Ferroelectric film, ferroelectric capacitor, ferroelectric memory, piezoelectric element, semiconductor element, method of manufacturing ferroelectric film, and method of manufacturing ferroelectric capacitor

13-05-2008 дата публикации

Номер:

US7371473B2

Автор: Eiji Natori, Koji Ohashi, Takeshi Kijima, Yasuaki Hamada

Принадлежит: Seiko Epson Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C01 C01G C01G3 C01G33 C01G33/C01G33/0 C01G33/00 C01G33/006 C01G35 C01G35/C01G35/0 C01G35/00 C01G35/006 C01P C01P2 C01P20 C01P200 C01P2002 C01P2002/C01P2002/7 C01P2002/72 C01P2002/77 C01P2004 C01P2004/C01P2004/0 C01P2004/04 C01P2004/8 C01P2004/80 C01P2006 C01P2006/C01P2006/4 C01P2006/40 C01P2006/8 C01P2006/80 H H0 H01 H01B H01B1 H01B1/H01B1/0 H01B1/08 H01B3 H01B3/H01B3/1 H01B3/12 H01G H01G4 H01G4/H01G4/1 H01G4/12 H01G4/125 H01G4/1254 H01G4/3 H01G4/33 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0219 H01L21/02197 H01L21/022 H01L21/0228 H01L21/02282 H01L21/3 H01L21/31 H01L21/316 H01L21/3169 H01L21/31691 H01L27 H01L27/H01L27/1 H01L27/10 H01L28 H01L28/H01L28/5 H01L28/55 H01L28/57 H1 H10 H10B H10B5 H10B53 H10B53/H10B53/0 H10B53/00 H10B53/3 H10B53/30 H10N H10N3 H10N30 H10N30/H10N30/0 H10N30/07 H10N30/078 H10N30/1 H10N30/10 H10N30/105 H10N30/1051 H10N30/8 H10N30/85 H10N30/855 H10N30/8554

IPC - классификация

H H0 H01 H01B H01B1 H01B1/H01B1/0 H01B1/08 H01B3 H01B3/H01B3/1 H01B3/12 H01G H01G4 H01G4/H01G4/3 H01G4/33

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