31-10-2013 дата публикации
Номер: US20130286463A1
Принадлежит:
A method of actuating micromirror elements of a digital micromirror device is disclosed. A logic state is stored in the micromirror element including applying a negative voltage more negative than about −5 volts to the micromirror element, applying a positive voltage less than about 5 volts to a first electrode, and applying ground to a second electrode. A first logic state is switched to a second logic state with an inverted waveform, including applying ground to the first electrode, applying a positive voltage less than 5 volts to the second electrode, applying a negative BSA voltage to the first electrode, applying a positive reset voltage pulse greater than about 10 volts, removing the negative BSA voltage, and applying the negative voltage to the micromirror element. 1. A method of actuating a digital micromirror device , comprising: applying a negative voltage more negative than about −5 volts to the micromirror element,', 'applying a positive voltage less than about 5 volts to a first electrode, and', 'applying ground to a second electrode; and, 'storing a logic state in a micromirror element including applying ground to the first electrode,', 'applying a positive voltage less than 5 volts to the second electrode,', 'applying a negative BSA voltage to the first electrode,', 'applying a positive reset voltage pulse greater than about 10 volts, and', 'removing the negative BSA voltage, and applying the negative voltage to the micromirror element., 'switching from a first logic state to a second logic state with an inverted waveform, including2. The method of claim 1 , wherein the first electrode is coupled to a first SRAM cell in an SRAM array and the second electrode is coupled to a second SRAM cell in the SRAM array.3. The method of claim 2 , wherein the SRAM array is formed in an isolated p-type well.4. The method of claim 1 , wherein claim 1 , during the step of storing a logic state claim 1 , the negative voltage to the micromirror element is the range of ...
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