03-02-2022 дата публикации
Номер: US20220038074A1
Принадлежит:
Two or more ME resonators are connected in series and in parallel generating a high sensitive, energy efficient and broadband miniature antenna and other conductor devices. 1. An ME antenna , comprising: a magnetostrictive layer;', 'a top ground electrode layer;', 'a piezoelectric layer;', 'a bottom electrode layer; and', wherein said top ground electrode layer is deposited on said piezoelectric layer and is patterned with a shaped aperture; the magnetostrictive layer is also deposited on said piezoelectric layer through the shaped aperture; the piezoelectric layer is deposited on the bottom electrode layer which is deposited on the substrate layer;', 'thereby the magnetostrictive layer and the piezoelectric form a heterostructure on the bottom electrode layer, leading to magnetization oscillation that radiates electromagnetic waves at the acoustic resonance frequencies and converts the electromagnetic waves into a piezoelectric voltage output., 'a substrate layer;'}], 'one or more resonators electronically connected in series or in parallel, each of said resonators having a structure of'}2. The ME antenna of claim 1 , wherein the electrode layer is deposited with materials comprising at least one of the materials claim 1 , including Molybdenum (Mo) claim 1 , Titanium (Ti) claim 1 , Tungsten (W) claim 1 , Gold (Au) claim 1 , Platinum (Pt) and Aluminum (Al) claim 1 , and Ru (Ruthenium).3. The ME antenna of claim 1 , wherein the piezoelectric layer comprises a material comprising at least one of the piezoelectric materials selected from Aluminum Nitride Scadium Nitride (AlSN) claim 1 , Aluminum Nitride (AlN) claim 1 , (Hf claim 1 ,X)Owith X=Zr claim 1 , Si claim 1 , etc. claim 1 , Barium titanate (BaTiO) claim 1 , Gallium phosphate (GaPO) claim 1 , Lanthanum gallium silicate (LGS) claim 1 , Lead scandium tantalate (PST) claim 1 , Zinc oxide (ZnO) claim 1 , Quartz claim 1 , Lead zirconate titanate (PZT) claim 1 , Lithium tantalate (LiTaO) claim 1 , Lead lanthanum ...
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