Measuring instrument

An instrument is described for measuring inclination or acceleration. The instrument comprises a mass (38) suspended by three (for inclination) or four (for acceleration) stretched conductive strings (32, 34, 36) within a frame (10). The strings form the frequency determining elements in the outputs of negative resistance amplifiers (50, 52, 54 etc.,) and differential amplifiers (56, 58, 60) together with decoding circuits (62) provide output signals for a computing device (64) which provides data to indicate (66) the means (68) is provided. Where four strings are employed a further display device may be provided to indicate the magnitude of the accelerating force, the first display device (66) indicating the direction in which the accelerating force is acting. ...

Improvements in or relating to vibrating cord accelerometers

Kraftmessvorrichtung

Device for the measurement of forces

Physical quantity sensor device, and inclinometer, inertia measurement device, structure monitoring device, and moving object using physical quantity sensor device

A physical quantity sensor device includes a physical quantity sensor and a storage. The storage stores a first constant used as a constant of each term in an approximate polynomial to obtain a first secondary frequency temperature characteristic approximated to the actual frequency temperature characteristic, in a first temperature region less than the first boundary temperature, and a second constant used as a constant of each term in the approximate polynomial to obtain a second secondary frequency temperature characteristic approximated to the actual frequency temperature characteristic, in a second temperature region equal to or greater than the first boundary temperature.

Method for monitoring a vibrating gyroscope

The invention relates to a method for monitoring a vibrating gyroscope which represents a resonator and forms part of at least one control loop that excites the vibrating gyroscope with its natural frequency by supplying an excitation signal. An output signal can be extracted from the vibrating gyroscope, the excitation signal being derived from said output signal by means of filtering and amplifying. According to the invention, the quality of the resonator is measured. If the measured quality is below a threshold value, an error message is generated.

КОМПЕНСАЦИОННЫЙ МАЯТНИКОВЫЙ АКСЕЛЕРОМЕТР

FIELD: measurement of acceleration. SUBSTANCE: proposed accelerometer has case housing pendulous unit made of one plate of silicon monocrystal and carrying mobile blade arranged on elastic suspension and bearing frame with protrusions. Two electric insulation aids are anchored on both sides of bearing frame on protrusions. Two magnetic systems are fixed on proper electric insulation aid. Two coils of torque generator with leads are arranged in gap of corresponding magnetic circuit and are attached to proper side of mobile blade. Elastic suspension includes at least two elastic elements placed at angle of 90 degrees one relative another in symmetry with respect to symmetry axis of pendulous unit. Electric insulation aid is manufactured in the form of bushing that embraces magnetic circuit of magnetic system over external side surface and bearing frame of pendulous unit rests against butts of bushings forming common planes with end faces of magnetic circuit facing pendulous unit. EFFECT: increased accuracy of measurement of acceleration vector with keeping or reduction of dimensions, enhanced vibration stability. 10 cl, 10 dwg тЭ9Э6б99гс ПЧ ГЭ РОССИЙСКОЕ АГЕНТСТВО ПО ПАТЕНТАМ И ТОВАРНЫМ ЗНАКАМ (19) ВИ "” 2 155 964 ' (51) МПК? 13) Сл С О1Р 15/43 12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ РОССИЙСКОЙ ФЕДЕРАЦИИ (21), (22) Заявка: 99113694/28, 23.06.1999 (24) Дата начала действия патента: 23.06.1999 (46) Дата публикации: 10.09.2000 (56) Ссылки: ЗЧ 1679395 АЛ, 23.09.1991. МО 96/10185 АТ, 04.04.1996. Ц$ 4498342, 12.02.1985. КЦ 2121694 СЛ, 10.11.1998. КЦ 2046345 СЛ, 20.10.1995. ОЕ 3523593 АЛ, 06.02.1986. (98) Адрес для переписки: 129010, Москва, ул. Большая Спасская 25, стр.3, ООО "Городисский и Партнеры", Емельянову Е.И. (71) Заявитель: Коновалов Сергей Феодосьевич (КЦ) (72) Изобретатель: Прокофьев В.М.(КЦ), Ларшин А.С. (КИ), Курносов В.И. (КО), Коновченко А.А.(КОЦ), Бахратов АР.(КО), Коновалов С.Ф.(КУ), Полынков АВ. (КО), Трунов А.А. (КО), О Мун-Су (КВ) ‚ ЧЕНГ Тэ-Хо (КБ), МУН Хонг- ...

Transducer systems

... 920,668. Measuring electrically. BORGWARNER CORPORATION. Oct. 10, 1960, No. 34682/60. Class 40 (1). Apparatus for measuring acceleration comprises two stretched conductive strings attached to either side of a seismic mass, with each incorporated in an electrical circuit which oscillates at the natural frequency of vibration of the string, whereby linear acceleration produces a displacement of mass 16 and a proportional frequency difference between the two circuits. As shown (Fig. 1), a seismic mass 16, supported by radial wires 38 between hollow circular discs 42, carries two conductive strings 12, 14 between magnet systems 26, 28, each string forming one arm of a bridge 50, 52 whose output and input are coupled via an amplifier 54, 56 so that the strings vibrate at their natural frequencies which are also the frequencies of the outputs of amplifiers 54, 56, thereby providing an indication of the displacement of mass 16. Electrical coupling between the two circuits is neutralized by an ...

Multi-axis transducer

Виброчастотный датчик линейных ускорений

Полезная модель относится к измерительной технике и может применяться в микромеханических датчиках линейных ускорений. Задачей, на решение которой направлена полезная модель, является увеличение точности виброчастотного микромеханического акселерометра. Виброчастотный датчик линейных ускорений содержит, основание, кристалл, включающий внешнюю рамку, резонатор, две инерционные массы, площадки крепления к основанию. Резонатор соединен своими концами с инерционными массами. На внешней рамке и на инерционных массах сформированы сквозные прорези. Сформированные таким образом резонатор с инерционными массами и сквозными прорезями позволяет существенно увеличить точность виброчастотного микромеханического акселерометра. 1 ил.

Vibrating string transducer devices and systems for employing the same

... 907,240. Measuring electrically. BORGWARNER CORPORATION. Jan. 23, 1959, No. 2649/59. Class 40 (1). In apparatus for measuring acceleration comprising an inertia mass 46 supported on a diaphragm 48 and attached to two substantially similar conductive strings 12, 14 which pass between the poles of permanent magnets 60, 62 and 68 and are maintained vibrating at their natural frequency, whereby any difference in frequency is indicative of the force acting on mass 46, e.g. due to acceleration, a linear relationship between frequency difference and acceleration is produced by keeping the sum of the two vibrating frequencies constant. As shown, the strings 12, 14 are maintained vibrating by amplifiers 16, 18 respectively, the vibrating frequencies being combined at 32 and their difference selected by a low-pass filter 33 for indication on a meter 34. With no force acting on mass 46, string 12 will vibrate at twice the frequency of string 14, because of the double magnet 60, 62; hence the difference ...

Improvements relating to accelerometers

... 789,611. Accelerometers. ROE & CO., Ltd., A. V. April 24, 1956 [May 3, 1955], No. 12763/55. Class 40 (1). In an accelerometer, the tension of a vibrating wire is varied by acceleration, changes in its vibration frequency being detected by reference to a second wire which, in the absence of acceleration, vibrates at the same frequency as the first wire. As shown, two wires 1, 2 disposed between magnet poles along an axis A-A of the instrument housing are kept in oscillation at their natural frequencies by oscillators 10, 11. Acceleration displaces two weights 8, 9, each connected to one of the wires 1, 2, and inter. connected by a spring 7, thus increasing the frequency of oscillation of one wire and decreasing that of the other. The output of the oscillator 10 is fed to a phase-splitter 12 which produces two signals in quadrature, each of which is mixed with the output of the oscillator 11 in one of two modulators 13, 14, whose output signals are used to drive a two-phase synchronous motor ...

Improvements with the vibrating cord accelerometers

Device transforming a force into electrical energy using two cords

ACCELEROMETER AND METHOD FOR ITS CALIBRATION

INSTABILITÄTENSCHWINGER MIT ELEKTROSTATISCHER VOREINSTELLUNG

Dual string force transducer

... 880,361. Force transducers; accelerometers; pressure gauges. BORG-WARNER CORPORATION. May 12, 1958 [May 17, 1957], No. 15220/58. Class 40 (1). [Also in Groups XIX and XL (c)] A force-measuring apparatus comprises a force-responsive mass with two non-magnetic wires extending from opposite sides of it, each wire being maintained in oscillation at its resonant frequency under tension in a magnetic field, means for suspending the mass so that it can move axially relative to the wires and thus differentially alter the tensions in the wires, an electronic amplifier having feedback to sustain the oscillations in the wires at a constant amplitude, and means to heterodyne the outputs of the two amplifiers and measure the difference frequency which is a measure of the axial force applied to the mass. Such a system is substantially unaffected by forces at right angles to the wires or by changes in ambient temperature. The force to be measured may for example be due to acceleration or fluid pressure ...

Improvements in and relating to accelerometers

... 896,101. Measuring acceleration electrically. ENGLISH ELECTRIC CO. Ltd. Sept. 27, 1957 [Oct. 3, 1956], No. 30198/56. Drawings to Specification. Class 40 (1). In an accelerometer a mass is supported in a framework by several tensioned, vibrating strings. Upon acceleration of the framework, the inertial forces due to the acceleration of the mass, after the string tensions and the resultant vibration frequency changes are a measure of the acceleration. The strings are maintained in vibration by exciter units and the vibrations are detected at pick-offs which provide electrical signals. It is shown that if the sum of the frequencies is maintained constant, the difference frequency is in a linear relationship with the acceleration. This is effected by a feed-back loop which detects the sum of the frequencies and applies a control to the strings to maintain the sum at a fixed value, by changing the tension in the strings by heating, as described in Specification 896,102. Strings are employed ...

MEMS resonant accelerometer having improved electrical characteristics

A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

Force measuring system

... 966,679. Measuring electrically. BORGWARNER CORPORATION. March 27, 1961, No. 11184/61. Drawings to Specification. Heading G1N. A force measuring transducer includes a plurality of pairs of coaxial stretched strings, each pair being at an angle to each other pair, a force responsive element joining the two strings of each pair, means for vibrating the strings at their natural frequencies, and means for indicating the difference in frequency between the two strings of each pair to determine the magnitude and direction of the force acting on the element. An arrangement similar to that described in Specification 880, 361 is used for each axis of a triaxial accelerometer, a single force responsive element being common to all the pairs of wires and being supported solely by the wires in the present case. The outputs from the three mutually perpendicular axes are derived independently. It is stated that the device may be mounted on a stable platform in a missile, the platform being fixed relative ...

Improvements in and relating to force measuring devices

... 861,325. Electric measuring systems. ENGLISH ELECTRIC CO. Ltd. July 31, 1957 [July 31, 1956], No. 23663/56. Class 40 (1). A force measuring device comprises a crystal, suitable for use in a crystal oscillator, means for stressing the crystal in dependence upon the strength of a force to be measured, and means for measuring the natural frequency of the crystal. Two such crystals 34 are shown in Fig. 4 mounted on a mass 32 and suspended by members 37 from a housing 31 so that stress in the suspending members arising from acceleration and gravitation forces in the mass acting in the X . . . X direction may be measured by measuring the oscillation frequencies of the crystals. With two such crystals as shown, measurement may be made by heat frequency methods and the output representing acceleration may be integrated once or twice to give velocity and displacement outputs respectively. The mass 32 is constrained to move in the required direction only by ligaments 33. By using a single crystal ...

Improvements in vibrating wire accelerometers

... 871,553. Vibrating wire accelerometer. ROE & CO. Ltd., A. V. May 19, 1959 [May 27, 1958], No. 16822/58. Class 40 (1). A linear accelerometer comprises a frame 1 in which two vibrating wires 6 and 7 are aligned under a common tension provided by a magnetic force between two seismic weights 2 and 3 carried on adjacent ends of the wires, Fig. 1 (part longitudinal section). The wires vibrate between magnetic systems 8 and 9 providing output signals of frequency corresponding to the wire tension. Any acceleration causes one frequency to be increased and the other to be reduced and the difference frequency varies linearly with acceleration provided that the sum of the frequencies remain constant. To ensure this, such sum is compared with a fixed frequency and any error is used to vary the current in coil 15. As shown in Fig. 2, the other poles 10 and 11 of the magnets 4 and 5 are attached to the weights 2 and 3 and are supported by hinges 12 and a magnetic return path is provided by the surrounding ...

METHOD, APPARATUS AND SYSTEM FOR PROVIDING METERING OF ACCELERATION

Techniques and mechanisms to provide for metering acceleration. In an embodiment, a microelectromechanical accelerometer includes a magnet, a mass, and a first support beam portion and second support beam portion for suspension of the mass. Resonance frequency characteristics of the first support beam portion and second support beam portion, based on the magnet and a current conducted by the first support beam portion and second support beam portion, are indicative of acceleration of the mass. In another embodiment, the accelerometer further includes a first wire portion and a second wire portion which are each coupled to the mass and further coupled to a respective anchor for exchanging a signal with the first wire portion and the second wire portion. The first wire portion and the second wire portion provide for biasing of the mass.

Beschleunigungsmesser mit schwingenden Saiten

Vorrichtung zum Messen mechanischer Kraefte, insbesondere auf Traegheit ansprechender Beschleunigungsmesser

Improvements with the detecting instruments

Improvements with the vibrating cord accelerometers

Improvements with the vibrating cord accelerometers

ACCELERATION SENSOR

PURPOSE: To improve detection precision by providing a weight attached by a support member and a circuit which calculates the difference in output frequency between two oscillation circuits which oscillate two piezoelectric vibrators, and measuring acceleration from the output of the circuit. CONSTITUTION: When an acceleration sensor moves with acceleration α as shown by an arrow A, the tensile strength applied to a left-side crystal resonator 3 becomes F0-mα, and the tensile strength applied to a right-side crystal resonator 4 becomes F0+mα. Consequently, the tensile force applied to the crystal resonator 3 decreases, so the output frequency of the crystal oscillation circuit 10a increases up to f3=f0+Δf. Further, the tensile strength applied to the crystal resonator 4 increases, so the output frequency of the crystal oscillation circuit 10b decreases to f4=f0-Δf. Consequently, the acceleration α is calculated through a mixer 10c from two-fold output frequency variation. Thus, a high-precision ...

Improvements in and relating to accelerometers

... 896,102. Measuring acceleration electrically. ENGLISH ELECTRIC CO. Ltd. Sept. 27, 1957 [Oct. 3, 1956], No.30199/56. Drawings to Specification. Class 40 (1). In an accelerometer, a mass is supported in a rigid framework by several tensioned, vibrating strings or wires. Upon acceleration of the framework, the inertial forces due to the acceleration of the mass, alter the string tensions and the resultant vibration frequency changes are a measure of the acceleration. The strings are maintained in vibration by exciter units and the vibrations are detected at pick-offs which provide electrical signals. It is stated that if the sum of the frequencies is maintained constant, the difference frequency is in a linear relationship with the acceleration. This is effected by a feed-back loop which detects the scan of the frequencies and applies a control to the strings to maintain their sum at a fixed value, by changing the tension in the strings by heating. The strings form single turn secondary windings ...

Accelerometers

... 861,341. Accelerometers. SPERRY RAND CORPORATION. July 16, 1959 [July 16, 1958], No. 24542/59. Class 40 (1). [Also in Group XXXV] In an accelerometer of the type described in Specification 789,611 in which acceleration displaces a mass connected between two wires so altering their tensions and hence their natural vibration frequencies these frequencies being detected and compared to determine the acceleration, the mass includes a compound mass comprising two masses connected resiliently together so as to have a relative oscillation frequency substantially equal to the mean vibration frequencies of the wires so as to reduce vibratory intercoupling between the wires. A preferred embodiment comprises, Fig. 1, masses 16 and 17 suspended by ligaments 18 from rings 12, 13, 14 and 15 which form part of the supporting frame. From the outer ends of the masses wires 25 and 26 run to clamps on the end plates 10 and 101, the inner ends of the masses being coupled by circular spring 40 which ...

Acceleration sensor

A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of ...

Improvements in Vibrating String Accelerometers.

... 1,171,091. Accelerometers. CSFCOMPAGNIE GENERALE DE TELEGRAPHIE SANS FIL. Feb. 13, 1968 [Feb. 24, 1967], No. 7134/68. Headings G1K and G1N. An accelerometer with dual vibration strings C1, C2 supporting a mass M in a frame B secured to a body subjected to acceleration in the direction shown in Fig. 1, has identical circuits including oscillating amplifiers 4, 14 maintaining identical metal or metallized strings C1, C2 vibrating at their resonant frequencies #1, #2, retroactive means 20 controlling heating current Ic to the strings C1, C2 in series to keep constant the sum #1 + #2 and decoupling capacitors 3, 13 between an ungrounded supply of heating current and the oscillators 4, 14. Each circuit also includes a bridge with one vibrating string C1 (C2) (in a constant transverse magnetic field), an electrically equivalent dead string CM1 (CM2) and two identical resistances 1, 2 (11, 12). The secondary of an output transformer of the amplifier 4 (14) is applied between the apices A, B of ...

Vorrichtung zum Messen mechanischer Kraefte, insbesondere auf Traegheitskraefte ansprechender Beschleunigungsmesser

METHOD, APPARATUS AND SYSTEM FOR PROVIDING METERING OF ACCELERATION

Force sensor having an adjustable distance between an operating point and a point of mechanical instability

A force sensor, especially an acceleration sensor or a pressure sensor, has a structure that vibrates in resonance, and its oscillation frequency is variable due to an acting force which is to be detected. The distance of an operating point of the force sensor from the point of its mechanical instability can be adjusted by applying an electric voltage.

PHYSICAL QUANTITY SENSOR DEVICE, AND INCLINOMETER, INERTIA MEASUREMENT DEVICE, STRUCTURE MONITORING DEVICE, AND MOVING OBJECT USING PHYSICAL QUANTITY SENSOR DEVICE

A physical quantity sensor device includes a physical quantity sensor and a storage. The storage stores a first constant used as a constant of each term in an approximate polynomial to obtain a first secondary frequency temperature characteristic approximated to the actual frequency temperature characteristic, in a first temperature region less than the first boundary temperature, and a second constant used as a constant of each term in the approximate polynomial to obtain a second secondary frequency temperature characteristic approximated to the actual frequency temperature characteristic, in a second temperature region equal to or greater than the first boundary temperature.

ACCELERATION SENSOR

This acceleration sensor (10) is provided with: a frame-shaped affixed section (12) of which the outer shape is a rectangle; a plumb section (14) that has an approximately square shape having, in a plan view, two sides opposite each other and parallel to the x-axis direction and two sides opposite each other and parallel to the y-axis direction, and that has a notch section (15) provided along a direction forming a 45° angle with respect to the x-axis direction and the y-axis direction; a vibrating beam (13) that is provided linearly in a plan view along a direction forming a 45° angle with respect to the x-axis direction and the y-axis direction, has one end connected to the affixed section (12), has the other end connected to the plumb section (14), has a portion thereof disposed within the notch section (15), and supports the plumb section (14) in a manner so as to be able to displace in the z-axis direction; a drive unit (19A) that is provided to the vibrating beam (13) and that vibrates ...

Resonant sensor device

A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.

SUBSTRATE FOR SENSOR, PHYSICAL QUANTITY DETECTION SENSOR, ACCELERATION SENSOR, ELECTRONIC APPARATUS, VEHICLE, AND METHOD OF MANUFACTURING SUBSTRATE FOR SENSOR

A cantilever section as a substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section when viewed in a planar view as viewed from a thickness direction of the movable section; and a gap portion formed to have a predetermined gap between the movable section and the arm portion when viewed in the planar view, in which a ridge portion formed as an etching residue having a top portion on the side facing the gap portion is provided on each of facing surfaces of the movable section and the arm portion in the gap portion, and the predetermined gap is a gap between a top portion of a first ridge portion which is the ridge portion formed at one of the movable section and the arm portion, and a top portion of a second ridge portion which is the ridge portion formed at the other of the movable section and the arm portion. 1. A substrate for a sensor comprising:a base section;a movable section connected to the base section, the movable section extending from the base section along an extension direction when viewed in a planar view as viewed from a thickness direction of the movable section, the thickness direction being perpendicular to the extending direction;a support portion which extends along the movable section from the base section in the extension direction when viewed in the planar view;a gap portion formed to have a predetermined gap in a cross direction between the movable section and the support portion when viewed in the planar view, the cross direction being perpendicular to the extension direction and the thickness direction; anda ridge portion on each of facing surfaces of the movable section and the support portion in the gap portion, each ridge portion being formed as an etching residue and having a top portion on the corresponding facing surface,the predetermined gap being a gap between a top portion of a first ridge portion ...

Acceleration sensor

An acceleration sensor includes a fixation member, a weight member including a plate with two opposing sides parallel or substantially parallel to an X-direction and two opposing sides parallel to a Y-axis direction in a plan view, the weight member including a cutout extending in a direction about 45° relative to the X and Y axis directions, a vibrating beam linearly extending in the direction about 45° relative to the X and Y axis directions in the plan view, and one end portion is connected to the fixation member and the other end portion is connected to the weight member, the vibrating beam is partly arranged within the cutout and supporting the weight member to be displaceable in a Z-axis direction, a driver disposed on the vibrating beam and vibrating the vibrating beam, and a detector disposed on the vibrating beam and outputting a detection signal that is changed depending on deformation of the vibrating beam.

VERFAHREN ZUR ÜBERWACHUNG EINES VIBRATIONSKREISELS

Kraftsensor

The invention relates to a force sensor, in particular an acceleration sensor or a pressure sensor, with a structure oscillating in resonance, the oscillation frequency thereof being variable as a result of a force effect to be detected. The distance of a working point (PSA) of the force sensor (10) can be set in relation to a point of its mechanical instability by feeding an electrical voltage (U).

MEMS resonant accelerometer having improved electrical characteristics

A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

Anordnung zur Messung der Geschwindigkeit ueber Grund eines Wasser- oder Luftfahrzeuges

INERTIAL FORCE SENSOR

An inertial force sensor includes a substrate, a transducer disposed on the substrate, and a wiring trace disposed on the substrate and connected with the transducer. The wiring trace includes a lower electrode layer on the substrate, a piezoelectric layer on the lower electrode layer, a capacitance-reducing layer on the piezoelectric layer, and an upper electrode layer on the capacitance-reducing layer. The capacitance-reducing layer has a relative dielectric constant smaller than that of the first piezoelectric layer. This inertial force sensor can improve a noise level. 2. The inertial force sensor of claim 1 , wherein the first piezoelectric layer and the first upper electrode layer cover the capacitance-reducing layer completely so as not to expose the capacitance-reducing layer.3. The inertial force sensor of claim 1 ,wherein the capacitance-reducing layer has a lower surface situated on the upper surface of the first piezoelectric layer,wherein the capacitance-reducing layer has a side surface connected with the upper surface and the lower surface of the capacitance-reducing layer, andwherein the first upper electrode layer covers the upper surface and the side surface of the capacitance-reducing layer.4. The inertial force sensor of claim 1 , wherein a thickness of the capacitance-reducing layer is not larger than a thickness of the first upper electrode layer.5. The inertial force sensor of claim 1 , wherein a dielectric constant of the capacitance-reducing layer is not larger than 5% of a dielectric constant of the first piezoelectric layer.6. The inertial force sensor of claim 1 , wherein the capacitance-reducing layer is made of a photosensitive organic material.7. (canceled)8. The inertial force sensor of claim 1 , wherein the capacitance-reducing layer is made of a photosensitive polyimide which can be developed with alkali.9. (canceled)10. The inertial force sensor of claim 1 , wherein the transducer includes:a second lower electrode layer provided on ...

ACCELERATION SENSOR

An acceleration sensor includes a fixation member, a weight member including a plate with two opposing sides parallel or substantially parallel to an X-direction and two opposing sides parallel to a Y-axis direction in a plan view, the weight member including a cutout extending in a direction about 45° relative to the X and Y axis directions, a vibrating beam linearly extending in the direction about 45° relative to the X and Y axis directions in the plan view, and one end portion is connected to the fixation member and the other end portion is connected to the weight member, the vibrating beam is partly arranged within the cutout and supporting the weight member to be displaceable in a Z-axis direction, a driver disposed on the vibrating beam and vibrating the vibrating beam, and a detector disposed on the vibrating beam and outputting a detection signal that is changed depending on deformation of the vibrating beam. 1. (canceled)2. An acceleration sensor comprising:a fixation member;a weight member including two opposing sides parallel or substantially parallel to a first direction and two opposing sides parallel or substantially parallel to a second direction perpendicular or substantially perpendicular to the first direction when looked at in a plan view, the weight member including a cutout that extends in a direction of about 45° relative to the first direction and the second direction;a vibrating beam that linearly extends in the direction of about 45° relative to the first direction and the second direction when looked at in a plan view, and including a first end portion connected to the fixation member and a second end portion connected to the weight member, the vibrating beam being partially arranged within the cutout and supporting the weight member to be displaceable in a third direction that is perpendicular or substantially perpendicular to the first direction and the second direction;a driver disposed on the vibrating beam and vibrating the vibrating ...

RATE AND/OR ACCELERATION SENSOR

APPARATUS FOR MEASURING ACCELERATIONS, ESPECIALLY THE ACCELERATION OF GRAVITY

INERTIAL FORCE SENSOR

An inertial force sensor includes a base, a connection electrode on the base; a flexible section supported by the base, a driving section on an upper surface of the flexible section, a detection section on the upper surface of the flexible section, an interlayer insulating layer on the upper surface of one of the driving section and the detection section, and a wiring electrically connecting another of the driving section and the detection section to a connection electrode via an upper surface of the interlayer insulating layer. This inertial force sensor can have improved sensitivity and a small size.

Methods and systems for detecting acceleration using bondwires

Disclosed herein are example methods, systems, and devices involving electrically-conductive wires, such as standard IC bonding wires, that are configured so as to operate as inertial sensors. One embodiment of the disclosed methods, systems, and devices may take the form of a system that includes a first electrically-conductive wire and a second electrically-conductive wire, where the first wire and the second wire are electromagnetically coupled; and a sensor oscillator, where the sensor oscillator is coupled to the first wire and the second wire, and where the sensor oscillator is configured to output a sensor-oscillator signal that is frequency modulated based on a change in complex impedance between the first wire and the second wire, where the change in complex impedance is due to a displacement of the first wire relative to the second wire.

Acceleration or inclination measuring instrument

A measuring instrument is described for measuring inclination or acceleration. For inclination only three strings are required. For acceleration four strings are required.

The instrument comprises a mass (38) suspended by three or four stretched strings (32, 34, 36 or 70, 72, 74 and 76) with the strings being suspended from terminals within a frame (10).

The strings are conductive as is also the mass (38) and a flexible electrical connection (46) allows connection to be made to the star point of the three or four conductive strings.

The strings form the frequency determining elements in the outputs of negative resistance amplifiers (50, 52, 54 etc.,) and differential amplifiers (56, 58, 60) together with decoding circuits (62) provide output signals for a computing device (64) which inturn provides data for an indicator (66) to indicate the inclination of the frame (10) relative to some datum. Calibrating means (68) is provided for calibrating the read-out device ...

ACCELERATION SENSOR

A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of ...

Vibration rectification error correction circuit, physical quantity sensor module, structure monitoring device, and correction value adjustment method of vibration rectification error correction circuit

A vibration rectification error correction circuit includes a first correction circuit that obtains a digital value based on a signal to be measured output from a sensor element configured to measure a physical quantity and corrects a vibration rectification error of the digital value by a correction function based on a product of values obtained by biasing the digital value.

ACCELEROMETERS

VIBRATING STRING ACCELEROMETERS

Active waveguide excitation and compensation

An environmental condition may be measured with a sensor (10) including a wire (20) having an ultrasonic signal transmission characteristic that varies in response to the environmental condition by sensing ultrasonic energy propagated through the wire using multiple types of propagation, and separating an effect of temperature on the wire from an effect of strain on the wire using the sensed ultrasonic energy propagated through the wire using the multiple types of propagation. A positive feedback loop may be used to excite the wire such that strain in the wire is based upon a sensed resonant frequency, while a square wave with a controlled duty cycle may be used to excite the wire at multiple excitation frequencies. A phase matched cone (200, 210) may be used to couple ultrasonic energy between a waveguide wire (202, 212) and a transducer (204, 214).

RESONANT SENSOR DEVICE

A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.

VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT, PHYSICAL QUANTITY SENSOR MODULE, STRUCTURE MONITORING DEVICE, AND CORRECTION VALUE ADJUSTMENT METHOD OF VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT

A vibration rectification error correction circuit includes a first correction circuit that obtains a digital value based on a signal to be measured output from a sensor element configured to measure a physical quantity and corrects a vibration rectification error of the digital value by a correction function based on a product of values obtained by biasing the digital value.

Mechanically excited resonant-element sensor

A resonant wire instrument for producing a measurement signal, which is derived from the resonant frequency of a vibratable wire tensioned in accordance with the magnitude of a physical variable being measured, wherein a force impulse produced mechanically by an apparatus is applied to displace laterally one end of the vibratable wire so as to excite the wire into resonant motion. In one embodiment, the one end is rigidly attached to a housing and a piston applies a transverse force impulse to that end by momentarily striking the housing. In another embodiment, the one end is connected to a piezoelectric crystal which responds to a short-duration electric field to displace momentarily that end. In one species of this other embodiment, the crystal is made to oscillate at the resonant frequency of the tensioned wire by the application of an alternating-polarity voltage signal that is generated by a voltage source having an output connected to the crystal, and a feedback circuit coupled to ...

Compensation pendulous accelerometer

A compensation pendulous accelerometer comprises a body in which a pendulous unit is positioned that is made as a unitary plate of a silicon monocrystal and comprises a movable vane on a flexible suspension and a support frame with protrusions. Two magnetic systems are secured on opposite sides of the movable vane and two coils of a torquer are positioned in a clearance of a corresponding core and are secured on a corresponding side of the movable vane. The flexible suspension includes flexible members arranged at an angle of 90 degrees relative to one another, symmetrically relative to an axis of symmetry of the pendulous unit. When the accelerometer is accelerated, the movable vane deflects in the opposite direction of the acceleration, and a current in the coils returns the movable vane to its initial position. A measured amount of current through coils is used to determine the acceleration.

Mechanically excited resonant-element sensor

A resonant wire instrument for producing a measurement signal, which is derived from the resonant frequency of a vibratable wire tensioned in accordance with the magnitude of a physical variable being measured, wherein a force impulse produced mechanically by an apparatus is applied to displace laterally one end of the vibratable wire so as to excite the wire into resonant motion. In one embodiment, the one end is rigidly attached to a housing and a piston applies a transverse force impulse to that end by momentarily striking the housing. In another embodiment, the one end is connected to a piezoelectric crystal which responds to a short-duration electric field to displace momentarily that end. In one species of this other embodiment, the crystal is made to oscillate at the resonant frequency of the tensioned wire by the application of an alternating-polarity voltage signal that is generated by a voltage source having an output connected to the crystal, and a feedback circuit coupled to ...

FLUIDIC ACCELEROMETER

加速度センサ

ACCELERATION MEASURING APPARATUS

Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor

A cantilever section as a substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section when viewed in a planar view as viewed from a thickness direction of the movable section; and a gap portion formed to have a predetermined gap between the movable section and the arm portion when viewed in the planar view, in which a ridge portion formed as an etching residue having a top portion on the side facing the gap portion is provided on each of facing surfaces of the movable section and the arm portion in the gap portion, and the predetermined gap is a gap between a top portion of a first ridge portion which is the ridge portion formed at one of the movable section and the arm portion, and a top portion of a second ridge portion which is the ridge portion formed at the other of the movable section and the arm portion.

MAGNETIC INERTIAL SENSOR AND METHOD FOR OPERATING THE SAME

An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis. 1. An inertial sensor , comprising: an excitation coil;', 'a first sensing coil extending at a first distance from the excitation coil along a first axis;, 'a body of semiconductor material, having a first surface and a second surface, the body includinga suspended mass including a magnetic-field concentrator, the suspended mass extending above the first surface and being magnetically coupled to the excitation coil and to the first sensing coil, and configured to be displaced by way of inertia; anda supply and sensing circuit electrically coupled to the excitation coil and to the first sensing coil, and configured to generate a time-variable flow of electric current through the excitation coil to generate a magnetic field that, in use, interacts with said magnetic-field concentrator to induce an electrical quantity in the first sensing coil, the supply and sensing circuit being configured to measure a value of said electrical quantity induced in the first sensing coil to detect a quantity associated with a displacement of the suspended mass.2. The inertial sensor according to wherein the electrical quantity induced in ...

Mems gyroscope

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions.

MEMS GYROSCOPE

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions. 1. A MEMS gyroscope , comprising: a pair of movable portions that are capable of moving in opposite directions in response to an angular velocity along a sensing direction;', 'a pair of driving mechanisms associated with said movable portions for moving the movable portions in opposite directions along a driving direction that is substantially perpendicular to the sensing direction; and', 'a plurality of magnetic sources attached to at least one of the movable portions for generating magnetic field; and, 'a first substrate, comprisinga second substrate having a plurality of magnetic sensors associated with said plurality of magnetic sources for measuring the magnetic field from the plurality of magnetic sources.2. The MEMS gyroscope of claim 1 , wherein the magnetic source comprises a conducting wire.3. The MEMS gyroscope of claim 1 , wherein the magnetic source comprises a magnetic nanoparticle.4. The MEMS gyroscope of claim 2 , wherein the magnetic sensor comprises a giant-magnetic-resistor.5. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a spin-valve structure.6. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a tunnel-magnetic-resistor.7. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a magnetic pickup coil that is an element of a fluxgate. This US utility patent application claims priority from co-pending US utility patent application “A HYBRID MEMS DEVICE,” Ser. No. 13559625 filed Jul. 27, 2012, which claims priority from US provisional patent application “A HYBRID MEMS DEVICE,” tiled May 31, 2012, Ser. No. 61653408 to Biao Zhang and Tao Ju. This US utility patent application also claims priority from co-pending US utility patent ...

Mems device

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.

MEMS GYROSCOPE

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a driving mechanism, a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass. The MEMS gyroscope is enclosed in a package that further comprises a magnet for providing bias magnetic field. 1. A MEMS gyroscope , comprising: a movable portion that is movable in response to an external angular velocity;', 'a driving mechanism capable of moving the movable portion;', 'a magnetic source for generating magnetic field;, 'a first substrate, comprising 'a magnetic sensor of a spintronic device for detecting the magnetic field from said magnetic source; and wherein the first and second substrates are bonded into a substrate assembly; and', 'a second substrate, comprising the substrate assembly; and', 'a magnet disposed at a side of the spintronic device for providing a bias magnetic field for the spintronic device along a hard axis of the spintronic device., 'a package, comprising2. The MEMS gyroscope of claim 1 , wherein the magnetic source comprises a conducting wire.3. The MEMS gyroscope of claim 1 , wherein the magnetic source comprises a magnetic nanoparticle.4. The MEMS gyroscope of claim 2 , further comprising:a conducting wire connected to the spintronic device, wherein the conducting wire is magnetically insulated.5. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a spin-valve structure.6. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a tunnel-magnetic-resistor.7. The MEMS gyroscope of claim 1 , wherein the proof-mass is composed of a ceramic material. This US utility patent application claims priority from co-pending US utility patent application “A HYBRID MEMS DEVICE,” Ser. No. /, filed Jul. , , which claims priority from US provisional patent application “A HYBRID MEMS DEVICE,” filed May 31, 2012, Ser. No. 61/653,408 to Biao Zhang and Tao Ju. This US utility patent application also claims priority from co-pending US ...

System And Method For Hybrid Optical/Inertial Headtracking Via Numerically Stable Kalman Filter

A system and related method for hybrid headtracking receives head-referenced pose data from a head-mounted IMU and platform-referenced or georeferenced position and orientation (pose) data from a platform-mounted IMU, determines error models corresponding to uncertainties associated with both IMUs, and performs an initial estimate of head pose relative to the platform reference frame based on the head-referenced and platform-referenced pose data. A numerically stable UD factorization of the Kalman filter propagates the estimated head pose data forward in time and corrects the initial head pose estimate (and may correct the error models associated with the head-mounted and platform-mounted IMUs) based on secondary head pose estimates, and corresponding error models, received from an optical or magnetic aiding device. The corrected head pose data is forward to a head-worn display to ensure high accuracy of displayed imagery and symbology. 1. A hybrid headtracking system incorporating a numerically stable Kalman fitter , comprising:at least one platform-referenced inertial measurement unit (IMU) configured to be rigidly mounted to a mobile platform associated with a platform reference frame, the at least one platform-referenced IMU configured to provide platform-referenced position and orientation (pose) data;at least one head-referenced IMU configured to be rigidly mounted to a head of a user, the head associated with a head reference frame, the at least one head-referenced IMU configured to provide head-referenced pose data;at least one aiding device configured to be rigidly mounted to at least one of the mobile platform and the head and to provide first estimated pose data, the at least one aiding device including at least one aiding sensor configured to generate the first estimated pose data based on one or more fiducial markers;and receive the head-referenced pose data, the platform-referenced pose data, and the first estimated pose data;', 'determine at least one ...

INERTIAL SENSOR

According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer. 120.-. (canceled)21. A sensor comprising:a first member;a second member connected with the first member, the second member being deformable;a first sensing element unit provided at a first portion of the second member and including a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer and being nonmagnetic; anda second sensing element unit provided at a second portion of the second member and including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer and being nonmagnetic.22. The sensor according to claim 21 , wherein a direction from the first sensing element unit toward the second sensing element unit crosses a first direction from the first member toward the second member.23. The sensor according to claim 21 , wherein the first sensing element unit and the second sensing element unit are electrically connected in series.24. The sensor according to claim 21 , further comprising:a third sensing element unit provided at a third portion of the second member and including a fifth magnetic layer, a sixth magnetic layer, and a ...

Packaging system and process for inertial sensor modules using moving-gate transducers

A sensor device includes a first CMOS chip and a second CMOS chip with a first moving-gate transducer formed in the first CMOS chip for implementing a first 3-axis inertial sensor and a second moving-gate transducer formed in the second CMOS chip for implementing a second 3-axis inertial sensor. An ASIC for evaluating the outputs of the first 3-axis inertial sensor and the second 3-axis inertial sensor is distributed between the first CMOS chip and the second CMOS chip.

INERTIAL SENSOR

According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer. 1. An inertial sensor comprising:a base portion;a weight portion;a connection portion connecting the weight portion and the base portion, connection portion being configured to be deformed in accordance with a change in a relative position of the weight portion with respect to a position of the base portion; anda first sensing element unit provided on a first portion of the connection portion and including a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer, the nonmagnetic first intermediate layer being provided between the first magnetic layer and the second magnetic layer.2. The sensor according to claim 1 , wherein at least a part of the first magnetic layer includes iron and has an amorphous structure.3. The sensor according to claim 2 , wherein the at least the part includes Boron.4. The sensor according to claim 1 , further comprising a second sensing element unit including a third magnetic layer claim 1 , a fourth magnetic layer claim 1 , and a nonmagnetic second intermediate layer claim 1 , the nonmagnetic second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer claim 1 ,the connection portion further including a second portion, the second sensing element unit being provided on the second portion, ...

DUAL-FUNCTIONAL RESONANT MAGNETIC FIELD SENSOR

Disclosed is a dual-functional resonant based magnetic field sensor that functions as magnetic field sensor and accelerometer, respectively, comprising a sensor structure including a mass block and motion sensor electrodes, capacitance to voltage converter and amplifier to convert sensing signals of the sensor electrodes into voltage, as output signals of the magnetic field sensor, a driving circuit to provide the output signals to the mass block in the form of current, to drive the mass block to vibrate, and a selection circuit to select measurement of magnetic field or acceleration. The driving circuit may be a comparator. The selection circuit may be replaced by a filter to select frequency bands of the output signals of the converter, for simultaneously providing signals representing magnetic field and acceleration, respectively. 1. A dual-functional resonant magnetic field sensor , comprising:a detector structure, comprising a mass block suspended in the detector structure; and two sets of displacement detection electrodes disposed on the detector structure, at both sides of the mass block along a first direction X in a plane where the mass block is arranged;a converter circuit, connected to the displacement detection electrodes of the detector structure, to convert detection results of the displacement detection electrodes into a voltage signal, as output signal of the dual-functional magnetic field sensor;a vibration driving circuit, connected to output of the converter circuit, to provide output of the converter circuit to the mass block in the detector structure in a form of current, for driving the mass block to vibrate; anda selection circuit to selectively block the driving current of the vibration driving circuit from being provided to the mass block;wherein currents provided by the vibration driving circuit flow through the mass block in a second direction Y, which is perpendicular to the first direction X in the plane where the mass block is arranged. ...

METHOD, APPARATUS AND SYSTEM FOR PROVIDING METERING OF ACCELERATION

Techniques and mechanisms to provide for metering acceleration. In an embodiment, a microelectromechanical accelerometer includes a magnet, a mass, and a first support beam portion and second support beam portion for suspension of the mass. Resonance frequency characteristics of the first support beam portion and second support beam portion, based on the magnet and a current conducted by the first support beam portion and second support beam portion, are indicative of acceleration of the mass. In another embodiment, the accelerometer further includes a first wire portion and a second wire portion which are each coupled to the mass and further coupled to a respective anchor for exchanging a signal with the first wire portion and the second wire portion. The first wire portion and the second wire portion provide for biasing of the mass. 1. An apparatus comprising: a microelectromechanical accelerometer including:a mass;a first magnet to generate a magnetic field;a first support beam portion and a second support beam portion each to conduct a time varying signal which traverses the magnetic field along a first dimension, wherein a resonance frequency for the time varying signal is based on the magnetic field, wherein the mass is suspended with the first support beam portion and the second support beam portion;a first wire portion coupled to the mass and flexibly coupled to a first anchor; anda second wire portion coupled to the mass and flexibly coupled to a second anchor, wherein the first anchor and the second anchor to exchange a first signal with the first wire portion and the second wire portion, wherein, based on the first signal and the magnetic field, the first wire portion and the second wire portion to impose a force on the mass along a second dimension perpendicular to the first dimension.2. The apparatus of claim 1 , wherein the first signal includes a direct current signal.3. The apparatus of claim 1 , wherein the first wire portion is flexibly coupled to ...

VERTICAL SUPERCONDUCTING MAGNETIC MASS-SPRING OSCILLATOR WITH ADJUSTABLE NATURAL FREQUENCY

The present disclosure discloses a vertical superconducting magnetic mass-spring oscillator with an adjustable natural frequency, comprising: a proof mass, a negative-stiffness superconducting coil and a positive-stiffness superconducting coil; the negative-stiffness superconducting coil is mounted at an opening of a semi-closed space of the proof mass, so that a part of magnetic lines of the negative-stiffness superconducting coil are in a compressed state in a closed space of the proof mass, and the other part of the magnetic lines of the negative-stiffness superconducting coil are in an expanded state outside the closed space of the proof mass; a vertical magnetic repulsive force applied to the proof mass by the negative-stiffness superconducting coil varies with a displacement of the proof mass from an equilibrium position, with the variation magnitude proportional to the displacement and the variation direction the same as the displacement direction; and the positive-stiffness superconducting coil is mounted in the semi-closed space of the proof mass, and a vertical magnetic repulsive force applied to the proof mass by the positive-stiffness superconducting coil varies proportionally to the displacement of the proof mass from the equilibrium position, with the variation direction opposite to the displacement direction. The present disclosure realizes that the natural frequency of the superconducting mass-spring oscillator is adjustable, and meanwhile, the cross-coupling effect of horizontal and vertical degrees of freedom of the proof mass can be reduced. 1. A vertical superconducting magnetic mass-spring oscillator with an adjustable natural frequency , comprising a proof mass , a negative-stiffness superconducting coil and a positive-stiffness superconducting coil;the proof mass, the negative-stiffness superconducting coil and the positive-stiffness superconducting coil are all made of superconducting material, and the proof mass is a semi-closed barrel with ...

MICROMECHANICAL SENSOR DEVICE

A micromechanical sensor device, having a first unhoused sensor unit, and at least one second unhoused sensor unit, the sensor units being functionally connected to one another, the sensor units being essentially vertically configured one over the other so that a sensor unit having a larger footprint completely covers a sensor unit having a smaller footprint. 1. A micromechanical sensor device , comprising:a first unhoused sensor unit; andat least one second unhoused sensor unit;wherein the sensor units are functionally connected to one another, and wherein the sensor units are essentially vertically configured one over the other so that a sensor unit having a larger footprint completely covers a sensor unit having a smaller footprint.2. The sensor device of claim 1 , wherein the sensor units are functionally connected to one another by first solder bumps claim 1 , and wherein the sensor device is externally contactable by second solder bumps.3. The sensor device of claim 1 , wherein the first sensor unit includes a MEMS structure and an ASIC wafer.4. The sensor device of claim 1 , wherein an electrically conductive bonded connection is provided between the two sensor units claim 1 , wherein electrical vias are provided in the ASIC wafer claim 1 , and wherein the two sensor units are electrically contactable to one another by the bonded connection and the vias.5. The sensor device of claim 1 , wherein the ASIC wafer has an electrical redistribution device.6. The sensor device of claim 1 , wherein the second sensor unit has at least one of a magnetic sensor claim 1 , an ASIC chip claim 1 , a radio module claim 1 , and a microcontroller.7. The sensor device of claim 1 , wherein the first sensor unit is a 9D sensor.8. The sensor device of claim 1 , wherein the first sensor unit has a capping wafer claim 1 , wherein the second sensor unit is situated on the capping wafer claim 1 , wherein the capping wafer has electrical vias claim 1 , and wherein the capping wafer is ...

Method and system for tracking and determining a position of an object

According to an example aspect of the present invention, there is provided a method for tracking and determining the position of an object, the method comprising determining a primary position indication based on signals received from an external positioning system and using said primary position indication to determine a first position of said object, recording acceleration data of a cyclically moving object using inertial sensor signals or accelerometer sensor signals and integrating said acceleration data over a selected period of time to determine a tilting of said cyclically moving part of the object relative to a horizontal plane, recording direction data of said moving object based on measuring an external magnetic field of the cyclically moving part of the object using a magnetometer sensor to determine an orientation of said cyclically moving part relative to the external magnetic field, computing the velocity of said moving object in any direction based on said inertial sensor signals or accelerometer sensor signals, determining a secondary position indication of said object based on said first position, said direction data and said velocity data, and using said secondary position indication to determine a second position of said object. 1. A method for tracking and determining a position of an object , the method comprising:determining a primary position indication based on signals received from an external positioning system and using said primary position indication to determine a first position of said object,recording acceleration data of a cyclically moving part of the object using inertial sensor signals or accelerometer sensor signals and integrating said acceleration data over a selected period of time to determine a tilting of said cyclically moving part of the object relative to a horizontal plane,recording direction data of said moving object based on measuring an external magnetic field of the cyclically moving part of the object using a ...

MICRO ELECTRO MECHANICAL SYSTEMS SENSOR MODULE PACKAGE AND METHOD OF MANUFACTURING THE SAME

Disclosed herein is a micro electro mechanical systems (MEMS) sensor module package. The MEMS sensor module package includes: an MEMS sensor; a base part formed so as to encapsulate the MEMS sensor with a resin; an external terminal provided on one surface of the base part; a through mold via (TMV) provided in the base part to electrically connect the external terminal and the MEMS sensor to each other; and an application specific integrated circuit (ASIC) stacked on the MEMS sensor. Compared to a MEMS sensor module package structure according to the prior art, the present invention is to reduce the entire size and implement electric shielding. 1. A micro electro mechanical systems (MEMS) sensor module package comprising:an MEMS sensor;a base part formed so as to encapsulate the MEMS sensor with a resin;an external terminal provided on one surface of the base part;a through mold via (TMV) provided in the base part to electrically connect the external terminal and the MEMS sensor to each other; andan application specific integrated circuit (ASIC) stacked on the MEMS sensor.2. The MEMS sensor module package as set forth in claim 1 , wherein the MEMS sensor is a six-axis inertial sensor.3. The MEMS sensor module package as set forth in claim 1 , further comprising an electrical shielding layer interposed between the MEMS sensor and the base part.4. The MEMS sensor module package as set forth in claim 1 , further comprising a three-axis geomagnetic sensor provided under the base part and electrically connected to the MEMS sensor.5. The MEMS sensor module package as set forth in claim 1 , wherein the base part closes one side of the MEMS sensor and opens the other side of the MEMS sensor to the outside.6. The MEMS sensor module package as set forth in claim 1 , wherein the base part closes both sides of the MEMS sensor.7. The MEMS sensor module package as set forth in claim 1 , wherein the external terminal includes a solder bump.8. A method of manufacturing an MEMS ...

MEMS GYROSCOPE

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion for generating magnetic field, and a spintronic device for measuring the magnetic field. The conducting wire is disposed such that the current it carries is substantially perpendicular to the sensing direction of the sensing mode of the proof-mass. 1. A MEMS gyroscope , comprising: a movable portion that is capable of moving in response to an angular velocity;', 'a driving mechanism associated with said movable portion for moving the movable portion along a driving direction in a driving mode;', 'a conducting wire of a magnetic source on the movable portion for generating magnetic field; and, 'a first substrate, comprising a magnetic sensor that is a spintronic device for measuring the magnetic field from the conducting wire,', 'wherein the magnetic sensor has an easy axis and hard axis;', 'wherein the hard axis is substantially parallel to a sensing direction of a sensing mode of the movable portion; and', 'wherein the conducting wire is disposed such that the current it carries is substantially perpendicular to the sensing direction of the sensing mode of the proof-mass., 'a second substrate, comprising2. The MEMS gyroscope of claim 1 , wherein the spintronic device comprises a spin-valve.3. The MEMS gyroscope of claim 1 , wherein the spintronic device comprises a tunnel-magnetic-resistor.4. The MEMS gyroscope of claim 1 , wherein the driving mechanism comprises a group of capacitors.5. The MEMS gyroscope of claim 1 , wherein the driving mechanism comprises a magnetic driving mechanism. This U.S. utility patent application claims priority from co-pending U.S. utility patent application “A HYBRID MEMS DEVICE,” Ser. No. 13/559,625 filed Jul. 27, 2012, which claims priority from U.S. provisional patent application “A HYBRID MEMS DEVICE,” tiled May 31, 2012, Ser. No. 61/653,408 ...

MEMS GYROSCOPE

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass, wherein the magnetic sensing mechanism comprises an integrated pickup coil of a fluxgate. A magnetic shield is provided in the vicinity of the magnetic source. 1. A MEMS gyroscope , comprising: a movable portion that is movable in response to an external angular velocity;', 'a magnetic source for generating magnetic field; and', 'a magnetic shield in the vicinity of the magnetic source;, 'a first substrate, comprisinga second substrate having a magnetic sensor for detecting the magnetic field from said magnetic source, wherein the magnetic sensor is a pickup coil of a fluxgate.2. The MEMS gyroscope of claim 1 , wherein the magnetic source comprises a conducting wire.3. The MEMS gyroscope of claim 1 , wherein the magnetic source comprises a magnetic nanoparticle.4. The MEMS gyroscope of claim 2 , wherein the magnetic sensor comprises a giant-magnetic-resistor.5. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a spin-valve structure.6. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a tunnel-magnetic-resistor.7. The MEMS gyroscope of claim 2 , wherein the magnetic sensors comprises a magnetic pickup coil that is an element of a fluxgate. This US utility patent application claims priority from co-pending US utility patent application “A HYBRID MEMS DEVICE,” Ser. No. 13/559,625 filed Jul. 27, 2012, which claims priority from US provisional patent application “A HYBRID MEMS DEVICE,” filed May 31, 2012, Ser. No. 61/653,408 to Biao Zhang and Tao Ju. This US utility patent application also claims priority from co-pending US utility patent application “A MEMS DEVICE,” Ser. No. 13/854,972 filed Apr. 2, 2013 to the same inventor of this US utility patent application, the subject matter of each of which is incorporated herein by reference in its entirety.The technical field ...

TENSION IN POST-TENSIONED RODS

A system for estimating tension in a post-tensioned rod is provided. The system includes an impact device for transversely-impacting a post-tensioned rod, an accelerometer configured to generate data indicative of a vibrational response in the post-tensioned rod, and a receiver communicatively coupled to the accelerometer. The receiver includes a display, at least one input device, a communication module, a processor, and one or more memory devices coupled to the processor. Instructions stored on the one or more memory devices, when executed by the processor, cause the processor to receiver the data indicative of a vibrational response in the post-tensioned rod, process the received data to determine a difference between a first and a second modal frequency corresponding to the vibrational response, and store the difference between a first and second modal frequency corresponding to the vibrational response. The receiver is configured to transmit the stored difference between a first and second modal frequency. 130-. (canceled)31. A system for estimating tension in a post-tensioned rod , the system comprising:an impact device for transversely-impacting a post-tensioned rod;an accelerometer configured to generate data indicative of a vibrational response in the post-tensioned rod; and a display;', 'at least one input device;', 'a communication module;', 'a processor; and', receive the data indicative of a vibrational response in the post-tensioned rod;', 'process the received data to determine a difference between a first and a second modal frequency corresponding to the vibrational response; and', 'store the difference between a first and second modal frequency corresponding to the vibrational response;, 'one or more memory devices coupled to the processor, wherein the one or more memory devices stores instructions that, when executed by the processor, cause the processor to, 'wherein the receiver is configured to transmit to an external system, via the ...

MLU BASED ACCELEROMETER USING A MAGNETIC TUNNEL JUNCTION

An MLU-based accelerometer including: at least one MLU including a tunnel barrier layer between a first magnetic layer having a fixed first magnetization direction and a second magnetic layer having a second magnetization direction that can be varied. A proof-mass includes a ferromagnetic material having a proof-mass magnetization inducing a proof-mass field, the proof-mass being elastically suspended such as to be deflected in at least one direction when subjected to an acceleration vector. The proof-mass is magnetically coupled to the MLU cell via the proof-mass field. A read module is configured for determining a magnetoresistance of each MLU cell such as to determine an acceleration vector from the deflection of the proof-mass relative to any one of the at least one MLU cell. 1. An MLU-based accelerometer comprising:at least one MLU cell comprising a tunnel barrier layer between a first magnetic layer having a fixed first magnetization direction and a second magnetic layer having a second magnetization direction that can be varied;a proof-mass comprising a ferromagnetic material having a proof-mass magnetization inducing a proof-mass field, the proof-mass being elastically suspended such as to be able of being deflected in at least one direction when subjected to an acceleration vector, the proof-mass being magnetically coupled to said at least one MLU cell via the proof-mass field; characterized in that the MLU-based accelerometer further comprises,a read module configured for determining a magnetoresistance of each of said at least one MLU cell such as to determine an acceleration vector from the deflection of the proof-mass relative to any one of said at least one MLU cellwherein said read module comprises means for switching the second magnetization to a highly sensitive and linear state in which the second magnetization direction is in an intermediary state between parallel and antiparallel to the first magnetization direction; and means for determining a ...

ACCELEROMETER USING DIMAGNETIC LEVITATION

An accelerometer without internal mechanical attachments. Three parallel cylindrical magnets are fixed within a housing. Each cylindrical magnet has a long axis extending through the housing and a cylindrical cross-section. The cylindrical cross-sections of the cylindrical magnets are organized to form a triangular formation. The magnetization of the cylindrical magnets is tangential to the triangular formation. A diamagnetic mass object levitates within the three cylindrical magnets by the magnetization of the cylindrical magnets at an equilibrium position near the center of the triangular formation and near a central axis of the three parallel cylindrical magnets when no external force is applied. Sensors detect the location of the diamagnetic mass object when the diamagnetic mass object is displaced from the equilibrium position near the center of the triangular formation and the three parallel cylindrical magnets by an external force to the housing. 1. An accelerometer without internal mechanical attachments , the accelerometer comprising:a housing;three parallel cylindrical magnets fixed within the housing, each cylindrical magnet having a long axis extending through the housing and a cylindrical cross-section, the cylindrical cross-sections of the cylindrical magnets organized to form a triangular formation, the magnetization of the cylindrical magnets tangential to the triangular formation;a diamagnetic mass object, the diamagnetic mass levitating within the three cylindrical magnets by the magnetization of the cylindrical magnets at an equilibrium position near the center of the triangular formation and near a central axis of the three parallel cylindrical magnets when no external force is applied; andsensors for detecting the location of the diamagnetic mass object when the diamagnetic mass object is displaced from the equilibrium position near the center of the triangular formation and the three parallel cylindrical magnets by an external force to the ...

THIN FILM SUPERCONDUCTING ACCELERATION MEASURING APPARATUS

An acceleration measuring apparatus, a SQUID sensor module, and a fabrication method of the SQUID sensor module. The acceleration measuring apparatus includes a test mass structure with a superconducting thin film on its one surface and providing elasticity, a superconducting coil for measurement disposed on the substrate to be opposite to the one surface of the test mass structure and magnetically coupled to the test mass structure, a transformer disposed on the substrate and including a primary superconducting coil connected to the superconducting coil and a secondary superconducting coil magnetically coupled to the primary superconducting coil, an input coil disposed on the substrate and connected to the secondary superconducting coil, and a superconducting quantum interference device (SQUID) disposed on the substrate and magnetically coupled to the input coil. 1. An acceleration measuring apparatus comprising:a test mass structure with a superconducting thin film on one surface of the test mass structure and providing elasticity;a superconducting coil for measurement disposed on a substrate to be opposite to the one surface of the test mass structure and magnetically coupled to the test mass structure;a transformer disposed on the substrate and including a primary superconducting coil connected to the superconducting coil and a secondary superconducting coil magnetically coupled to the primary superconducting coil;an input coil disposed on the substrate and connected to the secondary superconducting coil; anda superconducting quantum interference device (SQUID) disposed on the substrate and magnetically coupled to the input coil.2. The acceleration measuring apparatus as set forth in claim 1 , wherein the test mass structure includes at least one slit as proceeding from its central axis in a radial direction claim 1 ,wherein the slit has constant width, andwherein an angle between a start point and an end point of the slit is 90 degree or greater on the basis of ...

Continuous Trajectory Calculation for Directional Drilling

An instrument package for use during the drilling a wellbore. The instrument package includes a plurality of instruments such as accelerometers, gyroscopes, and magnetometers; a computer is configured to determine the current position of the plurality of instruments from a set of measurements produced by the plurality of instruments; and wherein the plurality of instruments are mechanically isolated from a drill head assembly by one or more multi-degree of freedom vibration isolators. The computer preferably has at least two modes different analytical modes of analyzing the set of measurements produced by the plurality of instruments, including a continuous mode and a survey mode, the continuous mode being operational during times that active drilling is occurring and the survey mode being operational during times that the active drilling is not occurring. 1. A downhole instrument package for use with a well drilling apparatus , the downhole instrument package comprising:a. at least three sensors including an accelerometer, a magnetometer, a gyroscope;b. the accelerometer, the magnetometer, and the gyroscope being mounted in an elongate configuration along with a signal processing device, the elongate configuration being supported by shock absorbers between a drill string associated with said well drilling apparatus and a drill face of a drill bit;c. the instrument package having at least two modes of operation including a continuous mode and a survey mode, the continuous mode being operational at least during times that the drilling apparatus is actively drilling and the survey mode being operational at least during times that the drilling apparatus is not actively drilling;d. the signal processing device applying a first set of algorithms to data collected from the at least three sensors while in said continuous mode of operation, the collected data and/or the results of applying said first set of algorithms to the data detected when in said continuous mode of ...

MAGNETIC ANOMALY TRACKING FOR AN INERTIAL NAVIGATION SYSTEM

One example includes an inertial navigation system (INS). The INS includes a navigation controller configured to generate inertial data associated with motion of a vehicle based on at least one navigation sensor configured on the vehicle and based on magnetic anomaly data. The INS also includes a magnetic anomaly INS-aiding system comprising a plurality of magnetometers distributed in a respective plurality of locations on the vehicle. The magnetic anomaly INS-aiding system can be configured to generate the magnetic anomaly data based on magnetic field measurements of a fixed magnetic anomaly at each of the plurality of magnetometers. 1. An inertial navigation system (INS) comprising:a navigation controller configured to generate inertial data associated with motion of a vehicle based on at least one navigation sensor configured on the vehicle and based on magnetic anomaly data; anda magnetic anomaly INS-aiding system comprising a plurality of magnetometers distributed in a respective plurality of locations on the vehicle, the magnetic anomaly INS-aiding system being configured to generate the magnetic anomaly data based on magnetic field measurements of a fixed magnetic anomaly at each of the plurality of magnetometers.2. The system of claim 1 , wherein the plurality of magnetometers are located at the plurality of locations at predetermined distances with respect to each other claim 1 , such that the magnetic anomaly INS-aiding system is configured to generate the magnetic anomaly data based on magnetic field measurements at each of the plurality of magnetometers with respect to the predetermined distances.3. The system of claim 1 , wherein the plurality of magnetometers comprises a first magnetometer located at a fore-section of the vehicle and a second magnetometer located at an aft-section of the vehicle claim 1 , the first and second magnetometers being located a predetermined distance with respect to each other along a substantially central axis of the ...

WIRELESS VECTOR KINEMATIC SENSING OF LINEAR AND ANGULAR, VELOCITY AND ACCELERATION, AND POSITION AND ORIENTATION VIA WEAKLY-COUPLED QUASISTATIC MAGNETIC FIELDS

Range and orientation of a transmitter and a receiver are found by detecting the magnetoquasistatic field couplings between coils at the transmitter and receiver. Sum functions and ratio functions are calculated for each of the unique magnetoquasistatic field couplings between the transmitter and the receiver. The sum and ratio functions are inverted to determine the drift-free range and orientation. Linear and angular velocity and acceleration are calculated by applying a filter to reduce noise, and then taking the corresponding derivatives. 1. A method comprising:providing a transmitter configured to transmit quasistatic magnetic fields in one or more transmitter axes;providing a receiver configured to receive quasistatic magnetic fields in one or more receiver axes;transmitting, by the transmitter, the quasistatic magnetic fields in one or more frequency bands;detecting, by the receiver, one or more quasistatic magnetic field couplings between each axis of the one or more transmitter axes and each axis of the one or more receiver axes;calculating a sum function by adding power measurements of all of the one or more quasistatic magnetic field couplings;calculating a ratio function by taking a ratio between all of the power measurements of the one or more quasistatic magnetic field couplings;inverting the sum function and the ratio function by a direct linear inversion calculation;calculating, from the inverted sum function, a drift-free orientation-invariant range between the transmitter and the receiver, the drift-free range-invariant range describing, in a frame of reference, a magnitude of a vector between the receiver and the transmitter;calculating, from the inverted ratio function, one or more drift-free range-invariant orientation angles of the receiver or of the transmitter, the one or more drift-free range-invariant orientation angles describing an orientation of the receiver or of the transmitter in the frame of reference;calculating, from the inverted ...

PRESSURE SENSOR, ACCELERATION SENSOR, AND METHOD FOR MANUFACTURING PRESSURE SENSOR

According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer. 1. A pressure sensor , comprising:a base; anda sensor unit provided on the base, a transducing thin film having a first surface and being flexible;', 'a first strain sensing element provided on the first surface; and', 'a second strain sensing element provided on the first surface and separated from the first strain sensing element,, 'the sensor unit including a first magnetic layer having a first magnetization being changeable;', 'a first film including oxygen at a first oxygen concentration;', 'a second magnetic layer provided between the first magnetic layer and the first film, the second magnetic layer having a second magnetization being fixed; and', 'a first intermediate layer provided between the first magnetic layer and the second magnetic layer,, 'the first strain sensing element including a third magnetic layer having a third magnetization being changeable;', 'a second film having a second oxygen concentration different from the first oxygen concentration;', 'a fourth magnetic layer provided between the third magnetic layer and the second film, ...

DRIVE DEVICE AND METHOD FOR CONTROLLING THE DRIVE DEVICE

A drive device includes a noise signal calculation unit, a signal correction unit, and a drive controller. The noise signal calculation unit calculates a noise signal corresponding to a magnetic flux generated from a current flowing through a drive coil. The signal correction unit corrects a detection signal detected by a detector based on the noise signal. The drive controller controls a drive signal to be applied to the drive coil based on a corrected signal obtained by the signal correction unit. The noise signal calculation unit acquires an amplitude of a predetermined frequency band including a frequency of a high-frequency drive signal, and calculates the noise signal included in the detection signal based on the acquired amplitude. 1. A drive device comprising:a fixed frame on which one of a drive coil and a magnet facing the drive coil is disposed;a movable frame on which another one of the drive coil and the magnet is disposed and which is movable relative to the fixed frame;a detector that is disposed on one of the fixed frame and the movable frame on which the drive coil is disposed, and that detects and outputs a detection signal corresponding to a magnetic flux of the magnet;a noise signal calculation unit that calculates a noise signal corresponding to a magnetic flux generated from a current flowing through the drive coil;a signal correction unit that corrects the detection signal detected by the detector based on the noise signal; anda drive controller that controls, based on a corrected signal obtained from correction by the signal correction unit, a drive signal to be applied to the drive coil and that drives the movable frame to a position corresponding to the corrected signal,whereinfrom the detection signal detected by the detector when a drive signal, in which a high-frequency drive signal is superimposed on a drive current to drive the movable frame, is applied to the drive coil, the noise signal calculation unit acquires an amplitude of a ...

SYSTEMS AND METHODS FOR JOINT ACTIVITY MONITORING

Joint analysis system for analyzing kinematics of an anatomical including a sensor device, a storage device, a magnet, and an analysis engine. The sensor device can be configured to be disposed on a first side of the joint and can have one or more sensors, a processor coupled to the one or more sensors, a wireless data transmitter coupled to the processor, a data storage device coupled to the processor, and a battery coupled to the sensors, processor, wireless data transmitter, and data storage device. The magnet can be configured to be disposed on the second side of the joint. The analysis engine can be configured to receive data from the sensors. 1. A joint analysis system for analyzing kinematics of an anatomical joint , the joint having a first side and a second side , the joint analysis system comprising: one or more sensors;', 'a processor coupled to the one or more sensors;', 'a wireless data transmitter coupled to the processor;', 'a data storage device coupled to the processor; and', 'a battery coupled to the sensors, processor, wireless data transmitter, and data storage device;, 'a sensor device, configured to be disposed on the first side of the joint, the sensor device havinga magnet, configured to be disposed on the second side of the joint; andan analysis engine, configured to receive data from the sensors.2. The system of claim 1 , wherein the one or more sensors includes a magnetometer.3. The system of claim 2 , wherein magnetometer sensor is adapted to provide readings that are influenced by the magnetic field provided by the magnet to provide kinematic information of the joint.4. The system of claim 1 , wherein the one or more sensors includes an accelerometer.5. The system of claim 1 , wherein the one or more sensors includes a gyroscope.6. The system of claim 1 , wherein the one or more sensors are further configured to sense stride length.7. The system of claim 1 , wherein the one or more sensors are further configured to sense swing time.8. ...

Mems-based sensor suite

A microelectromechanical (MEMS) sensor suite including a three axis accelerometer including an accelerometer sensor polyhedron having a series of faces, and a series of axial accelerometers on three faces of the series of faces of the accelerometer sensor polyhedron. The MEMS sensor suite also includes a three axis magnetometer including a magnetometer sensor polyhedron having a series of faces, and a series of axial magnetometers on three faces of the series of faces of the magnetometer sensor polyhedron.

ACCELERATION SENSOR, ESPECIALLY DUPLEX ACCELERATION SENSOR, ARRANGEMENT AND METHOD FOR DETECTING A LOSS OF ADHESION OF A VEHICLE TIRE

The invention relates to an acceleration sensor, especially a duplex acceleration sensor, an arrangement and a method for detecting a loss of road grip of a vehicle wheel (). The acceleration sensor comprises a tube () having a longitudinal axis forming a circular arc segment, and two closed ends. A mass () is arranged inside the tube () such that is able to move inside the tube () in the longitudinal direction thereof. A magnet arrangement () is designed to counteract, by way of a magnetic force exerted on the mass (), a movement of said mass () from an idle position (), and a read-out unit () is designed to detect a movement of said mass () from the idle position (). 115.-. (canceled)16. An arrangement for detecting a loss of road grip of a vehicle wheel , comprising:a first acceleration sensor, anda warning unit coupled to the first acceleration sensor, the warning unit designed to inform a vehicle driver of the loss of road grip if a loss of road grip is detected by the acceleration sensor.17. An arrangement in accordance with claim 16 ,further comprising a second duplex acceleration sensor opposite to the first acceleration sensor.18. An arrangement in accordance with claim 16 , comprisinga control unit designed to control the vehicle brake and/or the vehicle engine in order to effect an acceleration of at least one vehicle wheel.19. An arrangement in accordance with claim 18 , comprising:an activation element designed to send, upon activation by a vehicle driver, an acceleration signal to the control unit in order to effect an acceleration of at least one vehicle wheel.20. A method for detecting a loss of road grip of a vehicle wheel claim 18 , comprising the steps of:a) verifying a loss of road grip of a vehicle wheel if the loss of road grip is detected by means of an acceleration sensor, wherein the verifying is executed by way ofi. a change in acceleration of the vehicle wheel by means of a vehicle brake and/or a vehicle engine, andii. the detection of a ...

Single Axis Accelerometer with Inertial Threshold

A single axis accelerometer comprising a swing arm pivotally attached to a frame is held in apposition to a stop by a threshold force until an experienced acceleration force greater than the threshold force causes a distal segment of the swing arm to release from the stop and move toward a sensor that is activated by a sensor trigger on the distal segment of the swing arm. 1. A single axis accelerometer comprising:a frame, a swing arm, a sensor, a printed circuit board (PCB), a stop, and a threshold setting device wherein:the swing arm comprises a proximal segment connected to the frame through a pivoting connection allowing the swing arm to swing around a pivot axis and a distal segment comprising a sensor trigger and a threshold engagement element;wherein:the stop is positioned to block the distal segment of the swing arm from swinging in a first direction;the sensor is positioned to be engaged by the sensor trigger when the distal segment of the swing arm swings in a second direction, opposite the first direction;the PCB communicates with the sensor and is configured to convey sensor data from the sensor to a receiving device;the threshold setting device is positioned in apposition to the stop and the threshold engagement element when the distal segment of the swing arm is in contact with the stop;an interaction between the threshold engagement element and the threshold setting device applies a threshold force in the first direction to the distal segment of the swing arm.2. The single axis accelerometer of claim 1 , wherein the threshold engagement device comprises a magnet and the threshold setting device comprises a ferromagnetic material.3. The single axis accelerometer of claim 2 , wherein the magnet is a permanent magnet.4. The single axis accelerometer of claim 2 , wherein the threshold setting device is configured as a screw extending through a threaded hole in the stop and the threshold force may be increased or decreased by turning the screw.5. The ...

Mobile electronic device, control method and non-transitory storage medium that stores control program

In one of aspects, a mobile electronic device that is configured to determine transportation thereof comprises at least one controller that is configured to, while a predetermined vibration is being detected, determine that the transportation is a train when a predetermined change in magnetic field strength is detected within a predetermined period of time. On the other hand, the at least one controller is configured to determine that the transportation is an automobile when the predetermined change in the magnetic field strength is not detected within the predetermined period of time. The at least one controller is further configured to determine that, when predetermined information regarding rotation of the mobile electronic device is detected, the transportation is an automobile even when the predetermined change in the magnetic field strength has been detected within the predetermined period of time.

BALL SPIN RATE MEASUREMENT SYSTEM AND METHOD

A system and method wherein ball spin rate and axis orientation are determined according to an electronic circuit that includes a magnetometer spin sensor module and, in the alternative, an electronic circuit that includes a spin sensor module with a plurality of accelerometers. 1. A system for determining a spin rate and spin axis orientation of a body in motion , said system comprising: an inertial measurement unit that generates IMU data in accordance with the motion of said body;', 'a spin sensor module that generates spin sensor data in accordance with rotation of said body relative to a reference frame;', 'one or more microcontrollers that manage and execute data acquisition, power management, and communication processes associated with the IMU data and the spin sensor module data;', 'a data storage module for storing data from said spin sensor module or said at least one microcontroller or at least one IMU;', 'a wireless communication module that is in communication with a processing device and that sends said spin sensor data or data from said at least one microcontroller, or data from said at least one IMU;', 'a battery that supplies electrical power for said at least one microcontroller and said wireless communication module; and, 'an electronics circuit that is located in said body, wherein said electronics circuit collects and processes data defining a reference frame of said body and data defining a global reference frame, said electronics circuit including;'} wherein said electronics circuit alone or said processing device alone or said electronics circuit in combination with said processing device determine the spin rate of said body, and', 'wherein the spin rate of said body is determined from said spin sensor data that is segmented according to said IMU data, and', 'wherein said electronics circuit determines selected events of the motion of said body according to said IMU data and wherein said spin sensor data is segmented according to said IMU ...

LIFT SYSTEM HAVING A SIGNAL GENERATION UNIT ARRANGED ON A LIFT CAR OF THE LIFT SYSTEM

An elevator system including a cab displaceably received within an elevator shaft and a linear drive embodied to drive the cab. A sensor is disposed in the elevator shaft and a signal generation unit is disposed on the cab. The signal generation unit is embodied to generate a measurement signal in the sensor, the measurement signal depending on a displacement speed of the cab in the elevator shaft. Further, the elevator system has a safety control unit configured to ascertain an acceleration of the cab on the basis of the measurement signal and to bring the linear drive into a safety operating state should the ascertained acceleration exceed a limit value. 115.-. (canceled)16. An elevator system comprising:a cab displaceably received within an elevator shaft;a linear drive configured to drive the cab;a sensor disposed in the elevator shaft;a signal generation unit disposed on the cab and embodied to generate a measurement signal in the sensor, wherein the measurement signal depends on a speed of the cab in the elevator shaft; anda safety control unit embodied to ascertain an acceleration of the cab on the basis of the measurement signal and to bring the linear drive into a safety operating state when the ascertained acceleration exceeds a limit value.17. The elevator system of wherein the signal generation unit has a plurality of coils claim 16 , wherein a first coil of the plurality of coils is coupled to an alternating current source claim 16 , which is configured to feed the first coil with an alternating current with a first phase displacement and a constant frequency claim 16 , and wherein a second coil of the plurality of coils is coupled to the alternating current source claim 16 , which is configured to feed the second coil with an alternating current with a second phase displacement and the constant frequency.18. The elevator system of wherein the plurality of coils includes a third coil and a fourth coil claim 17 , wherein a difference between the first ...

Arrangement for Displaying the Airflow Conditions Around the Sails and the Procedure for its Application

The subject of the invention is an arrangement for displaying the airflow conditions around the sails, including a wind sensing device (), a central device () and a signal transmission device (), and at least one of the wind sensing devices () being a built-in wind sensor device fixed on the sail (). It is characterized in that the built-in wind sensor device () is connected to the central device () and contains electronic units. The process for the application of the arrangement is also a subject of this invention. 1. An Arrangement for displaying airflow conditions around one or more sails , said arrangement comprising a wind sensor device , a central device and a signal transmission device;wherein at least one of the wind sensing devices being a built-in wind sensor device fixed on the sale, and wherein the built-in wind sensor device is connected to the central device and further comprises a moving unit, at least one accelerometer unit, a signal transmitter unit, a controller unit, and a signal converter unit,characterized in that at least one of the accelerometer units is located in the moving unit.2. The arrangement according to claim 1 , further characterized in that a controller device is located between the built-in wind sensor device and the central device claim 1 , and wherein the wind sensor device and the central device are connected by the signal transmitter device.3. (canceled)4. The arrangement according to claim 1 , in which the arrangement further comprises an external wind sensor device claim 1 , a rudder sensor device and a graphic user interface; and in which the external wind sensor device claim 1 , the rudder sensor device claim 1 , and the graphic user interface are all connected to the central device.5. The arrangement according to further characterized in that the wind sensor device contains at least one magnetic sensor unit and/or magnet claim 1 , and at least one of the magnetic sensor units is located on the moving unit.6. Procedure for ...

Magnetic spin hall effect spintronic accelerometer

An example device for detecting acceleration using a spintronic Hall effect includes a spin Hall effect structure, a Magnetic Tunnel Junction (MTJ) element, a magnetic structure, and processing circuitry. The MTJ element includes a free structure, a pinned structure, and a tunnel barrier arranged between the free structure and the pinned structure. The magnetic structure is spaced apart from the spin Hall effect structure such that a magnetic field generated by the magnetic structure is moved relative to the spin Hall effect structure during acceleration. The processing circuitry is configured to generate electrical current through the spin Hall effect structure, measure a resistance at the MTJ element, and determine acceleration based on the resistance at the MTJ element.

PHYSICAL QUANTITY MEASURING APPARATUS AND SIGNAL PROCESSING METHOD THEREOF

According to one embodiment, a physical quantity measuring apparatus includes a signal measurer configured to include sensors configured to measure component values of two axes from among component values of three axes including an X(Hx), a Y(Hy) and a Z(Hz) measured component value of a physical quantity to be measured, a sensor controller configured to select one from among the sensors to be controlled to output a measured value from the selected sensor, an A/D transformer configured to transform an outputted signal selected by the sensor control unit into a digital signal, and a signal processor configured to receive the digital signal from the A/D transformer and to combine the received digital signal with other received digital signals to calculate X, Y and Z component values of the physical quantity. 1. A physical quantity measuring apparatus , comprising:a signal measurer comprising sensors configured to measure component values of two axes from among component values of three axes comprising an X (Hx), a Y (Hy), and a Z (Hz) measured component value of a physical quantity to be measured;a sensor controller configured to select one from among the sensors to be controlled to output a measured value from the selected sensor;an A/D transformer configured to transform an outputted signal selected by the sensor control unit into a digital signal; anda signal processor configured to receive the digital signal from the A/D transformer and to combine the received digital signal with other received digital signals to calculate X, Y and Z component values of the physical quantity.2. The physical quantity measuring apparatus of claim 1 , further comprising:an amplifier configured to amplify the outputted signal selected by the sensor controller, wherein each physical quantity outputted by the amplifier comprises only components for two axes.3. The physical quantity measuring apparatus of claim 1 , wherein the sensors comprise:a first sensor configured to measure the Hx ...

BALL SPIN RATE MEASUREMENT SYSTEM AND METHOD

A system and method wherein ball spin rate and axis orientation are determined according to an electronic circuit that includes a magnetometer spin sensor module and, in the alternative, an electronic circuit that includes a spin sensor module with a plurality of accelerometers. 1. A system for determining the spin rate and spin axis of a body in free flight , said system comprising: an inertial measurement unit that generates data in accordance with the movement of said body relative to a starting location and an ending location;', 'a spin sensor module that generates data in accordance with the rotation of said body relative to a reference frame;', 'at least one microcontroller that manages and executes data acquisition, data computation, power management and communication processes associated with data generated by said inertial measurement unit and said spin sensor module;', 'a storage module for storing data from said spin sensor or said at least one microcontroller;', 'a wireless communication module that is capable of receiving instruction data from a remote device and that sends data from said spin sensor module or said at least one microcontroller to a computing device;', 'a battery that supplies electrical power for said microcontroller and said wireless communication module; and, 'an electronics circuit that is located in said body, said electronics circuit including;'}a device that is capable of communicating with said wireless communication module, said device processing data from said electronics circuit to display the spin rate of said body.2. The system of wherein the spin rate is determined by said electronics circuit.3. The system of wherein the spin rate is determined by said device.4. The system of wherein said spin rate is determined by said electronics circuit alone or said device alone or said electronics circuit in combination with said device.5. The system of wherein said spin sensor module determines selected events of the object's motion ...

Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece

Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characteristic can depend on the relative motion between the magnetic field and the conductive material of the microfeature workpiece. The characteristic can include the strength of the magnetic field, current in an electromagnet circuit used to create the magnetic field, force exerted on the magnetic field source, or movement of the magnetic field source. The apparatus can include a feedback control device to adjust the rotation speed of the microfeature workpiece based on the characteristic detected.

Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece

Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characteristic can depend on the relative motion between the magnetic field and the conductive material of the microfeature workpiece. The characteristic can include the strength of the magnetic field, current in an electromagnet circuit used to create the magnetic field, force exerted on the magnetic field source, or movement of the magnetic field source. The apparatus can include a feedback control device to adjust the rotation speed of the microfeature workpiece based on the characteristic detected.

Micromechanical sensor device

Mikromechanische Sensorvorrichtung (100), aufweisend: – eine erste ungehäuste Sensoreinrichung (10); und – wenigstens eine zweite ungehäuste Sensoreinrichtung (20), wobei die Sensoreinrichtungen (10, 20) miteinander funktional verbunden sind, wobei die Sensoreinrichtungen (10, 20) im Wesentlichen vertikal derart übereinander angeordnet sind, dass eine in der Grundfläche größere Sensoreinrichtung (10) eine in der Grundfläche kleinere Sensoreinrichtung (20) vollständig überdeckt. Micromechanical sensor device (100), comprising: - a first unhoused sensor device (10); and - at least one second unhoused sensor device (20), wherein the sensor devices (10, 20) are functionally connected to one another, wherein the sensor devices (10, 20) are arranged substantially vertically above one another such that a sensor device (10) which is larger in the base area a completely smaller in the base area sensor device (20) completely covered.

Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism

A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.

Magnetic transduction sensor device, manufacturing process and detection process therefrom

A magnetic pressure sensor device comprises at least one magnetic layer able to vary a magnetisation associated thereto in response to a pressure (P) exerted thereon. The device comprises a plurality of layers arranged in a stack, the magnetic layer able to vary a magnetisation associated thereto in response to a pressure (P) comprising a free magnetic layer, able to be associated to a temporary magnetisation (MT), the free magnetic layer belonging to said plurality of layers, which further comprises at least a spacer layer and a permanent magnetic layer associated to a permanent magnetisation (MP). The sensor device further comprises a compressible layer and a layer with high magnetic coercivity associated to the plurality of layers.

Spring member for acceleration sensor, acceleration sensor and magnetic disk drive apparatus

A spring member for an acceleration sensor for detecting acceleration in a direction of a Z-axis that is perpendicular to an X-Y plane includes a movable section having a plane plate shape, for fixing a magnetic field generation member with weight of the acceleration sensor, and a single support arm section having a strip shape parallel to a plane of the movable section when no acceleration is applied. One end of the single support arm section is integrally connected to one end of the movable section and the other end of the single support arm section is fixed. Only the single support arm section in a cantilever configuration supports the movable section.

Acceleration sensor and magnetic disk drive apparatus

An acceleration sensor includes a housing member, a spring member attached to the housing member, a magnetic field generation member fixed to the housing member, and at least one magnetic field detection sensor and a weight member, fixed to the spring member so that the at least one magnetic field detection sensor faces the magnetic field generation member. The spring member has freedom in at least one direction of acceleration to be detected. The at least one magnetic field detection sensor is provided with at least one multi-layered MR element including a magnetization fixed layer and a magnetization free layer. A magnetic field is applied to the at least one multi-layered MR element from the magnetic field generation member in a direction substantially perpendicular to a lamination plane of the at least one multi-layered MR element when no acceleration is applied. When an acceleration is applied, the magnetic field is applied to the at least one multi-layered MR element from the magnetic field generation member in a direction changed by an angle corresponding to the applied acceleration from the substantially perpendicular direction.

Deformation sensor and method for detecting a deformation

A sensor has a substrate having a mechanically deformable region, a magnetostrictive spin-valve sensor element being arranged to detect a mechanical deformation of the mechanically deformable region. On the substrate, there is a device for generating a controllable magnetic field by which a performance of the sensor element is influenced.

一种轴向变化的隧道磁阻加速度测量系统及其测量方法

本发明公开了一种轴向变化的隧道磁阻加速度测量系统，包括：外框、悬臂梁、磁场源和隧道磁电阻桥；悬臂梁位于外框内部，且其一端与外框固定连接，另一端为自由端，其自由端的运动方向与加速度的输入方向相同；磁场源固定于悬臂梁的自由端，其用于产生均匀的梯度磁场；隧道磁电阻桥为由多个隧道磁电阻连接成的惠斯通电桥结构；隧道磁电阻桥固定于外框表面，并与磁场源位置对应，且其磁敏感方向与加速度的输入方向垂直。本发明能够实现加速度到位移量、位移量到磁场变化、磁场变化到电场的高精度转换，具有易实现、高精度和低噪声的特性。

manual accelerometer calibrator

본 발명에 따른 수동형 가속도계 캘리브레이터는 수평 프레임; 상기 수평 프레임에 수직으로 형성된 수직 프레임; 상기 수직 프레임에 회전가능하게 연결된 회전축; 상기 회전축의 일측에 탈부착가능한 가속도계; 및 상기 회전축의 타측에 상기 회전축을 회전시키는 핸들을 포함하는 것을 특징으로 한다. A passive accelerometer calibrator according to the present invention includes a horizontal frame; A vertical frame formed perpendicular to the horizontal frame; A rotating shaft rotatably connected to the vertical frame; An accelerometer detachably attached to one side of the rotary shaft; And a handle for rotating the rotary shaft on the other side of the rotary shaft.

Automatic accelerometer calibrator

An automatic accelerometer calibrator according to the present invention includes a horizontal frame, a vertical frame which is vertical to the horizontal frame, a rotation shaft which is rotatably connected to the vertical frame, an accelerometer which is detachable from one side of the rotation shaft, and an encoder motor which rotates the rotation shaft at the other side of the rotation shaft.

一种基于双层线圈敏感结构的隧道磁阻式微加速度计装置

本发明涉及一种基于双层线圈敏感结构的隧道磁阻式微加速度计装置,该加速度计装置由顶层隧道磁阻传感器结构，中间层双层线圈敏感结构以及底层支撑结构构成，顶层隧道磁阻传感器结构包括两个对称布置的隧道磁阻传感器，位于中间层双层线圈敏感结构的正上方。中间层敏感结构的质量块上布置有上下两层线圈，上下两层线圈向内通过中间连接电极相连，向外分别连接到位于锚点中心位置的表层输入电极、表层输出电极。中间层双层线圈敏感结构与顶层隧道磁阻传感器结构分别通过锚点组件和支撑框架固定到底层支撑结构，从而构成统一整体。该方案具有易于加工，线性度好，灵敏度高，宽量程等诸多优点。

Accelerated velocity meter

내용 없음. No content.

Accelerometer with silicon pendulum assembly which improves scale factor linearity under high-g acceleration

PURPOSE: A silicon pendulum assembly embedded type accelerometer is provided to improve linearity of output of an accelerometer and to perform accurate detection of acceleration by preventing distortion of torque coefficient and to maintain a scale factor constant by allowing a pendulum assembly to perform motion of straight line with respect to input acceleration. CONSTITUTION: A silicon pendulum assembly embedded type accelerometer includes a reference plate(1), an upper cover(2), a pendulum assembly(3), an upper magnet assembly(4), a lower magnet assembly(5), a coupling ring(6) and a fixing ring(7). The pendulum assembly includes a thin pendulum plate(9) made of a single crystalline silicon and a support frame(11). A protrusion unit(10) formed on and below the support frame is fixed between two magnet assemblies by being supported by two insulation rings. The pendulum assembly is assembled in an aligned state between the two magnet assemblies. The upper/lower magnet assemblies consist of an upper/lower magnet housings, magnets and magnet caps. The upper/lower magnet housings are coupled with the insulation rings. The pendulum assembly and the upper/lower magnet housings are connected to a servo electronic circuit through an internal terminal plate.

Tunnel magnetoresistance MEMS accelerometer structure based on magnetic film and control method

本发明属于加速度计技术领域，具体涉及一种基于磁膜的隧道磁阻MEMS加速度计结构及控制方法，底层结构包括整体支撑框架、加速度计检测梁、质量块，加速度计检测梁固定在整体支撑框架的内侧面，质量块通过加速度计检测梁固定在整体支撑框架的中央，中层结构包括磁膜阵列，磁膜阵列键合在质量块上，磁阻支撑框架固定在整体支撑框架的上方，磁阻基板通过支撑梁固定在磁阻支撑框架上，磁阻基板设置在质量块的正上方，磁阻基板上固定有隧道磁阻元件。本发明提出的加速度计利用磁膜阵列产生高变化率磁场，不需要外加激励，具有结构简单、灵敏度高、可靠性好，寿命长、制作成本低，功耗低等特点。本发明用于加速度的检测。

Horizontal axis sensitive tunnel magnetic resistance accelerometer device based on 3D prints

本发明提供如了一种基于3D打印的水平轴敏感的隧道磁阻加速度计装置，包括：顶部隧道磁阻传感元件结构、中部敏感部件结构、底部隧道磁阻传感元件结构，中部敏感部件结构为3D打印而成；中部结构通过3D立体支撑梁支撑在基座之上，分别位于中部结构的上下两侧，且关于中部结构上下对称布置。本发明采用3D打印代替硅微加工工艺，尺寸精确、加工便捷；敏感部件采用3D立体支撑梁，在测量上具有可靠性好、灵敏度高、抗干扰能力强等优点，支撑梁和质量块都使用尼龙材料进行3D打印而来，其在水平方向有较好的位移能力，同时在垂直方向有更好的抑制能力；立体支撑梁采用双层“U型”梁相反布置，能有效增强敏感部件的稳定性，提高装置的可靠性。

A kind of single shaft mems accelerometer

本发明公开了一种单轴MEMS加速度计。该加速度计包括磁场源，用于产生梯度磁场，磁场源的位置固定；隧道磁电阻芯片，为具有隧道磁电阻传感器的芯片，隧道磁电阻芯片用于感知磁场大小和方向的变化；隧道磁电阻芯片的数量为两个，分别位于所述磁场源的两侧，隧道磁电阻芯片与磁场源位于同一直线上，隧道磁电阻芯片的磁敏感方向与磁场源的磁矩方向位于同一直线上，且隧道磁电阻芯片关于所述磁场源对称，隧道磁电阻芯片在加速度的作用下能够沿所述直线在同一方向上移动。本发明提供的加速度计与现有技术中的加速度测量仪器相比，提高了加速度的测量精度，扩大了加速度的测量范围。

Using the accelerometer based on MLU for the magnetic tunnel-junction

本公开涉及一种基于MLU的加速计，包括：至少一个MLU单元，包括位于具有固定的第一磁化方向的第一磁性层与具有能够改变的第二磁化方向的第二磁性层之间的隧道势垒层；检测质量，包括具有引起检测质量场的检测质量磁化的铁磁材料，所述检测质量弹性地悬浮，以便能够在经受加速度向量时沿至少一个方向偏斜，所述检测质量经由所述检测质量场磁耦合到所述至少一个MLU单元；以及读取模块，配置用于确定所述至少一个MLU单元的每个的磁阻，以便从检测质量相对于所述至少一个MLU单元的任一个的偏斜来确定加速度向量。

Satellite accelerometer

FIELD: measuring equipment. SUBSTANCE: satellite accelerometer of pendulum type contains a body, a pendulum with inertial mass, a torsion suspension, a displacement sensor, a feedback compensation system. There are two pendulum limiters in the construction, rigidly attached to the body of the device. One is located in the mass center of the pendulum, and the second is located along the axis of the torsion suspension of the pendulum. EFFECT: increased sensitivity threshold of the satellite accelerometer. 4 cl, 6 dwg РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2 627 014 C1 (51) МПК G01P 15/105 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ (21)(22) Заявка: 2016130705, 27.07.2016 (24) Дата начала отсчета срока действия патента: 27.07.2016 Дата регистрации: (45) Опубликовано: 02.08.2017 Бюл. № 22 Адрес для переписки: 141091, Московская обл., г. Королев, мкр. Юбилейный, ул. М.К. Тихонравова, 27, руководителю "НИИ КС имени А.А. Максимова" (54) СПУТНИКОВЫЙ АКСЕЛЕРОМЕТР (57) Реферат: Изобретение относится к области измерительной техники, а именно к измерительным преобразователям линейного ускорения, а также к области космической техники. Спутниковый акселерометр маятникового типа содержит корпус, маятник с инерционной массой, торсионный подвес, датчик перемещений, компенсационную систему R U 2 6 2 7 0 1 4 1478826 A1, 23.09.1990. RU 52486 U1, 27.03.2006. US 4649748 A1, 17.03.1987. US 7406868 B2, 05.08.2008. Стр.: 1 C 1 C 1 (56) Список документов, цитированных в отчете о поиске: RU 2514150 C1, 27.04.2014. SU 2 6 2 7 0 1 4 (73) Патентообладатель(и): Российская Федерация, от имени которой выступает Государственная корпорация по космической деятельности "РОСКОСМОС" (Госкорпорация "РОСКОСМОС") (RU), Федеральное государственное унитарное предприятие "Государственный космический научно-производственный центр им. М.В. Хруничева" (RU) Приоритет(ы): (22) Дата подачи заявки: 27.07.2016 R U 02.08.2017 (72) Автор(ы): Дубовской Владимир ...

Inertial sensor

A kind of differential type single shaft mems accelerometer based on anisotropic-magnetoresistance effect

本发明公开一种基于各向异性磁电阻效应的差分式单轴MEMS加速度计，所述差分式单轴MEMS加速度计包括：晶圆框体，所述晶圆框体包括中心竖框，所述中心竖框将所述晶圆框体的内部空间分为两个封闭的框室；磁源，所述磁源设置在所述晶圆框体的中心竖框中；支撑梁、检验质量块、AMR芯片，各所述框室内均容置有一个支撑梁、检验质量块、AMR芯片，且各所述AMR芯片的中心与磁源的中心在同一水平线上，所述磁源到各所述AMR芯片的距离相同，使得各所述AMR芯片的磁敏感方向与磁源的磁矩方向相同，且各所述检验质量块的位移方向与磁矩方向在同一条直线上，以保证各所述AMR芯片只感受到单一方向的磁场。本发明差分式单轴MEMS加速度计，可提高加速度的测量精度和测量范围。

Micromechanical sensor device

본 발명은 미세 기계 센서 장치(100)에 관한 것으로서, 이 센서 장치는, 패키징되지 않은 제1 센서 요소(10)와, 패키징되지 않은 하나 이상의 제2 센서 요소(20)를 포함하며, 이들 센서 요소(10, 20)는 서로 기능적으로 연결되어 있고, 이들 센서 요소(10, 20)는 패키지 면적이 상대적으로 더 큰 센서 요소(10)가 패키지 면적이 상대적으로 더 작은 센서 요소(20) 위에 완전히 겹쳐지도록 실질적으로 수직으로 서로 적층 배치된다. The present invention relates to a micromechanical sensor device 100, the sensor device, A first sensor element 10 that is not packaged, One or more second sensor elements 20 that are not packaged, these sensor elements 10 and 20 are functionally connected to each other, and these sensor elements 10 and 20 are sensor elements having a relatively larger package area. 10 are disposed substantially vertically stacked on each other such that the package area is completely overlaid on the sensor element 20 having a relatively smaller package area.

Spring member for acceleration sensor, acceleration sensor and magnetic disk drive device

【課題】 小型化が容易であり、小型化を図った場合にも安定した高感度のＺ軸方向加速度検出を行うことができる加速度センサ用のばね部材、加速度センサ及び磁気ディスクドライブ装置を提供する。 【解決手段】 Ｘ−Ｙ平面に垂直なＺ軸方向の加速度を検出する加速度センサ用のばね部材であって、平板形状を有しており加速度センサの磁界発生錘部材を取り付けるための可動部と、加速度の印加されていない時に可動部の平面と平行となる帯板形状を有しており一端が可動部の一端に一体的に結合しており他端が固定されている単一の帯板形状の支持アーム部とを備えており、可動部が単一の支持アーム部のみによって片持ち支持されている。 【選択図】 図５

Space accelerometer

Изобретение относится к области космической техники. Акселерометр содержит корпус, физический маятник в виде осесимметричного стержня, измеритель периода колебаний, включающий электрическую схему со встроенным в маятник вдоль его оси светодиодом, в месте, смещенном от середины рабочего цикла качания маятника внутри панели, крепящейся к корпусу акселерометра, имеется фотодатчик, включающий в себя объемную щелевую диафрагму и фотоэлемент. Ось щели маятника перпендикулярна вектору качания маятника. Подвес маятника представляет собой широкую кольцевую и узкоцилиндрическую части опоры качания, являющиеся соответственно подвижной и неподвижной частями подвеса маятника. Имеется активная система термостатирования акселерометра. Технический результат – высокоточное определение ускорения поступательного движения космического аппарата. 4 ил. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2 721 589 C1 (51) МПК G01P 15/105 (2006.01) B64G 1/24 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ (52) СПК G01P 15/105 (2020.02) (21)(22) Заявка: 2019123135, 23.07.2019 (24) Дата начала отсчета срока действия патента: 20.05.2020 Приоритет(ы): (22) Дата подачи заявки: 23.07.2019 (45) Опубликовано: 20.05.2020 Бюл. № 14 2 7 2 1 5 8 9 R U (54) Акселерометр космический (57) Реферат: Изобретение относится к области космической техники. Акселерометр содержит корпус, физический маятник в виде осесимметричного стержня, измеритель периода колебаний, включающий электрическую схему со встроенным в маятник вдоль его оси светодиодом, в месте, смещенном от середины рабочего цикла качания маятника внутри панели, крепящейся к корпусу акселерометра, имеется фотодатчик, включающий в себя объемную щелевую диафрагму и фотоэлемент. Ось щели маятника Стр.: 1 перпендикулярна вектору качания маятника. Подвес маятника представляет собой широкую кольцевую и узкоцилиндрическую части опоры качания, являющиеся соответственно подвижной и неподвижной частями подвеса маятника. ...

High-sensitivity acceleration detector based on quantum effect

本发明涉及加速度探测领域，具体提供了一种基于量子效应的高灵敏加速度探测器，本发明提供了一种基于量子效应的高灵敏加速度探测器。本发明中，钉扎层、势垒层、自由层构成磁隧道结。应用时，在加速度的作用下，质量块压缩自由层；同时，应用固定磁场作用于本发明。通过测量在加速度作用下和未在加速度作用下，磁隧道结磁电阻的差异，确定待测加速度。在本发明中，质量块改变了自由层内部的应力，改变了势垒层中产生的量子隧穿，从而改变了磁隧道结的磁电阻。因为自由层的磁性或自旋严重地依赖于其内部的应力，所以本发明具有加速度探测灵敏度高的优点。另外，本发明是基于传统电学的，信号处理简单，器件尺寸小。

Force / pressure sensor

본 발명은 그의 공진 주파수가 검출하려는 작용력에 의해 변할 수 있는 공진 구조물을 지닌 힘센서, 특히 가속도센서 또는 압력센서에 관한 것이다. The present invention relates to a force sensor, in particular an accelerometer or pressure sensor, having a resonant structure whose resonance frequency can be varied by the action force to be detected. 전압(U)을 인가함으로써 힘 센서(10) 기계적 불안정한 지점과 작용점(P SA )의 거리가 조절될 수 있게 된다. By applying the voltage U, the distance between the force sensor 10 mechanical unstable point and the operating point P SA can be adjusted.

Sensor and sensor package

For tracking and determining the method and system of object space

本发明公开了一种用于跟踪和确定物体的位置的方法，包括：基于从外部定位系统中接收到的信号来确定主要位置指示，并使用主要位置指示来确定物体的第一位置；使用惯性传感器或加速计传感器信号来记录周期性运动部分的加速度数据，并在选定的时间段内对加速度数据进行积分，以确定物体的周期性运动部分相对于水平面的倾斜；基于使用磁力计传感器测量物体的周期性运动部分的外部磁场来记录运动物体的方向数据，以确定周期性运动部分相对于外部磁场的取向；计算运动物体在任何方向上的速度；基于第一位置、方向数据和速度数据来确定物体的次要位置指示；以及使用次要位置指示来确定物体的第二位置。

Micromechanical sensor device

본 발명은 미세 기계 센서 장치(100)에 관한 것으로서, 이 센서 장치는, 패키징되지 않은 제1 센서 요소(10)와, 패키징되지 않은 하나 이상의 제2 센서 요소(20)를 포함하며, 이들 센서 요소(10, 20)는 서로 기능적으로 연결되어 있고, 이들 센서 요소(10, 20)는 패키지 면적이 상대적으로 더 큰 센서 요소(10)가 패키지 면적이 상대적으로 더 작은 센서 요소(20) 위에 완전히 겹쳐지도록 실질적으로 수직으로 서로 적층 배치된다.

Triaxial accelerometer device for tunnel magnetic resistance detection

本发明属微惯性导航的技术领域，具体涉及一种隧道磁阻检测的三轴加速度计装置。一种隧道磁阻检测的三轴加速度计装置，主要结构由键合基板、支撑框架、敏感质量块、检测梁、连接块、悬臂梁、检测磁体、隧道磁阻元件、信号线组成，在支撑框架上设置敏感质量块、检测组合梁、悬臂梁，在敏感质量块上设置检测磁体，所述敏感质量块、及位于敏感质量块两侧的检测组合梁共同构成矩形体检测结构，所述矩形体检测结构位于三轴加速度计装置整体结构检测方向的轴线方向上，实现高精度的加速度检测。此装置结构对微弱磁场变化具有高灵敏特性，设计合理、简单，易单片集成，适合微型化。

Magnetic system

FIELD: measuring equipment. SUBSTANCE: invention relates to the field of measuring mechanical parameters, such as accelerations, and can be used to damp the oscillations of sensitive elements of measuring devices. Magnetic system contains at least one electrically conductive element mounted for movement in the working gap of the magnetic system, that consists of two or more identical parts. Each of the parts includes permanent magnets interconnected to form a mosaic structure in which a working gap is formed between two permanent magnets with the same direction of magnetization, at that the parts of the magnetic system and the magnets in each of them are interconnected by opposite magnetic poles, except for one pair of magnets in each of the parts interconnected by the same magnetic poles. EFFECT: increase damping ratio. 1 cl, 2 dwg РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2 683 882 C1 (51) МПК G01P 15/10 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ (52) СПК G01P 15/105 (2018.08) (24) Дата начала отсчета срока действия патента: 25.06.2018 Дата регистрации: 02.04.2019 Приоритет(ы): (22) Дата подачи заявки: 25.06.2018 (45) Опубликовано: 02.04.2019 Бюл. № 10 Адрес для переписки: 607188, Нижегородская обл., г. Саров, пр. Мира, 37, ФГУП "РФЯЦ-ВНИИЭФ" (56) Список документов, цитированных в отчете о поиске: RU 92966 U1, 10.04.2010. RU C 1 2 6 8 3 8 8 2 (73) Патентообладатель(и): Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (RU), Федеральное государственное унитарное предприятие "Российский федеральный ядерный центр - Всероссийский научно-исследовательский институт экспериментальной физики" (ФГУП "РФЯЦ-ВНИИЭФ") (RU) 2244178 C2, 10.01.2005. RU 2343491 C2, 10.01.2009. CN 206785905 U, 22.12.2017. (54) МАГНИТНАЯ СИСТЕМА (57) Реферат: Изобретение относится к области измерения механических параметров, например ускорений, и может быть использовано для демпфирования ...

Anisotropic-magnetoresistance-effect-based differential single-shaft MEMS accelerometer

本发明公开一种基于各向异性磁电阻效应的差分式单轴MEMS加速度计，所述差分式单轴MEMS加速度计包括：晶圆框体，所述晶圆框体包括中心竖框，所述中心竖框将所述晶圆框体的内部空间分为两个封闭的框室；磁源，所述磁源设置在所述晶圆框体的中心竖框中；支撑梁、检验质量块、AMR芯片，各所述框室内均容置有一个支撑梁、检验质量块、AMR芯片，且各所述AMR芯片的中心与磁源的中心在同一水平线上，所述磁源到各所述AMR芯片的距离相同，使得各所述AMR芯片的磁敏感方向与磁源的磁矩方向相同，且各所述检验质量块的位移方向与磁矩方向在同一条直线上，以保证各所述AMR芯片只感受到单一方向的磁场。本发明差分式单轴MEMS加速度计，可提高加速度的测量精度和测量范围。

Accelerometer

Spring member for acceleration sensor, acceleration sensor, and magnetic disk drive device

A kind of two-dimensional magnetic liquid acceleration sensor with magnet shielding structure

一种具有磁屏蔽结构的二维磁性液体加速度传感器，属于惯性传感器技术领域。解决了现有采用永磁体作为惯性质量的二维磁性液体加速度传感器缺少有效的磁屏蔽结构，应用领域受限的问题。该传感器由上盖、橡胶密封圈、惯性块、磁性液体、电极、非导磁保护层、永磁体、壳体、磁屏蔽结构组成。永磁体安装在壳体侧面的凹槽中，每相邻两块永磁体磁极相斥。壳体的前后左右四个侧面设有凸台，凸台上安装有电极。惯性快为非导磁材料制成，浸没于壳体内腔的磁性液体中。非导磁保护层外侧、上盖顶部以及壳体底部均粘接有导磁片，导磁片相互间连接紧密，形成磁屏蔽。该传感器具有有效的磁屏蔽结构，工作时不需远离导磁物质，具有更广泛的应用领域。

Electronic brake control for trailer - with sprung inertial mass and magnetic detector to operate brakes without direct line

The trailer braking system is controlled by a special electronic inertial sensor to operate the brakes when the towing unit brakes, without any brake line connections between the towing unit and the trailer. A sprung inertial mass is displaced by the retardation and moves over a magnetic sensor, with the output of the sensor proportional to the amount of retardation. The output of the sensor controls the amount of braking control for the trailer brakes to prevent the trailer from jackknifing or overrunning. For added control, the circuit is coupled to the brake pedal by a single electrical connection so that the trailer brakes only operate in conjunction with the towing unit brakes.

Two-dimensional acceleration sensor

An acceleration sensor for detecting an acceleration in a plane, and having a housing, and a disk magnet arranged in a magnetic fludi stored in the housing. The movement of disk magnet is limited, i.e., a translational movement or rotational movement thereof can occur only in the plane, by projections formed in the housing, between which projections portions of the magnetic fluid having an increased density are formed adjacent to the poles of the disk magnet so that only a translational movement is allowed, or by small circumferential walls between the housing and the disk magnet and radial projections formed between end walls of the housing and disk magnet so that only a rotational movement is allowed. A Hall element issues a signal corresponding to a position of the disk magnet, to thereby determine the acceleration rate.

SENSOR FOR MOTOR VEHICLE WITH ELECTRONIC REGULATION OF CERTAIN VARIABLES CONCERNING ITS DYNAMICS

Un capteur pour véhicule automobile à régulation électronique du comportement de conduite et de freinage et/ou de l'amortissement des oscillations, en fonction de la vitesse des roues et de l'accélération verticale, est conçu sous la forme d'un capteur à double fonction ou à fonctions multiples en combinant et en réunissant structurellement un transducteur inductif ou magnétorésistif et un système de capteur d'accélération verticale 2 et, si nécessaire, d'autres capteurs. Les signaux mesurés sont transmis à l'extérieur par l'intermédiaire d'une ligne de signaux commune.

IMAGE BLURRECTION CORRECTING DEVICE FOR A CAMERA USING AN ANGULAR ACCELERATION SENSOR AND ANGULAR ACCELERATION SENSOR

A kind of tunnel magnetoresistive based on torsional pendulum type structure declines accelerometer device

本发明公开了一种基于扭摆式结构的隧道磁阻式微加速度计装置，该加速度计装置主要由顶层隧道磁阻传感器元件检测结构、中间层硅微机械结构、底层布有电极的玻璃衬底结构构成。顶层结构和中间层结构通过锚点键合在底层结构之上,从而构成统一整体。中间层外部质量块在外界输入加速度的作用下运动，带动内部质量块和磁片的扭摆。通过顶层隧道磁阻传感器检测磁片形成磁场的变化反应外界输入加速度的变化。本发明提出的隧道磁阻微加速度计装置结构简单、易于加工，具有线性度好、灵敏度高、检测精度高、测量量程宽等诸多优点。

INERTIA TYPE SENSOR

High antidetonation suspension wire pendulum-type accelerometer

本发明公开了一种高抗震悬丝摆式加速度计，包括电路组件、设有电涡流线圈的电涡流传感器组件、悬丝摆组件、涡流片、永磁体组件，悬丝摆组件包括摆框架、弹性支承悬丝，摆框架上有线圈绕组，摆框架一侧边位于永磁体组件的磁场内，涡流片固定于摆框架上与电涡流传感器组件适配，摆框架对应于支承悬丝的侧边上下方设有上、下限位螺钉，对支承悬丝进行限位，防止过震；加电后电涡流线圈内产生高频电流，涡流片表面形成电涡流，线圈绕组在磁场内受磁力作用，悬丝摆组件悬空平衡，受到加速度时，悬丝摆组件产生惯性力矩偏离平衡位置，涡流片产生位移，引起电涡流线圈差动电感变化并转变为电信号，经力矩平衡电信号回路电流反馈，激励涡流片处于平衡位置，反馈的电流信号作为输出，表征加速度大小。

SENSOR FOR MOTOR VEHICLE WITH ELECTRONIC REGULATION OF CERTAIN VARIABLES CONCERNING ITS DYNAMICS

IMAGE BLUR CORRECTION DEVICE FOR PHOTOGRAPHIC APPARATUS HAVING BIMORPH CRYSTAL PLATE

Patent FR2481457B3

MLU based accelerometer using a magnetic tunnel junction

DECELERO (ACCELERO) METER, AND APPLICATION, PARTICULARLY FOR THE CONTROL OF ELECTRICALLY CONTROLLED AXLE BRAKES

Il s'agit d'un décéléro(accéléro)mètre du genre comportant un organe mobile 20, qui est capable de se déplacer à l'encontre de moyens élastiques 21 le sollicitant en permanence en direction d'une butée de repos 22, et un organe fixe 23 qui est propre à délivrer un signal de sortie fonction de la position de l'organe mobile 20. Suivant l'invention, l'organe fixe 23 est un détecteur de proximité apte à délivrer une tension proportionnelle à la distance séparant de lui l'organe mobile 20; il s'agit par exemple d'une sonde à effet Hall. Application notamment à la commande d'un frein d'essieu à commande électrique, en particulier pour véhicule tracté. This is a decelerator (accelerator) meter of the kind comprising a movable member 20, which is capable of moving against elastic means 21 urging it continuously in the direction of a rest stop 22, and a fixed member 23 which is able to deliver an output signal depending on the position of the movable member 20. According to the invention, the fixed member 23 is a proximity detector capable of delivering a voltage proportional to the distance separating from it the movable member 20; it is for example a Hall effect probe. Application in particular to the control of an electrically controlled axle brake, in particular for a towed vehicle.

IMAGE FLOUD CORRECTION DEVICE FOR PHOTOGRAPHIC APPARATUS COMPRISING A BIMORPHIC CRYSTAL PLATE

Le dispositif comporte une lentille de correction de flou constituant une partie au moins d'un objectif photographique et supportée de manière à se déplacer selon une direction sensiblement perpendiculaire à un axe optique de l'objectif. Une plaque de cristal bimorphe 25 est attachée de manière fixe à une première extrémité et est connectée fonctionnellement à ladite lentille de correction de flou d'image. Une tension d'entraînement est appliquée à la plaque de cristal bimorphe 25 pour déplacer la lentille de correction de flou d'image 22 suivant une direction permettant d'annuler un mouvement indésirable de l'axe optique de l'objectif photographique. La lentille correctrice de flou est entraînée en fonction du signal délivré par la bobine. The device comprises a blur correction lens constituting at least part of a photographic lens and supported so as to move in a direction substantially perpendicular to an optical axis of the lens. A bimorphic crystal plate 25 is fixedly attached to a first end and is operatively connected to said image blur correcting lens. A driving voltage is applied to the bimorphic crystal plate 25 to move the image blur correcting lens 22 in a direction to cancel unwanted movement of the optical axis of the photographic lens. The blur correcting lens is driven according to the signal output from the coil.

IMAGE FLOUD CORRECTION DEVICE FOR CAMERA USING ANGULAR ACCELERATION SENSOR AND ANGULAR ACCELERATION SENSOR

Le dispositif comporte une lentille de correction de flou constituant une partie au moins d'un objectif photographique et supportée de manière à se déplacer selon une direction sensiblement perpendiculaire à un axe optique de l'objectif. Un moyen d'entraînement de cette lentille correctrice est associé à un capteur d'accélération angulaire qui détecte l'accélération angulaire appliquée à l'appareil pour envoyer un signal d'entraînement audit moyen en vue d'annuler un mouvement indésirable de l'axe optique de l'objectif. Le capteur d'accélération angulaire comporte un bras capteur rotatif 3 ayant un axe de rotation 4 en son milieu, des aimants permanents 5 à ses extrémités opposées, un capteur magnétique 7 en regard de l'un des aimants permanents et une bobine 8 en regard de l'autre aimant permanent avec un enroulement interceptant le flux magnétique de cet autre aimant permanent. La lentille correctrice de flou est entraînée en fonction du signal délivré par la bobine. The device includes a blur correction lens constituting at least a portion of a photographic lens and supported to move in a direction substantially perpendicular to an optical axis of the lens. A driving means of this corrective lens is associated with an angular acceleration sensor which detects the angular acceleration applied to the apparatus for sending a drive signal to said means for canceling an unwanted motion of the axis. optical lens. The angular acceleration sensor comprises a rotary sensor arm 3 having an axis of rotation 4 in the middle, permanent magnets 5 at its opposite ends, a magnetic sensor 7 facing one of the permanent magnets and a coil 8 facing each other. of the other permanent magnet with a winding intercepting the magnetic flux of this other permanent magnet. The blur correction lens is driven in accordance with the signal delivered by the coil.

High-precision static magnetic suspension accelerometer

本发明公开了一种高精度静磁悬浮加速度计，用于测量飞行器的线性加速度。包括真空磁屏蔽腔系统、磁场位移传感系统、静磁悬浮控制系统和检验磁体。所述加速度计采用磁场位移传感技术来实现对检验磁体位置和姿态的实时精确测量，采用静磁悬浮控制技术来实现对检验磁体位置和姿态的精确回归控制，从而将检验磁体始终控制在腔室中心，同时也是空间飞行器的质心位置；当空间飞行器受到外界非保守力作用时，由于飞行器的加速度将正比于位置控制线圈的电流大小，最终通过位置控制线圈电流的测量即可精确测量加速度的大小和方向。所述加速度计可以避开高精度机械加工的技术瓶颈，制作工艺简单，可以实现更高精度的加速度矢量测量。

Magnetofluidic accelerometer with active suspension

A method of measuring acceleration includes suspending an inertial body using a magnetic fluid; generating a magnetic field within the magnetic fluid; modulating the magnetic field to counteract a change in position of the inertial body relative to sources of the magnetic field due to acceleration; and calculating the acceleration based on the modulation. The calculating step derives the acceleration based on an amount of current through drive coils required for the modulation. The acceleration includes linear acceleration and/or angular acceleration. The drive coils include permanent magnets, electromagnets, or a combination of a permanent magnet and an electromagnet. Sensing coils can be used for detecting the displacement of the inertial body. Each sensing coil can be positioned substantially within a corresponding drive coil. The inertial body can be non-magnetic, weakly magnetic, or have a ferromagnetic coating.

Self-powered electromagnetic motion perception sensor

本发明公开了一种自供能的电磁运动感知传感器，包括磁块、柔性连接体、导电线圈、底部基座和高精度直流电压表组成。磁块通过柔性连接体固定在底部基座上，导电线圈也固定在底部基座，并且通过导线与高精度直流电压表连接在一起。将传感器的底部基座固定在机器人头部，当机器人运动时，传感器上的磁块就会通过柔性连接体将惯性力传输下去从而实现相对摆动，产生一个变化的磁场。底部的导电线圈就会产生感应电压，根据电压的相对大小就可知道磁块的变化方向和相对位移的变化，得知受测物运动状态的变化。本发明结构简单、稳定性好、应用范围广，可以实现自供能，可以实时检测机器人的运动状态，所有材料均是已工业化的材料，成本低，具有较好的实用性。

Movable mass and frictionless support means therefor

Motion sensor and portable telephone using the same

本发明提出了一种可以很容易高精度地实现对3维空间中任何方向的方位、姿势、以及加速度进行检测的动作传感器和使用该动作传感器的手机。本发明提出的动作传感器(1)，具有检测相互垂直的3个轴方向磁场强度的3个磁性感测部(2)和检测3个轴方向加速度的3个加速度感测部(3)。加速度感测部(3)，由与加速度相对应产生位移的磁铁体(31)和检测该磁铁体(31)的位移的磁铁位移感测头(32)所构成。3个磁性感测部(2)和3个磁铁位移感测头(32)具有共同的动作原理，由同类型的磁性检测元件(4)所构成。并且，所使用的控制6个磁性检测元件(4)的1个电子控制回路(12)和3个磁性感测部(2)、以及3个加速度感测部(3)构成一个标准组件，实现了模块一体化。

Vibration rectification error correction circuit, physical quantity sensor module, structure monitoring device, and method for adjusting correction value of vibration rectification error correction circuit

【課題】振動整流誤差の補正に係る演算負荷を低減することが可能な振動整流誤差補正回路を提供すること。【解決手段】物理量を検出可能なセンサー素子から出力された被測定信号に基づいてデジタル値を得て、前記デジタル値をバイアスした値の積に基づく補正関数により前記デジタル値の振動整流誤差を補正する第１の補正回路を含む、振動整流誤差補正回路。【選択図】図７

Control method of drive device and image pickup device

Superconducting accelerometer, acceleration measuring apparatus, and acceleration measuring methid

The present invention provides a superconducting accelerometer, an acceleration measuring device, and an acceleration measuring method. The superconducting accelerometer comprises a body part of a stick shape and a coupling part of a disk shape connected to the body part and arranged to cover a test source of mass formed with a superconducting body and the part of the body part and comprises a solenoid floating coil formed with the superconducting body and magnetically floating the test source of mass, a superconducting coil for measuring arranged at least at one side of the upper part or the lower part of the coupling part, and a SQUID sensor sensing the current according to the variation of the distance between the test source of mass and the superconducting coil for measuring.

Extended range accelerometer

A low noise, extended dynamic range accelerometer useful for sensitive seismic observations. The accelerometer's extended range is obtained by utilizing a single opposing magnetic field to non-linearly oppose movement of a magnetic proof mass. The accelerometer may also utilize an external bias magnetic field located apart from the magnetic proof mass to provide a constant gravitational offset source.