22-12-2016 дата публикации
Номер: US20160370247A1
A balancing device, a uniformity device and an apparatus including the balancing device and the uniformity device are disclosed. Each of the balancing device and the uniformity device includes at least one multi-axis transducer. Methods are also disclosed. 110. An apparatus (′) , comprising:{'b': 10', '10', '18', '20, 'i': u', 'u', 'u, 'a uniformity device () that determines uniformity of a workpiece (TW), wherein the uniformity device () includes: a lower workpiece-engaging portion () that interfaces with an upper workpiece-engaging portion (); and'}{'b': 75', '18', '20', '77, 'i': 'u', 'a computing resource () communicatively-coupled to one or more components of one or both of the lower workpiece-engaging portion () and the upper workpiece-engaging portion () by one or more communication conduits (),'}{'b': 18', '36', '36', '36', '38', '36', '36', '18', '40', '36', '36', '40', '18', '44', '36', '36', '20', '58', '58', '58', '60', '44, 'sub': P', 'D', 'P', 'D', 'P', 'D', 'P', 'D, 'i': 'u', 'wherein the lower workpiece-engaging portion () includes a central shaft () having a proximal end () and a distal end () and an elongated body () that extends between the proximal end () and the distal end (), wherein the lower workpiece-engaging portion () includes a motor (), wherein the proximal end () of the central shaft () is connected to the motor (), wherein the lower workpiece-engaging portion () includes a radially manipulatable workpiece-engaging chuck () that is connected to the distal end () of the central shaft (), wherein the upper workpiece-engaging portion () includes an axially-movable cylinder () having a proximal end () and a distal end () forming a recess () that is sized for receiving the radially inwardly/outwardly manipulatable workpiece-engaging chuck (); and'}{'b': 100', '101', '100', '101', '112', '100', '110', '112', '100', '112', '118', '120', '122', '118', '118', '118, 'i': u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u', 'u ...
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