Systems and methods for metrology with layer-specific illumination spectra

15-10-2019 дата публикации

Номер:

US10444161B2

Автор: Amnon Manassen, Andrew V. Hill, Daria Negri, Ohad Bachar, Vladimir Levinski, Yuri Paskover

Принадлежит: KLA Tencor Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G01 G01B G01B1 G01B11 G01B11/G01B11/0 G01B11/06 G01B11/063 G01B11/0633 G01B11/2 G01B11/27 G01B11/272 G01B2 G01B22 G01B221 G01B2210 G01B2210/G01B2210/5 G01B2210/56 G01J G01J3 G01J3/G01J3/0 G01J3/02 G01J3/020 G01J3/0205 G01J3/2 G01J3/28 G01J3/282 G01J3/2823 G01N G01N2 G01N20 G01N202 G01N2021 G01N2021/G01N2021/8 G01N2021/84 G01N2021/843 G01N2021/8438 G01N2021/88 G01N2021/883 G01N2021/8835 G01N2021/884 G01N2021/8845 G01N21 G01N21/G01N21/3 G01N21/33 G01N21/35 G01N21/356 G01N21/3563 G01N21/8 G01N21/84 G01N21/842 G01N21/8422 G01N21/88 G01N21/880 G01N21/8806 G01N21/9 G01N21/95 G01N21/950 G01N21/9505 G01N21/956 G01N22 G01N220 G01N2201 G01N2201/G01N2201/0 G01N2201/06 G01N2201/061 G01N2201/0611 G01N2201/06113 G03 G03F G03F7 G03F7/G03F7/7 G03F7/70 G03F7/706 G03F7/7063 G03F7/70633 H H0 H01 H01L H01L2 H01L22 H01L22/H01L22/1 H01L22/12 H01L22/2 H01L22/24 H01L22/3 H01L22/30

IPC - классификация

G G0 G01 G01B G01B1 G01B11 G01B11/G01B11/2 G01B11/27 G01B11/272 G01N G01N2 G01N21 G01N21/G01N21/3 G01N21/33 G01N21/35 G01N21/356 G01N21/3563

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