18-01-2018 дата публикации
Номер: US20180016695A1
Принадлежит:
The presently disclosed apparatus and method offer the capability to electroplate pure metals or alloys onto substrates, having no current collectors or being connected to the power supply by a low conductivity seed layer. Thus, the disclosed system enables pure metal or alloy deposition on various substrates, including flexible electronic circuits, wafers for IC processing, and discrete electronic devices in surface finishing applications. 1. An apparatus for electroplating a metal onto a substrate comprising an isolated seed pattern or a substrate comprising a seed pattern connected to a resistance current collector with conductivity of less than 1e+5 ohm-cm , said apparatus comprising:a. a working electrode comprising fine metal mesh, metal fiber cloth, or metal web, wherein the working electrode is configured to directly contact the seed pattern of the substrate; i. fine metal mesh, metal fiber cloth, or metal web; or', 'ii. metal mesh; and, 'b. a counter electrode comprising either wherein current collectors link both electrodes to the respective polarity of a power supply, and', 'wherein the working electrode is free from electrically conductive bristles., 'c. a chemically inert porous material;'}2. The apparatus of claim 1 , wherein the working electrode and counter electrode are constructed from:(a) gold, silver, copper, nickel, palladium, platinum, titanium, stainless steel, cobalt, thallium, tantalum, rhodium, iridium, ruthenium, osmium or alloys of gold, alloys of silver, alloys of copper, tungsten, vanadium, alloys of nickel, alloys of palladium, alloys of platinum, platinized titanium, platinum clad niobium or tantalum, gold plated stainless steel, copper, nickel, or combinations thereof; or(b) chemically inert polymer textile material combined with one or more materials selected from (a).3. The apparatus of claim 1 , wherein the chemically inert porous material is selected from the group comprising porous polymer sponge claim 1 , pile cloth material ...
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