PLASMA PRESS DEVICE AND BONDING METHOD USING SAME
The present invention refers to plasma press device and welding method relates to search, the opposite surface of each of both sides of the plasma electrode is provided is activated in a state where the two apposed to the bonding surface of the substrate to plasma by applying urging force to the substrate after the bonding interfaces are brought into contact with two inter-bonded plasma press device and method are disclosed to conjugation. Generally, heterogeneous interface laminated, junction, a physical method for attaching the fixing method, thermosetting resin welding method, hot press (hot press) method, mechanical press method, diffusion bonding method such as using method etc.. This method are metal - polymer (polymer a-metal), resin (resin-a ceramic) ceramic -, ceramic - been used for joining various material such as metal (ceramic non-metal). However, recent electricity are components used in and workpiece size, while thermal deformation in processes for bonding process, curing rates, junction speed, addition of additional fine structure, physical opening that is limited in various portions of the new bonding method has been conventionally expected disclosed. The door number cookies excludes low temperature, low press (low press), substrate deformation, etc. without damage (damage) layer is. Low temperature, low press (low press) having the substrate bonding process for low temperature cure of bonded to the substrate in the second step for developing forward more, functional group (functional group), various coating (coating) are various method such as adhesive number (adhesive) to look into the. However industrially applied marks where a door number that corresponds to productivity and flow tides. Return thermal deformation door number is low temperature cure can solve a specific time but chamber number component must therefore industrial storage rear disclosed. Functional groups such as functional groups (functional group) (Functional group) surface when applying a industry easily enough to be separately press an upper force independently from the remote. And of the existing method of the present invention to solve the aforementioned such as door number point number is provided, in a state where the two press a material joined to the plasma by plasma simultaneously after reducing the process compared with a triple-joint, bonding force even higher number plasma press device and a number [...][...] conjugation method can be recycled. * In addition, to generate plasma only by the upper equipment of a conventional press process, adding additional equipment existing office equipment need high plasma press device and a number [...] conjugation method can be recycled. In addition, plasma activated surfaces bonded by heating compressed bonded to thermal distortion based on plasma press device and a surface of the conjugation method [...] number and can be recycled. In addition, junction substrate low thermal distortion signal controller, such as conventional door number low press (low press) to the external device and welding a number [...] plasma press method can be recycled. In addition, junction substrate support device of braking signal controller can be coupled with a heterojunction device and welding a number [...] plasma press method can be recycled. Said number and is, in the embodiment of the present invention according to one, number 1 number 2 with a substrate surface of the substrate is activated to device for producing plasma generating section; said number 1 and number 2 brought into contact with the base substrate, wherein the composition is a fourth urging force to the base number 1 number 2 abutting the bonding interfaces; and said plasma generating section formed in plasma generated, simultaneously with said activation of said plasma surface is connected to a pressurized elongatable, said plasma during the bonding interfaces with said sealed surface protection film to start driving part number said foamed plower number control unit; including a, can be achieved by plasma press device. Wherein, said plasma generation section, one surface of a substrate on which is mounted said number 1 number 1 plasma electrode; and said number 1 positioned opposite to the plasma electrode and disposed, said number 2 the opposite side substrate bonded to the substrate on which is mounted said number 1 number 2 plasma electrode; and, said driving unit is described that said number 1 base said number 2 is injected to at least one plasma electrode to move said number 1 plasma electrode or said number 2 can be provided. Said number 1 located in the upper and lower plasma electrode, and the plasma electrode positioned under said number 2, said driving unit to move up and down in plasma electrode said number 1 can be coupled to plasma electrode said number 1. In addition, the radiator is driving said material can be provided. In addition, plasma electrode on opposing sides of said number 2 is to be performed and ceramic dielectric, said ceramic dielectric substrate with said number 2 can be. In addition, at the time of said plasma, said number 1 plasma electrode shaft passes between said number 1 and order to bloc said number 2 plasma electrode to form said number 1 plasma electrode positioned on opposing sides of the radial direction than said number 2 plasma electrode, said number 2 base material is a base bolted said number 1 are inhibited said number 1 plasma electrode can be positioned to not further includes an interval forming portions abut. In addition, organic or inorganic substrate said number 1 said number 2 be a base substrate. In addition, it buys the barium titanium substrate and said number 1 (BaTiO 3, BTO), prepreg (prepreg) said number 2 substrate implementation being. In addition, the adhesive sheet is attached to one side of the plasma electrode said number 1 to said number 1 permeable substrate can be. In addition, the double-sided adhesive member said said number 1 with each other by the base protective film can be. In addition, polyimide (PI) film or PET film can be said protective film. In addition, can be adjusted depending on the type of surface-mount type adhesion in said joint interface. In addition, the adhesion in said joint interface bonding interface and said injected gaseous form around said joint interface number additive can be adjustable. In addition, said number is added metal source, comprising at least one of the inorganic source and source can be. The bonding method using said plasma press device, activated plasma generated number 1 number 2 to a base surface of the substrate, at least one inter-bonded substrate kept returning said number 1 base said number 2. Specifically, the bonding method using said plasma press device, one side of the plasma electrode number 1 number 1 is attached to the substrate, said number 1 and number 2 positioned opposite to the plasma electrode provided opposite side substrate opposing said number 1 and number 2 attached to one side of the plasma electrode during plasma electrode substrate step; and at a certain distance from said number 1 plasma electrode and plasma electrode positioned to form said number 2, said number 1 plasma electrode and said number 2 plasma electrode formed in said number 1 for activating a surface of a substrate surface of the substrate and said number 2 plasma is generated plasma generating step; and, a plasma is generated in the surface is activated, said number 1 plasma electrode or said number 2 to move said number 2 and at least one plasma electrode base substrate is brought into contact with the number 1, said number 1 is described that the abutting state by applying urging force to the base said number 2 set said number 1 base substrate bonding said number 2 plasma press step; including bonding method can be achieved by using a plasma press device. Wherein, after said plasma press said number 1 plasma electrode and said number 2 plasma electrode cutting off power plasma generating stop, continue urging force to further include the step of applying additional press can be set. In addition, plasma generating step either before or said plasma occurs, said base number 1 and number 2 is described that the abutting joint interface additionally includes a number addition of injecting gaseous around a joint interface, said number in said modulating adhesion can be added via a bonding interface. In addition, said number is added metal source, comprising at least one of the inorganic source or source can be. On the other hand, said press device of the present invention is another number and as in the embodiment according to plasma, said plasma generating portion is, said number 1 number 2 while the fixing base substrate so as to firm interspaces pressurized plasma density per unit number 1 number 2 roller roller and at least one of muffler comprising; said driving unit, said number 1 roller and arranged so that said number 2 rolling member; said number the fishermen, said number 1 base is described that perform said number 1 roller and said number 2 roller is a part of muffler said number 2 plasma used plasma electrode roller and applying power, said driving unit provided for each roller rotation number under [e can be achieved by plasma press device. Wherein, said number 1 roller and said number 2 roller used for one of either the plasma electrode, the other ground electrode can be used. In addition, roller when said number 1 roller and said number 2 plasma electrode, having a frequency different power can be applied to the disclosed. In addition, the base substrate is a part said number 1 roller and said number 2 said number 1 said number 2 which additionally includes a roller electrode member this standing arrangement of muffler, said number 1 roller, said roller and said number 2 2 dog plasma electrode has an electrode is used, the other of the ground electrode can be used. In addition, roller coating layer on the outer surface of said number 1 roller and said number 2 can be. In addition, electrode member on the outer surface of said coating layer can be. The bonding method using said plasma press device, number 1 number 2 roller between the roller, the base substrate preparing step number 1 number 2 mutual engagement of muffler; said number 1 formed in at least one of said number 1 roller and said number 2 roller base based on said number 2 plasma is generated based on said number 1 base said number 2 a part of muffler body facing surface respectively activate plasma generating step; and, said number 1 roller and said number 2 is rotated so that the roller between the roller and said number 2 roller said number 1 substrate and said number 2 substrate is said number 1 of muffler, a plasma is generated in said number 1 substrate and said number 2 mask layer substrate surface is activated pressurized plasma press step; can be a. Wherein, said number 1 roller and said number 2 when used in plasma electrode roller, preferably having a frequency different conveniently. In addition, the heat roller is described that said number 1 base said number 2 which is installed in electrode when said number 1 roller and said number 2 this standing arrangement of muffler, said number 1 roller, said roller and said number 2 is passed through a plasma electrode 2 of the central electrode member, preferably used in the other ground electrode. In addition, plasma generating step either before or said plasma occurs, said number 2 substrate is said number 1 base addition of injecting gaseous additionally includes a number a part of muffler, said base substrate in said number 1 through number added the joint interface adhesion can be adjusting said number 2. In addition, said number is added metal source, comprising at least one of the inorganic source or source can be. According to the present invention, in a state where the two press a material by plasma simultaneously joined to the joint plate and vibration compared to plasma after plasma press device and welding method is encoded ball number. In addition, the upper equipment to generate plasma only by a conventional press process, adding additional equipment need high plasma press device existing office equipment and welding method is encoded ball number. In addition, plasma activated surfaces bonded by heating compressed bonded to substrate support device of braking surface of the conjugation method and plasma press device is encoded ball number. In addition, junction substrate low thermal distortion signal controller, such as conventional door number low press (low press) to the external device and plasma press conjugation method is encoded ball number. In addition, junction substrate support device of braking signal controller device and an ultrasonic bonding method with plasma press method is encoded ball number. Figure 1 shows a schematic diagram of the device of the present invention number 1 in the embodiment according to plasma press also, Figure 2 shows a device of the present invention number 1 in the embodiment according to the order of bonding method using plasma press also, Figure 6 shows a standpoint of Figure 2, according to each order also 3 to Figure 7 the present invention according to experiments using plasma press device provide a graph, Figure 8 adhesion comparison graph, Figure 9 shows a schematic diagram of the device of the present invention number 2 in the embodiment according to plasma press also, Operating state diagram of Figure 9, Figure 10 shows a Figure 11 shows a schematic diagram of the device of the present invention number 3 in the embodiment according to plasma press and also, Operating state diagram of Figure 11 and Figure 12 shows a, Figure 13 shows a number 1 and number 2 before the bonded substrate is also indicative of the state of surface of the base, Figure 14 shows a base substrate bond number 1 number 2 with separated hot also when representing a surface of the substrate and a surface, Figure 15 shows a plasma surface treatment according to the present invention also number 1 number 2 in urging force to the base substrate when applied to the surface of the substrate through an indicating surface with separated are disclosed. Prior description, in various in the embodiment, the same type component typically in number 1 in the embodiment is described using identical code, otherwise in other configuration in the embodiment number 1 in the embodiment described the on-sensors other. Hereinafter, with reference to the drawing of the present invention number 1 in the embodiment according to the preface heterojunction detailed plasma press device are described as follows. Figure 1 shows a schematic diagram of the device of the present invention number 1 in the embodiment according to plasma press also are disclosed. The reference also 1, plasma press device of the present invention number 1 in the embodiment according to the number 1 plasma electrode (10) and, number 2 plasma electrode (20), drive (30), interval formation (40) and number control unit (50) consists of including. Preferably, plasma press device ([...] shown) which is located in the chamber, a plasma within the chamber discharge gas is implanted in, number 1 plasma electrode (10) and number 2 plasma electrode (20) respectively the second terminal can be a plasma is generated. In the embodiment shown in the atmospheric-pressure plasma device in which, it is installed in a vacuum chamber capable of plasma may be filled. In addition, the number 1 in the embodiment in plasma electrode (10) disposed at located, number 2 plasma electrode (20) is positioned under and, driving unit (30) includes a number 1 plasma electrode (10) mounted so as to moving to mammals are also described, each plasma positional relationship between the and second display parts (30) associated with it goes the one and not the number is below a certain electrode. In addition, the base substrate is number 1 in the embodiment number 2 in different materials is described which is provided as the heterogeneous material needed number 1 number 2 substrate base soft disapproval. Said number 1 plasma electrode (10) number 1 substrate bonding both sides (11) attached thereto. In addition, said number 2 plasma electrode (20) ceramic dielectric layer is opposite the upper surface (22) is installed, said ceramics (22) number 2 on the upper surface of substrate (21) is loaded on substrate. Said number 2 substrate (21) through ceramics any attachment means (22) attached to the top surface on the upper surface of disapproval. Wherein, based on said number 1 (11) based on said number 2 (21) can be either organic or inorganic substrate is. I.e., number 1 substrate (11) includes a substrate (21) - number 2 - organic substrate organic substrate, organic substrate - inorganic substrate, organic or inorganic substrate be a - inorganic substrate - inorganic substrate. The number 1 in the embodiment described in (11) is titanium it buys the barium (BaTiO 3, BTO) and, number 2 substrate (21) is prepreg (prepreg) are disclosed. Said number 1 substrate (11) assembly includes a film (12) are bonded state said number 1 plasma electrode (10) on the lower surface of bonded, number 1 substrate (11) and the protective film (12) double-sided adhesive member (13) with respect to the other is bonded. The, said protective film (12) polyimide (PI) film or PET film disclosed. Said protective film (12) using an adhesive means the end of one of the number 1 plasma electrode (10) is attached to the, its function is number 1 substrate (11) activated by plasma while plasma electrode number 1 (10) to prevent the adherence of hypermetropia. Said interval formation (40) includes said number 2 plasma electrode (20) on a side in the vicinity of the pair is arranged, via a driving means a predetermined number 1 plasma electrode (10) away from reinforces the further or closer, in a vertical direction to be movable in the left-right direction or force is removed. In the embodiment moves in left and right directions in the other when the other mammals are also described. Said interval formation (40) includes a number control unit (50) or the number of the number by number through [...] stage can also be disclosed. Said interval formation (40) at the time of plasma generation is number 2 plasma electrode (20) on opposing sides of said number 1 than plasma electrode (10) is provided on a position moved to, number 1 plasma electrode (10) number 1 yeast shaft passes and said number 2 plasma electrode (20) spaced between formed on the substrate. In addition, said interval formation (40) includes a number 1 substrate (11) number 2 on substrate (21) is bolted upon, i.e. number 1 plasma electrode (10) and number 2 plasma electrode (20) moves to number 1 when against the plasma electrode (10) engages not location are confirmed each other. Said drive (30) to an isolated with the air suction number 1 plasma electrode (10) therein with, number control unit (50) is driven through number 1 plasma electrode (10) to move vertical direction force is removed. Said number control unit (50) in plasma discharge gas is introduced in the chamber number 1 plasma electrode (10) and number 2 plasma electrode (20) formed in number 1 plasma electrode (10) and number 2 plasma electrode (20) plasma between CLK3. In addition, number control unit (50) has a driven portion (30) number 1 to number by a plasma electrode (10) is vertically moved by the number 1 plasma electrode (10) and number 2 plasma electrode (20) of two or, drive (30) by applying a force set number 1 plasma electrode (10) side is to deliver as much as the number. In addition, number control unit (50) is the aforementioned interval formation (10) be [...] position of number. On the other hand, can be adjusted depending on the type of surface-mount type adhesion in said joint interface. The, said vacuum chamber number 1 substrate (11) number 2 on substrate (21) in the joint interface adhesion control additive gas can be injected into the peripheral bonding interface bonding interface and form number. Included is the number added injected through injection of each plasma electrode means formed therethrough that is injected through a nozzle or disapproval. Wherein, number is added metal source, such as inorganic source and dopamine (dopamine) silane (Silane), catechol (catechol) can be at least one of a source. The above method of the present invention number 1 in the embodiment according to plasma press device and welding is described substrate. Figure 2 shows a device of the present invention number 1 in the embodiment according to the order of [...] bonding method using plasma press also, each order according to process 3 of Figure 2 to Figure 6 shows a also are disclosed. The reference 2 also, bonding method (S10) of the present invention number 1 in the embodiment according to plasma press device using a substrate step, plasma generating step (S20) and plasma press bonding including consists of (S30). First, said substrate step (S10) is, such as in Figure 3, number 1 plasma electrode (10) and a deposition substrate number 1 (11) for attaching, said number 1 plasma electrode (10) and positioned opposite to the provided number 2 plasma electrode (20) of said number 1 plasma electrode (10) and the opposing faces one side of the opposing substrate number 2 (21) are attached to. Wherein, number 1 substrate (11) is titanium it buys the barium (BaTiO 3, BTO) and, number 2 substrate (21) includes a prepreg (prepreg) implementation being. Said number 1 substrate (11) assembly includes a film (12) are bonded state said number 1 plasma electrode (10) one side of the bonded, number 1 substrate (11) and the protective film (12) double-sided adhesive member (13) with respect to the other is bonded. The, said protective film (12) polyimide (PI) film or PET film disclosed. Said number 2 substrate (21) is said number 2 plasma electrode (20) installed opposite surface of ceramic dielectric (22) attached to the substrate. Next, as plasma generating step (S20), the reference also 4, interval formation (40) number 2 a plasma electrode (20) situated above the flow, number 1 plasma electrode (10) to move and spaced formation (40) by abutting the number 1 on plasma electrode (10) and number 2 plasma electrode (20) form a constant interval. And, in a plasma within the chamber discharge gas is implanted, number 1 plasma electrode (10) and number 2 plasma electrode (20) formed in the plasma, number 1 substrate (11) with a surface of substrate number 2 (21) to the surface of the activated, same 'plasma suface treatment' called the anode. Ear, as step (S30) plasma press, such as in Figure 5, a plasma is generated in the interval formation (40) number after a stand-alone, number 1 substrate (11) based on number 2 (21) number 1 becomes flat plasma electrode (10) returning a moved downwardly. And, during a plasma surface treatment, such as in Figure 6 number 1 substrate (11) number 2 on substrate (21) and is brought into contact with, the bonding interfaces set a pressurizing force applied to the drive unit (30) for a period of time established via the number 1 plasma electrode (10) number 2 a plasma electrode (20) is pressed against by, number 1 substrate (11) based on number 2 (21) brazed with the fixing. In particular, number control unit (50) through, pressurization is preferably performed simultaneously with plasma electrode number 1 of the plasma surface treatment. I.e., during plasma surface treatment is performed, preferably by means of plasma electrode number 1 are initiated. On the other hand, method for a decided by bonding reinforcing needs of, additional press step, number 1 plasma electrode (10) and number 2 plasma electrode (20) after cutting off power to stop generating plasma, set number 1 urging force to the plasma electrode (10) capable of applying a continually over the disapproval. Method such as described above which form a material bond the joint interface of the adhesion in different 2 substrate, depending on the type of surface-mount type injected into the vacuum chamber can be. In addition, plasma generating prior to or plasma occurs, further injection bonded to the bonding interface and in the interface adhesion bonding interface peripheral addition number strongly or weakly can be controlled. The, number added in the form of a gas to metal source, such as inorganic source and dopamine (dopamine) silane (Silane), catechol (catechol) can be at least one of a source. The aforementioned method number 1 through substrate (11) number 2 on substrate (21) is bonded, heating is the conventional surface-active to receive thermal distortion does not occur compared to those of which the substrate can be the upper mill. Experiment example The present invention according to plasma press device is provided so as to such as in Figure 1, number 1 plasma electrode (10) is number 1 substrate (11) is attached to the titanium in it buys the barium (BaTiO 3, BTO), number 2 plasma electrode (20) is number 2 substrate (21) in prepreg (PPG) are attached to. And, number 1 plasma electrode (10) moving a number 2 plasma electrode (20) and between an internal in the state by generating, activating the surface of the substrate base number 1 number 2 plasma surface treatment has a plurality of hierarchies. Plasma suface processing number 1 in substrate (11) it buys the barium titanium in number 2 (BTO) and substrate (21) in prepreg (PPG) becomes flat number 1 plasma electrode (10) to move the other. Ear, such as in Figure 7, plasma surface treatment is performed in number 1 plasma electrode (10) 40 seconds to a maximum pressing force 38 kgf number 2 plasma electrode (20) is pressed against the, number 1 substrate (11) it buys the barium titanium in number 2 (BTO) and substrate (21) so as to inter-bonded in a prepreg (PPG). The, plasma discharge is generated so as to output the processed foamed 5 seconds after initiating the protection film. Figure 8 result of comparative ticket adhesion are disclosed. In Figure 8, said in Figure 7 such as the present invention according to a method such as by an conjugation number 1 joined to a substrate through plasma press device (11) based on number 2 (21) (peel off) each other remove the result (a) for measuring a force, (b) and (c) have been designated. (A) before the substrate is exposed to a plasma is a pressurizing force applied when time superhuman as 25, remove the force presented a predetermined first locked 458 kgf/mm, (b) is applied before the substrate is exposed to a plasma when 35 as superhuman protection time, remove the force presented a predetermined first locked 603 kgf/mm, (c) a pressurizing force is applied before the time when 60 superhuman as substrate is exposed to a plasma, remove the force up to a predetermined first 334 kgf/mm. Number 1 substrate (11) it buys the barium titanium in number 2 (BTO) and substrate (21) in prepreg (PPG) surface treating the state, hot press process after remove the force measured joined up to 264 kgf/mm. And, number 1 substrate (11) in the surface treatment of titanium it buys the barium (BTO) after 1 seconds after a, number 2 through a hot substrate (21) in prepreg (PPG) when bonded to, remove the force measured up to 355 kgf/mm. In addition, number 2 substrate (21) in prepreg (PPG) after 1 seconds after a surface treating, number 1 through a hot substrate (11) (BTO) if it buys the barium titanium in bonded, remove the force measured up to 0 kgf/mm. By selecting a testing result studied, using the present invention according to plasma press device through other significant advantages over the conventional bonding method joined to the improving method can be know appears as a minor component. In particular, in case a predetermined period of time plasma suface is performed according to of the invention device applying urging force to the herein, molecules as a minor component can be greatly increased. Of the present invention device according to bonding force, is firstly carried out as pre-treatment plasma surface treatment or after, when pressure not more than about 1. 70 An article and, not more than about 2 when hot press without surface treatment. 28 Can be an article molecules. Figure 15 number 1 to number 2 of the surface condition of a base substrate and joining base 13 also, when joined to a substrate surface condition of a stripped after's desire. It buys the barium titanium as substrates (BaTiO 3, BTO) and on the left in Figure 15 to 13 also is saved in the number 1, number 2 (prepreg) right is saved in the prepreg as substrates are disclosed. Figure 13 number 1 number 2 (prepreg) on substrate (titanium it buys the barium) specifically bonded substrate before surface condition of a photograph representing are disclosed. Figure 14 number 1 number 2 substrate is hot and then base bond, again showing surface condition of a photograph taken out from the substrate are disclosed. Figure 15 number 1 number 2 in a base substrate 35 seconds and then improve productivity through a urging force to the plasma surface treatment, substrate surface condition of a photograph showing yet again are disclosed. When you are symmetrically 15 14 also each surface of a base material, the other party can be sure that the compresses the substrate. In particular, in the case of Figure 15 than 14 also, much still more the amount of a substrate having the adherence can be. A substrate having a sticky, due to strong bond force, from being dropped when separated based on other party big portion are left behind substrate portion. Thus, the present invention is in a liquid (also 15) when plasma press device, bonded together by a hot junction (14 also) than can be understood that when a strong force. Then, of the present invention number 2 in the embodiment according to plasma press device is described as follows. Number 1 in the embodiment described above in the form of plasma electrode against the plasma electrode is fixed stationary mobile mobile number 2 in the embodiment are disclosed. Figure 9 shows a schematic diagram of the device of the present invention number 2 in the embodiment according to plasma press also are disclosed. The reference also 9, number 1 of the present invention number 2 in the embodiment according to plasma press device includes a roller (10a), number 2 roller (20a), drive (30) and number control unit (50) consists of including. Said number 1 roller (10a) said number 2 on roller (20a) is rotatable mounted so, number 1 substrate (11) number 2 on substrate (12) encoded-bonded state ingrowth to this standing arrangement. Number 1 roller (10a) number 2 on roller (20a) of the ingrowth between number 1 substrate (11) number 2 on substrate (12) forms the bonding interfaces with number 1 roller (10a) number 2 on roller (20a) pressurizing force by means of transferred. In addition, said number 1 roller (10a) said number 2 on roller (20a) can be using at least one plasma electrode. I.e., number 1 roller (10a) or number 2 roller (20a) used for the other one of either the plasma electrode used ground electrode or, number 1 roller (10a) number 2 on roller (20a) both plasma electrode can be used. Number 1 roller (10a) number 2 on roller (20a) used to predetermined portion if both plasma electrode grounded, number 1 roller (10a) number 2 on roller (20a) the detection power applied to the plasma is performed with each other. The, applied to the power supply is AC or DC power to the plasma electrode is or more of the frequencies are disclosed. The, required introduction tube (not shown) of a predetermined plasma generating plasma discharge gas through the aforementioned number 1 substrate (11) number 2 on substrate (12) is number 1 roller (10a) number 2 on roller (20a) between a part of the watering introduced, as well as addition of the center of gravity of number are introduced through separate introduction tube or the like can be provided. Number 1 substrate (11) based on number 2 (12) in the joint interface or lightly strongly depending on the type of bonding force surface-mount type and additive number can be. Wherein, in the form of added number gas to metal source, such as inorganic source and dopamine (dopamine) silane (Silane), catechol (catechol) can be at least one of a source. Said driving unit (30) including any motor number 1 roller (10a) number 2 on roller (20a) for rotation of the pair of substrates. Said number control unit (50) includes a number 1 roller (10a) number 2 on roller (20a) applying power to an electrode used in the upper and lower electrode during plasma, in a power number 1 substrate (11) number 2 on substrate (12) is a part of muffler for generating plasma gas is equal to a predetermined plasma is created. The, plasma that is generated by number 1 substrate (11) number 2 on substrate (12) can be activated each facing surface. Number 1 roller (10a) or number 2 roller (20a) used for either of the plasma electrode, allowing the ground electrode used radically, number control unit (50) is configured and electrode is formed in the roller moves in the DC or AC frequency consistently, number 1 substrate (11) number 2 on substrate (12) is ingrowth at the portions perform plasma can be. In addition, said number control unit (50) has a driven portion (30) to be rotation of each roller by a number [...] number. The above-described device and made of a method of the present invention number 2 in the embodiment according to plasma press is described substrate. The number 1 in the embodiment in roller (10a) used for plasma electrode, number 2 roller (20a) on a high voltage electrode is utilized is described as follows. Figure 10 shows a operation as [...], using standpoint of Figure 9 is formed into a plasma press device are disclosed. The reference also 10, number 1 substrate (11) number 2 on substrate (12) is bolted state number 1 roller (10a) number 2 on roller (20a) positioned in the water level between ingrowth to number of (50) number 1 through roller (10a) application power, number 1 substrate (11) number 2 on substrate (12) between both surfaces of plasma is generated. The, opposite side of the plasma during plasma surface treatment for activating progressing, number control unit (50) has a driven portion (30) number 1 to number by a roller (10a) number 2 on roller (20a) installed to, number 1 substrate (11) number 2 on substrate (12) is bolted state number 1 roller (10a) number 2 on roller (20a) causes the watering of interspaces. Said state such as, plasma substrate number 1 (11) based on number 2 (12) in an alignment surface of each activated, base number 1 number 2 substrates are bonded simultaneously number 1 roller (10a) number 2 on roller (20a) of the bonding interfaces is pressed energizing force is applied state is under or over. I.e., heating is the conventional surface-active to receive in plasma compared to those of which the surface is activated, the other part of the pressurization each substrate support device of braking does not occur the productivity can be improved. On the other hand, the number 1 in the embodiment in roller (10a) used for plasma electrode, number 2 roller (20a) when a ground electrode by the barrier metals but, if both two roller used plasma electrode having a frequency capable of respectively different power and internal. For example, number 1 roller (10a) to 13. 56MHz, number 2 roller (20a) frequency of the plasma can be 60KHz applies to. Then, of the present invention number 3 in the embodiment according to plasma press device is described as follows. Figure 11 shows a schematic diagram of the device of the present invention number 3 in the embodiment according to plasma press also are disclosed. The reference also 11, number 2 in the embodiment of the present invention number 3 in the embodiment according to plasma press device is compared to the electrode member (25) is further force is removed. Said electrode member (25) is number 1 roller (10a) and number 2 roller (20a) of each of the spaced, number 1 substrate (11) number 2 on substrate (12) is bonded to a number 1 roller (10a) number 2 on roller (20a) of interspaces ingrowth a part disposed thereon. The, number 1 substrate (11) is number 1 roller (10a) and the electrode member (25) number 1 through between roller (10a) number 2 on roller (20a) and a position of interspaces ingrowth, number 2 substrate (12) is number 2 roller (20a) and the electrode member (25) number 1 through between roller (10a) number 2 on roller (20a) of interspaces ingrowth to the lungs. The herein, number 1 roller (10a), number 2 roller (20a) and electrode member (25) is passed through a plasma electrode used for at least 2, on the other of the ground electrode is used as substrate. For example, number 1 roller (10a) number 2 on roller (20a) using plasma electrode into a member (25) is welded to the ground electrode used for, number 1 roller (10a) and the electrode member (25) using the plasma electrode number 2 roller (20a) are using the ground electrode. As above-mentioned herein, such as in Figure 12, the device for producing, number 1 roller (10a) and the electrode member (25) number 1 between the substrate (11) is activated by the surface of the plasma, number 2 roller (20a) and the electrode member (25) number 2 between the substrate (12) is activated by the surface of the plasma, plasma surface treatment processing advances. Number 1 and number 2 surface of the substrate surface of the substrate during plasma surface treatment, number 1 roller (10a) number 2 on roller (20a) is rotated number 1 substrate (11) number 2 on substrate (12) energizing force is transferred to the joint interface. I.e., a plasma is generated in substrate number 1 (11) number 2 on substrate (12) is pressurized can be mask layer. On the other hand, the aforementioned number 1 roller (10a) number 2 on roller (20a) and electrode member (25) can be both coating layer is the outer surface. Said coating layer is made polymer, metal, ceramic or a composite material such as be a pure. To prevent arc through said coating, and is uniform plasma generating unit, pressure is exerted upon the two pieces can be constructed. The present invention according to the above-described plasma press device is such that, in a state where the plasma by applying pressing force can be remarkably improved in the bonding interfaces as a minor component. In the embodiment of the present invention defined in the appended claim the aforementioned scope of the invention but can be implemented in various forms of in the embodiment. Claim in claim the subject matter of invention made without deviating from the invention of the present invention is provided to anyone if person with skill in the art in various deformable extent within the range of I is on the substrate. A code description of the main part ※ ※ of the drawings 10: Number 1 plasma electrode 10A: number 1 roller 11: Number 1 substrate 12: Protective film 13: The double-sided adhesive member 20: Number 2 plasma electrode 20A: number 2 roller 21: Number 2 substrate 22: Ceramics 25: Electrode member 30: Drive 40: Interval formation 50: Number control unit The present invention relates to a plasma press device, and a bonding method using the same. The present invention provides a significantly improved bonding force when compared to an existing press device by bonding and pressing two base materials bonded while plasma is generated. The present invention is able to bond the two base materials without an additional process to prevent thermal damage to the bonded base material. The present invention comprises: a plasma generation unit; a driving unit; and a control unit. COPYRIGHT KIPO 2017 Number 1 number 2 with a substrate surface of the substrate to plasma activated plasma generating section; said number 1 and number 2 brought into contact with the base substrate, wherein the composition is a fourth urging force to the base number 1 number 2 abutting the bonding interfaces; and said plasma generating section formed in plasma generated, simultaneously with said activation of said plasma surface is connected to a pressurized elongatable, said plasma during the bonding interfaces with said sealed surface protection film to start driving part number said foamed plower number control unit; including a, plasma press device. According to Claim 1, said plasma generation section, one surface of a substrate on which is mounted said number 1 number 1 plasma electrode; and said number 1 positioned opposite to the plasma electrode and disposed, said number 2 the opposite side substrate bonded to the substrate on which is mounted said number 1 number 2 plasma electrode; and, said driving unit is described that said number 1 base said number 2 is injected to at least one plasma electrode provided to move said number 1 plasma electrode or said number 2, plasma press device. According to Claim 2, said number 1 located in the upper and lower plasma electrode, and the plasma electrode positioned under said number 2, said driving unit to move up and down in said number 1 plasma electrode plate is provided to said number 1 plasma electrode plasma press device. According to Claim 2, said number 2 plasma electrode on opposing sides of the ceramic dielectric is to be performed and, said ceramic dielectric substrate on which is mounted said number 2 plasma press device. According to Claim 2, at the time of said plasma, said number 1 plasma electrode shaft passes between said number 1 and order to bloc said number 2 plasma electrode to form said number 1 plasma electrode positioned on opposing sides of the radial direction than said number 2 plasma electrode, said number 2 base material is a base bolted said number 1 are inhibited said number 1 further including plasma press device positioned to not abut the plasma electrode interval forming portions. According to Claim 2, said number 1 substrate protective film are bonded state said number 1 attached to one side of the plasma electrode plasma press device. According to Claim 1, said plasma generation unit, said number 1 number 2 while the fixing base substrate so as to firm interspaces pressurized plasma density per unit number 1 number 2 roller roller and at least one of muffler comprising, said driving unit, said number 2 rolling member arranged so that said number 1 roller, said number the fishermen, said number 1 base is described that perform said number 1 roller and said number 2 roller is a part of muffler said number 2 plasma used plasma electrode roller and applying power, said driving unit provided for each roller rotation number under [e plasma press device. According to Claim 7, said number 1 roller and said number 2 roller used for one of either the plasma electrode, the other ground electrode plasma press device used. According to Claim 7, said number 1 roller and roller when said number 2 plasma electrode, having a frequency different power gate pattern by press device. According to Claim 7, wherein the composition is a part said number 1 roller and said number 2 said number 1 base said number 2 which additionally includes a roller electrode member this standing arrangement of muffler, said number 1 roller, said roller and said number 2 2 dog plasma electrode has an electrode is used, plasma press device used on the other of the ground electrode. One side of the plasma electrode number 1 number 1 is attached to the substrate, said number 1 and number 2 positioned opposite to the plasma electrode provided opposite side substrate opposing said number 1 and number 2 attached to one side of the plasma electrode during plasma electrode substrate step; and at a certain distance from said number 1 plasma electrode and plasma electrode positioned to form said number 2, said number 1 plasma electrode and said number 2 plasma electrode formed in said number 1 for activating a surface of a substrate surface of the substrate and said number 2 plasma is generated plasma generating step; and, a plasma is generated in the surface is activated, said number 1 plasma electrode or said number 2 to move said number 2 and at least one plasma electrode base substrate is brought into contact with the number 1, said number 1 is described that the abutting state by applying urging force to the base said number 2 set said number 1 base substrate bonding said number 2 plasma press step; including a bonding method using plasma press device. According to Claim 11, after said number 1 plasma electrode and cutting off power to said plasma press said number 2 plasma electrode plasma generating stop, continue urging force applying device further including additional press set using plasma press bonding method. According to Claim 11, said plasma generating step either before or plasma occurs, said base number 1 and number 2 is described that the abutting joint interface additionally includes a number addition of injecting gaseous around a joint interface, said device through said number added in modulating method using plasma press bonding interface adhesion bonding. According to Claim 13, said number is added metal source, including at least one of the bonding method using an inorganic source or source plasma press device. Number 1 number 2 roller between the roller, the base substrate preparing step number 1 number 2 mutual engagement of muffler; said number 1 formed in at least one of said number 1 roller and said number 2 roller base based on said number 2 plasma is generated based on said number 1 base said number 2 a part of muffler body facing surface respectively activate plasma generating step; and, said number 1 roller and said number 2 is rotated so that the roller between the roller and said number 2 roller said number 1 substrate and said number 2 substrate is said number 1 of muffler, a plasma is generated in said number 1 substrate and said number 2 mask layer substrate surface is activated pressurized plasma press step; including a bonding method using plasma press device. According to Claim 15, said number 1 roller and said number 2 when used in plasma electrode roller, applying power having a frequency different bonding method using plasma press device. According to Claim 15, wherein the composition is a part said number 1 base said number 2 which is installed in electrode roller when said number 1 roller and said number 2 this standing arrangement of muffler, said number 1 roller, said roller and said number 2 is passed through a plasma electrode 2 of the central electrode member, the other of the ground electrode using bonding method utilizing plasma press device. According to Claim 15, said plasma generating step either before or plasma occurs, said number 2 substrate is said number 1 base addition of injecting gaseous additionally includes a number a part of muffler, said base substrate in said number 1 through number added modulating method using plasma press device said number 2 the joint interface adhesion bonding. According to Claim 15, said number is added metal source, including at least one of the bonding method using an inorganic source or source plasma press device.
