20-09-2018 дата публикации
Номер: US20180266946A1
Принадлежит:
A system and method are disclosed for gas sensing over a wide tunable wavelength range provided by one or more quantum cascade lasers. A laser beam is generated within the wide tunable wavelength range, which is given by the sum of the wavelength ranges from the individual lasers. Gas sensing or detection is achieved by obtaining an infrared absorption spectrum for a sample contained in one or more cells having different path lengths for the laser beam. 1. A gas sensing system , comprising:at least one quantum cascade laser configured for tuning within a wavelength range and for providing a beam in the wavelength range;at least one cell for containing a gas sample, from a semiconductor processing operation, and for receiving the beam; anda detector system configured for obtaining at least one absorption spectrum for the sample by detecting the beam exiting the at least one cell, which optionally has a multipass cell.2. A method for gas sensing , comprising:providing at least one quantum cascade laser configured for tuning within a wavelength range and for providing a beam in the wavelength range;directing the beam through at least one cell containing a sample from a semiconductor processing operation; and{'sub': 2', '2', '4', '3', '4', '2', '4', '2', '6', '3', '6', '3', '8', '4', '6', '4', '8', '5', '8', '2', '2', '3', '3', '2', '3', '2', '3', '4', '4', '2', '2', '6', '3', '3', '2', '2', '2', '2', '4', '3', '2', '2', '2', '2', '2', '2', '2', '4', '2', '6', '3', '2', '2', '4', '4', '4', '4', '3', '2', '6', '3', '8', '2', '2', '2', '2', '6', '3', '4', '3', '3', '6', '3', '2', '2', '2', '4', '2, 'obtaining at least one absorption spectrum for the sample by detecting the beam exiting the at least one cell, which optionally further comprises determining concentrations of any of the following: HO, CO, CO, CH, NH, plus other hydrocarbons; fluoro-carbons: CF, CF, CF, CF, CF, CF, CF, CF; hydro-fluoro-carbons: CHF, CHF, CHF, CHF, CHF; silicon-containing: SiF, SiH, SiClH; ...
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