07-01-2021 дата публикации
Номер: US20210002551A1
The present invention pertains to a protective fluid for alumina, a protection method, and a production method for semiconductor substrate having an alumina layer using same. This alumina protective fluid is characterized by: containing 0.0001%-20% by mass of an alkali earth metal compound; and the alkali earth metal being at least one selected from the group consisting of beryllium, magnesium, strontium, and barium. As a result of the present invention, alumina corrosion can be suppressed during the production process for semiconductor circuits. 1. A protective fluid for alumina , comprising:from 0.0001 to 20% by mass of an alkaline earth metal compound,wherein an alkaline earth metal in the alkaline earth metal compound is at least one selected from the group consisting of beryllium, magnesium, strontium and barium.2. The protective fluid for alumina according to claim 1 , wherein the alkaline earth metal compound is at least one selected from the group consisting of:beryllium nitrate, beryllium acetate, beryllium chloride, beryllium hydroxide, beryllium sulfite, beryllium chlorate, beryllium perchlorate, beryllium peroxide, beryllium chromate, beryllium oxide, beryllium cyanide, beryllium bromide, beryllium carbonate, beryllium metaborate, beryllium iodide, beryllium tetrafluoroborate, beryllium sulfate, beryllium sulfide, and a salt obtained by reacting beryllium hydroxide with an acid;magnesium nitrate, magnesium acetate, magnesium chloride, magnesium hydroxide, magnesium sulfite, magnesium chlorate, magnesium perchlorate, magnesium peroxide, magnesium chromate, magnesium oxide, magnesium cyanide, magnesium bromide, magnesium carbonate, magnesium metaborate, magnesium iodide, magnesium tetrafluoroborate, magnesium sulfate, magnesium sulfide, and a salt obtained by reacting magnesium hydroxide with an acid;strontium nitrate, strontium acetate, strontium chloride, strontium hydroxide, strontium sulfite, strontium chlorate, strontium perchlorate, strontium ...
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