06-06-2013 дата публикации
Номер: US20130141495A1
An electrode is provided with a lanthanum nickelate film which is formed through a chemical solution deposition method using a lanthanum nickelate film forming composition which is obtained by heating a mixed solution obtained by mixing at least lanthanum acetate, nickel acetate, acetic acid, and water, a piezoelectric layer is provided on the lanthanum nickelate film and is formed of a complex oxide having a perovskite structure which contains at least Pb, Ti, and Zr, and a half-width (θ) of a peak derived from a (100) plane and/or a peak derived from a (001) plane measured using an X-ray rocking curve method is 6.0 degrees or less. 1. A liquid ejecting head comprising:a piezoelectric element which is provided with a piezoelectric layer and an electrode provided on the piezoelectric layer,wherein the piezoelectric layer is provided above a lanthanum nickelate film, and is formed of a complex oxide having a perovskite structure which contains at least Pb, Ti, and Zr, and a half-width (θ) of a peak derived from a (100) plane and/or a peak derived from a (001) plane measured using an X-ray rocking curve method is 6.0 degrees or less.2. A liquid ejecting apparatus comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the liquid ejecting head according to .'}3. A piezoelectric element comprising:a piezoelectric layer; andan electrode which is provided on the piezoelectric layer,wherein the piezoelectric layer is provided above a lanthanum nickelate film, and is formed of a complex oxide having a perovskite structure which contains at least Pb, Ti, and Zr, and a half-width (θ) of a peak derived from a (100) plane and/or a peak derived from a (001) plane measured using an X-ray rocking curve method is 6.0 degrees or less. The entire disclosure of Japanese Patent Application No. 2011-264139, filed Dec. 1, 2011 is incorporated by reference herein.1. Technical FieldThe present invention relates to a liquid ejecting head, a liquid ejecting apparatus, and a ...
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