30-05-2013 дата публикации
Номер: US20130134318A1
Принадлежит:
The invention relates to a beam line () for a source of extreme ultraviolet (EUV) radiation, wherein a EUV-radiating plasma is generated by irradiating droplets of a suitable target material with a focused laser beam () at a plasma generation point, said beam line () comprising within a vacuum chamber (): a beam delivery system () comprising a focusing lens and means for cooling and shielding said focusing lens; a EUV mirror collector (), which collects and focuses the radiated EUV in a EUV beam () at an intermediate focus (IF); a beam dump () capable of damping at least a portion of the laser beam () without imposing a shadow on the collected and focused EUV beam (); and an intermediate focus module () for blocking particles from leaving the vacuum chamber () with the EUV beam (). 130406054135304060. A beam line ( , , ) for a source of extreme ultraviolet (EUV) radiation , wherein a EUV-radiating plasma is generated by irradiating droplets of a suitable target material with a focused laser beam ( , ) at a plasma generation point () , said beam line ( , , ) comprising:{'b': 2', '39', '7', '38', '2', '39', '8', '9', '10', '11', '13', '14', '15', '8, 'a beam delivery system (, ) within a vacuum chamber (, ), the beam delivery system (, ) comprising a focusing lens () and means (, , , , , ) for cooling and shielding said focusing lens ();'}{'b': 1', '50', '64', '6', '55', '63', '70, 'a EUV mirror collector (, , ), which collects and focuses the radiated EUV in a EUV beam (, , , ) at an intermediate focus (IF);'}{'b': 3', '42', '5', '41', '6', '55', '63', '70, 'a beam dump (, ) capable of damping at least a portion of the laser beam (, ) without imposing a shadow on the collected and focused EUV beam (, , , ); and'}{'b': 4', '51', '7', '38', '6', '55', '63', '70, 'an intermediate focus module (, ) for blocking particles and/or radiation from leaving the vacuum chamber (, ) with the EUV beam (, , , ).'}287. A beam line according to claim 1 , wherein the focusing lens () ...
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