22-09-2022 дата публикации
Номер: US20220298665A1
Принадлежит:
A copper electroplating solution comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electroplating solution is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxyl may comprise a reaction product between 2,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol. 1. (canceled)2. The method according to claim 10 , wherein the copper salt is copper sulfate.3. The method according to claim 10 , wherein the copper electroplating solution further comprises an acid claim 10 , wherein the acid comprises sulfuric acid or methane sulfonic acid.4. The method according to claim 10 , wherein the linear or branched polyhydroxyl comprises poly(2 claim 10 ,3-epoxy-1-propanol).5. The method according to claim 10 , wherein the linear or branched polyhydroxyl comprises a reaction product between 2 claim 10 ,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol.6. The method according to claim 10 , wherein the linear or branched polyhydroxyl comprises at least one nitrogen atom.7. The method according to claim 5 , wherein the aminic alcohol or the ammonium alcohol is selected from the group consisting of ethanolamine claim 5 , diethanolamine claim 5 , triethanolamine claim 5 , propanolamine claim 5 , isopropanolamine claim 5 , diisopropanolamine claim 5 , triisopropanolamine claim 5 , N-methyl diethanolamine claim 5 , N-ethyl diethanolamine claim 5 , N-propyl diethanolamine claim 5 , methyl monoethanolamine claim 5 , N claim 5 ,N-dimethyl ethanolamine claim 5 , N claim 5 ,N-diethyl ethanolamine claim 5 , N-propyl monoethanolamine claim 5 , N-propyl diethanolamine claim 5 , N-butyl ethanolamine claim 5 , N-butyl diethanolamine claim 5 , N claim 5 ,N-dibutyl ethanolamine claim 5 , hydroxy ethyl morpholine claim 5 , 2-piperidino ethanol claim 5 , diethanol isopropanolamine claim 5 , N-(2-hydroxyethyl) pyrrolidine claim 5 , choline chloride claim 5 , b- ...
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