15-02-2018 дата публикации
Номер: US20180042610A1
Принадлежит:
A force sensor includes a substrate, a plurality of sensing elements, and a plate. The substrate includes a central aperture extending along a longitudinal axis of the substrate, and has a proximal surface, a distal surface, a first side surface, a second side surface, a top surface, and a bottom surface. A recess is defined in at least one of the distal surface, the first side surface, the second side surface, the top surface, or the bottom surface of the substrate. The plurality of sensing elements are disposed within the recess, and the plate is disposed over the recess and mounted to the substrate to hermetically seal the plurality of sensing elements within the substrate. 1. A force sensor comprising:a substrate including a central aperture extending along a longitudinal axis of the substrate, the substrate having a proximal surface, a distal surface, a first side surface, a second side surface, a top surface, and a bottom surface, at least one of the distal surface, the first side surface, the second side surface, the top surface, or the bottom surface including a recess defined therein;a plurality of sensing elements disposed within the recess; anda plate disposed over the recess and mounted to the substrate to hermetically seal the plurality of sensing elements within the substrate.2. The force sensor according to claim 1 , wherein the recess is a first recess defined in the first side surface of the substrate claim 1 , the first recess including a back wall claim 1 , a proximal-facing wall claim 1 , a distal-facing wall claim 1 , a top wall claim 1 , and a bottom wall.3. The force sensor according to claim 2 , wherein the back wall claim 2 , the proximal-facing wall claim 2 , the distal-facing wall claim 2 , the top wall claim 2 , and the bottom wall are all substantially planar.4. The force sensor according to claim 2 , wherein the back wall is angled with respect to the longitudinal axis of the substrate claim 2 , and the proximal-facing and distal-facing ...
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