29-04-2021 дата публикации
Номер: US20210123736A1
Принадлежит:
An inertial measurement apparatus includes a first gyro sensor that has a detection axis set in the direction of a first axis, is driven at a first drive frequency, and detects angular velocity around the first axis, a second gyro sensor that has a detection axis set in the direction of a second axis, is driven at a second drive frequency, and detects angular velocity around the second axis, a third gyro sensor that has a detection axis set in the direction of a third axis, is driven at a third drive frequency, and detects angular velocity around the third axis, and a substrate on which the first, second, and third gyro sensors are provided. The natural vibration frequency of the substrate is set at a frequency that does not coincide with any of fd, fd, and fd, where fd, fd, and fd represent the first, second, and third drive frequencies. 1. An inertial measurement apparatus comprising:a first gyro sensor that has a detection axis set in a direction of a first axis, is driven at a first drive frequency, and detects angular velocity around the first axis;a second gyro sensor that has a detection axis set in a direction of a second axis, is driven at a second drive frequency different from the first drive frequency, and detects angular velocity around the second axis;a third gyro sensor that has a detection axis set in a direction of a third axis, is driven at a third drive frequency different from the first and second drive frequencies, and detects angular velocity around the third axis; anda substrate on which the first, second, and third gyro sensors are provided,{'b': 1', '2', '3', '1', '2', '3, 'wherein a natural vibration frequency of the substrate is set at a frequency that does not coincide with any of fd, fd, and fd, where fd represents the first drive frequency, fd represents the second drive frequency, and fd represents the third drive frequency.'}2. The inertial measurement apparatus according to claim 1 ,wherein vibration modes resulting from vibration ...
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