24-01-2019 дата публикации
Номер: US20190022577A9
Принадлежит:
A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH, HO, H, NF, SF, F, HCl, HF, Cl, and HBr. Representative condensing abating reagents include, for example, H, HO, O, N, O, CO, CO, NH, NO, CH, and combinations thereof. 1. An apparatus for abating effluent from a processing chamber , comprising: a first plate having an outer edge and an inner edge;', 'a second plate parallel to the first plate, wherein the second plate has an outer edge and an inner edge;', 'an outer wall disposed between the outer edges of the first and second plates;', 'an electrode disposed between the inner edges of the first and second plates;', 'a first plurality of magnets disposed on the first plate; and', 'a second plurality of magnets disposed on the second plate; and, 'a plasma source coupled to a foreline of a deposition chamber, the plasma source comprising{'sub': 3', '4', '4', '3', '4', '6', '8', '4', '2', '2', '2', '2', '2', '3', '2', '3', '2', '4, 'a reagent source positioned upstream of the plasma source, wherein the reagent source is coupled with the plasma source, and wherein the reagent source is configured to deliver an abating reagent to the plasma source, the abating reagent selected from the group comprising BCl, CCl, SiCl, NF, SF, SF, SF, a reducing compound, a halogenated etching compound, CH, H, F, HCl, HF, Cl, HBr, O, N, O, CO, CO, NH, NO, CH, and combinations thereof.'}2. An apparatus for abating effluent from a ...
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