광파가 공간으로 방사되는 방사각을 조절하는 광 발산기

Hereinafter, with reference to the attached drawing of the present invention in the embodiment according to lattice structure are detailed to explain normalizing divergence less than 1000. In the embodiment of the present invention blocks for the present invention are to form a number of the present invention for not only define the scope of the invention as well as relayed or are disclosed. The detailed description of the invention in the embodiment for the present invention is provided to and from the range of the present invention can be accurately and hereinafter specialist rights interpreted substrate.

Figure 2 shows a basic structure of one in the embodiment according to the schematic diagram indicating light divergence also are disclosed. Specifically, light divergence of Figure 2 (a) is growth factor species cross-sectional drawing and, (b) is a plane view indicating light divergence are disclosed.

The reference 2 also, grating (201) generally comprises optical waveguide core (200) is located in the end portion of the, optical waveguide core (200) formed upper or lower part of. However grating (201) a light waveguide core (200) portion without relayed, core (200) can be selected from hydroxyl around. General waveguide comprising a semiconductor or insulator material can be used, rib type, channel number can be small glass waveguide structure. At this time, the major design parameters for when drawing number, channel-type optical waveguide as an example waveguide core portion has been shown only for example, optical waveguide core (200) formed on top of the grating (201) is shown disclosed.

Input lightwave (202) is optical waveguide core (200) inputted through, grating (201) scattering (scattering) occurs over a relatively wide range in outer space unfolded diffraction pattern output lightwave (203) radiation (radiation) with each other. At this time, output light waves emitted from the lattice structure (203) a far-field radiation angle of diffraction (diffraction) expressions can be designed utilizing principle 1.

1<>Expressions

In expressions 1, Lightwave input (202) of central wavelength in free space, A lattice (201) period, A lattice (201) including the optical waveguide (core and clad overall waveguide) effective orange paragraph rate (effective index), A lattice (201) is formed of an optical waveguide core (200) on covering the clad (clad) refractive index, and Is periodic grating (201) formed in largest [...] calcinations of light waves scattered from intensity of the light radiation angle corresponding central (e.g., grating (201) surface normal (normal) angle directions) exhibits.

Wherein, an effective refractive index A light waveguide material refractive index (refractive index) according to existing wavelength based on optical waveguide depending on the structure of the c1. In addition, a refractive index grating exposed free space of the other silica plate wave guide It can display the word disclosed. Such expressions are based on these devices by classical in diffraction principle but, grating (201) period, optical waveguide core (200) of width and thickness geometric scale diffraction limit (diffraction limit) when hereinafter, i.e., input lightwave (202) half the wavelength of the ( ) When the target is close to or smaller than by classical diffraction principle and has many center with number depicting as the pin is. However, refractive index dependence is coarse wavelength radiation angle according to expressions can be expected through 1. Thus, in the embodiment 1 and expressions are an effective refractive index in one Electrically by varying emission angle The number number [...] a divergent angle structure-in other.

Figure 3 shows a lattice structure by the hypertensive effects of a refrigeration system having also one in the embodiment according to electro-a optic structure of light divergence as, p a-n junction consisting of structure of the indicating light divergence are disclosed. Specifically, the plane view of Figure 3 (a) and, (b) is Cross-sectional drawing through the line side-by-side are disclosed.

Figure 4 shows a lattice structure by the hypertensive effects of a refrigeration system having also one in the embodiment according to electro-a optic structure of light divergence as, consisting of light divergence indicating the structure of p-a i-a n junction are disclosed. Specifically, the plane view of Figure 4 (a) and, (b) is Cross-sectional drawing through the line side-by-side are disclosed.

P-a n junction structure using the reference also 3, such as (a), p type doped region (304 - 1) and n-type doped region (304 - 2) optical waveguide core (300) in the lattice (301) formed adjacent the moving parts. In addition, optical waveguide core (300) of the neighborhood of the p type doped region (304 - 1) and n-type doped region (304 - 2) electrode (305 - 1, 305 - 2) formed therein.

Such an optical waveguide core (300) lightwave input (302) is arranged two electrodes in (305 - 1, 305 - 2) voltage between or when electric current is applied, doped region (304 - 1, 304 - 2) carrier (carrier) concentration, i.e., electronic (electron) or holes (hole) is increased and the concentration of the electro-a optic effect, specifically free carrier plasma dispersion (FCPD) fixates the doping effect whose refractive index changes of the area to be coated. The refractive index changes from the lattice of a doped region (301) emitted from the output lightwave (203) of emission angle Is s402. Electro non-optic effect in the semiconductor optical effect known free carrier plasma dispersion effect (FCPD), description dispensed to each other.

P a-i-a n junction structure using the reference also 4, such as (a), p type doped region (404 - 1), i-type region (404 - 3) and n-type doped region (404 - 2) optical waveguide core (400) in grating (401) formed adjacent the moving parts. In addition, grating (401) portion of the neighborhood of the p type doped region (404 - 1) and n-type doped region (404 - 2) electrode (405 - 1, 405 - 2) formed therein.

Two electrodes (405 - 1, 405 - 2) voltage between or when electric current is applied, with reference to the pulverized product 3 also can be added for electro-a optic effect, i.e., FCPD effect and change due to the refractive index of the doped regions, the refractive index changes from the lattice of a doped region (401) emitted from the output lightwave (203) of emission angle Is s402.

In refractive index variations in the applied voltage or current can be obtained more effectively the preferred method of Figure 3 p a-n (reverse bias) applies a reverse voltage to the junction structure can be extracted carrier, carriers are injected in to of Figure 4 p a-i-a n junction structure applying pure pressure (forward bias) are disclosed.

At this time, doped lattice (401) emitted from the output lightwave (203) of emission angle Electrode (405 - 1, 405 - 2) value of the voltage applied to the properly adjusted number can be disclosed.

Figure 5 shows a lattice structure by the hypertensive effects of a refrigeration system having also one in the embodiment according to thermo-a optic structure of light divergence as, p or n doped region consisting of structure of the indicating light divergence are disclosed. Specifically, the plane view of Figure 5 (a) and, (b) is Cross-sectional drawing through the line side-by-side are disclosed.

Figure 6 shows a lattice structure by the hypertensive effects of a refrigeration system having also one in the embodiment according to thermo-a optic structure of light divergence as, p a-n junction consisting of structure of the indicating light divergence are disclosed. Specifically, the plane view of Figure 6 (a) and, (b) is Cross-sectional drawing through the line side-by-side are disclosed.

P or n doped regions 5 a reference hole are the growth factor of light divergence, such as (a), one of the n-type-doped regions p (504) the optical waveguide core (500) in the lattice (501) formed adjacent the moving parts. In addition, optical waveguide core (500) on either side of the n-doped region or neighborhood of p (504) electrode (505 - 1, 505 - 2) formed therein.

The p or n-doped region (504) and low ambient than an aluminum by, for inducing an electric current to flow in by intensive current injection doped regions are disclosed. The, optical waveguide core (500) lightwave input (502) is arranged in two electrodes (505 - 1, 305 - 2) between when electric current is applied, current temperature is equal to Joule heat is generated. Doped regions (504 - 1, 504 - 2) lattice of inspecting a thermo non-optic effect (501) is equal to an effective refractive index of changes.

Thus, an effective refractive index changes from the doped regions in the lattice (501) emitted from the output lightwave (203) of emission angle Is s402. Semiconductor optical effect known in the Thermo non-optic effect, description dispensed to each other.

Also shown in light divergence in 5 structure of two electrodes (505 - 1, 505 - 2) toward the direction of the current injection between which the correlation whether free. In other words, electrode 505 - 1 is installed applies a voltage to a heating is + 505 - 2? By applying a predetermined voltage, current electrode (505 - 1) electrode (505 - 2) and directing the engine fuel; + voltage? By applying a current electrode voltage and vice versa (505 - 2) electrode (505 - 1) directing the engine fuel therefrom. The Joule heat temperature rise becomes larger current is large, an effective refractive index changes, i.e., emission angle Adjusting the number of radial current strength of 2000.

P-a n junction structure also 6 using reference surface, such as (a), p type doped region (604 - 1) and n-type doped region (604 - 2) optical waveguide core (600) in grating (601) formed adjacent the moving parts. In addition, optical waveguide core (600) of the neighborhood of the p type doped region (604 - 1) and n-type doped region (604 - 2) electrode (605 - 1, 605 - 2) formed therein.

Wherein, p type doped region (604 - 1) and n-type doped region (604 - 2) even if joining of two doped region, these doping regions can be intensive current is flowing ambient than resistance. The, optical waveguide core (600) to lightwave (602) is entered in two electrodes (605 - 1, 605 - 2) between when electric current is applied, current Joule heat is generated doped regions (604 - 1, 604 - 2) is equal to of temperature rise. Doped regions (604 - 1, 604 - 2) whose refractive index changes caused by the hypertensive effects of inspecting a thermo-a optic to be coated. The refractive index changes from the doped region in the lattice (601) emitted from the output lightwave (203) of emission angle Is s402.

6 Structure of two electrodes also shown in light divergence (605 - 1, 605 - 2) according to the direction of voltage between s402. level of temperature rise. Two electrodes (605 - 1, 605 - 2) forward voltage is applied between parallel if voltage rises continuously from 0 up current in Figure 0 according basically to be coated. The effective refractive index also can be continuously changed.

The compared, two electrodes (605 - 1, 605 - 2) forward voltage gradually increases up between when the traffic channel element breakdown voltage (breakdown voltage) in order to change the current until current and breakdown voltage can be increased beyond a small multivalent accidental. The doped region (604 - 1, 604 - 2) and discharged into an effective refractive index changes in breakdown voltage or more thermo non-optic effect can be seen effectively.

Silicon material grating coupler (grating coupler) studies of result (Jong-a Hun Kim et al. , IEEE Photo. Tech. Lett, vol. 27, No. 21, P. 2034, Nov. 1, 2015) The, refractive index variations in the contrast detector destruction under reverse voltage modulation efficiency expressed in higher than pure electroslag remelting p a-n junction structure in the same modulated signal. The one in the embodiment are p a-n structure with lattice structure by taking into account modulation efficiency in using light divergence, rather than pure reverse pressure applying pressure by applying the destruction status can be more desirable. Pure pressure or inverted pressure even in any case, the Joule heat temperature rise becomes larger current is large, light divergence of Figure 6 effective structure of refractive index change, i.e., emission angle The f-number of electrodes (605 - 1, 605 - 2) current intensity or electrodes placed between (605 - 1, 605 - 2) applied between the absolute magnitude of the voltage can be adjusted to.

The present invention such as described above for the one or more expressed in the embodiment are is received, adjustment process from various detailed structure. For example, grid 3 and 6 also is formed optical waveguide core (301, 601) is located in the middle of the p a-n junction at a radiates heat when, the number without limit one or, p a-n junction silicon within the optical waveguide core may be positioned either side or toward the outside to one of disapproval.

Similarly, in Figure 4 grating is formed on optical waveguide core (401) side end face located at a radiates heat when each p provided i i provided p junction, the number without limit one or, connecting each one of the optical waveguide core p provided i i provided p junction or positions the optical waveguide core located outside one of the disapproval.

In addition, electrodes in 3 to 6 also (305 - 1, 305 - 2, 405 - 1, 405 - 2, 505 - 1, 505 - 2, 605 - 1, 605 - 2) or n-type doped layer on at a when the p radiates heat, the one or number without limit, electrode (305 - 1, 305 - 2, 405 - 1, 405 - 2, 505 - 1, 505 - 2, 605 - 1, 605 - 2) to reduce the electrical resistance intending to be, moiety (301, 401, 501, 601) of n-type doped than higher concentration p + n + type doped p or layer on or disapproval.

In addition, electrodes in 3 to 6 also (305 - 1, 305 - 2, 405 - 1, 405 - 2, 505 - 1, 505 - 2, 605 - 1, 605 - 2) optical waveguide grating is formed on the core (301, 401, 501, 601) at a radiates heat when positioned on one portion of the neighborhood, the number one or without limit, electrode (305 - 1, 305 - 2, 405 - 1, 405 - 2, 505 - 1, 505 - 2, 605 - 1, 605 - 2) is a suitable voltage, in terms of current injection array deployment for optical waveguide core are placed in many locations may be filled out.

In addition, (b) of Figure 3, of Figure 4 (b), in (b) of Figure 5 (b) and rib type waveguide structure as an example of Figure 6 for example optical waveguide core (300, 400, 500, 600) side rib waveguide portion (lower portion of optical waveguide) (306, 406, 506, 606) when electrode formed at a radiates heat, the one or number without limit, strip electrode is (channel) type, embedded strip type, ridge type (e.g., "Fundamentals of Photonics," B. E. A. Saleh and M. C. Teich, 2nd Edition, p. 310) Based on a variety of types of optical waveguide, moiety in the vicinity of the voltage and current injection can be performed which may be formed into various structure and disapproval.

In the embodiment of use in symbol indicates that bars as follows.

X: longitudinal grating

Z: lattice of transverse

Y: grating which reflect (Normal direction)

: Input lightwave wavelength in free space

: Grating period

M: light divergence to number in the array

: Longitudinal radiation angle (an angle from the normal) unit lattice

: Optical waveguide grating is formed on effective orange paragraph rate (effective index)

: On covering the clad (clad) the refractive index of the optical waveguide gratings can be written

Although in the embodiment than in the embodiment described by the drawing but are limited to, if said person with skill in the art from the substrate in the art of various corresponding modifications and deformable disclosed. For example, techniques described herein or in a different order and are described method is carried out, and/or illustrating system, structure, device, such as a fixed or other method described component alone or in combination, or other suitable components or even replaced by uniformly substituted results can be achieved.

Therefore, other implementations, other claim claim also carry on those two pieces in the embodiment and ranges.