacer (MC) is far upper substrate (GT) may be loaded into the disclosed.

Said liquid crystal (LC) is than normal injection of residual state, as shown in (c) of Figure 1 said both ends of said upper and said lower substrate (GT) each main spacer (MC) (GB) are supported. Said liquid crystal (LC) between said upper and said lower substrate (GT) filled but (GB), and an amount of injection of said liquid crystal (LC) compared to said upper substrate and said lower substrate (GT) can be an empty area is formed between (GB).

Wherein, said liquid crystal cell (SG) carry radiating light in the urging unit (20) to the predetermined pressing force when pressing said liquid crystal cell (SG) (Pp), in said liquid crystal cell (SG) liquid crystal (LC) is driven by said pressing force (Pp) such as a pressed position (P) of said liquid crystal cell (SG) identical in principle to the effect of valves are disclosed.

For example, injecting said liquid crystal (LC) in said normal state (P) can be america but according to a pressed position, said in a pressed position (P) (Pa) is selected from within a range error of variation of brightness of light present.

Wherein, carry Pa is the urging unit (20) to said liquid crystal cell (SG) when the predetermined pressing force (Pp) pressing, (P) said brightness of light in a pressed position are disclosed. The, pressing said liquid crystal cell (SG) when not, "0" (P) said light brightness of the system is in a pressed position.

In other words, liquid crystal (LC) if said normal into the state, as shown in (a) of Figure 2 (P) (Pa) in a pressed position said brightness of light is equal to or small (Ph) selected from maximum value of variation of, (Ps) or larger than the minimum value of variation of selected from such as value by a goniophotometer.

However, liquid crystal (LC) exceeds said normal or infusing state, said liquid crystal (LC) less than normal if the injection state, (b) of Figure 2 as shown in (P) (Pa) is a pressed position in said brightness of light (Ps) exhibits minimum of variation of selected from less than value. In addition, liquid crystal (LC) exceeds said normal or infusing state, said liquid crystal (LC) less than normal if the injection state, in a pressed position of Figure 2 (c) (P) (Pa) as shown in the brightness of said light is a value larger than the maximum value of variation of selected from (Ph) by a goniophotometer.

As another alternative, said introduction of said liquid crystal (LC) state to an off-normal (P) can be america but according to a pressed position, said common diameter (Da) in a pressed position (P) present in the error range of variation of selected from.

Wherein, carry Da is the urging unit (20) to said liquid crystal cell (SG) when pressing the predetermined pressing force (Pp), a pressed position in said common diameter (P) are disclosed. The, said liquid crystal cell (SG) when not pressing, said common diameter is "0" (P) system is in a pressed position.

In other words, liquid crystal (LC) if said normal into the state, as shown in (a) of Figure 2 (P) facing said maximum diameter (Da) in a pressed position is equal to or small (Dh) selected from of variation of, such as or larger than the value (Ds) exhibits minimum of variation of selected from

However, liquid crystal (LC) exceeds said normal or infusing state, said liquid crystal (LC) less than normal if the injection state, in a pressed position (P) of Figure 2 (b) as shown in said common diameter (Da) (Ps) exhibits a value less than the minimum value of variation of selected from. In addition, liquid crystal (LC) exceeds said normal or infusing state, said liquid crystal (LC) less than normal if the injection state, (b) or (c) of Figure 2 of Figure 2 shown in a pressed position (P) as said common diameter (Da) in the selected from a value larger than the maximum value of variation of (Ph) by a goniophotometer.

In a pressed position (P) enumerated above said common state between the brightness light in said pressed position (P), (P) said common area and in a pressed position, said at least one common diameter (P) can exhibit either in a pressed position.

The method of the present invention includes a liquid crystal (LC) and one in the embodiment according to introduction of said injecting liquid crystal state inspection device for injecting liquid crystal filter and said pressurizing position (P) and the other in the common state control signal is measured for plural times. In the embodiment of the present invention the liquid crystal injection state inspection device is described first one, using the same of the present invention describe a hole of one in the embodiment according to liquid crystal injecting state inspection method.

In the embodiment according to liquid crystal injecting state inspection device of the present invention now is described S. one withdrawals. In the embodiment according to Figure 3 shows a drawing of the present invention injecting liquid crystal state inspection device and a one also shown, one in the embodiment according to the deformation of the device shown in Figure 4 of the present invention injecting liquid crystal filter and embodiments are disclosed.

The reference also 1 to 4 also, injecting liquid crystal state inspection device of the present invention includes a liquid crystal cell (SG) one in the embodiment according to said locally pressing the liquid crystal cell (SG) (P) of said according to a pressed position in said liquid crystal (LC) for inspecting state introduction of identical state can be measured.

Injecting liquid crystal state inspection device of the present invention is one in the embodiment according to the urging unit (20) and, lighting unit (36) and, a common measurement unit (30) and, inspection unit (40) comprises.

Said urging unit (20) is pressed position (P) of said liquid crystal cell (SG) to a prescribed pressing force (Pp) can be pressed against each other. For example, said urging unit (20) by indirect pressurizing, said pressurizing position (P) can be various forms a fluid injection device. As another alternative, said urging unit (20) by direct compressive, a pressed position (P) to said predetermined pressing force (Pp) pressurizing a tip with a pressure device can be of various types. Said urging unit (20) is not continuously press against the pressurizing position said (P), (P) said period of time at a predetermined pressing force (Pp) press against the preferably only to a pressed position.

Said urging unit (20) can be used to carry the pressing step (S2) is performing.

Said lighting unit (36) is said liquid crystal cell (SG) pressed position (P) all or said light are applied to the substrate. Wherein, said illumination unit (36) defining an anisotropic, said pressurizing position (P) (SG) through various forms can be radiating light to said liquid crystal cell. In addition, said illumination unit (36) defining an anisotropic, said liquid crystal cell (SG) through various forms can be entire radiating light.

The, said urging unit (20) is connected to the upper side of said liquid crystal cell (SG), said illumination unit (36) is a lower side of said liquid crystal cell (SG) said urging unit (20) operation of said lighting unit (36) not diffuse to the interference.

Said lighting unit (36) can be used to carry an illumination step (S3) is performing.

Said common measurement unit (30) is said urging unit (20) and said lighting unit (36) (P) (SG) in a pressurizing position said switch of said light passing through the liquid crystal cell and a common state by using predetermined material.

Wherein, said common measurement unit (30) defining an anisotropic, illuminometer, interferometer, such as camera (P) (SG) in a pressed position through various forms said light passing through said liquid crystal cell can be determining the state and a common. Said common measurement unit (30) the lighting unit (36) is said pressurizing position (P) or said liquid crystal cell (SG) in said light throughout the urging unit (20) is pressed position (P) said pressurizing position (P) while being pressed in said said light passing through the liquid crystal cell (SG) preferably a common state measurement.

Wherein, said common measurement unit (30) also 3 as shown in the common measuring section (31) on, position adjusting part (32) can be a.

Said common measuring section (31) is in a state in which on the upper side of said liquid crystal cell (SG) disposed thereon. Said common measuring section (31) is pressed position (P) to said light passing through the liquid crystal cell (SG) in said common state by using predetermined material. Wherein, said urging unit (20) facing the measuring section (31) on said liquid crystal cell (SG) (P) can be pressed between said press position. And, said common measuring section (31) is illuminometer, interferometer, such as camera (P) (SG) in a pressed position through various forms said light passing through said liquid crystal cell can be determining the state and a common.

Said common measuring section (31) is measured (S31) carry identical perform can be used.

Said position adjusting part (32) is in said upper side of said liquid crystal cell (SG) in response to said pressurizing position (P) and a common measuring section (31) to move substrate. Said position adjusting part (32) in said upper side of said liquid crystal cell (SG) (P) is a pressed position in response to said urging unit (20) can be moving. Said position adjusting part (32) is not limited herein, said upper side of said liquid crystal cell (SG) through various forms in a pressed position (P) corresponding to said common measuring section (31) on said urging unit (20) can be moving.

The, in the embodiment according to of the present invention injecting liquid crystal state inspection device in said liquid crystal cell (SG) is one pressed position (P) for altering said measuring number control unit (35) can be further comprises. Said measuring number control unit (35) is said position adjusting part (32) are operated to said common measuring section (31) on said urging unit (20) by moving the press position corresponding parameters (P), said pressurizing position to a change in said liquid crystal cell (SG) (P) can be disclosed.

Said measuring number control unit (35) is said position adjusting part (32) in connection with a scaling step (S5) perform a carry position can be used.

As another alternative, said common measurement unit (30) is also 4 as shown in measuring support (34) on, a common measuring section (31) can be a.

Measuring said support (34) is spaced apart from said liquid crystal cell (SG) disposed thereon.

Said common measuring section (31) which corresponds to the position includes measuring said plurality is pressurized said support (34) is combined with each other. Said common measuring section (31) is pressed position (P) to said light passing through the liquid crystal cell (SG) in said common state by using predetermined material. And, said common measuring section (31) is illuminometer, interferometer, such as camera (P) (SG) in a pressed position through various forms said light passing through said liquid crystal cell can be determining the state and a common.

Said common measuring section (31) is measured (S31) carry identical perform can be used.

For example, measuring said support (34) corresponding to said plurality of said pressurizing position (P) is a common measuring section (31) and a plurality of on the urging unit (20) can be supported.

As another alternative, said measuring support (34) is pressed position (P) corresponding to said said common measuring section (31) on said urging unit (20) either supported multiple, said position adjusting part (32) is said common measuring section (31) on said urging unit (20) with another one can be.

The, in the embodiment according to of the present invention injecting liquid crystal state inspection device in said liquid crystal cell (SG) is one pressed position (P) for altering said measuring number control unit (35) can be further comprises.

For example, measuring said number control unit (35) is pressed position (P) corresponding to said measuring said support (34) supported on said common measuring section (31) on said urging unit (20) by operating the, said pressurizing position to a change in said liquid crystal cell (SG) (P) can be disclosed.

As another alternative, said measuring number control unit (35) is pressed position (P) corresponding to said measuring said support (34) supported on said common measuring section (31) on said urging unit (20) for operating either, said position adjusting part (32) are operated to said common measuring section (31) on said urging unit (20) by moving the corresponding another one of the pressed position (P), said pressurizing position to a change in said liquid crystal cell (SG) (P) can be disclosed.

Said measuring number control unit (35) is said position adjusting part (32) in connection with a scaling step (S5) perform a carry position can be used.

The, said common measurement unit (30) measuring said light in a pressed position or identical state (P) between the brightness, a pressed position in said common area and (P), (P) said at least one can be a common diameter in a pressed position.

Said common measurement unit (30) is a common measurement steps (S31) carry perform can be used.

Said inspection unit (40) facing the measuring section (31) compares selected from variation in a common state.

Said inspection unit (40) carry (S4) can be used to perform the verify phase.

Then, said inspection unit (40) facing the measuring section (31) and a common state in the presence of selected from of variation of signal is applied, said liquid crystal (LC) injection normally S73 that each other. In addition, said inspection unit (40) facing the measuring section (31) and a common state in selected from of variation of error range, said liquid crystal (LC) equipment has an injecting state is, determine substrate.

The outer case to the roster lake [...] said liquid crystal cell (SG) stage 10 are disclosed. The, said stage (10) for said liquid crystal cell (SG) is radiating light said illumination unit (36) can be with. Said stage (10) carry (S1) can be used to perform step is disposed.

In the embodiment according to liquid crystal injecting state inspection method of the present invention now is described S. one withdrawals. Figure 5 shows a method of the present invention also one in the embodiment according to liquid crystal injecting state inspection surface shown are disclosed.

The reference also 1 to 5 also, in the embodiment according to the liquid crystal cell (SG) of the present invention injecting liquid crystal state inspection method in said locally pressing the liquid crystal cell (SG) (P) of said according to a pressed position in said liquid crystal (LC) for inspecting state introduction of identical state can be measured.

In the embodiment according to one method of the present invention injecting liquid crystal (S2) on the pressing step for checking status, on illumination step (S3), measured on a common (S31), the verify phase (S4) having a predetermined wavelength.

said pressing step (S2) of said liquid crystal cell (SG) is a pressed position (P) to a prescribed pressing force (Pp) can be pressed against each other. said pressing step (S2) is said urging unit (20) according to a pressed position of operation of said liquid crystal cell (SG) (P) (Pp) can be pressed to a prescribed pressing force.

Said liquid crystal cell (SG) said illumination step (S3) is a pressed position (P) all or said light are applied to the substrate. Said illumination step (S3) is said illumination unit (36) of said liquid crystal cell (SG) according to a pressed position (P) all or said light are applied to the substrate.

Said passivation layer (S2) and (S3) said pressing step (S31) is measured according to a pressed position (P) said illumination step to said liquid crystal cell (SG) capable in said light passing through a common state by using predetermined material. (S31) is facing said measured when said illumination unit (36) according to said operation of said liquid crystal cell (SG) is irradiated with light in the urging unit (20) according to a pressed position (P) of said pressurizes, said common measurement unit (30) (P) (SG) in a pressurizing position said switch of said light passing through the liquid crystal cell can be determining the state and a common.

The, said measurement steps (S31) measured via said common or identical state (P) between the brightness light in a pressed position, in said common area and a pressed position (P), (P) said at least one can be a common diameter in a pressed position.

(S4) (S31) measured in said common said verify phase is common state compares selected from variation. Said verify phase (S4) is said inspection unit (40) along said common state (S31) in operation of the common measurement steps selected from variation can be compared.

In the embodiment according to liquid crystal injecting state inspection method of the present invention further includes a scaling step (S5) one position can be.

Said position adjusting step (S5) (P) (SG) changing said liquid crystal cell is in a pressed position said reaction chamber. Said position adjusting step (S5) is said measuring number control unit (35) in accordance with said operation of said liquid crystal cell (SG) can be changing in a pressed position (P). Scaling step (S5) consisting of a plurality of said pressurizing position according to said position (P) (P) can be inspecting state injecting liquid crystal in the other of the pressurizing position.

The, said verify phase (S4) is, facing said common state (S31) measured in the presence of selected from of variation of signal is applied, said liquid crystal normally S73 that can be injected. In addition, verify phase (S4) is said, identical common state (S31) measured in said selected from of variation of error range, said suction device state is, equipment can be determined.

The, method of the present invention injecting liquid crystal (S42) (S41) or bad step one in the embodiment according to normal step further comprises checking can be.

(S41) measured in said step (S4) is normal (S31) facing said verify phase error range of variation of selected from said common state in the presence of in, embodiment as follows. Said introduction of said liquid crystal (LC) step (S41) normal state is normal and disclosed is determined to be a substrate.

Wherein, said step (S41) heating is normal via, said via scaling step (S5) and position, the other of the plurality of said pressurizing position to a pressed position (P) (P) be LC injecting assembly state.

In addition, a plurality of said pressurizing position (P) via said step (S41) examines both normal heating is, further comprising a replacement step (S43), further includes a step (S1) can be disposed.

Said replacement step (S43) (S41) according to said liquid crystal cell (SG) is a normal step said said stage (10) is drained from the and, a new liquid crystal cell (SG) said stage (10) into the reaction chamber. (S43) then said replacing step via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

Said step (S1) is a novel liquid crystal cell (SG) disposed to said stage (10) toward the home position. (S1) and then said locating the via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

Said defect in said step (S42) (S4) (S31) verify phase measurement steps in said passivation layer is selected from common state of variation of error range, embodiment as follows. Said injection of said liquid crystal (LC) step (S42) is defective data bit is, determine substrate.

Wherein, said step (S42) heating is defective via, said via scaling step (S5) and position, the other of the plurality of said pressurizing position to a pressed position (P) (P) be LC injecting assembly state. In addition, defective step (S42) via said heating is, further comprising a replacement step (S43), further includes a step (S1) can be disposed.

Said replacement step (S42) (SG) (S43) is a liquid crystal cell according to said defective said step said stage (10) is drained from the and, a new liquid crystal cell (SG) said stage (10) into the reaction chamber. (S43) then said replacing step via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

Said step (S1) is a novel liquid crystal cell (SG) disposed to said stage (10) toward the home position. (S1) and then said locating the via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

In the embodiment according to of the present invention injecting liquid crystal state inspection method and liquid crystal injecting state inspection device other withdrawals now is described substrate.

In the embodiment according to Figure 6 shows a device of the present invention injecting liquid crystal state inspection method and also other liquid crystal indicating the time for restoration of the pressed position in injecting liquid crystal state inspection are disclosed.

6 also and also 1 reference surface, said liquid crystal cell (SG) carry radiating light in the urging unit (10) to the predetermined pressing force when pressing said liquid crystal cell (SG) (Pp), in said liquid crystal cell (SG) liquid crystal (LC) is driven by said pressing force (Pp) such as a pressed position (P) of said liquid crystal cell (SG) identical in principle to the effect of valves are disclosed.

(SG) is not pressing said liquid crystal cell, liquid crystal (LC) but and keeping said tube, said pressing the liquid crystal cell (SG), said liquid crystal (LC) is moved by a predetermined pressing force (Pp) response (P) and a common change in said cathode to be sludge press position with each other. And, the change of the liquid crystal (LC) in a pressed position (P) facing said restoration of time can exhibit. Wherein, said liquid crystal (LC) said restoration of time is the urging unit (20) in a pressed position (P) and a common time generated by said pressurizing position (P) and a common said number 1 number 2 can be calculated as the difference in time disappear from the field. Not shown but, when said number 1 time to "0", by using the calculated time from said number 2 by said number 1 can be simplified.

The, said introduction of said liquid crystal (LC) state to an off-normal (P) can be america but according to a pressed position, said restoration of said liquid crystal (LC) in a pressed position (P) selected from within a range error recovery time time is present.

In other words, liquid crystal (LC) if said normal into the state, as shown in graph 6 also shown said number 1 time (t0) is generated and a common filar (ta) common to said number 2 time to disappear from the substrate. Therefore, said restoration of said liquid crystal (LC) in a pressed position (P) is equal to or smaller than a maximum recovery time and time (ta provided t0) selected from, such as or larger than the minimum value selected from the output of the adder by a goniophotometer.

However, liquid crystal (LC) exceeds said normal or infusing state, said liquid crystal (LC) if less than is inserted in the normal state, as shown in graph 6 also shown said number 1 time (t0) is generated time common to said number 2 dashed lines (tb) can be common to disappearance. Therefore, said restoration of said liquid crystal (LC) in a pressed position (P) selected from a maximum value selected from the time the output of the adder (tb provided t0) holds the drops below the minimum value is equal to the output of the adder. In addition, as shown in graph is also 6 time (t0) common to said number 1 as shown dashed lines is generated can be disappearance time (tc) common to said number 2. As well as the, said restoration of said liquid crystal (LC) in a pressed position (P) is selected from the output of the adder (tc provided t0) selected from time holds the output of the adder is equal to the maximum value drops below the minimum value.

The method of the present invention in the embodiment according to other liquid crystal (LC) is said liquid crystal injection state inspection device for injecting liquid crystal filter and said introduction of said liquid crystal (LC) in a pressed position (P) in accordance with the state of the control signal recovery time is measured for plural times. In the embodiment of the present invention injecting liquid crystal state inspection device is described in other first, using the same of the present invention injecting liquid crystal state inspection method in the embodiment according to other to explain less than 1000.

In the embodiment according to liquid crystal injecting state inspection device of the present invention other withdrawals now is described substrate. In the embodiment according to Figure 7 shows a drawing of the present invention injecting liquid crystal state inspection device also shown a other and, in the embodiment according to Figure 8 of the present invention injecting liquid crystal state inspection device shown deformation of the other embodiments are disclosed.

The reference 1 and 6 to 8 also may also, in the embodiment according to liquid crystal injecting state inspection device of the present invention includes a liquid crystal cell (SG) said other locally pressing (SG) (P) of said liquid crystal cell according to a pressed position in said liquid crystal (LC) according to said liquid crystal (LC) or identical state by timing the injection of animals can be inspection.

In the embodiment according to liquid crystal injecting state inspection device of the present invention includes other urging unit (20) and, lighting unit (36) and, recovery time measurement unit (33) and, inspection unit (40) comprises.

A pressed position (P) of said liquid crystal cell (SG) to a prescribed pressing force (Pp) can be pressed against each other. For example, said urging unit (20) by indirect pressurizing, said pressurizing position (P) can be various forms a fluid injection device. As another alternative, said urging unit (20) by direct compressive, a pressed position (P) to said predetermined pressing force (Pp) pressurizing a tip with a pressure device can be of various types. Said urging unit (20) is not continuously press against the pressurizing position said (P), (P) said period of time at a predetermined pressing force (Pp) press against the preferably only to a pressed position.

Said urging unit (20) can be used to carry the pressing step (S2) is performing.

Said lighting unit (36) is said liquid crystal cell (SG) pressed position (P) all or said light are applied to the substrate. Wherein, said illumination unit (36) defining an anisotropic, said pressurizing position (P) (SG) through various forms can be radiating light to said liquid crystal cell. In addition, said illumination unit (36) defining an anisotropic, said liquid crystal cell (SG) through various forms can be entire radiating light.

The, said urging unit (20) is connected to the upper side of said liquid crystal cell (SG), said illumination unit (36) is a lower side of said liquid crystal cell (SG) said urging unit (20) operation of said lighting unit (36) not diffuse to the interference.

Said lighting unit (36) can be used to carry an illumination step (S3) is performing.

Said recovery time measurement unit (33) is said urging unit (20) and said lighting unit (36) the switch of said liquid crystal cell (SG) facing said light passing through said liquid crystal (LC) in animals using a pressed position (P) and measuring the time for substrate.

Said liquid crystal (LC) said restoration of time is the urging unit (20) in a pressed position (P) and a common time generated by said pressurizing position (P) and a common said number 1 number 2 can be calculated as the difference in time disappear from the field. Not shown but, when said number 1 time to "0", by using the calculated time from said number 2 by said number 1 can be simplified.

Said recovery time measurement unit (33) for performing the measurement steps can be used to carry recovery time (S32).

Said inspection unit (40) is said recovery time measurement unit (33) compares selected from recovery time in recovery time.

Said inspection unit (40) carry (S4) can be used to perform the verify phase.

Then, said inspection unit (40) is said recovery time measurement unit (33) in the output of the adder when the predetermined recovery time reference signal is applied, said liquid crystal (LC) injection normally S73 that each other. In addition, said inspection unit (40) is said recovery time measurement unit (33) in the predetermined recovery time reference recovery time error range, said liquid crystal (LC) equipment has an injecting state is, determine substrate.

The outer case to the roster lake [...] said liquid crystal cell (SG) stage 10 are disclosed. The, said stage (10) for said liquid crystal cell (SG) is radiating light said illumination unit (36) can be with. Said stage (10) carry (S1) can be used to perform step is disposed.

In the embodiment according to liquid crystal injecting state inspection device of the present invention is another common measurement unit (30) further comprises, measuring number control unit (35) can be further comprises.

In the embodiment according to liquid crystal injecting state inspection device of the present invention other in said common measurement unit (30) and said measuring number control unit (35) of the present invention injecting liquid crystal state inspection device and the control gate is in the embodiment according to one and the same drawing code also 7 through 8 also impart configuration, a description is given of a dispensed to each other.

In the embodiment according to liquid crystal injecting state inspection method of the present invention other withdrawals now is described substrate. Figure 9 shows a method of the present invention are shown in the embodiment according to reflection type liquid crystal filter and other surface also are disclosed.

The reference 1 and 6 to 9 also may also, in the embodiment according to the liquid crystal cell of the present invention injecting liquid crystal state inspection method (SG) said other locally pressing (SG) (P) of said liquid crystal cell according to a pressed position in said liquid crystal (LC) according to said liquid crystal (LC) or identical state by timing the injection of animals can be inspection.

In the embodiment according to the method of the present invention injecting liquid crystal on the pressing step (S2) other checking, on illumination step (S3), recovery time measured on (S32), the verify phase (S4) having a predetermined wavelength.

said pressing step (S2) of said liquid crystal cell (SG) is a pressed position (P) to a prescribed pressing force (Pp) can be pressed against each other. said pressing step (S2) is said urging unit (20) according to a pressed position of operation of said liquid crystal cell (SG) (P) (Pp) can be pressed to a prescribed pressing force.

Said liquid crystal cell (SG) said illumination step (S3) is a pressed position (P) all or said light are applied to the substrate. Said illumination step (S3) is said illumination unit (36) of said liquid crystal cell (SG) according to a pressed position (P) all or said light are applied to the substrate.

Said recovery time (S2) (S32) is measured when said pressing step (S3) consisting of a liquid crystal cell (SG) according to said illumination step on said light passing through the liquid crystal (LC) in a pressed position using said restoration of said facing (P) and measuring the time for substrate. (S32) said recovery time is measured when said recovery time measurement unit (33) in said liquid crystal (LC) switch of said pressurizing position and measuring the time for restoration of (P) can be.

(S32) measured when said recovery time) in recovery time is said urging unit (20) in a pressed position (P) and a common time generated by said pressurizing position (P) and a common said number 1 number 2 can be calculated as the difference in time disappear from the field. Not shown but, when said number 1 time to "0", by using the calculated time from said number 2 by said number 1 can be simplified.

(S4) said recovery time (S32) measured in said verify phase is selected from recovery time restoring time compares. Said verify phase (S4) is said inspection unit (40) along said recovery time (S32) measured in restoring operation of the compares a time can be selected from recovery.

In the embodiment according to liquid crystal injecting state inspection method of the present invention further includes a scaling step (S5) other position can be.

Said position adjusting step (S5) (P) (SG) changing said liquid crystal cell is in a pressed position said reaction chamber. Said position adjusting step (S5) is said measuring number control unit (35) in accordance with said operation of said liquid crystal cell (SG) can be changing in a pressed position (P). Scaling step (S5) consisting of a plurality of said pressurizing position according to said position (P) (P) can be inspecting state injecting liquid crystal in the other of the pressurizing position.

The, said verify phase (S4) is, measured in recovery time (S32) selected from said recovery time when the output of the adder signal is applied, said liquid crystal (LC) S73 that normally can be injected. In addition, verify phase is said (S4), said recovery time (S32) measured in the predetermined recovery time reference recovery time error range, said liquid crystal (LC) can be determine is, implantation of the second frame.

The, method of the present invention injecting liquid crystal (S42) (S41) or bad step one in the embodiment according to normal step further comprises checking can be.

Said normal step (S41) (S4) (S32) in said recovery time is measured in said verify phase reference signal is applied to the predetermined recovery time when the output of the adder, embodiment as follows. Said introduction of said liquid crystal (LC) step (S41) normal state is normal and disclosed is determined to be a substrate.

Wherein, said step (S41) heating is normal via, said via scaling step (S5) and position, the other of the plurality of said pressurizing position to a pressed position (P) (P) be LC injecting assembly state.

In addition, a plurality of said pressurizing position (P) via said step (S41) examines both normal heating is, further comprising a replacement step (S43), further includes a step (S1) can be disposed.

Said replacement step (S43) (S41) according to said liquid crystal cell (SG) is a normal step said said stage (10) is drained from the and, a new liquid crystal cell (SG) said stage (10) into the reaction chamber. (S43) then said replacing step via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

Said step (S1) is a novel liquid crystal cell (SG) disposed to said stage (10) toward the home position. (S1) and then said locating the via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

Said defect in said step (S42) (S4) said recovery time (S32) verify phase is measured in the predetermined recovery time reference recovery time error range, embodiment as follows. Said injection of said liquid crystal (LC) step (S42) is defective data bit is, determine substrate.

Wherein, said step (S42) heating is defective via, said via scaling step (S5) and position, the other of the plurality of said pressurizing position to a pressed position (P) (P) be LC injecting assembly state. In addition, defective step (S42) via said heating is, further comprising a replacement step (S43), further includes a step (S1) can be disposed.

Said replacement step (S42) (SG) (S43) is a liquid crystal cell according to said defective said step said stage (10) is drained from the and, a new liquid crystal cell (SG) said stage (10) into the reaction chamber. (S43) then said replacing step via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

Said step (S1) is a novel liquid crystal cell (SG) disposed to said stage (10) toward the home position. (S1) and then said locating the via, a novel liquid crystal cell (SG) can be inspection method for injecting liquid crystal.

In the embodiment according to liquid crystal injecting state inspection method of the present invention analyzer further comprises other can be measured (S31).

Said passivation layer (S2) and (S3) said pressing step (S31) is measured according to a pressed position (P) said illumination step to said liquid crystal cell (SG) capable in said light passing through a common state by using predetermined material. (S31) is facing said measured when said illumination unit (36) according to said operation of said liquid crystal cell (SG) is irradiated with light in the urging unit (20) according to a pressed position (P) of said pressurizes, said common measurement unit (30) (P) (SG) in a pressurizing position said switch of said light passing through the liquid crystal cell can be determining the state and a common.

The, said measurement steps (S31) measured via said common or identical state (P) between the brightness light in a pressed position, in said common area and a pressed position (P), (P) said at least one can be a common diameter in a pressed position.

According to above-mentioned liquid crystal injection state inspection device for injecting liquid crystal in state inspection method, said liquid crystal (LC) between said upper and said lower substrate (GT) (GB) into which said liquid crystal cell is irradiated with light (SG), said liquid crystal cell (SG) is irradiated with light to said liquid crystal cell (SG) in locally pressing the liquid crystal cell (SG) (P) of said according to a pressed position in said liquid crystal (LC) using identical to be injecting assembly state. In addition, pressurizing position to said liquid crystal cell (SG) (P) (P) of said liquid crystal (LC) in a pressed position or said changed while the radiation is said common measuring and restoration of, said liquid crystal cell (SG) of said liquid crystal (LC) against the entire surface of an injection state can be.

In addition, by means of said liquid crystal cell (SG) and a common liquid crystal (LC) by measuring time or restoration of said guide grooves, said liquid crystal cell (SG) even if the surface of the liquid crystal (LC) as well as when it is flat form curved form can be said of an injection state. In particular, the passivation layer or said liquid crystal (LC) said liquid crystal cell (SG) of flat form to simplify the restoration of time measurement, said liquid crystal (LC) can be collected from the inspection of infusing state.

As described above with reference to the drawing of the present invention preferred embodiment but, if corresponding splicing one skilled in the art, to the present invention within a range that the idea of the present invention fee so as to range from a heavy and area from a tube capable of correcting or changing.