24-10-2013 дата публикации
Номер: US20130279313A1
A waveguide including a first cladding layer, the first cladding layer having an index of refraction, n; an assist layer, the assist layer having an index of refraction, n, and the assist layer including ASiO, wherein A is selected from: Ta, Ti, Nb, Hf, Zr, and Y, x is from about 0.5 to about 2.0, y is from about 3.5 to about 6.5, and the atomic ratio of A/A+Si in ASiOis from about 0.2 to about 0.7; and a core layer, the core layer including a material having an index of refraction, n, wherein nis greater than nand n, and nis greater than n. 1. A waveguide comprising:{'sub': '3', 'a first cladding layer, the first cladding layer having an index of refraction, n;'}{'sub': '2', 'claim-text': {'sub': x', 'y, 'claim-text': wherein A is selected from: Ta, Ti, Nb, Hf, Zr, and Y,', 'x is from about 0.5 to about 2.0,', 'y is from about 3.5 to about 6.5, and', {'sub': x', 'y, 'the atomic ratio of A/A+Si in ASiOis from about 0.2 to about 0.7; and'}], 'the assist layer comprising ASiO,'}, 'an assist layer, the assist layer having an index of refraction, n, and'}{'sub': '1', 'a core layer, the core layer having an index of refraction, n,'}{'sub': 1', '2', '3', '2', '3, 'wherein nis greater than nand n, and nis greater than n.'}2. The waveguide according to claim 1 , wherein nis from about 1.4 to about 2.1.3. The waveguide according to claim 1 , wherein A is Ta.4. The waveguide according to claim 1 , wherein the atomic ratio of A/A+Si in ASiOis from about 0.25 to about 0.65.5. The waveguide according to claim 1 , wherein the atomic ratio of A/A+Si in ASiOis from about 0.25 to about 0.5.6. The waveguide according to claim 1 , wherein the assist layer is positioned between the first cladding layer and the core layer.7. The waveguide according to further comprising a second cladding layer.8. The waveguide according to claim 7 , wherein the second cladding layer is positioned adjacent the core layer opposite the assist layer.9. The waveguide according to claim 1 , wherein the assist ...
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