30-03-2017 дата публикации
Номер: US20170088883A1
A sensor comprising a semiconductor layer having a two dimensional electron gas (2DEG) and an oxide layer in electronic contact with the semiconductor layer is provided. A method of detecting an analyte molecule using such sensor is also provided. 1. A sensor , comprising:a semiconductor layer having a two dimensional electron gas (2DEG); andan oxide layer in electronic contact with the semiconductor layer.2. The sensor of claim 1 , wherein the 2DEG is present at the interface of the semiconductor layer and the oxide layer.3. The sensor of claim 1 , wherein the semiconductor layer comprises a material selected from the group consisting of boron (B) claim 1 , aluminum (Al) claim 1 , Gallium (Ga) claim 1 , Indium (In) claim 1 , Thallium (Tl) claim 1 , Nitrogen (N) claim 1 , Phosphorus (P) claim 1 , Arsenic (As) claim 1 , Antimony (Sb) claim 1 , Bismuth (Bi) claim 1 , and combinations thereof.4. The sensor of claim 1 , wherein the oxide layer comprises an oxide of a material selected from the group consisting of boron (B) claim 1 , aluminum (Al) claim 1 , Gallium (Ga) claim 1 , Indium (In) claim 1 , Thallium (Tl) claim 1 , Nitrogen (N) claim 1 , Phosphorus (P) claim 1 , Arsenic (As) claim 1 , Antimony (Sb) claim 1 , Bismuth (Bi) claim 1 , and combinations thereof.5. The sensor of claim 1 , wherein the oxide layer comprises an oxide selected from the group consisting of an oxide of Indium claim 1 , an oxide of Arsenic claim 1 , and combinations thereof.6. The sensor of claim 1 , wherein the thickness of the oxide layer is from 0.1 nm to 10 nm.7. The sensor of claim 1 , further comprising an electronic circuit electronically coupled to the semiconductor layer claim 1 , the electronic circuit measuring the electron density of the 2DEG claim 1 , the electron mobility of the 2DEG claim 1 , or combinations thereof.8. The sensor of claim 1 , wherein the oxide layer comprises a functionalizing molecule.9. The sensor of claim 8 , wherein the functionalizing molecule is selected ...
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