LICHTKOLLEKTOR

Beleuchtungsoptik für die EUV-Projektionslithographie

Eine Beleuchtungsoptik für die EUV-Projektionslithographie dient zur Beleuchtung eines Objektfeldes mit Beleuchtungslicht. Die Beleuchtungsoptik hat einen ersten Facettenspiegel mit einer Mehrzahl von ersten Facetten auf einem ersten Spiegelträger, die zwischen mehreren Kippstellungen umstellbar sind. Dem ersten Facettenspiegel nachgeordnet ist ein zweiter Facettenspiegel (10) mit einer Mehrzahl von zweiten Facetten (11), die auf einem zweiten Spiegelträger (10a) um ein Facetten-Anordnungszentrum (12) angeordnet sind. Teilbündel des Beleuchtungslichts werden jeweils über Ausleuchtungskanäle, zu denen eine der ersten Facetten und eine der zweiten Facetten (11) gehört, einander überlagernd in das Objektfeld geführt. Am zweiten Spiegelträger (10a) sind randseitig zweite Maximalwinkel-Facetten (11M) angeordnet. Letztere geben maximal von einer Hauptstrahl-Inzidenz auf dem Objektfeld abweichende, maximale Beleuchtungswinkel des Beleuchtungslichts vor. Der zweite Spiegelträger (10a) hat einen ...

LED-Strahler

Strahler (1) mit einem topfartigen Reflektor (5) sowie einer am Boden des Reflektors (5) angeordneten LED-Lichtquelle (10), dadurch gekennzeichnet, dass innerhalb des Reflektors (5) eine Blende (20) angeordnet ist, welche auftreffendes Licht absorbiert und derart ausgestaltet und angeordnet ist, dass sie eine direkte Abstrahlung von Licht verhindert.

Bildabtastvorrichtung

Eine Bildabtastvorrichtung besitzt eine Linear-Lichtquelle (2), um eine lineare Beleuchtungsposition eines Abtastobjektes (1) mit Licht zu beleuchten, einen Linsenkörper (3) und einen Sensor (4). Die Linear-Lichtquelle (2) beinhaltet einen Lichtleiter (21), einen Streukörper (22), einen Strahler (23), einen Stufenbereich (24) und ein Lichtabschirmungselement (25). Der Stufenbereich (24) ist von der Endfläche des transparenten Körpers entlang der Hauptabtastrichtung auf einer Seite des Lichtleiters (21) ausgebildet, die der Seite der Beleuchtungsposition des Lichtleiters (21) gegenüberliegt. Das Lichtabschirmungselement (25) bedeckt einen Bereich des Strahlers (23) des Lichtleiters (21), wobei der Bereich die Endfläche des transparenten Körpers einschließt, und erstreckt sich über den Stufenbereich (24) in der Hauptabtastrichtung hinaus und hat einen Endbereich, der sich außerhalb eines Abtastbereichs des Sensors (4) in der Hauptabtastrichtung befindet.

Beleuchtungssystem mit genestetem Kollektor zur annularen Ausleuchtung einer Austrittspupille

Die Erfindung betrifft ein Beleuchtungssystem, das eine Lichtquelle und eine Feldebene aufweist für Wellenlängen 193 nm, insbesondere < 126 nm, besonders bevorzugt im EUV-Bereich, umfassend DOLLAR A wenigstens einen Kollektor, umfassend wenigstens eine um eine Achse rotationssymmetrisch angeordnete Spiegelschale zur Aufnahme eines Teiles des Lichtes der Lichtquelle, so dass eine im Lichtweg nach dem Kollektor angeordnete Aperturblendenebene annular ausgeleuchtet wird. DOLLAR A Die Erfindung ist dadurch gekennzeichnet, dass DOLLAR A wenigstens eine Spiegelschale derart ausgebildet ist, dass ein helles Bild der Lichtquelle in einer zur Feldebene defokussierten Ebene ausgebildet wird, so dass die Feldebene in einem vorgegebenen Bereich weitgehend homogen ausgeleuchtet wird.

LIGHT COLLECTING DEVICE

PARABOLIC REFLECTOR SYSTEM

A device to focus to a point parallel electromagnetic or sound waves, eg a solar power station, that consists of a reflector KLMN curved in one direction to a parabola, that reflects incoming waves onto a secondary reflector PQRS which is also curved to a parabola in one direction only. The two reflectors are so placed so as to concentrate the incoming parallel waves to a point focus F. The polar axis EG of the secondary reflector PCRS forms an acute angle theta with the axial plane ABCD of the primary reflector KLMN. The device may be mounted on a mechanism to allow the device to track the source of energy, eg in the case of a solar power station, the sun. The device can be mounted so that as it tracks the source of energy the focal point F remains stationary. The operation of the device can be reversed to create outgoing parallel waves of energy from a point source F. ...

LIGHT COLLECTING DEVICE

Reflective scatter detector

COMPOUND PARABOLIC REFLECTOR

Dispersive Optical Systems

... 1,163,314. Utilizing radiation detectors. PERKIN-ELMER CORP. Sept.29, 1966 [Oct. 4, 1965], No.43658/66. Heading G1A. [Also in Divisions G2 and H1] A resonant optical circulator employing two spherical mirrors is over illuminated off-axis by a laser output beam so that if the frequency of the laser output changes the mode pattern in the circulator is spatially shifted. A frequency stabilizer arrangement, Fig. 1, of helium neon laser 58 includes an optical resonator 24 constituted of a pair of multi-layer dielectric coated spherical mirrors 20, 22 separated by a distance slightly less than their radius of curvature. The output beam 26 of the laser is focused to an off-axis point 28 on mirror 22 so that the light is reflected back to mirror 20 to line 30 and then to point 28 on mirror 22 where the major portion of the light is reflected back to line 38 to begin another cycle. The output beam 34 is directed on to the apex of a prism 44 acting as a beam splitter. If the beam of light 26 falling ...

Non imaging radiant energy direction device

A raidant energy nonimaging light direction device is provided. The device includes an energy transducer and a reflective wall whose contour is particularly determined with respect to the geometrical vector flux of a field associated with the transducer.

LIGHT COLLECTORS IN CYLINDRICAL GEOMETRY

Solar energy control

Solar energy control

Conversion of solar energy to electrical and/or heat energy

Solar energy control

Concentrating optical Dispisitif for receivers of radiations.

Solar energy control

Conversion of solar energy to electrical and/or heat energy

OPTICAL SYSTEM WITH MULTIPLE REFLECTION

LATTICE OF BASING SPECTRAL FILTERS FOR THE SUPPRESSION OF RADIATION OUTSIDE OF THE UTILIZABLE VOLUME IN ONE EXTREME-ULTRAVIOLET LITHOGRAPHY SYSTEM

ARRANGEMENT FOR MICROSCOPIC OBSERVATION AND/OR DETECTION IN A LIGHT RASTER MICROSCOPE WITH LINIENFÖRMIGER SCANNING AND USE

VORRICHTUNG ZUM BESTRAHLEN VON FLAECHEN MIT ULTRAVIOLETTSTRAHLUNG

DEVICE FOR ILLUMINATING SURFACES WITH ULTRAVIOLET RADIATION

EMISSION DEVICE FOR ELECTROMAGNETIC, IN PARTICULAR INFRARED RADIATION.

Solar reflecting and condensing device using thin film

A solar reflecting and condensing device using a thin film includes a condensing film (2), a bottom plate (3) for surface forming and a focus fixing bracket (4) for surface forming. The condensing film (2) is a planar film with a reflecting cladding or a total reflection condensing film of micro-prisms, and is arranged on the top surface of the bottom plate (3). The bottom plate (3) is a thin plate, which is adhered to the top surface of the focus fixing bracket (4), and forms a surface shape and a precisely positioned focus, meeting optical requirements, together with the focus fixing bracket (4).

COUPLING OF LIGHT FROM A LIGHT SOURCE TO A TARGET USING DUAL ELLIPSOIDAL REFLECTORS

ELLIPSOID-CONIC RADIATION COLLECTOR AND METHOD

Disclosed is a radiation collector apparatus and method primarily for counting and analyzing a flow of dilute particulate material, such as blood cells, sperm cells and the like, through the use of light detection. The radiation collector apparatus comprises a reflector chamber having an ellipsoidal reflector surface with a pair of ellipsoidal foci defining a first focus, f11, and second focus, f12, and a second reflector surface with a primary focus, f21, positioned at the same point as focus f12, and a secondary focus, f22. The second reflector surface has the configuration of one of the conic sections of revolution. In operation the radiation collector apparatus is provided with an intensifed beam of light and a stream of particulate material aligned to intersect the intensifed beam of light at focus f11. Detectable light signals, after two reflections, are received in a focused beam by a photosensitive detector.

COUPLING OF LIGHT FROM A SMALL LIGHT SOURCE FOR PROJECTION SYSTEMS USING PARABOLIC REFLECTORS

A portion of a first paraboloid (30) collects and concentrates randomized light from a lamp (20) into parallel beams directed to a portion of a second paraboloid (40) which refocuses the light onto a homogenizer (60). The second paraboloid has a shape that is substantially similar to the first paraboloid reflector. The source and the target are located at the respective foci of the paraboloids such that the optical flux from the source is imaged to the target with minimal distortion in an approximately no magnification imaging system. The system may be configured to control wavelength and intensity by inserting an additional filter. In addition, a retro-reflector may be added to increase the overall flux density at homogenizer. The output is particular suitable for providing light to the light engine of projectors.

COUPLING OF LIGHT FROM A LIGHT SOURCE TO A TARGET USING DUAL ELLIPSOIDAL REFLECTORS

A condensing and collecting optical system includes a first reflector (20) and second reflector (30). The first and second reflectors and includes a portion of an ellipsoid of revolution having two focal points (24, 26) and an optical axis (22). A source of electromagnetic radiation is placed at one of the focal points of the first reflector to produce radiation that converges at the second focal point (26) of the first reflector. The second focal points (26, 36) of the reflectors coincide. The second reflector is positioned to receive the radiation after it passes through a second focal point of the second reflector and focuses the radiation toward a target positioned at the first focal point of the second reflector. To achieve maximum illumination at the target, the first and second reflectors are substantially of the same size and shape and positioned in optical symmetry with respect to one another so that radiation reflected from a surface portion of the first ellipsoidal reflector ...

LIGHT-CONCENTRATING LENS ASSEMBLY FOR A SOLAR ENERGY RECOVERY SYSTEM

A light-concentrating lens assembly for a solar energy system, the assembly comprising a plurality of concentrically arranged paraboloid mirror reflectors, a conical light guide extending below the plurality of paraboloid mirror reflectors, an inner central cone disposed along a central axis of the concentrically arranged paraboloid mirror reflectors, and a compound paraboloid concentrator disposed beneath the inner central cone.

NONIMAGING OPTICAL ILLUMINATION SYSTEM

A nonimaging illumination optical device for producing a selected far field illuminance over an angular range. The optical device includes a light source (102), a light reflecting surface (108), and a family of light edge rays defined along a reference line (104) with the reflecting surface (108) defined in terms of the reference line (104) as a parametric function R(t) where it is a scaler parameter position and R(t) = k(t)+Du(t) where k(t) is a parametrization of the reference line (104), and D is a distance from a point on the reference line (104) to the reflection surface (108) along the desired edge ray through the point.

Absorptionsmessvorrichtung, insbesondere für Mikrospektralanalyse

Dispositif optique concentrateur pour récepteurs de rayonnements

SEPARATING DEVICE OF A LIGHT BEAM EMITTED BY A SOURCE AND A REFLECTED BEAM COAXIALLY RECEIVED BY A SENSOR.

OPTICAL ELEMENT.

Parallel light ray condensing device for e.g. barbecue, has collector mirror reflecting incident rays with or without concentration effect, where rays are completely concentrated in progressive manner when collector mirror concentrates rays

The device has rotating mirrors such as collector and concentrator mirrors (1, 2), arranged in a concentric manner. The collector mirror reflects radially parallel incident rays with or without concentration effect. The concentrator mirror reflects the rays by concentrating the rays towards a focus spot situated on an optical axis downstream from the device. The optical axis is confounded with a rotational axis of the mirrors. The rays are completely concentrated in a progressive manner when the collector mirror concentrates the rays.

Method for producing a curved concentrator for a solar collector in two dimensions.

Die Erfindung betrifft ein Verfahren zum Herstellen eines in zwei Dimensionen gekrümmten Konzentrators mit einer im Betrieb druckbelasteten konzentrierenden Membran, die für verbesserte Konzentration durch über die Druckbelastung p A hinaus zu einer Druckbelastung p B überformt und danach wieder teilweise bis zu einer Druckbelastung p C entlastet wird. Dadurch lässt sich eine höhere Konzentration realisieren, als es ohne Überformung möglich ist.

ПРЕОБРАЗОВАНИЕ СОЛНЕЧНОЙ ЭНЕРГИИ В ЭЛЕКТРИЧЕСКУЮ И/ИЛИ ТЕПЛОВУЮ

Параболическое первичное зеркало (10) имеет вогнутую зеркальную поверхность (12), которая выполнена и расположена так, чтобы принимать солнечную энергию и фокусировать ее в направлении фокусной точки. Вторичное зеркало (14) имеет выпуклую зеркальную поверхность (16), которая выполнена и расположена так, чтобы принимать сфокусированную солнечную энергию от первичного зеркала и фокусировать ее на кольцевой приемник (18). Кольцевой приемник (18) может содержать кольцевую матрицу оптических элементов (100), выполненную так, чтобы принимать солнечную энергию от вторичной зеркальной поверхности (14) и фокусировать ее на кольцо дискретных областей. Кольцо устройств для солнечно-электрического преобразования расположено на кольце дискретных областей. Солнечный датчик, который позволяет точно отслеживать положение солнца, используется для ориентации системы зеркал на солнце.

LIGHT MODULE FOR MOTOR VEHICLE COMPRISING SEMICONDUCTOR LIGHT SOURCE

DISPOSITIF ET PROCEDE DE PREPARATION COLLECTIVE DE FIBRES OPTIQUES PAR UN TRAITEMENT THERMIQUE

SELON L'INVENTION, LE FAISCEAU D'UN LASER 1 A DIOXYDE DE CARBONE EST TRANSFORME EN UN FAISCEAU ANNULAIRE. SELON UNE PREMIERE VARIANTE, LE FAISCEAU ANNULAIRE EST CREE A L'AIDE D'UN AXICON 2 ET FOCALISE A L'AIDE D'UN MIROIR SPHERIQUE MOBILE 3. LE FOYER DE FOCALISATION 31 EST DEPLACE DE FACON A BALAYER SEQUENTIELLEMENT LES FIBRES OPTIQUES F A F. SELON UNE SECONDE VARIANTE LE FAISCEAU ANNULAIRE, CREE PAR UN REFLEXICON, EST UN FAISCEAU CONVERGENT EN UNE REGION ENGLOBANT TOUTES LES FIBRES OPTIQUES A TRAITER. APPLICATIONS DU DENUDAGE, A LA CASSURE, A L'EPISSURAGE COLLECTIFS DE NAPPES DE FIBRES OPTIQUES OU A LA CREATION COLLECTIVE DE LENTILLES HEMISPHERIQUES AUX EXTREMITES DE FIBRES OPTIQUES.

METHOD FOR SHAPING A SHEET OF GLASS AND MIRROR COMPRISING A GLASS SHEET

Source optical projector for arc lamp with high efficiency.

SEPARATING BODY Of a BEAM OF LIGHT EMITTED BY a SOURCE AND Of a COAXIAL CONSIDERED BEAM RECEIVED BY a SENSOR

Device intended to prevent the parasitic beams in the projectors and the headlights

Dispositif concentrateur de rayonnements.

La présente invention concerne un dispositif concentrateur de rayonnements constitué d'éléments cylindriques symétriques par rapport à un plan (P) de même direction que les rayonnements. Ce dispositif est caractérisé en ce qu'il comprend au moins deux éléments concentrateurs, situés de part et d'autre du plan (P), et comprenant chacun un réflecteur principal dont la base est constituée d'un arc de parabole (AA'), et un réflecteur secondaire, constitué d'au moins deux éléments (B'C',BC), dont la base est constituée de deux arcs d'ellipse, chacun de ces arcs d'ellipse étant terminé par une extrémité amont (B,B') déterminant un segment de droite (BB') sur lequel est disposé le foyer (F) de l'arc de parabole constituant la base du réflecteur principal (10,50,52) et une extrémité aval (C,C'), la distance (d) étant telle que chaque réflecteur secondaire (12,60,62,82) est en contact par sa paroi la plus proche du plan de symétrie P du concentrateur avec un réflecteur secondaire adjacent.

Systeme de miroirs pour le guidage d'une onde electromagnetique

Systeme de miroirs pour le guidage d'une onde electromagnetique. Selon l'invention, ce systeme comprend au moins deux miroirs concaves M1, M2 en forme de portion de cylindre, la concavite de l'un des miroirs etant tournee vers l'autre miroir, les plans de section droite des deux miroirs etant perpendiculaires. Application au guidage d'ondes millimetriques ou submillimetriques pour la physique des plasmas.

Multiple reflection optical system - has reflecting member comprising two concave mirrors, one with focal length 1.5 times that of other

Multiple reflection optical system - has reflecting member comprising two concave mirrors, one with focal length 1.5 times that of other

THERMAL SOLAR PANEL HAS HIGH OUTPUT

Le panneau solaire thermique (10) comprend au moins un élément de collecte thermique (18) destiné à recevoir des rayons solaires. Il comporte un logement (20) pour l'élément de collecte thermique (18), ce logement (20) étant délimité par des parois (22, 24, 26) entourant l'élément de collecte thermique (18). Au moins l'une de ces parois (22, 24, 26) comporte au moins une zone réfléchissante agencée en regard de l'élément de collecte thermique (18), cette zone réfléchissante étant propre à réfléchir un rayonnement thermique émis par l'élément de collecte thermique (18).

COLLECTING MIRROR Of a SOLAR CONCENTRATOR HAS LINEAR MIRRORS OF FRESNEL

L'invention a pour objet un miroir collecteur (2) constitutif d'un concentrateur solaire à miroirs de Fresnel linéaires. Le miroir collecteur (2) comprend une bande réfléchissante. Le miroir collecteur (2) est pourvu d'un dispositif apte à générer une dépression (AP) à l'arrière de la bande réfléchissante (6).

LIGHTING DEVICE WITH SUPPLY AREA LOCAL PHOTON AND PHOTON DISTRIBUTION

Un dispositif d'éclairage (DE) comprend des diodes électroluminescentes (D1-D4) et un guide de lumière (GL) plat et comportant une partie de guidage (PG) placée entre des faces d'entrée (FE) et de sortie (FS). La face d'entrée (FE) alimente en photons la partie de guidage (PG), et la face de sortie (FS) délivre à l'extérieur des photons guidés. Les diodes électroluminescentes (D1-D4) sont toutes placées en regard respectivement de zones d'entrée (ZE1-ZE4), définies dans une zone d'alimentation (ZA) de la face d'entrée (FE) située en regard d'une première zone de sortie (ZS1) de la face de sortie (FS), et agencées pour répartir les photons reçus dans des secteurs angulaires (SA1-SA4) prédéfinis afin d'induire sur une seconde zone de sortie (ZS2) de la face de sortie (FS), située à côté de la première zone de sortie (ZS1), une intensité lumineuse décroissante à partir de la première zone de sortie (ZS1).

Analytic microscopy device, capable of forming both a Raman probe and an electronic probe

OPTICAL RADIATION SOURCE INCLUDING/UNDERSTANDING a SEMICONDUCTOR LASER AND MEANS Of ANAMORPHOSIS OF the BEAM EMITTED BY THIS LASER

Reflectors for radiation source to angle of controlled maximum side radiation

La présente invention concerne un réflecteur pour source de rayonnement, de type plan ou cylindrique, constitué de deux éléments de réflecteur (1, 1') disposés symétriquement par rapport à un plan (P) contenant l'axe longitudinal du réflecteur, caractérisé en ce que chaque élément de réflecteur (1, 1') est constitué d'au moins une partie cylindrique dont les génératrices sont parallèles a l'axe longitudinal du réflecteur, la section droite de cette partie cylindrique étant constituée d'une "courbe à construction par rayons extrêmes", c'est-à-dire une courbe telle que les rayons réfléchis par les extrémités respectives (F'1, B; F1 , B') de cette courbe constituent deux rayons extrêmes formant avec le plan de symétrie (P) des angles respectifs (thetaA et thetaB ), tous les rayons réfléchis sur ledit élément de réflecteur étant compris entre lesdits angles respectifs (thetaA et thetaB ).

Solar energy conversion unit - using an optical concentrator directing energy to a photovoltaic cell

ILLUMINATION SYSTEM FOR NON-IMAGING REFLECTIVE COLLECTOR

CONCENTRATING DAYLIGHT COLLECTOR

LIGHT-EMITTING DEVICE

A light-emitting device (100) comprising four light sources (101, 102, 103, 104) in quadrangular arrangement, and a collimating element (110) arranged to collimate and mix light emitted by said light sources is provided. The collimating element has a receiving side (111) for receiving light from said light sources and an opposite output side (112), and comprises two intersecting V-shaped profile surfaces (120, 130), the edges of said V-shaped profile surfaces (125, 135) being arranged towards said receiving face (111). The collimating element is capable of collimating the light from the four light sources and obtain a good color mixing, such that light from each light source is collimated to essentially the same degree. © KIPO & WIPO 2009 ...

Composite film for light emitting apparatus, light emitting apparatus and method for fabricating the same

Provided is a composite film used for a light emitting apparatus including a light emitting device. The composite film includes a fluorescent layer including phosphors and an optical plate disposed on the fluorescent layer, and diffusing, reducing or mixing at least one of light emitted by the light emitting device, light emitted by the phosphors and a combination thereof.

Reflector for a lighting device and illumination system of a projection apparatus

A reflector for the lighting device and an illumination system of the projection apparatus are provided. The reflector comprises a first reflecting structure and a second reflecting structure disposed on a portion of the first reflecting structure. The reflecting surfaces of the first and second reflecting structures are formed with a distance therebetween. After the first portion of the light is reflected through the first reflecting surface and the second portion of the light is reflected through the second reflecting surface, the second portion of the light is adapted to retrieve the central dim area at the opening of the lighting device. Thus, the luminance performance can be improved.

DEVICE FOR GENERATING A LINEAR INTENSITY DISTRIBUTION OF A LASER BEAM IN A WORKING PLANE

A device for generating a linear intensity distribution (10) of a laser beam in a working plane (11) comprising at least one laser light source (2), optical means (3) which can form a plurality of sections (4) of the laser beam, and reflecting means on which the sections (4) of the laser beam formed by the optical means (3) can be reflected in such a manner that they are arranged adjacent to one another by the reflecting means in the working plane (11) in the longitudinal direction of the linear intensity distribution (10) to be generated and are combined into the linear intensity distribution (10). The reflecting means comprise particularly a plurality of mirror modules (5, 5').

LED COLLIMATION OPTICS MODULE PROVIDING AN ISOLATION FITTING

An LED collimation optics module (16) providing an isolation fitting and luminaire (10) using the same are disclosed. In one embodiment of the LED collimation optics module (16), an LED chip (30) provides a plurality of sources of light (G, R, B, W). An optical conductor (32) is superposed on the LED chip (30) to mix the light received from the plurality of sources of light (G, R, B, W). A sleeve is connected to the LED chip (30) and positioned about the optical conductor (32) such that an annulus (102) is located therebetween. After passing through the optical conductor (32), the mixed light enters a compound parabolic concentrator (34) which is coupled to the optical conductor (32). The compound parabolic concentrator (34) collimates the light received from the optical conductor (32) such that a homogeneous pupil is emitted.

SPECTRA SHAPING SCHEME FOR CHIRPED PLUSE AMPLICATION

A spectra shaping scheme for chirped pulse amplification (CPA), uses a CTSI spectral decomposition system (6, 2, 3, 4, 10), a CTSI spectral synthesizing system (4′, 3′, 2′, 6′), and a spectral modulating system (10, 5), wherein the CTSI spectral decomposition system (6, 2, 3, 4, 10) and CTSI spectral synthesizing system (4′, 3′, 2′, 6′) are symmetrical to each other. The scheme includes the following steps: totally and truly expanding the laser chirped pulse to the spectral plane by the CTSI spectral decomposition system (6, 2, 3, 4, 10), performing the spectral modulation on the image plane by the spectral modulating system (10, 5), and reverting the modulated spectra into the chirped pulse without distortion by the CTSI spectral synthesizing system (4′, 3′, 2′, 6′), thereby realizing the spectra shaping.

ILLUMINATORS USING REFLECTIVE OPTICS WITH RECYCLING AND COLOR MIXING

Various optical techniques are described for obtaining a specified light output from an LED source. One technique uses a parabolic reflector surrounding an LED or LED array to create a collimated beam, and the light exit opening of the parabolic reflector is defined by a reflective disc with an opening of the desired size. Any generated light that is outside of the opening is reflected back into the parabolic reflector and re-reflected until the light exits the opening. For mixing different light colors from different LEDs or energized phosphors, a mixing tunnel is used. The mixing tunnel includes angled dichroic mirrors or angled polarizer mirrors that selectively reflect and pass selected colors or polarizations of light to a single output port of the mixing tunnel. Efficient and compact ways to energize phosphors are also described. Other optical techniques are also described.

LOW COST FOCUSSING SYSTEM GIVING HIGH CONCENTRATIONS

There is disclosed a focussing system for concentrating radiation onto a target surface, comprising: a first reflective element forming part of the surface of a cone axially aligned along a first alignment axis, the first reflective element being positioned such that when planar radiation is incident on the first reflective element in a direction parallel to the first alignment axis, the planar radiation is focussed towards a first focus lying along the first alignment axis, wherein said part of the surface of a cone is contained within a sector having an included angle of less than 180 degrees; and a second reflective element having a reflective surface that at all points is flat in a direction parallel to a single reference direction, the second reflective element being positioned between the first reflective element and the first focus such that, when planar radiation is incident on the first reflective element in a direction parallel to the first alignment axis, radiation reflected ...

REFLECTOR/CULLMINATOR

L'invention concerne une lampe de signalisation d'alerte à diodes électroluminescentes (LED), dont la pluralité de sources lumineuses est montée, avec un réflecteur ou un collimateur. La source lumineuse à diodes électroluminescentes est en communication électrique avec un régulateur et un bloc d'alimentation, une batterie ou une autre source électrique. La lampe de signalisation d'alerte fournit des signaux lumineux de couleurs différentes correspondant à une utilisation autonome ou sur un véhicule de secours. Les signaux lumineux peuvent être notamment ceux d'une lampe stroboscopique, d'un gyrophare, d'un feu clignotant, d'une lampe à éclats, d'une lampe à modulation, d'une lampe pulsatoire, d'une lampe à lumière oscillante ou d'une lampe combinant n'importe quels de ces principes. En outre, la lampe de signalisation d'alerte permet l'affichage de symboles, de caractères inversés, ou de flèches. Le régulateur peut, par ailleurs, être adapté de manière à réguler ou à moduler l'intensité ...

MULTIPATH OPTICAL MATRIX SYSTEM

The multipath optical matrix system comprises two main reflex objectives (6, 9) and an additional reflex objective (22) which are arranged on a holder (8). The holder (8) is mechanically connected with means (12, 20) which turn the holder about axes perpendicular and parallel to a line of an image matrix. In front of the holder (8) a main reflex collective (24) and an auxiliary reflex collective (25) are disposed along the longitudinal axis of the system.

Corrective optics for rectangular laser beams

An optical apparatus is described which reshapes rectangular cross-section laser beams, with toroidal divergence to generally square cross-section beams with plain or spherical divergence. The apparatus uses either two spherical mirrors or two pairs of spherical mirrors.

ELECTROMAGNETIC RADIATION CONCENTRATING APPARATUS EMBODYING FRUSTOCONICAL MIRROR ELEMENTS

Solar concentrator with restricted exit angles

A device is provided for the collection and concentration of radiant energy and includes at least one reflective side wall. The wall directs incident radiant energy to the exit aperture thereof or onto the surface of energy absorber positioned at the exit aperture so that the angle of incidence of radiant energy at the exit aperture or on the surface of the energy absorber is restricted to desired values.

Illuminating device

An illuminating device for use with an imagewise exposing arrangement of an electrophotographic copier, electrostatic printer or similar image recording equipment. A delimited area of a glass platen is illuminated by a light source and a main reflector which is implemented by a mirror. The main reflector is located outside of one end of the delimited area. Three auxiliary reflectors are individually associated with, among four sides which are individually associated with the outer edges of the delimited area, a side facing the one end where the main reflector is provided and two facing sides which adjoin the above-mentioned side. Light reflected by the main reflector is redirected by the auxiliary reflectors toward the delimited area.

Optical system for infrared spectroscopy having an aspherical concave mirror

An optical system for a high-sensitivity reflectivity measurement equipment having a simple structure enhances the light utilization efficiency and simplifies the production process and reduces the cost. An aspherical concave mirror with a predetermined range opened at the central portion and one focal point set on the outside of the end surface of the opening is used. The region width of the mirror surface measured from the plane the opening is so determined that the incident light from a proper light source and reflected by the mirror surface to enters the sample placed at the focal point at an incident angle theta where 60 DEG Подробнее

Secondary reflectors for solar collectors and methods of making the same

The present disclosure relates to a device that includes a reflecting surface having a length aligned along a first axis (z), where a cross-section of the reflecting surface in a plane perpendicular to the first axis (z) forms a curve comprising a concave section positioned between a first endpoint and a second endpoint, at least a portion of the concave section is accurately approximated by a polynomial equation, an aperture is formed by a straight line connecting the first endpoint to the second endpoint, and the concave section is configured to focus a plurality of beams of light passing through the aperture onto a focal point.

Light integrator for more than one lamp

A light integrator is provided, the light integrator comprising a body for integrating light, the body having a length and a light egress end. The light integrator further comprises a first light entrance device for accepting light from a first lamp into the body, the first light entrance device comprising a first light entrance face, the first light entrance device located distal the light egress end. The light integrator further comprises a second light entrance device for accepting light from a second lamp, the second light entrance device comprising a second light entrance face, the second light entrance device laterally displaced from the first light entrance device in a direction generally perpendicular to the first light entrance face, such that light from the first and second lamps independently enter the integrator via the first and second light entrance devices respectively, and exit the light egress end. The second light entrance device is further displaced from the first light ...

LED LIGHTING DEVICE FOR AN OPERATING FIELD COMPRISING A LIGHT BEAM DIVIDER

An LED lighting device comprises first and second LEDs arranged to respectively emit first and second beams of white light having first and second different respective colour temperatures, and a beam splitter arranged to split the first and second light beams respectively into a first reflected portion of the first and second beams and a second transmitted portion of the first and second beams. The LED's and the beam splitter are arranged spatially such that the transmitted portion of the first beam and the reflected portion of the second beam overlap into a first resulting beam of intermediate colour temperature between the first and second colour temperatures, and the reflected portion of the first beam and the transmitted portion of the second beam overlap into a second resulting beam of the same intermediate colour temperature.

Light-Concentrating Mechanism, Photovoltaic Power Generation Device, Window Structure, and Window Glass

[Problem] To provide a light-concentrating mechanism that is suitable for photovoltaic power generation. [Solution] This light-concentrating mechanism comprises an angle selective reflection means that reflects light having an incident angle of at least a first threshold angle and transmits at least some of the light having an incident angle smaller than the first threshold angle, and an angle-increase reflection means that reflects incident light at an angle greater than the incident angle of said light, the two means being arranged so as to have a gap therebetween. The angle-increase reflection means reflects, at an angle that is equal to or greater than the first threshold angle, at least some of the light that has been transmitted by the angle-selective reflection means, and the angle-selective reflection means reflects the light that has been reflected by the angle-increase reflection means and has an angle that is equal to or greater than the first threshold angle, and light is propagated and concentrated by the gap between the angle-selective reflection means and the angle-increase reflection means. 1. A light-concentrating mechanism comprising:an angle-selective reflector that reflects light having an incidence angle equal to or larger than a first threshold angle and transmits at least a portion of light having an incidence angle smaller than the threshold angle; andan angle-increasing reflector includes a flat holographic optical element that reflects incident light at an angle larger than an incidence angle thereof, the reflectors being disposed with a gap therebetween, whereinthe angle-increasing reflector reflects at least a portion of the light having passed through the angle-selective reflector at an angle equal to or larger than the first threshold angle,the angle-selective reflector reflects light having an angle equal to or larger than the first threshold angle, reflected by the angle-increasing reflector, andlight is concentrated by causing the ...

Collector for an illumination system with a wavelength of less than or equal to 193 nm

There is provided a collector for guiding light with a wavelength of <=193 nm onto a plane. The collector includes a first mirror shell for receiving a first ring aperture section of the light and irradiating a first planar ring section of the plane with a first irradiance, and a second mirror shell for receiving a second ring aperture section of the light and irradiating a second planar ring section of the plane with a second irradiance. The first and second mirror shells are rotationally symmetrical and concentrically arranged around a common axis of rotation, the first and second ring aperture sections do not overlap with one another, the first planar ring section substantially abuts the second planar ring section, and the first irradiance is approximately equal to the second irradiance.

IMAGE SCANNING DEVICE

An image scanning device includes a linear light source to illuminate a linear illumination position of a scan target with light, a lens body, and a sensor. The linear light source includes a light guide, a scatterer, an emitter, a stepped portion, and a light-shielding member. The stepped portion is formed, from the end surface of the transparent body along the main scan direction, on a side of the light guide that is opposite to the illumination position side of the light guide. The light-shielding member covers a portion of the emitter of the light guide, the portion including the end surface of the transparent body, and extends beyond the stepped portion in the main scan direction and has an end portion that is located out of a scan range of the sensor in the main scan direction.

Method and apparatus for forming a straight line projection on a semiconductor substrate

The present invention relates to an apparatus for irradiating a semiconductor comprising a curved mirror with a reflective surface of revolution, and a point source generating an irradiation beam being incident on the curved mirror along an incident direction, characterized in that the curved mirror and the point source form a system having an axis of revolution wherein the point source is provided on or near said axis of revolution, and that said axis of revolution substantially coincides with a straight line projection to be generated on a semiconductor substrate. Additionally, the present invention relates to the use of such apparatus for manufacturing a selective emitter grid, or for irradiating a large area semiconductor surface in a scanning movement.

Infrared microscopic spectrometer

LIGHTING DEVICE WITH LOCAL PHOTON SUPPLY AREA AND PHOTON DISTRIBUTION

УСТРОЙСТВО ДЛЯ УПРАВЛЕНИЯ СОЛНЕЧНОЙ ЭНЕРГИЕЙ

... 1. Затворное устройство для солнечной энергии, предназначенное для использования в системе собирания солнечной энергии, которая содержит солнечный концентратор, выполненный с возможностью направления сфокусированного пучка солнечной энергии на приемник солнечной энергии, и устанавливаемое между указанным концентратором и приемником для избирательной задержки части пучка солнечной энергии, содержащее, по меньшей мере, одну затворную пластину, перемещаемую из открытого положения вблизи пучка солнечной энергии в закрытое положение, в котором, по меньшей мере, часть пучка солнечной энергии попадает на переднюю поверхность затворной пластины для предотвращения попадания на приемник; контур охлаждения, выполненный с возможностью обеспечения циркуляции охлаждающей текучей среды для отвода тепла от затворной пластины; привод затвора, выполненный с возможностью перемещения, по меньшей мере, одной затворной пластины из открытого положения в закрытое положение; и орган управления затвором, связанный ...

Appts. for forming laser beam for coaxial laser unit

Appts. for forming a laser beam (12) with cross section in the form of a ring sector includes a first mirror (20) with a surface shaped as a cone sector, and a second mirror (24) with a surface shaped as a parabolic cylinder. The line focus of this cylinder coincides at least approximately with the cone axis (30) of the first mirror (20). The appts. (20,24) is used with a coaxial laser unit, in particular, a coaxial waveguide laser unit with a resonator (6,8).

Optische Linse für eine photodiodenbestückte Vorrichtung

Die Erfindung betrifft eine optische Linse (10) für eine photodiodenbestückte Vorrichtung, welche an und/oder in der photodiodenbestückten Vorrichtung derart anordbar ist, dass von mindestens zwei Photodioden der photodiodenbestückten Vorrichtung emittierte Lichtstrahlen (14) durch eine Lichteintrittsseite (S1) der optischen Linse (10) in die optische Linse (10) transmittieren und an einer Lichtaustrittsseite (S2) der optischen Linse (10) aus der optischen Linse (10) austreten, und für welche eine mittig durch die Lichteintrittsseite (S1) und mittig durch die Lichtaustrittsseite (S2) verlaufende Mittellängsachse (16) definierbar ist, wobei die Lichteintrittsseite (S1) der optischen Linse (10) und die Lichtaustrittsseite (S2) der optischen Linse (10) jeweils als eine Freiformfläche zur außeraxialen Projektion derart ausgebildet sind, dass die von den auf einer Kreisbahn um die Mittellängsachse (16) angeordneten Photodioden (32) emittierten Lichtstrahlen (14) mittels der optischen Linse ( ...

GITTER BASIERTER SPEKTRALER FILTER ZUR UNTERDRÜCKUNG VON STRAHLUNG AUSSERHALB DES NUTZBANDES IN EINEM EXTREM-ULTRAVIOLETT LITHOGRAPHIESYSTEM

A lamp

A lamp with a concave surface 123 with an apex 109. The apex has a light absorbing area surrounded by a reflecting area. The lamp is configured to receive a light source 117 such that the light source is directed towards the light absorbing area, which is preferably a substantially flat matt surface. The reflecting area may form an annular area around the light absorbing area. The light source may be located at the focal point of the concave surface, which may be hemispherical, paraboloid or conical. The lamp may have an arm 115 bridging the concave surface, which houses the light source, preferably at the focal point of the concave surface. The arm may have a further light absorbing portion, preferably a matt surface, facing the apex of the concave surface. The light source is preferably a light emitting diode.

Improvements in or relating to infrared and/or ultraviolet lights

Self-collimator concave spectral shaping device for chirped-pulse-amplification

light condensing unit

REFLECTOR FOR ELECTROMAGNETIC RADIATION

Device for separating a beam of light emitted by a source and a coaxial reflected beam received by a receiver

In order to separate the beam F1 emitted by a source e.g. a laser 3 from the beam F2 reflected by a surface S following the same path there is used a mirror 1 which may be spherical having an aperture 2 which transmits the emitted beam and focuses the reflected beam on a photo-detector 6. Beam F1 may be scanned across the surface S using a scanning device e.g. mirrors 4 and 5. ...

Electromagnetic radiation concentrator

... 1,110,821. Aerials. C. JACOBSEN & CIE. 4 May, 1965 [6 May, 1964], No. 18822/65. Heading H4A. [Also in Divisions F4 and G2] An electromagnetic radiation concentrator, particularly for use in the infra-red, comprises a front system 9, Fig. 1, of relative aperture 1 - which forms an image of the source in its N focal plane 10, the maximum inclination # 1 to the axis of the system of rays forming the image 1 being such that sin # 1 #-, and at least one 2N trunco-conical element 11 of internal refractive index n 1 and apex half-angle of 0À1 radian or less, which converges the beam by internal reflections on its trunco-conical surface, the entry surface 12 of element 11, having the maximum diameter d 1 being disposed in coincidence with image plane 10 and the minimum diameter d x being associated with a sensitive element 14 immersed in a medium 15 of refractive index n 2 wherein: p1 being the maximum number of internal reflections experienced by a ray forming the maximum angle # 1 with ...

Optical device for the concentration and transmission of the radiant flux of a radiation source collected seized with an imaging system and

Backlight unit and liquid crystal display device having the same

A backlight unit has a light source area. The width of the light source area in a first direction is shorter than the width of a liquid crystal panel in the first direction. A plurality of LED modules ( 31 ) are arranged along the second direction perpendicular to the first direction. End lenses ( 41 A, 41 B) and a middle lens ( 42 ) for enlarging a light divergence angle are disposed on the plurality of LED modules ( 31 ). The direction in which the end lens ( 41 A, 41 B) enlarges the light divergence angle differs from that in which the middle lens ( 42 ) enlarges the divergence angle. This structure can reduce difference in brightness of the liquid crystal panel, while reducing the number of light sources.

Optic emitting a simulated floating band of light

An optic includes an LED light source inside a primary reflector, where the primary reflector includes a parabolic trough whose interior surface has a longitudinally extending parabolic first reflective surface that receives light from the light source and emits a fan-shaped beam of light. The LED light source includes an LED die mounted so as to be at or near a focus of the parabolic trough. A selectively shaped secondary reflector is spaced from the primary reflector and has a second reflective surface that is arranged to intersect and reflect the fan of light. The size and shape of the second reflective surface corresponds to the fan of light where the second reflective surface intersects the fan of light. The second reflective surface displays a band of light that appears disassociated from a particular physical surface so as to float in space.

Electromagnetic energy concentrating device and method therefor

An electromagnetic energy concentrating dish ( 22 ) that comprises a contoured polymeric support ( 62 ) and a reflective surface ( 60 ). A contour ( 26 ) is determined that will reflect electromagnetic energy from reflective surface ( 60 ) to a receiver ( 36 ) set at focus region ( 28 ). A net or near net polymeric foam ( 100 ) is machined to form contoured polymeric support ( 62 ) having contour ( 26′ ). Reflective surface ( 60 ) is laid upon contoured polymeric support ( 62 ), and angles of reflection from reflective surface ( 60 ) adjust to reflect electromagnetic energy to focus region ( 28 ).

Systems and methods for optical tracking

Systems and methods for optical tracking are disclosed. One optical tracking system includes a first optical element configured to focus a light beam and a second optical element configured to redirect the focused light beam from the first optical element. The second optical element is configured to move in order to continuously receive the focused light beam during movement of the focused light beam. Another optical tracking system includes an optical element configured to redirect a light beam and a photosensitive material configured to change its optical properties when it receives the redirected light beam, in order to continuously redirect the light beam during movement of the light beam. The optical tracking methods employ the above-described optical tracking systems.

CONCENTRATING DAYLIGHT COLLECTOR

The disclosure generally relates to concentrating daylight collectors, and in particular to concentrating daylight collectors useful for interior lighting of a building. The concentrating daylight collectors generally include a plurality of moveable reflective vanes and a Cassegrain-type concentrator section. 1. A concentrating daylight collector , comprising:a collection section having a first opening for receiving sunlight and an opposing second opening for transmission of sunlight;a plurality of moveable reflective vanes disposed adjacent the first opening for directing received sunlight to the opposing second opening;a parabolic reflector disposed to reflect a major portion of the sunlight passing though the opposing second opening to a hyperbolic reflector disposed adjacent a focal point of the parabolic reflector; andan output aperture disposed to accept sunlight reflected from the hyperbolic reflector.2. (canceled)3. The concentrating daylight collector of claim 1 , wherein at least one of the collection section and the parabolic reflector rotate around a common axis.4. (canceled)5. The concentrating daylight collector of claim 1 , wherein the first opening intersects a central axis of the collection section at an angle less than 90 degrees.6. The concentrating daylight collector of claim 5 , wherein the angle is between about 20 degrees and about 70 degrees.710-. (canceled)11. The concentrating daylight collector of claim 1 , wherein the parabolic reflector and the hyperbolic reflector include a combined concentration ratio between about 2:1 and about 100:1.12. (canceled)13. The concentrating daylight collector of claim 1 , wherein the sunlight transmitted through the output aperture includes a collimation half-angle of no greater than about 20 degrees.14. The concentrating daylight collector of claim 5 , wherein each of the plurality of moveable reflective vanes includes a vane axis of rotation that is orthogonal to the central axis.15. The concentrating ...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ILLUMINATING METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING OPTICAL APPARATUS

An optical apparatus capable of illuminating an irradiation surface under a required illumination condition capable of achieving a high light efficiency while keeping a small light loss due to, for example, the overlap error of illuminating fields. The optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area. 1. An optical apparatus illuminating a first area with light from a light source , the first area being longer in a second direction intersecting a first direction than in the first direction , the optical apparatus comprising:a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; anda first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light from the collector optical member to the first area.2. The optical apparatus according to claim 1 , wherein the first direction is a direction in which the third direction is projected into the first area by an optical system exists between the first fly's eye optical member and the ...

OPTICAL SYSTEM FOR FLUORESCENCE DETECTION AND FINE PARTICLE ANALYZING APPARATUS

An optical system for fluorescence detection includes two parabolic mirrors, a first parabolic mirror and a second parabolic mirror, and fluorescent light beams that are incident from different directions are reflected by the first parabolic mirror as parallel light beams to the second parabolic mirror and are converged at one point by the second parabolic mirror. 1. An optical system for fluorescence detection comprising:two parabolic mirrors, a first parabolic mirror and a second parabolic mirror,wherein fluorescent light beams that are incident from different directions are reflected by the first parabolic mirror as parallel light beams to the second parabolic mirror and are converged at one point by the second parabolic mirror.2. The optical system for fluorescence detection according to claim 1 ,wherein the first parabolic mirror and the second parabolic mirror have reflecting surfaces whose curvatures are different from each other.4. The optical system for fluorescence detection according to claim 1 ,wherein the first parabolic mirror has a numerical aperture NA of 0.5 or more.5. The optical system for fluorescence detection according to claim 1 , further comprising:a plane mirror that reflects one of the fluorescent light beams reflected by the first parabolic mirror to the second parabolic mirror.6. The optical system for fluorescence detection according to claim 1 ,wherein the first parabolic mirror and the second parabolic mirror are disposed with a space therebetween.7. A fine particle analyzing apparatus comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the optical system for fluorescence detection according to .'}8. The fine particle analyzing apparatus according to claim 7 , further comprising:two or more light sources;a plurality of light detectors; anda detection unit,wherein the light sources emit an excitation light beam, and a light beam emitted from a fine particle that is irradiated with the excitation light beam is detected by the ...

Low Cost Focussing System Giving High Concentrations

There is disclosed a focussing system for concentrating radiation onto a target surface, comprising: a first reflective element forming part of the surface of a cone axially aligned along a first alignment axis, the first reflective element being positioned such that when planar radiation is incident on the first reflective element in a direction parallel to the first alignment axis, the planar radiation is focussed towards a first focus lying along the first alignment axis, wherein said part of the surface of a cone is contained within a sector having an included angle of less than 180 degrees; and a second reflective element having a reflective surface that at all points is flat in a direction parallel to a single reference direction, the second reflective element being positioned between the first reflective element and the first focus such that, when planar radiation is incident on the first reflective element in a direction parallel to the first alignment axis, radiation reflected from the first reflective element onto the second reflective element is focussed towards a second focus. A multiple target focussing system comprising a plurality of focussing systems, solar powered systems using focussing systems, kits, telescopes, defocussing light sources, and methods for assembling focussing systems are also disclosed.

Sunlight collection structure, multi light collection method, and sunlight transmission device

The present invention relates to a method for collecting sunlight through an image method by tracking the sun using a dish-shaped light collector or a paraboloidal light collector and, and to a method and an apparatus for transmitting high-density light as the collected sunlight to a remote place, to which the light is applied, and for generating super-high-density light by combining, in a multi-stage manner, the high-density light obtained through a plurality of light collectors. A first concave-paraboloidal reflector of a paraboloidal light collection unit can collect light, transmit the collected light to the remote place, and provide an efficient and quantitative use environment to an applied device by using a paraboloidal reflector set including: a first concave-paraboloidal mirror in which a slope of a paraboloide is provided to make a narrow width so that downward reflection is greater than or equal to 90% by an angle between an incident angle at an inner point of a paraboloidal mirror and a normal surface, the angle being larger than a critical angle, and which has an opening formed at the lower side of a central axis thereof; and a second convex-paraboloidal reflector, which has a small diameter, shares a focus of the first concave-paraboloidal mirror, and has a miniaturized shape of the first concave-paraboloidal mirror at a focal portion without an opening at a central axis thereof.

Solar light collecting mirror and solar thermal power generation system comprising the solar light collecting mirror

Provided are a solar light collecting mirror which can achieve high light collection efficiency even in a solar thermal power generation system such as a tower solar thermal power generation system in which the distance from a reflecting mirror to a heat collector is a long distance between several tens of meters and several hundreds of meters, can be manufactured easily and inexpensively, and can easily achieve concave mirrors with various curvatures, and a solar thermal power generation system using the same. A solar light collecting mirror (SL) of a heliostat ( 15 ) close to a light collecting mirror ( 11 ) serves as a concave mirror with a relatively small curvature by setting the relative rotation amount between a nut (NT) and a bolt (BT) large, and a solar light collecting mirror (SL) of a heliostat ( 15 ) distant from the light collecting mirror ( 11 ) serves as a concave mirror with a relatively large curvature by setting the relative rotation amount between the nut (NT) and the bolt (BT) small, thereby achieving a solar thermal power generation system having high light collection efficiency in total.

SOLAR CONDENSER

A solar condenser, comprising two or more parabolic mirrors; each parabolic mirror is provided with a different focal length and a common focusing plane; the parabolic mirrors consist of a plurality of staggeredly arranged mirror unit groups consisting of more than one reflecting units; the distance between every two parabolic mirrors with different focal lengths is the focal length difference thereof. Through the staggered installation of the reflecting units, the air flow between the mirrors is increased without increasing additional footprint or affecting the light-focusing effect, thus the impact of winds on the mirrors and structures is reduced; and ice, snow and dust do not easily accumulate on the mirrors, thus effectively improving the operational stability of the solar condenser. 1. A solar condenser , comprising a light collecting mirror , wherein the light collecting mirror comprises two or more paraboloidal minors having different focal lengths and mounted in such a manner to have a same focal plane; each of the paraboloidal minors is formed by staggeredly arranging minor unit groups comprising one or more reflecting unit; and the distance between every two paraboloidal minors having different focal lengths is a difference between the focal lengths of the two paraboloidal minors.2. The solar condenser according to claim 1 , wherein claim 1 , the reflecting unit is a glass minor or reflecting film having specular reflection performance.3. The solar condenser according to claim 1 , wherein claim 1 , each of the one or more reflecting unit has a sector shape claim 1 , a trapezoidal shape or any other geometrical shape.4. The solar condenser according to claim 1 , wherein claim 1 , each of the minor unit groups of each paraboloidal minor is formed by arranging the reflecting units of the paraboloidal minor in a radial direction of the condenser claim 1 , and two adjacent minor unit groups having different focal lengths are staggeredly arranged in a ...

Light-Concentrating Lens Assembly for a Solar Energy Recovery System

A light-concentrating lens assembly for a solar energy system, the assembly comprising a plurality of concentrically arranged paraboloid mirror reflectors, a conical light guide extending below the plurality of paraboloid mirror reflectors, an inner central cone disposed along a central axis of the concentrically arranged paraboloid mirror reflectors, and a compound paraboloid concentrator disposed beneath the inner central cone. 1. A light-concentrating lens assembly for a solar energy system , the assembly comprising:a plurality of concentrically arranged paraboloid mirror reflectors;a conical light guide extending below the plurality of paraboloid mirror reflectors;a reflective inner central cone disposed along a central axis of the concentrically arranged paraboloid mirror reflectors; anda compound paraboloid concentrator disposed beneath the inner central cone.2. The light-concentrating lens assembly as claimed in wherein the conical light guide extends from a bottom of a most radially outward reflector to an upper periphery of the compound paraboloid concentrator.3. The light-concentrating lens assembly as claimed in comprising a top glass plate disposed on top of the plurality of concentrically arranged paraboloid mirror reflectors.4. The light-concentrating lens assembly as claimed in wherein a thickness of the top glass plate is substantially equal to a thickness of each reflector.5. The light-concentrating lens assembly as claimed in wherein a thickness of the top glass plate is equal to 90-110% of a thickness of each reflector.6. The light-concentrating lens assembly as claimed in wherein a gap between successive paraboloid mirror reflectors is greater than a thickness of each of the paraboloid mirrors reflectors.7. The light-concentrating lens assembly as claimed in wherein a ratio of a gap between successive paraboloid mirror reflectors to a thickness of each of the paraboloid mirror reflectors is between 1 and 2.8. The light-concentrating lens assembly ...

Off-axis cassegrain solar collector

The disclosure generally relates to concentrating daylight collectors and in particular to concentrating daylight collectors useful for interior lighting of a building. The concentrating daylight collectors generally include a cassegrain-type concentrator section that provides for a full-tracking solar collector with one moving part and with a high efficiency of coupling of collected solar irradiation to a stationary duct. In some cases, the disclosed concentrating daylight collectors can be used more conventionally, such as for directing sunlight onto a photo-voltaic cell for generation of electrical power, or an absorbing surface for extraction of thermal energy.

SYSTEMS AND METHODS FOR FILTERING AND PRESENTING OPTICAL BEACONS OR SIGNALS

Systems and methods for optical narrowcasting are provided for transmitting various types of content. Optical narrowcasting content indicative of the presence of additional information along with identifying information may be transmitted. The additional information (which may include meaningful amounts of advertising information, media, or any other content) may also be transmitted as optical narrowcasting content. Elements of an optical narrowcasting system may include optical transmitters and optical receivers which can be configured to be operative at distances ranging from, e.g., 400 meters to 1200 meters. Additionally, the elements can be implemented on a miniaturized scale in conjunction with small, user devices such as smartphones. Moreover, optically narrowcast content may be filtered using at least identification data extracted from optical beacons received from optical transmitters such that only optically narrowcast content of interest is presented on a display and/or stored in a persistent storage. 1. A system , comprising:an optical receiver assembly to receive a plurality of optical beacons, each of the plurality of optical beacons transmitted by a respective optical transmitter assembly;a processor; and obtaining a filter for filtering the presentation of data received from each of the plurality of optical transmitter assemblies;', 'extracting identification data from each of the plurality of received optical beacons;', 'applying the filter to the extracted identification data from each of the plurality of received optical beacons to determine whether to present data extracted from modulated optical beams received from the optical transmitter assembly that transmitted the optical beacon; and', 'presenting data extracted from modulated optical beams received from optical transmitter assemblies that transmitted an optical beacon including identification data that satisfies the filter., 'a non-transitory computer readable medium having instructions ...

METHOD AND DEVICE FOR CONCENTRATING, COLLIMATING, AND DIRECTING LIGHT

An optical system for light energy concentration may comprise a light concentrator to convert incident light to converging light, a light collimating element to receive the converging light and to reduce an angle of convergence of the converging light, and a light directing element to direct the reduced-angle converging light to a light guide to transmit the directed light. 1. An apparatus comprising:a light concentrator to convert incident light to converging light;an optical element comprising a light collimating element, a light directing element, and a light guide as separate or integrated elements of said optical element;said light collimating element to receive said converging light and to reduce an angle of convergence of said converging lightsaid light directing element to re-direct and transfer said reduced-angle converging light along a portion of said light guide to transmit said directed light; andwherein said optical element comprises a curved reflective interior surface for totally internally reflecting said light at a particular angle based, at least in part, on a curvature of said curved reflective interior surface, such that said total internally reflected light enters said light guide at a nonparallel angle that allows total internal reflection to occur in said light guide.2. The apparatus of claim 1 , wherein said light collimating element includes at least one curved surface to perform said reducing the angle of convergence of said converging light.3. The apparatus of claim 1 , wherein said light collimating element includes a multi-sided prism to perform said reducing the angle of convergence of said converging light.4. (canceled)5. The apparatus of claim 1 , wherein said light collimating element and said light directing element are integrated elements of said optical element.6. The apparatus of claim 5 , wherein said optical element comprises at least one curved convex or concave surface to reduce the angle of convergence of said converging ...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ILLUMINATING METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING OPTICAL APPARATUS

An optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area. 1. An illumination optical system which illuminates an illumination area on a first plane with a light from a light source , the illumination optical system comprising:a first optical system configured to shape the light from the light source so that the light from the light source has a cross sectional shape in which a first dimension, on a second plane, along a first direction is smaller than a second dimension, on the second plane, along a second direction crossing the first direction;a second optical system which includes a plurality of reflection elements arranged on the second plane, and which is configured to reflect the light from the first optical system; anda third optical system which includes one or more reflection mirror, and which is configured to illuminate the illumination area with the light from the second optical system,wherein the light from the first optical system comes into the second optical system along a direction inclined, in the first direction, relative to an axis crossing the second plane,the light reflected by the second optical system is inclined relative to the light coming into the second optical system, andthe light reflected by the one or more reflection mirror of the third optical system passes a ...

OPTICS SYSTEM FOR A FLOW CYTOMETER

A flow cytometer includes a flow nozzle, a light source, an optics system, and a sensor analyzer. The flow nozzle provides a fluid along a flow path. The light source generates a light beam that illuminates the fluid. The optics system collects light rays that are radiated from the light beam by the fluid and passes or blocks the light rays based at least in part on the radiation angles associated with the light rays. 1. An optics system of a flow cytometer , the optics system comprising:a collection optics assembly arranged and configured to be positioned adjacent a fluid flow path and aligned with a path of a beam from a light source to collect light rays radiated from the beam by the fluid, or by particles in the fluid, in the fluid flow path;a collimator arranged to receive the light rays from the collection optics assembly, wherein the collimator directs the light rays through a focus insensitive region in which positions of the light rays are independent of fluctuations in the position of the fluid flow path with respect to the collection optics assembly; anda filter mask positioned at the focus insensitive region to selectively filter the light rays based on radiation angles associated with the light rays.2. The optics system of claim 1 , further comprising a re-imager optically arranged between the collection optics assembly and the collimator.3. The optics system of claim 1 , wherein the light source is a laser.4. The optics system of claim 1 , wherein the light rays radiated from the beam by the fluid claim 1 , or by particles in the fluid claim 1 , are forward-scattered.5. The optics system of claim 1 , wherein the light rays further comprise fluorescent light.6. The optics system of claim 1 , wherein the filter mask selectively blocks light rays having certain radiation angles and selectively passes light rays having other radiation angles.7. The optics system of claim 1 , further comprising a stray light control structure positioned at a focal point of ...

Radiation Collector, Radiation Source and Lithographic Apparatus

A radiation collector () comprising a plurality of reflective surfaces (-), wherein each of the plurality of reflective surfaces is coincident with part of one of a plurality of ellipsoids (-), wherein the plurality of ellipsoids have in common a first focus () and a second focus (), each of the plurality of reflective surfaces coincident with a different one of the plurality of ellipsoids, wherein the plurality of reflective surfaces are configured to receive radiation originating from the first focus () and reflect the radiation to the second focus (). An apparatus () shown in FIG. comprising a cooling system () and a reflector (), wherein the cooling system is configured to cool the reflector, the cooling system comprising: a porous structure () situated in thermal contact with the reflector, wherein the porous structure is configured to receive a coolant in a liquid phase state; a condenser () configured to receive coolant from () the porous structure in a vapour phase state, condense the coolant thereby causing the coolant to undergo a phase change to a liquid phase state and output the condensed coolant in the liquid phase state for entry () into the porous structure. 1. A radiation collector comprising:a plurality of reflective surfaces, wherein each of the plurality of reflective surfaces is coincident with part of one of a plurality of ellipsoids,wherein the plurality of ellipsoids have in common a first focus and a second focus,each of the plurality of reflective surfaces coincident with a different one of the plurality of ellipsoids, andthe plurality of reflective surfaces are configured to receive radiation originating from the first focus and reflect the radiation to the second focus.2. The radiation collector of claim 1 , wherein the reflective surfaces are disposed around an optical axis of the radiation collector.3. The radiation collector of claim 1 , wherein the reflective surfaces extend circumferentially around the optical axis.4. The radiation ...

LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

A light source apparatus including a light source configured to emit a light flux from an emission region having a predetermined size and a rotationally symmetrical emission intensity distribution; and a condenser configured to condense the light flux to allow the light flux to exit to the outside. The condenser is rotationally symmetrical about an optical axis and is disposed to surround the emission region, and has four or more reflection mirrors each having a reflecting surface for reflecting the light flux emitted from the emission region. The reflection mirrors include elliptical surface reflection mirrors where the reflecting surface is elliptical and spherical surface reflection mirrors where the reflecting surface is spherical, and are alternately arranged in the direction of the optical axis, and a light flux reflected by one spherical surface reflection mirror is further reflected by one elliptical surface reflection mirror oppositely disposed across the emission region. 1. A light source apparatus comprising:a light source configured to emit a light flux from an emission region having a predetermined size; anda condenser configured to condense the light flux so as to allow the light flux to exit to the outside,wherein the emission region has a rotationally symmetrical emission intensity distribution,the condenser is rotationally symmetrical about the optical axis defined as the rotationally symmetrical axis of the emission region, is disposed so as to surround the emission region, and has four or more reflection mirrors each having a reflecting surface for reflecting the light flux emitted from the emission region,the four or more reflection mirrors include elliptical surface reflection mirrors of which the reflecting surface is elliptical and spherical surface reflection mirrors of which the reflecting surface is spherical, andthe elliptical surface reflection mirrors and the spherical surface reflection mirrors are alternately arranged in the direction ...

Facet mirror

Illumination optical unit for illuminating an object field in a projection exposure apparatus, comprising a first facet mirror with a structure, which has a spatial frequency of at least 0.2 mm −1 in at least one direction, and a second facet mirror, comprising a multiplicity of facets, wherein the facets are respectively provided with a mechanism for damping spatial frequencies of the structure of the first facet mirror.

Advanced Mirrors Utilizing Polymer-Derived-Ceramic Mirror Substrates

Methods, systems, and processes are used to prepare strong, durable, light-weight, mirrors, aspheric mirrors, disk drives and component parts using polymer-derived ceramics (PDCs), such as silicon oxycarbide (SioC) as a substrate for the mirror blank or disk drive. Very high performance mirrors and machine components are produced at much lower costs; thus increasing their usage in applications as varied as extra-terrestrial space applications to machine vision used by robots to stationary terrestrial mirrors and machines. 1. A process for producing a mirror using a polymer-derived ceramic (PDC) system , comprising the steps of:selecting a cured polymer-derived ceramic (PDC) green body;figuring the cured green body to provide a shaped green body for optimal performance;applying a dense, non-porous, viscous layer of a PDC resin to the surface of the shaped green body;pyrolyzing the green body with the dense layer of the PDC resin to form a ceramic mirror blank;polishing the dense layer of the pyrolyzed PDC resin on the ceramic mirror blank to provide a pristine surface; andadding a metal layer to the pristine surface of the ceramic mirror blank to provide the mirror function wherein the metal layer is selected from at least one of aluminum, gold, or silver.2. The process of claim 1 , wherein the cured resin green body is formed from a polymer-derived ceramic (PDC) system selected from at least one of silicon oxycarbide (SiOC) claim 1 , silicon carbon nitride (SiCN) claim 1 , silicon titanium oxycarbide claim 1 , (Si—Ti—O—C) claim 1 , silicon aluminum oxycarbide (Si—Al—O—C) claim 1 , boron nitride (BN) claim 1 , silicon-aluminum oxynitride (Si—Al—O—N) and silicon carbide (SiC).3. The process of claim 1 , where the figuring step includes shaping the cured green body by at least one of machining or molding to create at least one of a concave shape claim 1 , an aspherical shape claim 1 , or a convex shape to optimize the mirror performance.4. The process of claim 1 , ...

Optical Lens for a Photodiode-Equipped Device

The invention relates to an optical lens () for a photodiode-equipped device, which is arrangeable at and/or in the photodiode-equipped device in such a way that light beams () emitted by at least two photodiodes of the photodiode-equipped device transmit into the optical lens () through a light entrance side (S) of the optical lens () and emerge from the optical lens () at a light exit side (S) of the optical lens (), and for which a central longitudinal axis () extending centrally through the light entrance side (S) and centrally through the light exit side (S) is definable, wherein the light entrance side (S) of the optical lens () and the light exit side (S) of the optical lens () are embodied in each case as a freeform surface for off-axis projection in such a way that the light beams () emitted by the photodiodes () arranged on a circular path around the central longitudinal axis () are focused off-axis by means of the optical lens (). 1. An optical lens for a photodiode-equipped device ,which is arrangeable at and/or in the photodiode-equipped device in such a way that light beams emitted by at least two photodiodes of the photodiode-equipped device transmit into the optical lens through a light entrance side of the optical lens and emerge from the optical lens at a light exit side of the optical lens; andfor which a central longitudinal axis extending centrally through the light entrance side and centrally through the light exit side is defined definable;characterized in that the light entrance side of the optical lens and the light exit side of the optical lens are embodied in each case as a freeform surface for off-axis projection in such a way that the light beams emitted by the photodiodes arranged on a circular path around the central longitudinal axis are focused off-axis by means of the optical lens.2. The optical lens according to claim 1 , wherein the central longitudinal axis defines an axis of symmetry of the optical lens claim 1 , with respect to ...

Reflective exposure apparatus

A reflective exposure apparatus includes a platform, an illuminating system, a photomask, a chip, and a reflecting convex mirror. The photomask is formed on the platform and faces the illuminating system. The chip is formed on the platform. The illuminating system and the reflecting curved mirror are formed on opposite sides of the platform. The platform can be moved relative to the illuminating system and the reflecting curved mirror.

RADIATION CONCENTRATOR INCORPORATING COMPOUND CONFOCAL UNEVEN PARABOLIC PRIMARY REFLECTOR, TAILORED SECONDARY REFLECTOR AND TAILORED RECEIVER

A radiation concentrator incorporating a main radiation concentrator () and an auxiliary radiation concentrator () that concentrates the incident radiation to the common receiver () is presented. The primary reflector () of the main concentrator () consists of two confocal parabolic reflectors (& ) on either side of the axial plane in such a way that their parabolic axes points at the centers of the diagonally opposite halves of the radiation source. The main concentrator () is configured in such a way that a part of the radiation reflected from every point on its primary reflector () is absorbed by the receiver () directly and its secondary reflector () reflects the other part of the radiation to the receiver (). The auxiliary concentrator () concentrates a substantial part of the incident radiation, which would have been blocked by the secondary reflector (), to the receiver (). 1- A radiation concentrator comprising of:a primary reflector, for which the cross section approximates sections/parts of a pair of parabolas arranged on either side of the axis of the system, said parabolas having a common focus on the axis of the system, said parabolas being rotated in opposite directions relative to the axis of the system through rotational angles defined by the angles between the axes of said parabolas and the axis of the system;a receiver placed at the common focus of said parabolas, in such a way that it directly absorbs a part of the radiation reflected from all points on the primary reflector; anda secondary reflector, for which the cross section is given by a pair of concave curves, arranged on either side of the axis of the system, facing the diagonally opposite parabola of the primary reflector.2- A radiation concentrator as said in claim 1 , wherein the rotational angle of said parabolas is ¼the angle subtended by the radiation source.3- A radiation concentrator as said in claim 2 , wherein the upper and lower edges of the receiver's cross section lie on the ...

METHOD AND APPARATUS FOR FIBER-LASER OUTPUT-BEAM SHAPING FOR BEAM COMBINATION

A method and apparatus for combining a plurality of laser beamlets to form a single annular beam using spectral beam combination. This invention includes a plurality of laser sources that emit a plurality of beamlets, wherein each one of the plurality of beamlets has a different wavelength; a beam annularizer that includes a plurality of optical units arranged to receive the beamlets, and configured to convert each beamlet into a respective annular beam that has an annular cross-sectional power profile; a beam-intersection transform element configured to point each respective one of the plurality of annular beams in an angular intersection arrangement toward a first location; and a spectral beam combiner at the first location configured to combine the plurality of wavelengths in the plurality of annular beams into a first annular spectrally combined beam. 1. A system for combining a plurality of laser beamlets to form a single annular beam using beam combination , the system comprising:a plurality of laser sources that emit a plurality of beamlets, wherein each one of the plurality of beamlets has one of a plurality of different wavelengths;a beam annularizer that includes a plurality of optical units arranged to receive the plurality of beamlets, and configured to convert each beamlet into a respective one of a first plurality of annular beams that each has an annular cross-sectional power profile; anda beam combiner configured to receive all of the first plurality of annular beams and to combine the first plurality of annular beams into a first annular combined beam.2. The system of claim 1 , wherein the plurality of laser sources includes a plurality of optical-fiber lasers claim 1 , wherein the plurality of optical units includes a plurality of fiber termination units claim 1 , wherein each one of the plurality of fiber termination units is connected to a respective one of the plurality of optical-fiber lasers claim 1 , and wherein each one of the plurality of ...

High-efficiency multiwavelength beam expander employing dielectric-enhanced mirrors

A high-efficiency, multiwavelength beam-expander optical system that employs dielectric-enhanced mirrors is disclosed. Each mirror includes a reflective multilayer coating formed from alternating layers of HfO 2 and SiO 2 that define, in order from the substrate surface, at least first and second sections, wherein the HfO 2 /SiO 2 layer thicknesses are generally constant within a given section and get smaller section by section moving outward from the substrate surface. The first and second sections are respectively configured to optimally reflect different operating wavelengths so that the beam-expander optical system has an optical transmission of greater than 95% at the different operating wavelengths.

ILLUMINATION OPTIC FOR EUV PROJECTION LITHOGRAPHY

An illumination optical unit for EUV projection lithography illuminates an object field with illumination light. The illumination optical unit has a first facet mirror including a plurality of first facets on a first mirror carrier. Disposed downstream of the first facet mirror is a second facet mirror including a plurality of second facets arranged on a second mirror carrier around a facet arrangement center. Partial beams of the illumination light are guided superposed on one another into the object field, respectively via illumination channels which have one of the first facets and one of the second facets. Second maximum angle facets are arranged at the edge of the second mirror carrier. The second maximum angle facets predetermine maximum illumination angles of the illumination light which deviate maximally from a chief ray incidence on the object field. 1. An illumination optical unit configured to illuminate an object field with illumination light , the illumination optical unit comprising:a first facet mirror in a beam path of the illumination light, the first facet mirror comprising a plurality of first facets supported by a first mirror carrier, at least some of the first facets being adjustable between a plurality of tilt positions; anda second facet mirror downstream of the first facet mirror in the beam path of the illumination light, the second facet mirror comprising a plurality of second facets supported by a second mirror carrier around a facet arrangement center, the illumination optical unit is configured so that, during use of the illumination optical unit, partial beams of the illumination light are guided superposed on one another into the object field, respectively via illumination channels;', 'one of the first facets and one of the second facets belongs to each of the illumination channels;', 'second maximum angle facets are arranged at an edge of the second mirror carrier;', 'the second maximum angle facets predetermine maximum illumination ...

HIGH-EFFICIENCY MULTIWAVELENGTH BEAM EXPANDER EMPLOYING DIELECTRIC-ENHANCED MIRRORS

A high-efficiency, multiwavelength beam-expander optical system that employs dielectric-enhanced mirrors is disclosed. Each mirror includes a reflective multilayer coating formed from alternating layers of HfOand SiOthat define, in order from the substrate surface, at least first and second sections, wherein the HfO/SiOlayer thicknesses are generally constant within a given section and get smaller section by section moving outward from the substrate surface. The first and second sections are respectively configured to optimally reflect different operating wavelengths so that the beam-expander optical system has an optical transmission of greater than 95% at the different operating wavelengths. 1. A method of forming a high-efficiency beam-expander optical system for use at ultraviolet (UV) , visible (VIS) and infrared (IR) operating wavelengths , comprising:diamond-turning and polishing a first mirror substrate and a second mirror substrate to respectively form a first mirror having a convex substrate surface and a second mirror having a concave substrate surface;{'sub': 2', '2', 'H', '2', '2, 'b': 1', '2', '3', '1', '2', '3, 'forming on each of the convex substrate surface and the concave substrate surface a reflective multilayer coating comprising alternating layers of HfOand SiOhaving respective layer thicknesses τand Is, including arranging the HfOand SiOlayers in at least three sections S, S and S in order outward from the convex substrate surface or the concave substrate surface, with the three sections S, S and S respectively configured to optimally reflect the IR, VIS and UV operating wavelengths; and'}{'sub': 'BE', 'arranging the first mirror and the second mirror in an off-axis, afocal configuration having greater than unity magnification and an optical transmittance T>95% at each of the UV, VIS and IR operating wavelengths.'}2. The method according to claim 1 , the forming the reflective multilayer coating comprising alternating layers of HfOand ...

Laminate Solar Concentrator

A focusing polymer foil for use in forming an optical element for use in a solar concentrator, and an optical element for use in a solar concentrator, arranged such that the focusing polymer foil is removable in order to renew the function of the optical element following damage and/or wear to the focusing polymer foil due to environmental conditions. A method of repair of such a damaged optical element, and methods of making the focusing polymer foil and optical element. 1. A focusing polymer foil for use in an optical element for solar concentrator , which comprises a layer of switchable adhesive and a refractive lens layer.2. A focusing polymer foil according to claim 1 , wherein the switchable adhesive layer is an adhesive that can be made less adhesive by exposure to heat claim 1 , pressure and/or a solvent.3. A focusing polymer foil according to or claim 1 , wherein the refractive lens layer comprises a Fresnel lens.4. A focusing polymer foil according to claim 3 , wherein the Fresnel lens comprises Fresnel microstructures.5. A focusing polymer foil according to claim 5 , wherein the focusing polymer layer comprises Fresnel microstructures arranged in a linear claim 5 , radial or concentric pattern.6. A focusing polymer foil according to any one of to claim 5 , further comprising a UV stabilizer.7. A focusing polymer foil according any one of to claim 5 , not comprising a UV stabilizer.8. A focusing polymer foil according to any one of to claim 5 , wherein the focusing polymer foil further comprises a reflective layer claim 5 , preferably a metal layer claim 5 , such as a silver layer or an aluminium layer.9. A focusing polymer foil according to claim 8 , wherein the refractive lens layer comprises Fresnel microstructures claim 8 , and wherein the reflective layer is formed the Fresnel microstructures.10. A focusing polymer foil according to any one of to claim 8 , wherein a protective layer is formed on the reflective layer claim 8 , which protective layer ...

Module or arrangement for, and method of, uniformly and efficiently illuminating a target by generating an illumination pattern that is substantially congruent to and overlaps a field of view of an imaging reader

An illumination light source emits illumination light toward a target to be read by image capture. An imaging assembly captures the illumination light returning from the target along an imaging axis over a field of view that extends along mutually orthogonal, first and second directions that are generally perpendicular to the imaging axis. A compound parabolic reflector receives, and optically modifies, the emitted illumination light to generate a generally uniform illumination light pattern that is substantially congruent to, and substantially overlaps, the field of view along both of the first and second directions. The compound parabolic reflector has first and second pairs of parabolic segments for respectively reflecting the emitted illumination light over first and second illumination angles along the first and second directions.

COLLECTOR MIRROR FOR A SOLAR CONCENTRATOR COMPRISING LINEAR FRESNEL MIRRORS

The invention relates to a collector mirror () which is a component of a solar concentrator comprising linear Fresnel mirrors. The collector mirror () includes a reflective strip. The collector mirror () is provided with a device capable of generating a negative pressure (AP) behind the reflective strip (). 1. Collector mirror for a solar concentrator comprising linear Fresnel mirrors , the collector mirror comprising a reflective strip , characterised in that the collector mirror is provided with a device capable of generating a negative pressure controlled behind the reflective strip , in order to apply a suction force to said strip , this force being of variable amplitude.2. Collector mirror as claimed in claim 1 , wherein the device comprises the reflective strip and a membrane that jointly delimits and at least partially a chamber inside of which the negative pressure is.3. Collector mirror as claimed in claim 1 , wherein the device comprises means for aspirating air contained inside the chamber claim 1 , such means for aspirating air provided on the membrane.4. Collector mirror according to claim 3 , wherein the means for aspirating air are advantageously provided with means of control of a suction speed.5. Collector mirror as claimed in claim 1 , wherein the reflective strip is carried by two longitudinal supports and a central support.6. Collector mirror according to claim 5 , wherein at least one cable connects a leg of the central support and the longitudinal support to which the cable is assigned.7. Collector mirror according to claim 6 , wherein at least one elastic strip is interposed between the cable and the longitudinal support to which the elastic strip is assigned.8. Collector mirror according to claim 6 , wherein at least one accessory support extends parallel to the longitudinal supports.9. Collector mirror according to claim 6 , wherein at least one additional support extends between the longitudinal supports.10. Collector mirror as claimed in ...

ADAPTABLE ILLUMINATING APPARATUS, SYSTEM, AND METHOD FOR EXTREME ULTRA-VIOLET LIGHT

An apparatus for focusing light in a semi-conductor inspection system, including: a first mirror arranged to reflect extreme ultra-violet (EUV) generated by a plasma source; and a second mirror arranged to focus the EUV light, reflected from the first mirror, onto a first intermediate focus plane. A homogenizing tunnel, including: a first aperture having a first shape and a first size and arranged to receive extreme ultra-violet (EUV) light; a second aperture having a second shape and a second size; and a passageway connecting the first and second apertures and arranged to homogenize the EUV light received by the first aperture. The first shape is different from the second shape or the first size is different from the second size. 1. An apparatus for focusing light in a semi-conductor inspection system , comprising:a first mirror arranged to reflect extreme ultra-violet (EUV) generated by a plasma source; and,a second mirror arranged to focus the EUV light, reflected from the first mirror, onto a first intermediate focus plane.2. The apparatus of claim 1 , wherein the first mirror is a positive power mirror and the second mirror is a negative power mirror.3. The apparatus of claim 2 , wherein the first mirror is an elliptical concave mirror and the second mirror is a hyperbolic convex mirror.4. The apparatus of claim 1 , wherein the first and second mirrors are respective positive power mirrors.5. The apparatus of claim 4 , wherein the first mirror is arranged to focus the EUV light onto a second intermediate focus plane between the first and second mirrors.6. The apparatus of claim 4 , wherein the first and second mirrors are respective elliptical concave mirrors.7. The apparatus of claim 4 , wherein the first and second mirrors are respective parabolic mirrors.8. The apparatus of claim 1 , wherein the first mirror is arranged to focus the EUV light onto a second intermediate focus plane between the first and second mirrors.9. The apparatus of claim 7 , further ...

PARABOLIC REFLECTOR

A reflection device including a sheet of flexible material with memory capabilities having a surface with a reflective property. The sheet comprises an elastic bendable material of a uniform thickness and the width of the sheet varies from the first end to the second end. The sheet forms into a parabolic shape by pulling the first end of the sheet toward the second end of the sheet and coupling them to the first and second securing ends of the securing mechanism. 1. A reflection device comprising:a sheet of flexible material with memory capabilities having a surface with a reflective property, a first end, a second end, a first side and a second side, anda securing mechanism,wherein the sheet comprises an elastic bendable material of a uniform thickness, and has a length measured between the first end and the second end, and a width measured between the first side and the second side and perpendicular to the length,wherein the width of the sheet varies from the first end to the second end;wherein the securing mechanism has a securing mechanism length and a first securing end and a second securing end, andwherein the sheet forms into a parabolic shape by pulling the first end of the sheet toward the second end of the sheet and coupling them to the first and second securing ends of the securing mechanism.2. The reflection device of claim 1 , wherein the sheet is made of claim 1 , acrylic claim 1 , polycarbonate claim 1 , fiberglass or carbon fiber.3. The reflection device of claim 1 , wherein a plurality of sheets are overlapped to form a trough structure.5. The reflection device of claim 1 , wherein the surface reflects light.6. The reflection device of claim 1 , wherein the surface reflects energy waves.7. The reflection device of claim 1 , wherein the sheet is a polyester film.8. The reflection device of wherein the first end of the sheet and the second end of the sheet and coupled using glue.9. The reflection device of further comprising a collector situated at a ...

MULTI-UNIT SPACE-EFFICIENT LIGHT-CONCENTRATING LENS ASSEMBLY

A light-concentrating lens assembly for a solar energy system, the assembly comprising a primary off-axis quarter-section parabolic reflector for reflecting incident light, a secondary off-axis quarter-section parabolic reflector for receiving light reflected from the primary off-axis quarter-section parabolic reflector, a compound paraboloid concentrator (CPC) for receiving light reflected from the secondary off-axis quarter-section parabolic reflector and a housing for holding the primary and secondary off-axis parabolic reflectors as well as the CPC. 1. A light-concentrating lens assembly for a solar energy system , the assembly comprising:a primary off-axis quarter-section parabolic reflector for reflecting incident light;a secondary off-axis quarter-section parabolic reflector for receiving light reflected from the primary off-axis quarter-section parabolic reflector;a compound paraboloid concentrator (CPC) for receiving light reflected from the secondary off-axis quarter-section parabolic reflector; anda housing for holding the primary and secondary off-axis parabolic reflectors as well as the CPC.2. The light-concentrating lens assembly as claimed in wherein the primary off-axis quarter-section parabolic reflector is larger than the secondary off-axis quarter-section parabolic reflector.3. A multi-unit light-concentrating lens assembly for a solar energy system claim 1 , the assembly comprising:for each unit of a plurality of units packaged together:a primary off-axis quarter-section parabolic reflector for reflecting incident light;a secondary off-axis quarter-section parabolic reflector for receiving light reflected from the primary off-axis quarter-section parabolic reflector;a compound paraboloid concentrator (CPC) for receiving light reflected from the secondary off-axis quarter-section parabolic reflector; anda housing for holding the primary and secondary off-axis parabolic reflectors as well as the CPC,wherein four units are packaged together such ...

LARGE-SCALE ALGAE CULTIVATION SYSTEM WITH DIFFUSED ACRYLIC RODS AND DOUBLE PARABOLIC TROUGH MIRROR SYSTEMS

The present disclosure provides a photobioreactor system designed for optimal algae productivity at large volumes in order to deliver a high yield per acre. The photobioreactor system comprises photobioreactor units, that may be isolated from each other to reduce culture clashes; an array of diffused acrylic rods attached to the bottom of a removable acrylic circular top in each photobioreactor unit that provides more light into the photobioreactors; a double parabolic trough mirror system, which utilizes two parabolic trough mirrors to reflect and concentrate sunlight into fiber optic cables; and an algae-cycling system mounted at the bottom of each photobioreactor unit and driven by air to circulate the algae suspension in a vertical motion. 1. A large-scale cultivation system for growing algae , comprising a container for containing an algae suspension, wherein the container has a circular opening, is cylindrical along a vertical central axis, and has a conical bottom closing the cylinder;', 'a removable clear circular top with a top side and a bottom side;', 'an array of diffused acrylic rods that are perpendicularly mounted to the bottom side of the removable clear circular top, wherein each of the array of diffused acrylic rods is about 5 to 6 inches apart;', 'clear support bars across the top side of the removable clear circular top to support the array of diffused acrylic rods; and', a compressor to provide pressure air into a main plastic pipe;', 'the main plastic pipe, which connects to the removable clear circular top, is then housed along the vertical center axis of the container;', 'two or more branch plastic pipes connecting perpendicularly to the main plastic pipe and horizontally housed in the container, wherein the two or more branch plastic pipes are seated generally at the edge of the conical bottom of the container; and', 'all of the two or more branch plastic pipes each have a top side and a bottom side, wherein on the bottom side of the two or ...

COLLECTOR

A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum. 114-. (canceled)15. A collector , comprising:a collector shell comprising a reflective section, the collector shell has a first focus and a second focus different from the first focus;', radiation is reflected from the first focus into the second focus; and', 'a spectrum of angles of impingement on the reflective section is within a range of at most 10° around a predefined angle of impingement; and, 'the reflective section is configured so that during use of the collector, 'the collector is a microlithography collector., 'wherein16. The collector of claim 15 , wherein the predefined angle of impingement deviates from the Brewster angle by at most 10°.17. The collector of claim 15 , wherein the reflective section is configured so that claim 15 , at the predefined angle of impingement claim 15 , the reflective section has a reflectance of at least 50% for EUV radiation.18. The collector of claim 15 , wherein the reflective section is a truncated cone.19. The collector of claim 15 , wherein the reflective section is aspherical.20. The collector of claim 15 , wherein the collector comprises an additional collector shell.21. The collector of claim 20 , wherein the additional collector shell comprises a spherical surface section around the first focus.22. The collector of claim 20 , wherein the additional collector shell has an opening configured to allow radiation to pass therethrough during use of the collector.23. The collector of claim 15 , wherein the collector shell comprises a plurality of reflective sections.24. The collector of claim 23 , wherein for each of the plurality of reflective sections claim 23 , the reflective section is configured so ...

Apparatus and method of light guiding with electricity generating

A light guiding apparatus includes at least adjacent two light-receiving devices having a first light-receiving device and a second light-receiving device. Each light-receiving device has an illuminated surface and a shady surface according to a position of incident light. A holding member is respectively disposed over the corresponding first light-receiving device. A light guiding device is disposed on the holding member. The light guiding device has a curved reflection surface and a rotating mechanism. The rotating mechanism is used to guide the incident light onto a shady surface of the second light-receiving device or shield the first light-receiving device. A driving control apparatus controls the rotating mechanism for rotating the light guiding device.

METHOD FOR SHAPING A FILM OF A MATERIAL THAT HAS LOW RESISTANCE TO TRACTION, AND MIRROR COMPRISING SUCH A FILM

A method for shaping a glass sheet having a thickness Ev by applying and adhering a layer of a first material that can be subjected to traction onto a first surface of the glass sheet. The layer has a thickness E1. Either the neutral fiber of the complex moves across into the layer of the first material, the glass being then completely under compression; or the neutral fiber moves towards the first material but remains in the glass sheet, the surface of the glass being then subjected to a level of traction lower than the failure value. The complex comprising the glass sheet coated with the first layer of material is deformed, such that it is close to the final shape and the glass is mainly under compression. A stabilizing element B is applied and adhered or attached onto the complex A and of dimensionally stabilizing the final shape. 118-. (canceled)19. Method for shaping a sheet of a material that has low resistance to traction and having a thickness Ev , comprising the steps of:applying and adhering onto a first surface of the sheet a layer of a first material withstanding higher tensile stresses than those of said sheet of material, said layer having a thickness E1 such that, when this complex is subjected to bending, the neutral fiber is moved by more than 20% of the sheet's thickness Ev;elastically deforming the complex comprising the sheet coated with the first layer of material into the final shape, such that the sheet is principally subjected to compression relative to the initial shape because of the neutral fiber having moved;applying a layer of a second material, resistant to compression stresses, on a free surface of the layer of the first material opposite to the sheet, the layer of the second material adopting a final shape of said surface of the layer of first material, the layer of second material shaping the complex into the final shape; andadhering the layer of the second material onto the layer of the first material and dimensionally stabilizing ...

IMAGING APPARATUS AND IMAGING METHOD

According to one embodiment, an imaging apparatus includes a light source for illumination, a stage on which an imaging object illuminated by illumination light from the light source is to be placed, a critical illumination optical system configured to supply the illumination light to the imaging object placed on the stage, and to have a greater magnification in a first axis direction than in a second axis direction, an imaging optical system configured to form an image of the imaging object placed on the stage and illuminated using the critical illumination optical system, and a detector configured to detect the image of the imaging object formed by the imaging optical system, and to have a detection area longer in the first axis direction than in the second axis direction. 1. An imaging apparatus comprising:a light source for illumination;a stage on which an imaging object illuminated by illumination light from the light source is to be placed;a critical illumination optical system configured to supply the illumination light from the light source to the imaging object placed on the stage, and to have a greater magnification in a first axis direction than in a second axis direction perpendicular to the first axis direction;an imaging optical system configured to form an image of the imaging object placed on the stage and illuminated using the critical illumination optical system; anda detector configured to detect the image of the imaging object formed by the imaging optical system, and to have a detection area longer in the first axis direction than in the second axis direction.2. The apparatus of claim 1 , whereina ratio of the magnification in the first axis direction to the magnification in the second axis direction in the critical illumination optical system corresponds to a ratio of a length of the detection area in the first axis direction to a length of the detection area in the second axis direction.3. The apparatus of claim 1 , whereinthe detector ...

Compact Optical Projection Apparatus

A compact optical projection apparatus. An apparatus for light projection includes at least one illumination device; a cover prism including a curved surface positioned to receive illumination light rays and a total internal reflection surface positioned to internally reflect the light rays towards an asymmetric reflector surface positioned opposite the total internal reflection surface, the asymmetric reflector surface configured to reflect the received light rays out of the cover prism at an emitter side of the cover prism; a spatial light modulating the illumination light rays with image data to form image light rays; a reverse total internal reflection (RTIR) prism positioned between the spatial light modulator and the emitter side of the cover prism and further comprising a total internal reflection surface configured to totally internally reflect the image light rays out of the RTIR prism into a light projection device. Additional apparatus are disclosed.

STAMPED SOLAR COLLECTOR CONCENTRATOR SYSTEM

A solar collector concentrator having a generally hollow, tubular structure that is precision stamped to form a highly reflective inside surface conforming to a geometry that facilitates concentrating incident light/radiation to the output end. The concentrator may be a separate component separately formed by stamping a malleable stock material. The concentrator may be coupled to the base of a reflector in the collector. The concentrator and the reflector may be integrally formed together by stamping a malleable stock material. The relative positions of the integrally defined concentrator and the reflector are therefore passively aligned with high accuracy achieved from precision stamping. The secondary reflector may be formed by stamping. 1. A solar energy collector , comprising:a primary reflector,a concentrator, having an input opening and an output opening, wherein the concentrator comprises a thin walled, hollow body stamped from a malleable metal stock material, wherein the body of the concentrator has an inside surface that is reflective, and wherein the concentrator is positioned with respect to the primary reflector, such that the primary reflector directs incident solar radiation to the input opening of the concentrator.2. The solar energy collector as in claim 1 , wherein the concentrator is positioned with respect to a central opening in the primary reflector.3. The solar energy collector as in claim 2 , wherein the concentrator is coupled to the primary reflector claim 2 , with the input opening opens into the central opening of the primary reflector.4. The solar energy collector as in claim 3 , wherein the concentrator and the primary reflector are formed are integrally formed together by stamping a malleable metal stock material claim 3 , to integrally defined the concentrator and the reflector from the same stock material claim 3 , wherein relative positions of the integrally defined concentrator and reflector are passively aligned.5. The solar ...

Laser/phosphor, led and/or diffuser light sources with light recycling

Apparatus and method using a recycling light source. The source includes: a laser, a phosphor plate and/or diffuser plate that receives laser light and outputs wavelength-converted and/or diffused light, curved reflective surface(s) that collect the output light and reflect the light back to the plate to increase brightness of output light. An optional heatsink and vibrator can be used. Some embodiments include a plurality of parabolic reflectors to image the plate to an output aperture in one of the parabolic reflectors. Some embodiments include a diffuser arranged to diffuse laser light at the diffuser, and a first curved reflector located and configured to reflect diffused light back toward the diffuser in order to preserve a brightness of the laser light. Some embodiments include a laser-excited phosphor light source and method with light recycling.

SUNLIGHT COLLECTION AND TRANSPORTATION SYSTEM

A solar collector energy conversion system has a solar collector apparatus adapted to collect sunlight at a collection location and direct it to one or more light transport guides for transporting the sunlight to a conversion location separate from the collection location, and a solar energy conversion apparatus arranged at the conversion location and adapted to receive sunlight transported by the light transport guides and to convert the transported sunlight to an alternative form of energy. 14-. (canceled)5. A solar collector energy conversion system comprising: an outer dish-shaped surface and an inner concave collection surface, which is reflective, and which is configured to collect sun rays and to reflect them towards a mirror location;', 'coupling means operable to couple a respective light receiver to the solar collector module at a light collection region of the solar collector module; and', 'a mirrored surface located at the mirror location to receive sun rays reflected from the collection surface and to reflect the sun rays to the respective light receiver at the light collection region,, 'a solar collector apparatus adapted to collect sunlight at a collection location, the solar collector apparatus comprising an array of solar collector modules mounted on a support and orientable to collect sunlight, each solar collector module includingwherein each solar collector module in the array is attached via the coupling means to the respective light receiver in the form of a respective flexible optical-fiber, wherein the optical-fibers from the array are housed in parallel arrangement in a flexible primary cable for transporting the sunlight from the collection location to a conversion location separate from the collection location, wherein the outer dish-shaped surface of each of the solar collector modules is configured to securely fit in and be removable from a holding substructure of the support on which the array of solar collector modules are mounted; ...

SOLAR COLLECTOR MODULE

A solar collector module has a support frame provided for attachment of a number of reflector elements forming a parabolic trough when viewed in a longitudinal direction, wherein on each of the end faces the support frame has, when viewed in the longitudinal direction, a respective coupling plate, which is provided with a number of adjusting elements, for connection to the support frame of a neighbouring module. The coupling plates are designed in pairs with regard to the adjusting elements thereof in such a way that the adjusting elements of the first coupling plate each have a reference bearing surface for a contact surface of an adjusting element of the second coupling plate. 17.-. (canceled)8. A solar collector module , comprising:a support frame having two ends in a longitudinal direction;a plurality of reflector elements forming a parabolic trough in the longitudinal direction for attachment to the support frame; andcoupling plates respectively provided on the ends of the support frame and having adjusting elements for connection with a support frame of a neighboring solar collection module, said adjusting elements of the coupling plates being arranged in pairs such that the adjusting elements of one of the first coupling plates have a reference support surface for a contact surface of an adjustment element of another one of the coupling plates.9. The solar collector module of claim 8 , wherein the coupling plates each have two adjusting elements which are arranged claim 8 , as seen in a plan view on the coupling plate claim 8 , in symmetry to its central axis in an end side region.10. The solar collector module of claim 8 , wherein the reference support surfaces formed by the adjusting elements of the one of the coupling plates are aligned in parallel relationship to a focal plane of the parabolic trough formed by the reflector elements.11. The solar collector module of claim 8 , wherein the reference support surfaces formed by the adjusting elements of the ...

LOCATING CONNECTORS AND METHODS FOR MOUNTING SOLAR HARDWARE

A solar concentrator assembly can include mirror assemblies that are connected to pivotable frames with locating connections. The locating connections can be in the form of cam devices or tool-less connections formed by snap fitting devices as well as tool-less cam devices. 1. (canceled)2. A solar collection system comprising:a frame;a solar collection device supported by the frame;a connection device connecting the solar collection device to the frame; anda pivot mount configured to guide the solar collection device through a pivoting motion about a pivot axis, between a disconnected state in which the connection device is not in an engaged state and in which the solar collection device can be rotated about the pivot axis and a second connected state in which the connection device inhibits movement of the solar collection device through the pivoting motion.3. The solar collection system of claim 2 , wherein the solar collection device comprises a mirror.4. The solar collection system of claim 2 , wherein the solar collection device comprises a solar receiver.5. The solar collection system of claim 2 , wherein the frame comprises a torque tube extending along a longitudinal axis and being supported above the ground for rotational movement about the longitudinal axis of the torque tube.6. The solar collection system of claim 5 , further wherein the solar collection device comprises a first plurality of mirrors on the frame on a first side of the torque tube and a second plurality of mirrors on the frame on a second side of the torque tube.7. The solar collection system of claim 6 , wherein each of the first plurality of mirrors and the second plurality of mirrors comprises a reflective surface that faces away from the torque tube.8. The solar collection system of claim 2 , wherein claim 2 , in the second connected state claim 2 , the connection device comprises a snap fitting to inhibit movement of the solar collection device through the pivoting motion.9. The solar ...

Compact folded optical multipass system

An optical multipass system is configured to include, in addition an end-mirror configuration of reflective surfaces, a multipass pattern folding assembly. The end-mirror configuration includes at least two reflective surfaces arranged to provide for establishing cell stability of an optical multipass cell comprising all or part of the optical multipass system, or further provide for directing and/or focusing light within the optical multipass cell, and can, in various embodiments, comprise a Herriott, White or other conventional or other cell type configuration. The multipass pattern folding assembly includes at least two inner reflective surfaces configured to provide for folding an optical pattern intra-cavity at least twice off one of the inner reflective surfaces of the multipass pattern folding assembly. In various embodiments, the multipass pattern folding assembly includes two substantially flat mirrors or other reflective surfaces disposed between the end reflective surfaces of the end-mirror configuration, and arranged substantially parallel to one another, so as to fold an optical path intra-cavity and in a zig-zag path between the end reflective surfaces of the end-mirror configuration. 1. An optical multipass system , comprising:at least two end reflective surfaces, wherein at least one of the end reflective surfaces includes a focusing surface configured to form a stable optical cavity, and wherein each end reflective surface is configured to direct an optical multipass pattern two or more times toward at least one of folding inner reflective surfaces; andwherein the folding inner reflective surfaces comprise at least two folding inner reflective surfaces configured to fold an optical path of a resulting multipass pattern intra-cavity between the end reflective surfaces.2. The optical multipass system of claim 1 , wherein the optical system comprises an optical multipass cell.3. The optical multipass system of claim 1 , wherein the optical system ...

LOW PROFILE MULTI-LENS TIR

In one aspect, an optical lens assembly (herein referred to also as an optic) is provided that comprises a plurality of lenses (or lens segments) adapted to receive light from a light source, each of said lenses (or lens segments) having an input surface and an output surface and a lateral surface extending between the input and output surfaces. The lenses are arranged relative to one another and positioned relative to the light source such that each of the lenses receives at its input surface a different portion of light emitted by the source, e.g., each lens receives at its input surface light emitted by the source into an angular subtense (solid angle) different than an angular subtense associated with another lens. Each lens (or lens segment) guides at least a portion of the received light to its output surface via reflection, e.g., via total internal reflection (TIR). 1. An optical lens assembly , comprisinga plurality of lenses adapted to receive light from a light source, each of said lenses having an input surface and an output surface and a lateral surface extending between said input surface and output surface,said lenses being arranged relative to one another such that each of the lenses receives at its input surface light emitted by the source into an angular subtense different than a respective angular subtense associated with another lens,wherein each of said lenses guides at least a portion of the received light to its output surface via total internal reflection at the lateral surface thereof.2. The optical lens assembly of claim 1 , wherein at least one of said lenses is configured to collimate at least a portion of the light it receives from the light source.3. The optical lens assembly of claim 1 , wherein the lateral surfaces of at least two adjacent lenses of said lens assembly are separated from one another by an airgap.4. The optical lens assembly of claim 1 , wherein said lenses are configured to collectively receive at least about 80% of the ...

Backlight module and light source assembly thereof

A light source assembly includes a base plate, a light source secured on the base plate, a first reflection member, a second reflection member, and a diffusion plate. The first reflection member includes a base portion secured on the base plate and a plurality of protrusions with reflection surfaces inclined to the base plate. A through hole is defined on the base portion to receive the light source. Each protrusion protrudes from a side of the base portion away from the base plate and extends around the through hole. The second reflection member includes a reflection portion defining a plurality of light holes. The diffusion plate covers the second reflection member. Light emitting from the light source transmits to the light guide assembly via the reflection portion and the reflection surfaces.

ILLUMINATION DEVICE

According to one embodiment, an illumination device includes a light source module including a plurality of light sources, and a reflector opposed to the light source module. The reflector includes a plurality of incidence openings on which light from the light sources is made incident, a plurality of emission openings opposed to the incidence openings, and a plurality of reflective surfaces extending from the incidence openings to the emission openings, respectively. Each of the reflective surfaces is formed by combining a plurality of curved surfaces arranged in an optical axis direction of the light sources. 112-. (canceled)13. A head up display , comprising:a liquid crystal display panel;an illumination device opposed to a rear surface of the liquid crystal display panel; andtwo mirrors,whereinthe illumination device, comprises:a plurality of light sources; anda reflector between the plurality of light sources and the liquid crystal display panel,the reflector comprises a plurality of light incidence openings, a plurality of light emission openings, and a plurality of reflective surfaces extending from the light incidence openings to the light emission openings, andone of the reflective surfaces comprises a first curved surface which is convex to an optical axis of one of the light sources and a second curved surface which is concave to the optical axis of the light source.14. The head up display of claim 13 , whereineach of the emission openings has a rectangular shape with four sides, and the reflective surfaces include four reflective surfaces connected to four sides of the emission opening.15. The head up display of claim 13 , whereineach of the reflective surfaces comprises a first curved surface which is convex to an optical axis of one of the light sources and a second curved surface which is concave to the optical axis of the light source, and the first curved surface and the second curved surface have radii of curvature different from each other.16. The ...

APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADIANT ENERGY FROM A SINGLE LIGHT SOURCE

A technique and apparatus are provided for supplying substantially uniform radiant heat energy to a semiconductor wafer in a load lock or process chamber using a light source and a set of radially-symmetric reflectors. 1. An apparatus for use with semiconductor processing equipment , the apparatus comprising: the outer reflector is radially symmetric about a center axis, and', 'the second base aperture is larger than the first base aperture; and, 'an outer reflector having a reflective interior surface, a first base aperture, and a second base aperture, wherein the at least one inner reflector is radially symmetric about the center axis,', 'the second base perimeter is larger than the first base perimeter,', 'the inner reflector is located between the first base aperture and the second base aperture, and', 'the second base perimeter is closer to the second base aperture than the first base aperture, and wherein:', 'the at least one inner reflector prevents substantially all light travelling parallel to the center axis and within a cylindrical volume bounded by a largest second base perimeter of the at least one second base perimeter from reaching the second base aperture without first reflecting at least once off of at least one surface selected from the group consisting of: the interior surface and the at least one exterior surface when the light originates from a location substantially centered on the center axis and located such that the at least one inner reflector is interposed between the second base aperture and the location., 'at least one inner reflector having a reflective exterior surface, a first base perimeter, and a second base perimeter, wherein, for each inner reflector2. The apparatus of claim 1 , wherein:the outer reflector is a conical frustum reflector, andthe at least one inner reflector is a conical frustum reflector.3. The apparatus of claim 1 , wherein:the at least one inner reflector includes at least two inner reflectors spaced apart along ...

Light collecting module

A light collecting module that includes at least one light concentrating unit, at least one collimating unit, and a focusing mirror is provided. The light concentrating unit has a light input end and a light output end opposite to the light input end, and the light concentrating unit is configured to collect lights at various incident angles through the light input end and concentrate the lights on the light output end. The collimating unit collimates the lights from the light output end of the light concentrating unit. The focusing mirror focuses the collimated lights from the collimating unit on a focus of the focusing mirror.

Glass Concentrator Mirror Assembly

A glass concentrator mirror assembly and a method for making same. A glass concentrator mirror assembly is configured to reflect sunlight to a receiver in a reflector assembly. The glass concentrator mirror assembly has at least one glass mirror. The at least one glass mirror has a reflective side and a back side. The glass concentrator mirror assembly also has a parabola-forming frame structure for the at least one glass mirror. The parabola-forming frame structure includes a sternum that is fixedly fastened to a spine with the at least one glass mirror therebetween. The parabola-forming frame structure facilitates a substantially parabolic curvature of the at least one glass mirror. The parabola-forming frame structure provides a substantially uniform force along a line of contact between the sternum and the at least one glass mirror. 1. A glass concentrator mirror assembly configured to reflect sunlight to a receiver comprising:at least one glass mirror, the at least one glass mirror having a reflective side and a back side; a tubular spine;', 'a tubular sternum on the reflective side of the at least one glass mirror, the tubular sternum being adjustably fastened to the tubular spine with the at least one glass mirror therebetween, wherein the tubular sternum and the tubular spine are disposed approximately midway across the length of the at least one glass mirror, and wherein the tubular spine and the tubular sternum are sufficiently long to traverse the width of the at least one glass mirror;', 'at least one upper rib and at least one lower rib attached to the tubular spine, each of said at least one upper rib and at least one lower rib being attached to the tubular spine via an aperture through the spine, wherein the at least one upper rib and the at least one lower rib are sufficiently long to traverse the length of the at least one glass mirror;', 'at least two stringers comprising at least one left stringer and at least one right stringer, wherein each of ...

Extreme ultraviolet (euv) collector inspection apparatus and method

An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING AND SUPPORTING DEVICES

Disclosed is an optical module for a lens, especially a microlithographic apparatus, comprising a first holding device with an inner circumference that extends in a first circumferential direction, and at least one first supporting device which is fastened to the inner circumference of said first holding device and is used for supporting a first optical element, an annular circumferential first assembly space being defined by displacing the first supporting device once in a revolving manner along the first circumferential direction. At least one second supporting device which is fixed to the inner circumference of the first holding device is provided for supporting a second optical element, an annular circumferential second assembly space being defined by displacing the second supporting device once in a revolving manner along the first circumferential direction. The first assembly space intersects the second assembly space. 123.-. (canceled)24. An optical module comprising:a first holding device with a circumference extending in a first circumferential direction,a first supporting device configured to support a first optical element, the first supporting device being fixed at the circumference of the first holding device; anda plurality of second supporting devices configured to support a second optical element, the second supporting devices being fixed at the circumference of the first holding device, the first supporting device does not contact the second supporting devices,', 'the first optical element is separate from the second optical element;', 'along the first circumferential direction, the first supporting device is located in a non-equidistant manner between two neighboring second supporting devices; and', 'the optical module is configured to be used in a microlithography objective., 'wherein25. The optical module according to claim 24 , wherein the first circumferential direction lies in a first plane and at least one of the following holds:at least one ...

COLLECTOR

A collector transfers EUV illumination light from a radiation source region to illumination optics. Imaging optics of the collector image the radiation source region in a downstream focal region. The imaging optics are embodied so that the radiation source is imaged with at least one first imaging scale by the EUV illumination light, which is emitted with beam angles <20° between the radiation source region and the downstream focal region. The imaging optics are also embodied so that the radiation source is imaged with at least one second imaging scale by the illumination light emitted with beam angles >70°. The two imaging scales for the beam angles <20° on the one hand and >70° on the other hand differ by no more than a factor of 2.5. In addition to a corresponding collector, an illumination system contains field facets transfer optics. 1. An illumination system , comprising:a collector; andillumination optics, the collector is configured transfer EUV illumination light from a radiation source region to the illumination optics;', 'the illumination optics are configured to guide the EUV illumination light received from the collector to an object field;', a field facet mirror comprising a multiplicity of field facets; and', 'a pupil facet mirror comprising a multiplicity of pupil facets;, 'the illumination optics comprise, 'the multiplicity of pupil facets comprise part of pupil facet transfer optics configured to image the field facets in a superposed manner on each other into the object field;', 'the collector comprises collector imaging optics configured to image a radiation source region into a plurality of downstream focal regions;', 'the field facets comprise part of field facet transfer optics configured in each case to image one of the focal regions onto one of the pupil facets;', the radiation source is imaged into a first focal region disposed downstream of the collector imaging optics with a first collector imaging scale via EUV illumination light emitted ...

ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

An illumination optical unit for EUV projection lithography illuminates an illumination field with illumination light from a light source. A first facet mirror of the illumination optical unit has a plurality of first facets for the reflective guidance of partial beams of a beam of the EUV illumination light. Disposed downstream of the first facet mirror is a second facet mirror with a plurality of second facets for further reflective guidance of the partial beams. As a result of this, the reflective beam guidance that the two facets predetermines object field illumination channels, by which the whole object field is illuminable by the illumination light in each case and to which exactly one first facet and exactly one second facet is assigned in each case. 1. An illumination optical unit configured to illuminate an illumination field with EUV illumination light from a light source , the illumination optical unit comprising:a first facet mirror comprising a plurality of first facets configured for the reflective guidance of partial beams of a beam of the EUV illumination light; anda second facet mirror downstream of the first facet mirror along a path of the EUV illumination light through the illumination optical unit, the second facet mirror comprising a plurality of second facets for the reflective guidance of the partial beams reflected by the first facets so that illumination channels are predetermined by the first facets and the second facets assigned by way of the reflective beam guidance, the illumination channels are configured so that the whole object field is illuminable by the illumination light;', 'for each illumination channel, there is exactly one first facet and exactly one second facet assigned to the illumination channel;', 'the first facet mirror comprises part of an imaging optical unit configured to generate one of a plurality of images of the light source corresponding to the number of object field illumination channels;', 'the first facets are ...

ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

An illumination optical unit for EUV projection lithography has a first and second facet mirrors, each with a plurality of reflecting facets on a support. The facets of the first facet mirror can be switched between various tilt positions. In each tilt position, the tiltable first facet is assigned to a second facet of the second facet mirror for deflecting EUV radiation in the direction of this second facet. Each of the first facets is assigned to a set of second facets by its tilt positions. The two facet mirrors are arranged so that an arrangement distribution of second facets, impinged upon via the first facets, results in an illumination-angle distribution of an illumination of an illumination field. 115-. (canceled)16. An illumination optical unit configured to illuminate an illumination field , the illumination optical unit comprising:a first facet mirror comprising a plurality of first reflecting facets; anda second facet mirror comprising a plurality of second reflecting facets, at least some of the first reflecting facets are tiltable between various tilt positions;', 'for each of at least some of the tiltable first reflecting facets, in each tilt position the first reflecting facet is assigned a second reflecting facet configured to deflect EUV radiation in a direction of a second reflecting facet;', 'each tiltable first reflecting facet is assigned to a set of second reflecting facets by its tilt positions;', 'the first and second facet mirrors are configured so that an arrangement distribution of second reflecting facets, on which EUV radiation is impingable in a given tilt position configuration of the first reflecting facets, results in an illumination-angle distribution of an illumination of the illumination field;', 'the second reflecting facets belonging to each of the sets of second reflecting facets lie within a circle on the second facet mirror;', 'the diameter of the circle is less than 70% of an overall diameter of an overall arrangement of ...

EUV COLLECTOR

An EUV collector transfers EUV radiation from an EUV radiation source into an illumination far field. The collector has a normal mirror collector subunit including a mirror for normal incidence, and a grazing mirror collector subunit including a mirror for grazing incidence. The arrangement of the collector subunits is such that an intensity distribution of the EUV radiation over the far field results which is composed of an inner normal mirror intensity distribution, generated by reflection at least also at the normal mirror collector subunit, and of an outer grazing mirror intensity distribution, generated by reflection at least also at the grazing mirror collector subunit. The intensity distribution, at least over a section of the far field which is greater than 40% of the total far field, deviates by less than 20% from an average intensity in the section of the far field. 112-. (canceled)13. A collector configured to transfer EUV radiation from an EUV radiation source into an illumination far field , the EUV collector comprising:a normal incidence mirror collector subunit comprising a mirror for normal incidence and configured to transfer the EUV radiation from the radiation source to the illumination far field; anda grazing incidence mirror collector subunit comprising a mirror for grazing incidence and configured to transfer the EUV radiation from the radiation source to the illumination far field, the collector subunits are arranged so that, during use of the collector, the collector subunits provide a total intensity distribution of the EUV radiation over the far field;', 'the total intensity distribution over the far field comprises, via different collector beam paths, a normal mirror incidence intensity distribution and a grazing incidence mirror intensity distribution;', 'the normal mirror incidence intensity distribution is generated via reflection at least at the normal incidence mirror collector subunit;', 'the grazing incidence mirror intensity ...

Radiation collector and method of manufacture thereof

Non-imaging radiation collecting and concentrating devices, and assemblies, are disclosed. The non-imaging radiation collecting and concentrating devices comprise an entrance aperture for receiving incoming radiation, an exit aperture located opposite to the entrance aperture for outputting concentrated radiation, and one or more concaved reflectors arranged between the entrance and exit apertures. The concaved reflectors define an acceptance angle of the device relative to an optical axis thereof and configured such that their optical focuses are located between edges of the exit aperture and the optical axis, thereby substantially preventing escape of the incoming radiation received in the entrance aperture within the acceptance angle and providing substantial uniform radiation collection at the exit aperture of the device.

REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

An illumination optical system is used with a reflective imaging optical system configured to form an image of a pattern arranged on a first plane onto a second plane, and is configured to illuminate an illumination area on the first plane with a light from a light source. The illumination optical system includes one or more reflecting mirrors configured to reflect the light from the light source to the first plane such that the reflected light reaches the first plane after crossing an optical path of a light which travels in the reflective imaging optical system. 1. An illumination optical system which is used with a reflective imaging optical system configured to form an image of a pattern arranged on a first plane onto a second plane , and which is configured to illuminate an illumination area on the first plane with a light from a light source , the illumination optical system comprising:one or more reflecting mirrors configured to reflect the light from the light source to the first plane such that the reflected light reaches the first plane after crossing an optical path of a light which travels in the reflective imaging optical system.2. The illumination optical system according to claim 1 , wherein the one or more reflecting mirrors include a fly's eye optical system and an optical path folding mirror configured to reflect the light that has traveled via the fly's eye optical system to the illumination area.3. The illumination optical system according to claim 2 , wherein the optical path of the light which travels in the reflective imaging optical system is an optical path defined between two mirrors of a plurality of mirrors provided in the reflective imaging optical system.4. The illumination optical system according to claim 1 , wherein the optical path of the light which travels in the reflective imaging optical system is an optical path defined between two mirrors of a plurality of mirrors provided in the reflective imaging optical system.5. The ...

Continuous Phase Delay Antenna

Antennas and other transducers for use in transmitting and receiving twisted waves are disclosed. A reflector includes numerous parabolic segments having focal lengths that decrease monotonically with azimuth angle. A feed is used that is located at a focal length associated with one of the segments. Thus, each segment has a phase delay that is related to a difference between the primary focal length and the focal length of the segment. This variation of phase delay with azimuth allows twisted waves to be transmitted and received. 1. A transducer comprising:a reflective dish structure comprising a large number of parabolic segments each having a different focal length, wherein the focal lengths of the segments decrease monotonically with increasing or decreasing azimuth angle; anda feed located at a focal length associated with one of the segments.2. The transducer of claim 1 , wherein:the parabolic segments are infinitesimally small so that the dish structure forms a smooth continuous reflective surface.3. The transducer of claim 1 , wherein:the focal lengths of the segments decrease substantially linearly with increasing or decreasing azimuth angle.4. The transducer of claim 1 , wherein:the transducer is a radio frequency antenna and the feed located at the focal length associated with one of the segments includes either a feed antenna located at the focal length of one of the segments or a secondary reflector located at the focal length of one of the segments that is associated with a feed antenna.5. The transducer of claim 1 , wherein:the transducer is an optical transducer and the feed located at the focal length associated with one of the segments includes at least one of: a lens, an optical fiber, a secondary optical reflector, an optical source, and an optical detector.6. The transducer of claim 1 , wherein:the parabolic segments have phase delays varying between zero and one wavelength at an operational frequency of the transducer.7. A communication system ...

FILM MIRROR, AND COMPOSITE FILM FOR USE IN SAME

The film mirror includes a resin substrate; a metal reflective layer; and a surface coating layer, a ratio of a number of fluorine atoms to a number of carbon atoms in a surface layer portion of the surface coating layer as expressed by F/C is 0.21 to 1.00 and the surface coating layer has a surface hardness of more than 100 N/mmand an elastic recovery rate of 60% or more. The film mirror has stain-proof properties, and scratch resistance so that the surface is resistant to scratches in collision with sandy dust and is also resistant to scratches upon cleaning with a brush. 1. A film mirror comprising: a resin substrate; a metal reflective layer; and a surface coating layer , wherein a ratio of a number of fluorine atoms to a number of carbon atoms in a surface layer portion of the surface coating layer as expressed by F/C is 0.21 to 1.00 and wherein the surface coating layer has a surface hardness of more than 100 N/mmand an elastic recovery rate of 60% or more.2. The film mirror according to claim 1 , wherein a resin making up the surface coating layer contains a polymer of monomers including at least one type of fluorine-containing monomer.3. The film mirror according to claim 1 , wherein a resin making up the surface coating layer contains a polymer of monomers including at least one type of fluorine-containing acrylate monomer and at least one type of non-fluorine-containing polyfunctional acrylate monomer.4. The film mirror according to claim 1 , wherein a resin making up the surface coating layer contains a polymer of monomers including at least one type of fluorine-containing epoxy and/or oxetane monomer and at least one type of non-fluorine-containing epoxy and/or oxetane monomer.5. The film mirror according to claim 1 , wherein the surface coating layer is formed by photo-curing under exposure to ultraviolet radiation at an accumulated light quantity of 95 mJ/cmor more.6. The film mirror according to claim 1 , wherein the surface coating layer is formed by ...

LOW PROFILE MULTI-LENS TIR

In one aspect, an optical lens assembly (herein referred to also as an optic) is provided that comprises a plurality of lenses (or lens segments) adapted to receive light from a light source, each of said lenses (or lens segments) having an input surface and an output surface and a lateral surface extending between the input and output surfaces. The lenses are arranged relative to one another and positioned relative to the light source such that each of the lenses receives at its input surface a different portion of light emitted by the source, e.g., each lens receives at its input surface light emitted by the source into an angular subtense (solid angle) different than an angular subtense associated with another lens. Each lens (or lens segment) guides at least a portion of the received light to its output surface via reflection, e.g., via total internal reflection (TIR). 1. An optical lens assembly , comprisinga plurality of lenses adapted to receive light from a light source, each of said lenses having an input surface and an output surface and a lateral surface extending between said input surface and output surface,said lenses being arranged relative to one another such that each of the lenses receives at its input surface light emitted by the source into an angular subtense different than a respective angular subtense associated with another lens,wherein each of said lenses guides at least a portion of the received light to its output surface via total internal reflection at the lateral surface thereof.2. The optical lens assembly of claim 1 , wherein at least one of said lenses is configured to collimate at least a portion of the light it receives from the light source.3. The optical lens assembly of claim 1 , wherein the lateral surfaces of at least two adjacent lenses of said lens assembly are separated from one another by an airgap.4. The optical lens assembly of claim 1 , wherein said lenses are configured to collectively receive at least about 80% of the ...

Solar-Concentrating Solarization Apparatus, Methods, and Applications

Methods, structures, devices and systems are disclosed for solarizing soil using a moveable optical focusing array. In one example, an apparatus to solarize soil from a moveable platform includes a vehicle, an array of mirrors located on the exterior of the vehicle, in which the mirrors are steerable to control the orientation of the mirrors to direct sunlight to a spot on soil that generates heat to a solarize the soil, and a sensor coupled to the vehicle to measure the temperature of the soil, in which the orientation of the mirrors is determined based at least in part on the measured temperature to control the temperature of the soil.

APPARATUS AND METHOD FOR FIBER-LASER OUTPUT-BEAM SHAPING FOR SPECTRAL BEAM COMBINATION

A method and apparatus for combining a plurality of laser beamlets to form a single annular beam using spectral beam combination. This invention includes a plurality of laser sources that emit a plurality of beamlets, wherein each one of the plurality of beamlets has a different wavelength; a beam annularizer that includes a plurality of optical units arranged to receive the beamlets, and configured to convert each beamlet into a respective annular beam that has an annular cross-sectional power profile; a beam-intersection transform element configured to point each respective one of the plurality of annular beams in an angular intersection arrangement toward a first location; and a spectral beam combiner at the first location configured to combine the plurality of wavelengths in the plurality of annular beams into a first annular spectrally combined beam. 1. A system for combining a plurality of laser beamlets to form a single annular beam using spectral beam combination , the system comprising:a plurality of laser sources that emit a plurality of beamlets, wherein each one of the plurality of beamlets has a different wavelength;a beam annularizer that includes a plurality of optical units arranged to receive the beamlets, and configured to convert each beamlet into a respective annular beam that has an annular cross-sectional power profile;a beam-intersection transform element configured to point each respective one of the plurality of annular beams in an angular intersection arrangement toward a first location; anda spectral beam combiner at the first location configured to combine the plurality of wavelengths in the plurality of annular beams into a first annular spectrally combined beam.2. The system of claim 1 , wherein the first annular combined beam is a collimated beam.3. The system of claim 2 , further comprising:a Cassegrain projector operatively coupled to receive the first annular spectrally combined collimated beam and configured to form a second ...

MICRO-CHANNEL-COOLED HIGH HEAT LOAD LIGHT EMITTING DEVICE

Micro-channel-cooled UV curing systems and components thereof are provided. According to one embodiment, a lamp head module includes a high aspect ratio, high fill factor array of light emitting devices and a submount. The array includes multiple groups of electrically seriesed light emitting devices that are connected in electrical parallel. The submount is of monolithic construction and includes multiple L-shaped patterned circuit material layers. Each of the L-shaped patterned circuit material layers includes an arm portion and a stem portion. The arm portion functions as a light emitting device bond pad and the stem portion functions as a wire bond pad and a circuit trace. Each light emitting device of a group is affixed to a corresponding arm portion of the submount. The stem portions are located external to the array, run parallel to the length of the array and perform a primary current carrying function for current flow between adjacent light emitting devices of the group. 1. A lamp head module comprising:an array of light emitting devices, the array having a high aspect ratio in which a length of the array is greater than a width of the array; anda pair of optical macro-reflectors to direct photons emitted by the array, the pair of optical macro-reflectors configured to produce a beam pattern on a surface of a workpiece, wherein the pair of optical macro-reflectors form an entrance aperture and an exit aperture, wherein the entrance aperture is positioned proximate to a light emitting surface of the array, wherein the exit aperture is located at a distal end of the pair of optical macro-reflectors, and wherein the entrance aperture has an area that is larger than an area of the light emitting surface.2. The lamp head module of claim 1 , wherein the entrance aperture is positioned proximate to the light emitting surface.3. The lamp head module of claim 1 , wherein inner surfaces of each optical macroreflector of the pair of optical macroreflectors have a ...

WIDE ANGLE, BROAD-BAND, POLARIZATION INDEPENDENT BEAM STEERING AND CONCENTRATION OF WAVE ENERGY UTILIZING ELECTRONICALLY CONTROLLED SOFT MATTER

A general method is provided for electronically reconfiguring the internal structure of a solid to allow precision control of the propagation of wave energy. The method allows digital or analog control of wave energy, such as but not limited to visible light, while maintaining low losses, a multi-octave bandwidth, polarization independence, large area and a large dynamic range in power handling. Embodiments of the technique are provided for large-angle beam steering, lenses and other devices to control wave energy. 1. A active system for concentrating wave energy , comprising:(a) an active beam steering system;(b) a wedge concentrator; wherein said wave energy, which is initially freely propagating from one of many possible input directions, is intercepted, redirected and transmitted by said active beam steering system into the expanding volume of said wedge concentrator to provide a first stage of concentration;', 'wherein said wave energy, which has been redirected into the expanding volume of said wedge concentrator by said active beam steering system, is redirected as needed by the reflective surfaces of said wedge concentrator to provide a second stage of concentration that focuses said wave energy onto said receiver at a higher intensity than said wave energy possessed at the input to said active beam steering system., '(c) a receiver;'}2. The system of claim 1 , wherein said active beam steering system is based on an array of rigid active mirrors derived from soft matter within rigid channels.3. The system of claim 1 , wherein said active beam steering system is based on an array of deformable mirrors.4. The system of claim 1 , wherein said active beam steering system is based on active holograms.5. The system of claim 1 , wherein said active beam steering system is based on active liquid crystal prism arrays.6. The system of claim 1 , wherein said wedge concentrator comprises one or more surfaces cut from a compound parabolic concentrator.7. The system of ...

Device for Generating A Linear Intensity Distribution of a Laser Beam in a Working Plane

A device for generating a linear intensity distribution () of a laser beam in a working plane () comprising at least one laser light source (), optical means () which can form a plurality of sections () of the laser beam, and reflecting means on which the sections () of the laser beam formed by the optical means () can be reflected in such a manner that they are arranged adjacent to one another by the reflecting means in the working plane () in the longitudinal direction of the linear intensity distribution () to be produced and are combined into the linear intensity distribution (). The reflecting means comprise particularly a plurality of mirror modules (′). 11011. A device for producing a linear intensity distribution () of a laser beam in a working plane () , comprising{'b': '2', 'at least one laser light source (),'}{'b': 3', '4, 'optical arrangements () capable of forming a plurality of sections () of the laser radiation,'}{'b': 4', '3', '11', '10', '10, 'mirror arrangements, at which the plurality of sections () of the laser radiation shaped by the optical means () is reflected so as to be arranged by the mirror arrangement side-by-side in the working plane () in longitudinal direction of the linear intensity distribution () to be produced and to be combined into the linear intensity distribution ().'}24410. The device according to claim 1 , wherein the mirror means operate at the same time as an aperture for the individual sections () of the laser radiation claim 1 , so that edge regions of the sections () do not contribute to the linear intensity distribution () in the longitudinal direction line of the line.34. The device according to claim 1 , wherein the mirror arrangements are designed so as to reflect each of the sections () of the laser radiation more than once.44. The device according to claim 3 , wherein the mirror arrangements are designed so as to reflect each of the sections () of the laser radiation three times.555. The device according to claim ...

Actuation Mechanism, Optical Apparatus, Lithography Apparatus and Method of Manufacturing Devices

An EUV optical apparatus includes a number of adjustable mirrors () on mirror bodies (). Each mirror body is supported on an actuator () comprising a moving part () and a fixed casing part (). The actuator provides a resilient support () for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (-) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling () is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation. 1. An actuation mechanism comprising:a first part and at least one second part coupled to the first part via a resilient support so as to be movable with at least one degree of freedom relative to the first part, under the influence of an applied motive force, the resilient support being arranged to provide a biasing force increasing in response to relative displacement of the first and second parts and opposing said motive force, wherein the actuation mechanism further comprises a magnetic coupling between said first and second parts, the magnetic coupling being arranged to provide a counter-biasing force, the counter-biasing force partly opposing said biasing force to reduce the motive force required to effect a given displacement.2. The mechanism as claimed in wherein said resilient support permits relative movement between the first and second parts with at least two degrees of freedom.3. The mechanism as claimed in wherein said actuation mechanism has a longitudinal axis claim 1 , and wherein said resilient support permits tilting movement about first and second axes orthogonal to said longitudinal axis.4. The mechanism as claimed in ...

MIRROR, IN PARTICULAR COLLECTOR MIRROR FOR MICROLITHOGRAPHY

A collector mirror for an EUV microlithography system. The collector mirror includes an optical grating having an optically effective mirror surface, which reflects electromagnetic used rays in an EUV spectral range emanating from a first focal point and focuses them onto a second focal point. The first and second focal points lie on a side of the optical grating facing the mirror surface and define an optical axis. The optical grating is configured, in interaction with a stop arranged at the second focal point, to allow the used rays to pass through the stop and to block electromagnetic remaining rays in a remaining spectral range different than the EUV spectral range. The optical grating includes a blazed grating composed of a plurality of mirror facets, each having a facet surface. The facet surfaces form the mirror surface of the blazed grating. 1. A mirror , comprising:an optical grating comprising an optically effective mirror surface configured to reflect electromagnetic rays emanating from a first focal point and to focus them onto a second focal point, the first and the second focal points lie on a side of the optical grating facing the optically effective mirror surface and define an optical axis;', 'the optical grating comprises a plurality of mirror facets;', 'each mirror facet comprises a facet surface;', 'the facet surfaces define the optically effective surface of the optical grating;', 'in a sectional plane that includes the optical axis, the facet surfaces are arranged on a plurality of imaginary elliptical shells displaced from each other along the optical axis;', 'common mathematical focus points of the imaginary elliptical shells coincide with the first and second focal points;', 'the facet surfaces are distributed along the elliptical shells so that the facet surfaces are arranged at intersection points of the elliptical shells with at least one section of an imaginary circular line; and', 'for each point on the circular line, a ratio of a ...

LASER ENERGY SOURCE DEVICE

A device and method for providing a laser system utilizing high efficiency lasers emitters and optionally the high quality beam characteristics of a crystal gain medium single mode laser for emitting beamlets and utilizing an optical and mechanical method of forming the beam and directing it to the desired target using both a concave and a partially reflective convex mirror to reflect the beamlets, with the convex mirror transmitting a portion of the beamlets to a transmission medium for emitting the beamlets as a laser beam. 1. A device for generating a focused laser beam , said device comprising:an emitter arranged to produce a plurality of beamlets;a first concave reflecting mirror for converging said beamlets to a focal point;an integrating convex mirror placed at or near said focal point, said integrated convex mirror adapted for reflecting a first portion of said beamlets back toward said first reflecting mirror and for allowing a second portion of said beamlets through said integrating convex mirror; anda light transmitter adapted for transmitting said second portion of said beamlets from said integrating convex mirror, wherein said second portion of beamlets exit said light transmitter as a laser beam.2. The device of claim 1 , wherein said emitter is comprised of a plurality of fibers for transmitting said beamlets.3. The device of claim 1 , wherein said emitter is comprised of at least one slab laser.4. A system comprising a plurality of the devices of chained together using adaptive optics or a beam combiner or both.5. The device of claim 1 , wherein said light transmitter is comprised of a fluid-filled tube claim 1 , a hollow tube claim 1 , a plurality of fibers for transmitting individual beamlets claim 1 , and a rod of glass which has been treated with silver nitrate to form a gradient index light conduit.6. The device of claim 1 , wherein said light transmitter is comprised of a fluid-filled tube.7. The device of claim 1 , wherein said light ...

Measuring arrangement for measuring optical properties of a reflective optical element, in particular for microlithography

A measuring arrangement for measuring optical properties of a reflective optical element, in particular for microlithography, with an EUV light source ( 5 ), a detector ( 20 ) configured to detect EUV radiation reflected at the reflective optical element ( 10 ), and an imaging system ( 30, 40, 50, 60, 70, 80, 90 ), which images object points on the reflective optical element onto respective image points on the detector, wherein the imaging system is configured to reflect the EUV radiation, a first optical component ( 31, 41, 51, 61, 71, 81, 91 ), and at least one second optical component ( 32, 42, 52, 62, 72, 82, 92 ). Both at the first optical component and at the second optical component, reflection angles with respect to respective surface normals that respectively occur during reflection of the EUV radiation are at least 70°.

HIGHLY-FOLDING PENDULAR OPTICAL CAVITY

An optical cavity includes: a first elliptical mirror, having a first focal axis A, and designed to reflect a light beam emitted by a light source; a second elliptical mirror, having a second focal axis A; a third elliptical mirror, having a third focal axis A, the light beam exiting from the third elliptical mirror being designed to be received by a detector; a first reflector, arranged to reflect the light beam exiting from first elliptical mirror in the direction of the second elliptical mirror, and arranged to reflect the light beam exiting from second elliptical mirror in the direction of the third elliptical mirror; the first, second and third elliptical mirrors being arranged so that A, Aand Ahave a point of intersection F, corresponding to a focus common to the first, second and third elliptical mirrors. 112-. (canceled)13. Optical cavity comprising:{'sub': '1', 'a first elliptical mirror having a first focal axis noted A, and designed to reflect a light beam emitted by a light source;'}{'sub': '2', 'a second elliptical mirror having a second focal axis noted A;'}{'sub': '3', 'a third elliptical mirror having a third focal axis noted A, the light beam exiting from the third elliptical mirror being designed to be received by a detector;'}a first reflector arranged to reflect the light beam exiting from the first elliptical mirror in the direction of the second elliptical mirror, and arranged to reflect the light beam exiting from the second elliptical mirror in the direction of the third elliptical mirror;{'sub': 1', '2', '3, 'the first, second and third elliptical mirrors being arranged so that A, Aand Ahave a point of intersection, noted F, corresponding to a focus common to the first, second and third elliptical mirrors.'}14. Optical cavity according to claim 13 , wherein Aand Aare identical.15. Optical cavity according to claim 13 , wherein a half-line FAdesigned to be directed towards the detector and the half-line FAdesigned to be directed towards the ...

ILLUMINATION OPTICAL UNIT FOR A PROJECTION EXPOSURE APPARATUS

An illumination optical unit for a projection exposure apparatus serves for guiding illumination light toward an illumination field, in which a lithography mask can be arranged. A first facet mirror has a plurality of individual mirrors that provide illumination channels for guiding illumination light partial beams toward the illumination field. The individual mirrors each bear a multilayer reflective coating. A second facet mirror is disposed downstream of the first facet mirror in the beam path of the illumination light. A respective facet of the second facet mirror with at least one of the individual mirrors of the first facet mirror completes the illumination channel for guiding the illumination light partial beam toward the illumination field. 110-. (canceled)11. An illumination optical unit configured to illuminate an illumination field with illumination light , the illumination optical unit comprising:a first facet mirror comprising a plurality of individual mirrors, each individual mirror comprising a multilayer reflective coating;a second facet mirror comprising a plurality of individual facets, the second facet mirror is downstream of the first facet mirror along a path of the illumination light to the illumination field;', 'each individual mirror of the first facet mirror is configured to guide a respective illumination light partial beam to the illumination field via a respective facet of the second facet mirror; and', 'each individual mirror of the first facet mirror is configured so that its respective illumination light partial beam is incident on the individual mirror with an angle of incidence so that a ratio of a reflectivity of the individual mirror for illumination light polarized in a plane of incidence of the illumination light on the individual mirror to a reflectivity of the individual mirror for illumination light polarized perpendicular to the plane of incidence of the illumination light on the individual mirror is less than 0.7., ' ...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ILLUMINATING METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING OPTICAL APPARATUS

An optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area. 1a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; anda first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light from the collector optical member to the first area.. An optical apparatus illuminating a first area with light from a light source, the first area being longer in a second direction intersecting a first direction than in the first direction, the optical apparatus comprising: This application is a continuation of U.S. application Ser. No. 13/639,037, filed on Dec. 17, 2012, which is a U.S. national phase entry of International Application No. PCT/JP2011/058189 which was filed on Mar. 31, 2011 claiming the conventional priority of U.S. Provisional Patent Applications No. 61/320,453, filed on Apr. 2, 2010 and No. 61/320,443, filed on Apr. 2, 2010 and the disclosure of U.S. Provisional Patent Applications No. 61/320,453 and No. 61/320,443 are ...

Ultraviolet Surface Illumination System

A diffusive ultraviolet illuminator is provided. The illuminator can include a reflective mirror and a set of ultraviolet radiation sources located within a proximity of the focus point of the reflective mirror. The ultraviolet radiation from the set of ultraviolet radiation sources is directed towards a reflective surface located adjacent to the illuminator. The reflective surface can diffusively reflect at least 30% the ultraviolet radiation and the diffusive ultraviolet radiation can be within at least 40% of Lambertian distribution. A set of optical elements can be located between the illuminator and the reflective surface in order to direct the ultraviolet radiation towards at least 50% of the reflective surface.

LIGHT COLLECTOR

A light collector includes: a light guide; optical blocks, each of which has top and bottom surfaces and front and rear surfaces which extend curvedly and frontwardly from the top surface to the bottom surface, the rear surface exhibiting total internal reflection and having a focal point; and optical coupling protrusions, each of which protrudes from the bottom surface, each of which is disposed at the focal point and each of which is coupled to the light-entrance surface of the light guide. The front surface of one of every two adjacent ones of the optical blocks overlaps the rear surface of the other of every two adjacent ones of the optical blocks along a normal direction of the light guide. 1. A light collector comprising:a light guide having a light-entrance surface;a plurality of spaced apart optical blocks that are disposed over said light-entrance surface of said light guide and that are arranged in an array, said array including at least one row of said optical blocks, each of said optical blocks having top and bottom surfaces and front and rear surfaces, said bottom surface being spaced apart from said light-entrance surface of said light guide by a clearance and having front and rear edges, said front and rear surfaces extending curvedly and frontwardly from said top surface to said front and rear edges of said bottom surface, respectively, and being aligned with each other along a row direction, said rear surface exhibiting total internal reflection and having a focal point such that light reflected from said rear surface converge at said focal point, said focal point being disposed adjacent to said front edge of said bottom surface and distal from said rear edge of said bottom surface; anda plurality of optical coupling protrusions, each of which protrudes outwardly from said bottom surface of a corresponding one of said optical blocks, each of which is disposed at said focal point of said rear surface, and each of which is coupled to said light- ...

Light module for a motor vehicle including a semiconductor light source

A light module including a semiconductor light source, an optical reflector that is positioned with respect to the light source, and a reference surface, belonging to a heat sink radiator, on which the light source and the optical reflector are fastened, wherein the light source is supported by a mount that is fastened on the reference surface. The light module includes means for adjusting the position of the mount with respect to the reference surface and means for fastening the mount, in the adjusted position, on the reference surface.

REFLECTIVE BEAM SHAPER

A reflective beam former for changing a diameter of a collimated light beam. A first mirror surface of a first curvature type, a second mirror surface and a third mirror surface are in a beam path; the shapes of the surfaces cause a collimated light beam entering the beam former via a first or third mirror surface to leave via the third or first mirror surface, respectively. The beam former includes several third, curved mirror surfaces of a second, different curvature type, one type being convex, the other concave. The second mirror surface is a plane mirror surface with an axis perpendicular to the plane mirror surface, and is in the beam path between the first and one selected from the several third mirror surfaces such that the surfaces are confocal to each other. The beam former includes a selector for selecting one of the several third curved mirror surfaces. 1. A reflective beam former for changing the diameter of a collimated light beam , comprising , arranged one after the other in a beam path:at least one first mirror surface of a first type of curvature,at least one second mirror surface andat least one third mirror surface, wherein the shapes of the mirror surfaces are matched to each other, with the result that a collimated light beam entering the beam former via a first mirror surface or a third mirror surface leaves the beam former via a third mirror surface or first mirror surface, respectively, as a collimated light beam,whereinthe beam former comprises several third, curved mirror surfaces of a second type of curvature, which differ in terms of their curvatures, wherein one of the two types of curvature is convex and the other is concave,the at least one second mirror surface is designed as a plane mirror surface with a plane mirror axis perpendicular to the second mirror surface and the at least one second mirror surface is arranged in the beam path between the first mirror surface and one selected from the several third mirror surfaces in such a ...

Light-Concentrating Mechanism, Photovoltaic Power Generation Device, Window Structure, and Glass Window

A light-concentrating mechanism comprises an angle-selective reflection means that reflects light having an incident angle of at least a first threshold angle and transmits at least some of the light having an incident angle smaller than the first threshold angle, and an angle-increase reflection means that reflects incident light at an angle greater than the incident angle of said light, the two means being arranged to have a gap therebetween. The angle-increase reflection means reflects, at an angle equal to or greater than the first threshold angle, at least some of the light transmitted by the angle-selective reflection means, and the angle-selective reflection means reflects the light reflected by the angle-increase reflection means and has an angle that is equal to or greater than the first threshold angle. Light is propagated and concentrated by the gap between the angle-selective reflection means and the angle-increase reflection means. 1. A light-concentrating mechanism , comprising:an angle-selective reflector comprising an angle-selective property; andan angle-increasing reflector comprising an angle-increasing property and a deflecting property, the angle-selective reflector and the angle-increasing reflector being disposed with a gap therebetween, wherein:the angle-selective reflector is configured to reflect light having an incidence angle equal to or larger than a first threshold angle and to transmit at least a portion of light having an incidence angle smaller than the first threshold angle;the angle-increasing reflector including a reflective holographic optical element configured to reflect at least a portion of an incident light that passes through the angle-selective reflector at a reflection angle larger than an incidence angle thereof, while deflecting a traveling direction of light reflected by the angle-increasing reflector, wherein the reflection angle is equal to or larger than the first threshold angle; andthe angle-selective reflector ...

REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

An illumination optical system which is used with a reflective imaging optical system configured to form an image of a pattern arranged on a first plane onto a second plane, and which illuminates an illumination area on the first plane with a light from a light source. The illumination optical system includes one or more reflecting mirrors configured to reflect the light from the light source such that the light from the light source passes between first and second mirrors of a plurality of mirrors provided in the reflective imaging optical system, the first mirror being configured to reflect the light from the pattern first, and the second mirror being configured to reflect the light from the pattern second. 1. An illumination optical system which is used with a reflective imaging optical system configured to form an image of a pattern arranged on a first plane onto a second plane , and which illuminates an illumination area on the first plane with a light from a light source , the illumination optical system comprising:one or more reflecting mirrors configured to reflect the light from the light source such that the light from the light source passes between first and second mirrors of a plurality of mirrors provided in the reflective imaging optical system, the first mirror being configured to reflect the light from the pattern first, and the second mirror being configured to reflect the light from the pattern second.2. The illumination optical system according to claim 1 , wherein the one or more reflecting mirrors reflect the light from the light source to the illumination area such that the light traveling to the illumination area is farther away from an optical axis of the reflective imaging optical system as the light travels.3. The illumination optical system according to claim 2 , wherein the one or more reflecting mirrors include a fly's eye optical system and an optical path folding mirror configured to reflect the light that has traveled via the fly's ...

ILLUMINATION DEVICE

According to one embodiment, an illumination device includes a light source module including a plurality of light sources, and a reflector opposed to the light source module. The reflector includes a plurality of incidence openings on which light from the light sources is made incident, a plurality of emission openings opposed to the incidence openings, and a plurality of reflective surfaces extending from the incidence openings to the emission openings, respectively. Each of the reflective surfaces is formed by combining a plurality of curved surfaces arranged in an optical axis direction of the light sources.

SUNLIGHT COLLECTION AND TRANSPORTATION SYSTEM

A solar collector energy conversion system has a solar collector apparatus adapted to collect sunlight at a collection location and direct it to one or more light transport guides for transporting the sunlight to a conversion location separate from the collection location, and a solar energy conversion apparatus arranged at the conversion location and adapted to receive sunlight transported by the light transport guides and to convert the transported sunlight to an alternative form of energy.

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ILLUMINATING METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING OPTICAL APPARATUS

An optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area. 1. An illumination optical system which illuminates an illumination area on a first plane with a light from a light source , the illumination optical system comprising:a first optical system configured to irradiate the light from the light source onto a second plane such that the light has a cross sectional shape, on the second plane, in which a first dimension in a first direction is smaller than a second dimension in a second direction crossing the first direction; anda second optical system which includes a plurality of reflection elements arranged on the second plane, and which is configured to reflect the light from the first optical system, wherein the first optical system is configured to allow the light to come into the second plane along a direction inclined, in the first direction, relative to an axis crossing the second plane; andthe light exiting from the second optical system is inclined relative to the light coming into the second optical system.2. The illumination optical system according to claim 1 , wherein the light exiting from the second optical system is inclined claim 1 , in a third direction opposite to the first direction claim 1 , relative to the axis.3. The illumination optical system according to claim 1 , ...

Beam Delivery for EUV Lithography

A beam delivery apparatus is used with a laser produced plasma source. The beam delivery apparatus comprises variable zoom optics () operable to condition a beam of radiation so as to output a conditioned beam having a configurable beam diameter (b) and a plurality of mirrors () operable to direct the conditioned beam of radiation to a plasma generation site. The beam delivery apparatus enables control of the axial position of the beam where the beam has a particular diameter, with respect to the beam's focus position (). Also, a method is used to control the axial position of the location at a plasma generation site where a beam has a particular diameter, with respect to the beam's focus position.

Pneumatic Parabolic Mirror Solar Energy Collector and Grids made thereof

A scalable parabolic or disc shaped mirror, that is formed and maintained by inflating, with air or inert gas, a rigid polymer membrane envelope, that is pre-formed, and such that when inflated, forms this parabolic or disc shape, governed by a centre supporting pole, and ring around circumference of the mirror. The top half of the ballooned envelope is made of a clear transparent membrane through which the sun's rays pass through and on to the lower inner lower surface, which is coated with reflective surface. The balloon is skewered through the middle of each membrane, and clamped with flanges to hermetically seal the envelope. The pole or centre structure is anchored and hinged at the base so the Pneumatic Mirror can be articulated to face towards the sun, thus focussing the energy to whatever device is at the focal point.

ILLUMINATION OPTICS FOR EUV PROJECTION LITHOGRAPHY

An illumination optical unit for EUV projection lithography includes a field facet mirror and a pupil facet mirror. A correction control device, which is used for the controlled displacement of at least some field facets that are usable as correction field facets, which are signal connected to displacement actuators, is embodied so that a correction displacement path for the correction field facets is so large that a respective correction illumination channel is cut off at the margin by the correction pupil facet so that the illumination light partial beam is not transferred in the entirety thereof from the correction pupil facet into the object field. 1. An illumination optical unit configured to illuminate an object field in which an object to be imaged is arrangeable , the illumination optical unit comprising:a field facet mirror comprising a plurality of field facets arranged in a region of a field plane of the illumination optical unit;a pupil facet mirror comprising a plurality of pupil facets in a region of a pupil plane of the illumination optical unit;a correction control device; andcorrection actuators, each of the field facets is configured to transfer used illumination light from a light source to respectively one of the pupil facets;', 'the illumination optical unit is configured so that, during use of the illumination optical unit via respectively one illumination channel, a respective used illumination light partial beam is guided between the light source and the object field via exactly one field facet and exactly one pupil facet;', 'a transfer optical unit is downstream of the field facet in the respective illumination channel;', 'the transfer optical unit is configured to superimposedly image the field facets into the object field;', 'for each illumination channel, the transfer optical unit respectively includes one of the pupil facets to transfer the illumination light partial beam from the field facet toward the object field;', 'at least some ...

Reflective focusing optics

A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved. 11234123434. A system for providing a focused beam (FB) of electromagnetic radiation onto a location on a sample (SAM) , said system being a reflective optics system (RFO) sequentially comprising first (M) , second (M) , third (M) and fourth (M) mirrors , each of said four mirrors (M) (M) (M (M) providing reflective surfaces , with said third (M) and fourth (M) mirrors providing convex and concave reflective surfaces , respectively;{'b': 1', '1', '1, 'such that in use an input beam (IB) of electromagnetic radiation having a specific polarization state is directed toward said first (M) mirror and reflects from said reflective surface thereof, such that a first plane of incidence (P) is formed between said incident beam (IB) and said beam which is reflected from said reflective surface of said first (M) mirror;'}{'b': 1', '2', '3', '4', '3', '4', '2', '1', '2, 'and such that said beam reflected from the reflective surface of said first (M) mirror is directed toward said second mirror (M) and reflects from said reflective surface thereof toward said convex third (M) mirror, from which it reflects at an off-center location thereon toward said concave fourth (M) mirror, wherefrom it is reflected by the reflective surface thereof toward said sample (SAM) as a focused (FB) outgoing beam (OB); said beam reflected from the reflective surface of said convex third (M) mirror and that reflected from said reflective surface of said concave fourth (M) mirror forming a second plane of incidence (P), said first (P ...

SUNLIGHT TRANSMITTER

Disclosed is a sunlight transmitter, and more particularly to a sunlight transmitter according to an embodiment of the present invention is used as a transmission device of solar light to transmit sunlight into an indoor space by condensing and converting the sunlight into straight parallel light, and maximizes a sunlight transmission efficiency by minimizing loss in condensing the sunlight and obtaining not only the straight parallel light of high luminous flux but also diffused light through hybrid condensation. 1. A sunlight transmitter comprising:a case which is formed with a through hole at a center thereof;a condensing member which is mounted to an inside of the case at a first end of the case, and refracts and condenses incident sunlight into a focusing region; anda light converting member which converts the condensed light collected in a focusing region at a second end of the case into parallel light and transmitting the parallel light toward the through hole,where the condensing member and the light converting member are formed as a single body inside the case,wherein the light converting member couples with a refractive lens by a groove formed in the light converting member or comprises a refractive lens integrally formed on an outer circumference of the light converting member, andwherein both parallel light converted by the light converting member and diffused light refracted by the refractive lens are introduced inward through the through hole.2. The sunlight transmitter according to claim 1 , whereinthe condensing member comprises a concave mirror having a predetermined curvature for refracting and reflecting the incident sunlight toward a focusing region, andthe light converting member comprises a convex mirror for reflecting and converting the light refracted toward the focusing region into the parallel light.3. The sunlight transmitter according to claim 1 , whereinthe light converting member comprises a coupling groove for coupling with a lens;a ...

ROTATING CLAMPING DEVICE

Disclosed herein are devices, systems, and methods for transitioning a substantially planar mirror () to a curved configuration. A device or system may comprise a clamping assembly for associating with a mirror () and a rotating assembly configured to rotate at least a portion of a mirror according to a rotation angle (Φ). In some cases, a rotation angle is adjustable. 1. A device for transitioning a substantially planar mirror to a curved configuration , the device comprising:a) a clamping assembly, wherein said clamping assembly is configured to operatively associate with an edge of said substantially planar mirror; andb) a rotating assembly configured to (i) rotate said edge according to a rotation angle by rotating a portion of said clamping assembly about a pivot point such that said substantially planar mirror transitions to said curved configuration and (ii) secure said edge at said rotation angle.2. The device of claim 1 , further comprising a longitudinal beam configured to operatively associate with and support said rotating assembly.3. The device of claim 2 , further comprising a transverse beam configured to operatively associate with and support said longitudinal beam.4. The device of any one of - claim 2 , further comprising a second clamping assembly claim 2 , wherein said second clamping assembly is configured to operatively associate with a second edge of said substantially planar mirror.5. The device of claim 4 , further comprising a second rotating assembly configured to (i) rotate said second edge according to a second rotation angle by rotating a portion of said second clamping assembly about a second pivot point and (ii) secure said second edge at said second rotation angle.6. The device of claim 5 , wherein said rotation angle and said second rotation angle are different.7. The device of any one of - claim 5 , further comprising a second longitudinal beam configured to operatively associate with and support said rotating assembly.8. The device ...

A solid state light emitter lighting assembly and a luminaire

A solid state light emitter lighting assembly ( 100 ) and a luminaire are provided. The solid state light emitter assembly comprises a light exit window ( 110 ), a reflector ( 120′, 120 ″), a light guide ( 150′, 150 ″) and a solid state light emitter ( 160 ). The reflector reflect light towards the light exit window and has at least one edge ( 122′, 122 ″) bending towards the light exit window. The light guide receives light at a first end ( 152 ) and emits at a second end ( 154′, 15 ″) the guided light towards the reflector. The first end is arranged at a first side of the at least one edge. The first side is away from a reflecting surface ( 124 ) of the reflector. The solid state light emitter is also at the first side and emits light towards the first end of the light guide. A portion of the light that is reflected by the reflector is transmitted through the light guide through side surfaces of the light guide.

MULTIPLE SUNLIGHT COLLECTION STRUCTURE

The present invention relates to a method for collecting sunlight through an image method by tracking the sun using a dish-shaped light collector or a paraboloidal light collector and, and to a method and an apparatus for transmitting high-density light as the collected sunlight to a remote place, to which the light is applied, and for generating super-high-density light by combining, in a multi-stage manner, the high-density light obtained through a plurality of light collectors. A first concaveparaboloidal reflector of a paraboloidal light collection unit can collect light, transmit the collected light to the remote place, and provide an efficient and quantitative use environment to an applied device by using a paraboloidal reflector set including: a first concave-paraboloidal mirror in which a slope of a paraboloide is provided to make a narrow width so that downward reflection is greater than or equal to 90% by an angle between an incident angle at an inner point of a paraboloidal mirror and a normal surface, the angle being larger than a critical angle, and which has an opening formed at the lower side of a central axis thereof; and a second convex-paraboloidal reflector, which has a small diameter, shares a focus of the first concave-paraboloidal mirror, and has a miniaturized shape of the first concave-paraboloidal mirror at a focal portion without an opening at a central axis thereof. 1. Multiple sunlight collection structure , comprising a plurality of sunlight collecting structures and a sunlight collection unit ,wherein a sunlight collecting structure transmits parallel light outside after the multiple sunlight collection structure collects sunlight by performing total reflection of sunlight in parallel and concentrating sunlight by combining multiple collected sunlight in a multistage manner,wherein the sunlight collecting structure transmits sunlight in parallel outside the multiple sunlight collection structure after collecting sunlight by performing ...

Device for swiveling a mirror element with two degrees of swiveling freedom

A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.

OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING OPTICAL ELEMENTS WITH SUPPORTING DEVICE LOCATED IN NON-EQUIDISTANT MANNER

Disclosed is an optical module for a lens, especially a microlithographic apparatus, comprising a first holding device () with an inner circumference () that extends in a first circumferential direction (), and at least one first supporting device () which is fastened to the inner circumference () of said first holding device () and is used for supporting a first optical element (), an annular circumferential first assembly space () being defined by displacing the first supporting device () once in a revolving manner along the first circumferential direction (). At least one second supporting device () which is fixed to the inner circumference () of the first holding device () is provided for supporting a second optical element (), an annular circumferential second assembly space () being defined by displacing the second supporting device () once in a revolving manner along the first circumferential direction (). The first assembly space () intersects the second assembly space (). 223.-. (canceled)24. An optical module comprising:a first holding device with a circumference extending in a first circumferential direction; anda plurality of first supporting devices configured to support a first optical element, the first supporting devices being fixed at the circumference of the first holding device, along the first circumferential direction, at least one of the first supporting devices is located in a non-equidistant manner between two neighboring first supporting devices;', 'the first optical element has a shape selected from a group consisting of a shape that is asymmetric along the circumferential direction, a shape that is non-rotationally symmetric along the circumferential direction, a shape that has a recess forming a light passage, and a shape that has a recess causing an asymmetry of the first optical element; and', 'the optical module is configured to be used in a microlithography objective., 'wherein25. The optical module of claim 24 , wherein each first ...

SECONDARY REFLECTORS FOR SOLAR COLLECTORS AND METHODS OF MAKING THE SAME

The present disclosure relates to a device that includes a reflecting surface having a length aligned along a first axis (z), where a cross-section of the reflecting surface in a plane perpendicular to the first axis (z) forms a curve comprising a concave section positioned between a first endpoint and a second endpoint, at least a portion of the concave section is accurately approximated by a polynomial equation, an aperture is formed by a straight line connecting the first endpoint to the second endpoint, and the concave section is configured to focus a plurality of beams of light passing through the aperture onto a focal point. 120-. (canceled)21. A method for defining a profile of a secondary reflector configured to receive a light from a field of primary reflectors and direct the light to an absorber , the method comprising:defining an aperture width for the secondary reflector;a first step of defining a vertical position of a starting edge surface point on the profile, relative to a horizontal axis, x, on which the plurality of primary reflectors are located;a second step of calculating a principal incidence of an incoming light relative to the starting edge surface point;a third step of calculating a dependent variable for the starting edge surface point;a fourth step of calculating a subsequent surface point on the profile based on the dependent variable; andrepeating the second step, the third step, and the fourth step, in series, until the profile is defined across the width of the aperture, wherein:the principal incidence is defined as an angle at which a maximum amount of power provided by the light from the primary reflectors is delivered to the absorber, andthe repeating is completed n times where n>2.22. The method of claim 21 , wherein the dependent variable includes at least one of a target reflection direction claim 21 , a surface normal claim 21 , or a surface tangent claim 21 , and a step distance.23. The method of claim 21 , further comprising ...

Collector with an unused area for lighting systems having a wavelength of ≤ 193 nm

The invention relates to a collector for lighting systems having a wavelength ≤ 193 nm, preferably ≤ 126 nm, more preferably EUV wavelengths for receiving light from a light source via an aperture on the side of the object, and for illuminating a region on an image plane, comprising a plurality of rotationally symmetrical mirror shells respectively comprising at least one first mirror segment having one first optical surface,said mirror shells being arranged about a common axis of rotation and an annular aperture element of the aperture on the side of the object being associated with each mirror shell; a beginning and end point on a meridional plane are associated with the first optical surface, the meridional plane is a plane which includes the axis of rotation and the beginning point of the first optical surface on the meridional plane defines an outer edge beam and the endpoint of the first optical surface defines an inner edge beam, the inner and outer edge beams when rotated about the axis of rotation defining a brush discharge which is reflected on at least the first optical surface of the mirror shells and which runs through the collector from the aperture on the side of the object to the plane to be illuminated. The brush discharge defines a used area between at least two adjacent mirror shells. The invention is characterized in that the surface parameters and the position of the mirror shells are selected in such a way that at least one unused area is formed between at least two adjacent mirror shells.

Collector for an illumination system with wavelength of 193 nm

The lighting of micro structures uses an optical collector that is rotationally symmetrical about an axis between the light source (1) and the target (5). The collector has a number of mirror shells (40,42,44,46) set around the axis and positioned such that there is no overlapping effect

Collector with fastening devices for fastening mirror shells

There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.

Illumination optical unit for euv projection lithography

An illumination optical unit for EUV projection lithography has a first facet mirror and a second facet mirror, each with a plurality of reflecting facets on a support. The facets of the first facet mirror can be switched between various tilt positions.In each tilt position, the tiltable first facet is assigned to a second facet (11) of the second facet mirror (11) for deflecting EUV radiation in the direction of this second facet (11). Each of the first facets (7) is assigned to a set (AAA, aaa...) of second facets (11) by its tilt positions. The two facet mirrors are arranged in such a way that an arrangement distribution of second facets (11), impinged upon by means of the first facets (7), results in an illumination-angle distribution of an illumination of an illumination field. The second facets (11) belonging to each of the sets (YYYY) of second facets (11) lie within a circle (28) on the second facet mirror (10), the diameter of which circle is less than 70% of an overall diameter (GD) of an overall arrangement of all second facets (11) on the second facet mirror (10). This results in an illumination optical unit, in which a change between various prescribed illumination settings is possible with little outlay.