SYSTEM FOR CONTROLLING THE PRESSURE OF A SEALED ENCLOSURE

A system for controlling pressure of a sealed enclosure such as a glove box or containment vessel, including: a first control circuit configured to keep a current pressure value of the sealed enclosure within an operational pressure range, and configured to isolate the sealed enclosure and to transmit a primary alarm signal in event of current pressure value reaching one or other of primary limits of a degradation range; an independent secondary safety circuit separate from the primary circuit, the secondary safety circuit configured to isolate the sealed enclosure and to transmit a secondary alarm signal when the pressure of the sealed enclosure reaches one or other of secondary limits of an alarm range. 115-. (canceled)16. A system for monitoring pressure of a glove box or containment enclosure type tight enclosure , comprising:a primary drive circuit configured to keep a current pressure value of the tight enclosure in an operational pressure interval, the primary drive circuit further configured to insulate the tight enclosure and to transmit a primary alert signal in a case that the current pressure value reaches either of primary bounds of a degradation interval;a secondary safety circuit independent of the primary circuit, the secondary safety circuit configured to insulate the tight enclosure and to transmit a secondary alert signal when the current pressure of the tight enclosure reaches either of secondary bounds of an alarm interval.17. The system according to claim 16 , wherein the primary drive circuit is a programmed logic circuit and the secondary safety circuit is a wired logic circuit.18. The system according to claim 16 , wherein the primary drive circuit includes:a primary measuring module configured to measure a first current pressure value of the tight enclosure;a primary module of adjustment valves; andan automatic drive configured to drive the primary adjustment module such that the first current pressure value remains within the operational ...

Vacuum valve and vacuum pressure control system using the same

A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.

Pressure control system

Pressure control system

The present invention relates to a pressure control system for maintaining the pressure differential between a reactor ( 1 ) and a feeder ( 2 ) connected thereto and provided for introducing feed into the reactor ( 1 ), characterized in that the pressure control system comprises a pressure up line ( 5 ) and a pressure release line ( 6 ), each line ( 5, 6 ) having a control valve ( 7, 8 ), both lines ( 5, 6 ) combining into one main line ( 3 ) leading to the feeder ( 2 ), wherein a filter unit ( 4 ) is provided in the main line ( 3 ); as well as to a reactor having such a pressure control system and a process utilizing a reactor with the specific pressure control system.

Pressure control system

The present invention relates to a pressure control system for maintaining the pressure differential between a reactor ( 1 ) and a feeder ( 2 ) connected thereto and provided for introducing feed into the reactor ( 1 ), characterized in that the pressure control system comprises a pressure up line ( 5 ) and a pressure release line ( 6 ), each line ( 5, 6 ) having a control valve ( 7, 8 ), both lines ( 5, 6 ) combining into one main line ( 3 ) leading to the feeder ( 2 ), wherein a filter unit ( 4 ) is provided in the main line ( 3 ); as well as to a reactor having such a pressure control system and a process utilizing a reactor with the specific pressure control system.

Pressure control system and pressure control method using the same

본 발명은 구획된 내부의 압력을 형성하기 위한 압력조절시스템 및 이를 이용하는 압력조절방법에 관한 것으로서, 이에 대한 특징적 구성은, 챔버 내부의 압력을 조절토록 하는 압력조절시스템에 있어서, 상기 챔버 내부의 공간 크기를 가감하도록 상기 챔버 내부와 이루는 경계 부위의 위치가 변경 가능하게 적어도 하나 이상 설치되는 공간가감부와; 인가되는 제어신호에 따라 상기 각 공간가감부의 경계 부위 위치를 조절하도록 구동하는 구동부와; 상기 챔버 내부의 압력 상태를 감지하는 압력센서와; 상기 압력센서로부터 챔버 내부의 압력 상태 신호를 수신하여 상기 구동부를 제어하는 콘트롤러를 포함하여 이루어짐을 특징으로 한다. 이에 따르면, 챔버 내부의 압력 형성을 보다 용이하고 신속하게 형성함과 동시에 상호 연통하는 챔버 상호간의 압력 균형을 미소한 단위까지 용이하고 신속 정확하게 형성함으로써 유체의 유동을 방지하여 웨이퍼를 포함한 공정설비의 오염을 방지하게 되고, 이를 통해 제조수율의 향상과 설비의 가동률 및 그에 따른 생산성이 향상되는 등의 효과가 있게 된다. The present invention relates to a pressure regulating system for forming a pressure in a compartment and a pressure regulating method using the same. A characteristic configuration thereof is a pressure regulating system for regulating a pressure in a chamber, wherein the space within the chamber is provided. A space addition unit installed at least one or more spaces of which a position of a boundary between the chamber and the inside of the chamber can be changed so as to decrease the size; A driving unit which drives to adjust the position of the boundary portion of each of the space adding and dropping units according to an applied control signal; A pressure sensor detecting a pressure state inside the chamber; And a controller for controlling the driving unit by receiving a pressure state signal inside the chamber from the pressure sensor. According to this, it is possible to easily and quickly form the pressure inside the chamber, and to easily and quickly form the pressure balance between the communicating chambers to the minute unit easily and quickly and accurately, thereby preventing the flow of fluid to contaminate the process equipment including the wafer. It is prevented, through which the effect of improving the production yield and the operation rate and the productivity of the facility is improved.

Pressure control system

The present invention relates to a pressure control system for maintaining the pressure differential between a reactor (1) and a feeder (2) connected thereto and provided for introducing feed into the reactor (1), characterized in that the pressure control system comprises a pressure up line (5) and a pressure release line (6), each line (5, 6) having a control valve (7, 8), both lines (5, 6) combining into one main line (3) leading to the feeder (2), wherein a filter unit (4) is provided in the main line (3); as well as to a reactor having such a pressure control system and a process utilizing a reactor with the specific pressure control system.

Pressure control system

The present invention relates to a pressure control system for maintaining the pressure differential between a reactor (1) and a feeder (2) connected thereto and provided for introducing feed into the reactor (1), characterized in that the pressure control system comprises a pressure up line (5) and a pressure release line (6), each line (5, 6) having a control valve (7, 8), both lines (5, 6) combining into one main line (3) leading to the feeder (2), wherein a filter unit (4) is provided in the main line (3); as well as to a reactor having such a pressure control system and a process utilizing a reactor with the specific pressure control system.

Control method of automatic control pneumatic apparatus

(57)【要約】 【課題】むだ時間を有する空気圧装置のオーバーシュー ト等を抑制する。 【解決手段】基準信号Ｓｒが階段状に変化したとき、ス イッチ２０８が開状態とされているので、むだ時間を有 する空気圧機器１５の駆動をＰＤ制御により開始する。 むだ時間経過後に、制御量が変化して位置検出器２０の 出力が発生したとき、フィードバック信号Ｓｆの微分値 である速度信号Ｓｖの値がゼロ値から変化する。速度検 出部２１４により、この速度信号Ｓｖの値が所定の値Ｓ ｖｒ以上の値になったことを検出したとき、切換信号Ｓ ｂによりスイッチ２０８を開状態から閉状態に切り換え る。したがって、この切換時点以降では空気圧機器１５ がＰＩＤ制御により駆動される。このため、むだ時間を Ｉ制御により積分することによる制御量におけるオーバ ーシュート等を抑制することができる。

How to inspect the gas supply system

Pilot operated gas regulator with diaphragm protection

FIELD: control; regulation. SUBSTANCE: method of controlling a regulator with a pilot device includes periodically measuring an outlet pressure at an outlet of the regulator with a feedback pressure sensor. Method also includes comparing each measured outlet pressure with a set-point control pressure. Additionally, the method includes opening an exhaust valve of the pilot device when a detected outlet pressure is determined to be greater than the set-point control pressure such that a loading gas in the pilot device, which is applied to a top surface of a diaphragm of the regulator, exhausts out through the exhaust valve to reduce loading on the diaphragm. Method further includes determining a loading pressure in the outlet port of the pilot valve with the loading pressure sensor after opening the exhaust valve and comparing the loading pressure to a predetermined minimum threshold pressure. When the loading pressure is determined to be equal to or less than the predetermined minimum threshold value, the method includes closing the exhaust valve. EFFECT: protection of regulator diaphragm, longer service life of the regulator. 22 cl, 7 dwg РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2 662 369 C2 (51) МПК G05D 16/20 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ (52) СПК G05D 16/2053 (2006.01); G05D 16/2093 (2006.01) (21)(22) Заявка: 2015154098, 03.06.2014 (24) Дата начала отсчета срока действия патента: (73) Патентообладатель(и): ТЕСКОМ КОРПОРЕЙШН (US) Дата регистрации: 25.07.2018 2010/0090137 A1, 15.04.2010. WO 2010/099623 A1, 10.09.2010. 03.06.2013 US 61/830,320; 15.04.2014 US 14/252,969 (43) Дата публикации заявки: 14.07.2017 Бюл. № 20 (45) Опубликовано: 25.07.2018 Бюл. № 21 (86) Заявка PCT: C 2 C 2 (85) Дата начала рассмотрения заявки PCT на национальной фазе: 11.01.2016 US 2014/040612 (03.06.2014) (87) Публикация заявки PCT: 2 6 6 2 3 6 9 WO 2014/197429 (11.12.2014) R U 2 6 6 2 3 6 9 (56) Список документов, ...

Low power regulator system and method

Methods are disclosed for collecting sensor data in a pressure regulator system including a controller and a plurality of sensors. The controller and each of the individual sensors are activated as required to collect sensor data during a sampling period thereby reducing the amount of power consumed by the pressure regulator system. Further power conservation measures are implemented by using a battery sensor to monitor the capacity of the pressure regulator battery and placing the pressure regulator in reduced power consumption operating modes as the capacity of the battery is reduced.

Method and apparatus for conditional control of electronic pressure regulator

FIELD: control; regulation. SUBSTANCE: electronic pressure regulator in a process control system is controlled according to a profile constructed by a user on a computer connected to the device. Profile is a multi-step command sequence. Profile includes at least one conditional statement and, additionally, at least one branching statement. In other words, the profile includes at least one conditional statement that, depending on whether the conditional statement is true or false, causes the device to execute a first command or a second command, respectively. Profile may also include a statement (e.g., a "goto" statement) that causes the device to skip one or more commands in the profile. EFFECT: enabling to program an electronic pressure regulator. 41 cl, 21 dwg РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2 661 252 C2 (51) МПК G05D 16/20 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ (52) СПК G05D 16/2053 (2006.01); G05D 16/2093 (2006.01) (21)(22) Заявка: 2015156470, 03.06.2014 (24) Дата начала отсчета срока действия патента: (73) Патентообладатель(и): ТЕСКОМ КОРПОРЕЙШН (US) Дата регистрации: 13.07.2018 R U 03.06.2014 (72) Автор(ы): ДЭВИС Стивен Крейг (GB) (56) Список документов, цитированных в отчете о поиске: US 2012/0012567 A1, 19.01.2012. RU 03.06.2013 US 61/830,350 (43) Дата публикации заявки: 17.07.2017 Бюл. № 20 (45) Опубликовано: 13.07.2018 Бюл. № 20 (85) Дата начала рассмотрения заявки PCT на национальной фазе: 11.01.2016 2276397 C2, 10.05.2006. US 2002/0017286 A1, 14.02.2002. HYESOON KIM & et al. Wish Branch: A New Control Flow Instruction Combining Conditional Branching and Predicated Execution. High Performance Systems Group Department of Electrical and Computer Engineering The University of Texas at Austin Austin, Texas (см. прод.) 2 6 6 1 2 5 2 Приоритет(ы): (30) Конвенционный приоритет: US 2014/040600 (03.06.2014) C 2 C 2 (86) Заявка PCT: (87) Публикация заявки PCT: R U 2 6 6 1 2 5 2 WO 2014/ ...

METHOD AND DEVICE FOR CONDITIONAL CONTROL OF ELECTRONIC PRESSURE REGULATOR

РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2015 156 470 A (51) МПК G05D 16/20 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ЗАЯВКА НА ИЗОБРЕТЕНИЕ (21)(22) Заявка: 2015156470, 03.06.2014 (71) Заявитель(и): ТЕСКОМ КОРПОРЕЙШН (US) Приоритет(ы): (30) Конвенционный приоритет: (72) Автор(ы): ДЭВИС Стивен Крейг (GB) 03.06.2013 US 61/830,350 (85) Дата начала рассмотрения заявки PCT на национальной фазе: 11.01.2016 R U (43) Дата публикации заявки: 17.07.2017 Бюл. № 20 (86) Заявка PCT: (87) Публикация заявки PCT: WO 2014/197420 (11.12.2014) R U (54) СПОСОБ И УСТРОЙСТВО ДЛЯ УСЛОВНОГО УПРАВЛЕНИЯ ЭЛЕКТРОННЫМ РЕГУЛЯТОРОМ ДАВЛЕНИЯ (57) Формула изобретения 1. Электронный регулятор давления, содержащий: корпус регулятора, имеющий впускное отверстие, соединенное с источником нагнетающего давления, выпускное отверстие для выпуска управляемого давления, и выходное отверстие; впускной клапан, соединенный на своем входе с нагнетающим давлением и на своем выходе с выпускным отверстием; выпускной клапан, соединенный на своем входе с выпускным отверстием и на своем выходе с выходным отверстием; и контроллер, расположенный внутри корпуса регулятора и выполненный с возможностью приведения в действие впускного клапана и выпускного клапана для регулировки управляемого давления, подаваемого на выпускное отверстие, причем контроллер содержит процессор, запрограммированный на прием и выполнение многоэтапной последовательности команд, содержащей условный оператор, принуждающий процессор к выполнению первой команды, если условный оператор оценивается как истинный, и второй команды, если условный оператор оценивается как ложный. 2. Электронный регулятор давления по п. 1, в котором процессор запрограммирован на прием и выполнение многоэтапной последовательности команд, включающей в себя в качестве или первой команды, или второй команды оператор ветвления, вызывающий Стр.: 1 A 2 0 1 5 1 5 6 4 7 0 A Адрес для переписки: 197101, Санкт-Петербург, а/я 128, "АРСПАТЕНТ", М.В. Хмара 2 0 1 5 ...

Pressure regulator operation method with reduced power consumption and system for performing the same

FIELD: pressure regulator, namely regulator power saving operation method and system providing selective turning on and off separate components of regulator in order to reduce power consumption. SUBSTANCE: controller and each separate sensor are activated when it is necessary to read sensor data for sampling period. It reduces power value consumed by pressure regulator system. Additional actions for saving power are realized due to using battery pickup for controlling capacitance of battery of pressure regulator and due to changing operation mode of pressure regulator to power saving mode as battery capacitance decreases. EFFECT: increased time period of pressure regulator maintenance due to its operation in mode of power saving. 47 cl, 19 dwg ÐÎÑÑÈÉÑÊÀß ÔÅÄÅÐÀÖÈß RU (19) (11) 2 292 577 (13) C2 (51) ÌÏÊ G05B 19/042 (2006.01) ÔÅÄÅÐÀËÜÍÀß ÑËÓÆÁÀ ÏÎ ÈÍÒÅËËÅÊÒÓÀËÜÍÎÉ ÑÎÁÑÒÂÅÍÍÎÑÒÈ, ÏÀÒÅÍÒÀÌ È ÒÎÂÀÐÍÛÌ ÇÍÀÊÀÌ (12) ÎÏÈÑÀÍÈÅ ÈÇÎÁÐÅÒÅÍÈß Ê ÏÀÒÅÍÒÓ (21), (22) Çà âêà: 2003128989/09, 23.01.2002 (72) Àâòîð(û): ÂÀÍÄÅÐÀÕ Ðè÷àðä Äæ. (US), ÀÄÀÌÑ Ïîë Ð. (US), ÂÓËËÀÌÑ Äýâèä Ý. (US), ÌÈËËÈÊÅÍ Äæîí Á. (US) (24) Äàòà íà÷àëà îòñ÷åòà ñðîêà äåéñòâè ïàòåíòà: 23.01.2002 (73) Ïàòåíòîîáëàäàòåëü(è): ÔÈØÅÐ ÊÎÍÒÐÎËÇ ÈÍÒÅÐÍÝØÍË ËËÑ (US) (43) Äàòà ïóáëèêàöèè çà âêè: 10.03.2005 R U (30) Êîíâåíöèîííûé ïðèîðèòåò: 28.02.2001 US 09/796,902 (45) Îïóáëèêîâàíî: 27.01.2007 Áþë. ¹ 3 2 2 9 2 5 7 7 (56) Ñïèñîê äîêóìåíòîâ, öèòèðîâàííûõ â îò÷åòå î ïîèñêå: ÅÐ 0937992 À1, 25.08.1999. RU 2158437 C1, 27.10.2000. US 5991827 A, 23.11.1999. RU 97119657 A, 27.10.1999. SU 111062 À1, 01.01.1957. SU 985338 À1, 30.12.1982. SU 372596 À1, 01.01.1973. SU 997179 À1,15.02.1983. 2 2 9 2 5 7 7 R U (86) Çà âêà PCT: US 02/01810 (23.01.2002) C 2 C 2 (85) Äàòà ïåðåâîäà çà âêè PCT íà íàöèîíàëüíóþ ôàçó: 29.09.2003 (87) Ïóáëèêàöè PCT: WO 02/071165 (12.09.2002) Àäðåñ äë ïåðåïèñêè: 129010, Ìîñêâà, óë. Á. Ñïàññêà , 25, ñòð.3, ÎÎÎ "Þðèäè÷åñêà ôèðìà Ãîðîäèññêèé è Ïàðòíåðû", ïàò.ïîâ. Þ.Ä.Êóçíåöîâó, ðåã.¹ 595 (54) ÑÈÑÒÅÌÀ È ÑÏÎÑÎÁ ÐÀÁÎÒÛ ...

Method and apparatus for stabilizing pressure in an intelligent regulator assembly

지능형 조절기 조립체에서의 압력을 안정화하는 방법이 제공된다. 상기 방법은 파일롯 장치의 온-보드 제어기에서, 유예 제어 모드를 활성화하기 위한 요청을 수신하는 단계를 포함한다. 또한 상기 방법은 온-보드 제어기를 통해 유예 제어 모드를 활성화하는 단계를 포함한다. 유예 제어 모드의 활성화는 파일롯 장치의 입구 밸브 및 배출 밸브를 조절하는 단계, 및 입구 밸브와 배출 밸브의 제어를 유예하는 단계를 포함한다. A method of stabilizing pressure in an intelligent regulator assembly is provided. The method includes receiving, at an on-board controller of the pilot device, a request to activate a deferred control mode. The method also includes activating the deferred control mode via the on-board controller. Activation of the deferred control mode includes adjusting the inlet and outlet valves of the pilot device, and suspending control of the inlet and outlet valves.

METHOD AND DEVICE FOR STABILIZING PRESSURE IN THE INTELLIGENT REGULATOR ASSEMBLY

РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2015 152 578 A (51) МПК F16K 37/00 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ЗАЯВКА НА ИЗОБРЕТЕНИЕ (21)(22) Заявка: 2015152578, 03.06.2014 (71) Заявитель(и): ТЕСКОМ КОРПОРЕЙШН (US) Приоритет(ы): (30) Конвенционный приоритет: (72) Автор(ы): ЛЕОНАРД Кристиан (DE) 03.06.2013 US 61/830,538 (85) Дата начала рассмотрения заявки PCT на национальной фазе: 11.01.2016 R U (43) Дата публикации заявки: 17.07.2017 Бюл. № 20 (86) Заявка PCT: (87) Публикация заявки PCT: WO 2014/197422 (11.12.2014) R U (54) СПОСОБ И УСТРОЙСТВО ДЛЯ СТАБИЛИЗАЦИИ ДАВЛЕНИЯ В ИНТЕЛЛЕКТУАЛЬНОМ УЗЛЕ РЕГУЛИРОВАНИЯ (57) Формула изобретения 1. Управляющее устройство для использования с узлом регулятора текучей среды, содержащим регулятор текучей среды и датчик давления обратной связи, причем управляющее устройство содержит: впускное отверстие, соединенное с источником подачи давления и имеющее впускной клапан, отверстие выброса, имеющее клапан выброса, выпускное отверстие, выполненное с возможностью выдачи управляемого давления на регулятор текучей среды, и встроенный контроллер, соединенный с возможностью связи с впускным клапаном и клапаном выброса и выполненный с возможностью управления указанными впускным клапаном и клапаном выброса для управления давлением, подаваемым на регулятор текучей среды, причем встроенный контроллер включает в себя запоминающее устройство, процессор и логическую схему, хранящуюся в запоминающем устройстве и исполняемую процессором для приема запроса на включение режима приостановки управления и для включения, на основе этого запроса, режима приостановки управления, который включает в себя регулировку впускного клапана и клапана выброса и приостановку управления впускным клапаном и клапаном выброса. 2. Управляющее устройство по п. 1, в котором обеспечена возможность приема указанного запроса от персонального вычислительного устройства, имеющего связь Стр.: 1 A 2 0 1 5 1 5 2 5 7 8 A Адрес для переписки: 197101, ...

PILOT GAS REGULATOR WITH IRIS PROTECTION

РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 2015 154 098 A (51) МПК G05D 16/06 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ЗАЯВКА НА ИЗОБРЕТЕНИЕ (21)(22) Заявка: 2015154098, 03.06.2014 (71) Заявитель(и): ТЕСКОМ КОРПОРЕЙШН (US) Приоритет(ы): (30) Конвенционный приоритет: (72) Автор(ы): МУИР Гордон Кэмерон (US), ФРАНЦВА Тимоти Патрик (US) 03.06.2013 US 61/830,320; 15.04.2014 US 14/252,969 (85) Дата начала рассмотрения заявки PCT на национальной фазе: 11.01.2016 US 2014/040612 (03.06.2014) (87) Публикация заявки PCT: WO 2014/197429 (11.12.2014) A Адрес для переписки: 197101, Санкт-Петербург, а/я 128, "АРСПАТЕНТ", М.В. Хмара R U (57) Формула изобретения 1. Устройство регулирования потока текучей среды, содержащее: регулятор, включающий вход, выход, управляющий элемент и узел диафрагмы с диафрагмой, функционально соединенный с управляющим элементом для перемещения управляющего элемента в ответ на изменения давления на диафрагме, чтобы регулировать поток текучей среды от входа к выходу; пилотное устройство, соединенное с регулятором текучей среды для нагружения верхней поверхности диафрагмы, при этом пилотное устройство включает впускной канал с возможностью получения поставок нагрузочного газа и имеющий впускной клапан, выхлопной канал с выхлопным клапаном, выпускной канал в соединении по текучей среде с верхней поверхностью диафрагмы регулятора, датчик нагрузочного давления, расположенный между впускным клапаном и выпускным клапаном и находящийся в соединении по текучей среде с выпускным каналом и верхней поверхностью диафрагмы, и встроенный контроллер, коммуникативно соединенный с впускным клапаном, выпускным клапаном и датчиком нагрузочного давления, при этом впускной клапан способен работать между открытой позицией для открытия впускного канала для доставки поставляемого нагрузочного газа к выпускному каналу и верхней поверхности диафрагмы и закрытой позицией для закрытия впускного канала, а выхлопной клапан способен работать между открытой ...

DEVICE FOR INTRODUCTION IN AN ENCLOSURE OF LIQUID PRECURSORS IN PULSE MODE WITH MEASUREMENT AND CONTROL OF THE FLOW

Un dispositif d'introduction (1) dans une enceinte d'au moins un précurseur comporte au moins un réservoir (2) contenant le précurseur, des moyens pour maintenir le réservoir (2), à une pression plus élevée que celle de l'enceinte, et au moins un injecteur (3) connecté au réservoir (2). Il comporte également un dispositif de mesure de débit moyen (6), disposé entre le réservoir (2) et l'injecteur (3) et un filtre passe-bas mécanique (7) disposé entre le dispositif de mesure du débit (6) et l'injecteur (3). Le circuit de commande (4) comporte des sorties connectées respectivement au réservoir (2) et à l'injecteur (3) pour contrôler ladite pression P et/ou le temps d'injection tinj et/ou la fréquence d'injection Finj, de manière à injecter périodiquement, dans l'enceinte des gouttelettes de précurseur. Le circuit de commande (4) comporte également une entrée de régulation connectée à la sortie du dispositif de mesure de débit moyen (6), de manière à contrôler ladite pression Pgaz et/ou le temps d'injection tinj et/ou la fréquence d'injection Finj afin de conserver le débit moyen à une valeur de consigne prédéterminée. An introduction device (1) in an enclosure of at least one precursor comprises at least one reservoir (2) containing the precursor, means for maintaining the reservoir (2), at a pressure higher than that of the enclosure , and at least one injector (3) connected to the reservoir (2). It also comprises an average flow measurement device (6) disposed between the reservoir (2) and the injector (3) and a mechanical low-pass filter (7) disposed between the flow measurement device (6) and the injector (3). The control circuit (4) has outputs respectively connected to the reservoir (2) and the injector (3) for controlling said pressure P and / or the injection time tinj and / or the injection frequency Finj, of to inject periodically into the precursor droplet chamber. The control circuit (4) also has a regulation ...

Inlet and outlet valve control arrangement - uses DC error signal with superimposed triangular waveform to minimise operating error (BE020676)

The precise control of pressure within a container is achieved by continuous pulsing of inlet and outlet solenoid valves operating about average value levels. A comparator (1) operates upon a preset reference level signal (Vc) and a feedback signal from a pressure transducer (2). A signal generator (3) produces a triangular wave output of constant frequency that is amplified (4) before transmission to an adder circuit (5). The adder circuit output is of variable d.c. level with the triangular wave from superimposed and is used to drive inlet solenoid valves (EVA, EVA') and outlet valves (EVE, EVE') coupled to the pressure container (C). In operation two valves (EVA, EVE) are set to respond to a higher level than the other valves to operate when large erras exist.

Pressure regulator esp. for vehicle brakes

L'INVENTION CONCERNE UN REGULATEUR DE PRESSION AVEC UN REGULATEUR PI 15 ET UN DIFFERENCIATEUR 13 DETERMINANT LA MODIFICATION DANS LE TEMPS DU SIGNAL DE VALEUR DE CONSIGNE U. SI LE SIGNAL DE SORTIE DU DIFFERENCIATEUR 13 DEPASSE UNE VALEUR-LIMITE, L'AMPLIFICATION PROPORTIONNELLE DU REGULATEUR EST AUGMENTEE ET LA PARTIE INTEGRALE EST DEBRANCHEE. SI L'ECART DE REGLAGE U CHANGE DE SIGNE, LA PARTIE INTEGRALE DU REGULATEUR 15 EST RAMENEE A LA VALEUR ZERO. APPLICATION AUX REGULATEURS DE PRESSION DE FREINAGE POUR DES VEHICULES.

PRESSURE REGULATION SYSTEM IN A SEAT ENCLOSURE FOR A PERIODIC DISSOLUTION CHEMICAL REACTION.

SYSTEM FOR MONITORING AND MONITORING A GLOVE BOX

L'INVENTION CONCERNE UN SYSTEME DE CONTROLE ET DE SURVEILLANCE D'UNE BOITE A GANTS. CE SYSTEME 1 COMPREND DES PREMIER ET SECOND MOYENS DE DETECTION 4 ET 5 DE SEUILS DE REGULATION DE PRESSION DANS LA BOITE, DES PREMIER ET SECOND MOYENS DE DETECTION 6, 7 DE SEUILS D'ALARME DE PRESSION DANS LA BOITE, DES VANNES D'ADMISSION ET D'EXTRACTION 2, 3 D'UN GAZ DANS LA BOITE, AINSI QUE DES MOYENS DE CONTROLE DE CES VANNES. LES MOYENS DE DETECTION DE SEUILS DE REGULATION ET D'ALARME ET LES MOYENS DE CONTROLE SONT DE TYPE PNEUMATIQUE; LES VANNES SONT A COMMANDE PNEUMATIQUE. APPLICATION AU CONTROLE DU FONCTIONNEMENT DE BOITE A GANTS.

Output pressure control apparatus

An output pressure control apparatus particularly adapted fox HVAC control applications, and being of the general type which admits a higher supply pressure to a controlled output line when it is desired to increase the pressure in the output line and which bleeds pressure from the controlled output line when it is desired to reduce the pneumatic output pressure. The pressure regulating apparatus requires only a single filter means and utilizes bidirectional flow of air through the filter means during normal operation which cleans the filter means.

GLOVE BOX MONITORING AND MONITORING SYSTEM

PRESSURE REGULATOR FOR PNEUMATIC PRESSURES ESPECIALLY FOR VEHICLES

L'invention concerne un régulateur de pression pour des pressions pneumatiques, du type comportant une électrovanne susceptible d'être commandée par des signaux électriques, un convertisseur ou transducteur pression-tension pour produire un signal de la valeur réelle ou instantanée et proportionnel à la pression à réguler, un générateur de la valeur de consigne de la pression, un comparateur pour fournir un signal d'écart de la régulation entre le signal de la valeur instantanée et celui de la valeur de consigne, ainsi qu'un régulateur relié au comparateur et un dispositif pour fournir un signal de commande pour l'électrovanne. Le signal de commande a une allure telle que dans une plage comprise entre l'ouverture et la fermeture, un siège de soupape peut être ajusté, pendant une durée quelconque, de façon continue dans des positions intermédiaires. Application aux véhicules. The invention relates to a pressure regulator for pneumatic pressures, of the type comprising a solenoid valve capable of being controlled by electrical signals, a pressure-voltage converter or transducer for producing a signal of the real or instantaneous value and proportional to the pressure. to be regulated, a pressure setpoint generator, a comparator to provide a regulation deviation signal between the instantaneous value signal and that of the setpoint value, as well as a regulator connected to the comparator and a device for providing a control signal for the solenoid valve. The control signal has a form such that in a range between opening and closing, a valve seat can be adjusted, for any period of time, continuously to intermediate positions. Application to vehicles.

Pneumatically operated wet settling machine

Patent FR2144951A5

Fluid flow control method and apparatus for minimizing particle contamination

A fluid flow control for use with a process chamber. In the disclosed embodiment, the process chamber is for ion implantation of a workpiece and the fluid flow control is to assure the flow rates are maintained at values which are efficient in evacuating and pressurizing the chamber but are not high enough to dislodge particulate contaminants from the process chamber walls. In the disclosed design, the invention has utility both in instances in which wafers are directly inserted into the process chamber for ion implantation and in which the wafers are inserted into the chamber by use of a load-lock which avoids the requirement that the process chamber be cyclicly pressurized and depressurized.

Automatic digital pressure setting device

Pump control module

A pump module that controls and varies the pressure of a fluid within a hydraulic system. The module includes a housing which has an inlet port, an outlet port and a return port. The inlet port is typically coupled to a pump. The return port is typically connected to a fluid reservoir. The outlet port is typically connected to a working device such as the fuel injector of an internal combustion engine. The module contains a spring loaded variable volume accumulator which maintains the fluid pressure at the outlet of the module. The module also has a three-way valve that provides fluid communication between the inlet port and the outlet port when in a first position, and fluid communication between the inlet port and the return port when in a second position. The module further includes a pressure transducer that senses the fluid pressure at the outlet port and provides a corresponding pressure feedback signal to an electronic controller. The electronic controller moves the three-way valve to the second position when the outlet fluid pressure exceeds a threshold value. Opening the valve allows the fluid provided by the pump to be directed to the reservoir through the return port, thereby bypassing the working device. Shorting the pump output to the reservoir reduces the work required by the pump. The fluid pressure within the system can be changed by varying the threshold value.

A pump control module

Method and system for controlling a pressurized fluid and valve assembly for use therein

A method and system are provided for controlling a pressurized fluid such as nitrogen gas which tray be initially stored at a pressure as high as 20.000 psi. A valve assembly is utilized m the method and system and includes an electric proportioning device such as a pneumatic servovalve (14) and a pair of pneumatic fluidly-coupled valves (16 and 18) which are piloted by the servovalve (14) to regulate the pressure of the pressurized nitrogen gas. la the method and system, the servovalve (14) operates in a closed loop fashion by utilizing feedback from a feedback device such as a pressure transducer (40). A controller (46) in the closed loop is responsive m a pressure signal from the pressure transducer (40) and a preset reference signal to provide an error control signal to the servovalve (14).

Method and apparatus for stabilizing pressure in an intelligent regulator assembly

A method of stabilizing pressure in an intelligent regulator assembly is provided. The method includes receiving, at an on-board controller of a pilot device, a request to activate a suspend control mode. The method also includes activating, via the on-board controller, the suspend control mode. The activation of the suspend control mode includes adjusting an inlet valve and an exhaust valve of the pilot device, and suspending control of the inlet valve and the exhaust valve.

Fluid flow control system, fluid delivery and control system for a fluid delivery line, and method for controlling pressure oscillations within fluid of a fluid delivery line

A fluid delivery and control system is provided for a fluid delivery line having elastic components. The system includes a pressure sensor, an electronically controlled valve, processing circuitry, and computer program code logic. The pressure sensor is operative to detect fluid pressure within a fluid delivery line. The electronically controlled valve includes an adjustable flow regulating aperture disposed in the line, interposed along a linear flow axis, and operative to regulate fluid flow through the line. The processing circuitry communicates with the pressure sensor and the electronically controlled valve. The computer program code logic is executed by the processing circuitry and is configured to generate an output signal. The output signal comprises an operating parameter of at least one of the pressure sensor and the electronically controlled valve to adjust flow capacity of the flow regulating aperture of the valve to dissipate pressure oscillations within the fluid delivery line. A method is also provided.

Patent RU2015152578A3

ВУ” 2015152578” АЗ Дата публикации: 22.03.2018 Форма № 18 ИЗ,ПМ-2011 Федеральная служба по интеллектуальной собственности Федеральное государственное бюджетное учреждение ж 5 «Федеральный институт промышленной собственности» (ФИПС) ОТЧЕТ О ПОИСКЕ 1. . ИДЕНТИФИКАЦИЯ ЗАЯВКИ Регистрационный номер Дата подачи 2015152578/06(081096) 03.06.2014 РСТЛ52014/040602 03.06.2014 Приоритет установлен по дате: [ ] подачи заявки [ ] поступления дополнительных материалов от к ранее поданной заявке № [ ] приоритета по первоначальной заявке № из которой данная заявка выделена [ ] подачи первоначальной заявки № из которой данная заявка выделена [ ] подачи ранее поданной заявки № [Х] подачи первой(ых) заявки(ок) в государстве-участнике Парижской конвенции (31) Номер первой(ых) заявки(ок) (32) Дата подачи первой(ых) заявки(ок) (33) Код страны 1. 61/830,538 03.06.2013 05 Название изобретения (полезной модели): [Х] - как заявлено; [ ] - уточненное (см. Примечания) СПОСОБ И УСТРОЙСТВО ДЛЯ СТАБИЛИЗАЦИИ ДАВЛЕНИЯ В ИНТЕЛЛЕКТУАЛЬНОМ УЗЛЕ РЕГУЛИРОВАНИЯ Заявитель: ТЕСКОМ КОРПОРЕЙШН, 0 2. ЕДИНСТВО ИЗОБРЕТЕНИЯ [Х] соблюдено [ ] не соблюдено. Пояснения: см. Примечания 3. ФОРМУЛА ИЗОБРЕТЕНИЯ: [Х] приняты во внимание все пункты (см. п см. Примечания [ ] приняты во внимание следующие пункты: р [ ] принята во внимание измененная формула изобретения (см. Примечания) 4. КЛАССИФИКАЦИЯ ОБЪЕКТА ИЗОБРЕТЕНИЯ (ПОЛЕЗНОЙ МОДЕЛИ) (Указываются индексы МПК и индикатор текущей версии) Е16К 37/00 (2006.01) 5. ОБЛАСТЬ ПОИСКА 5.1 Проверенный минимум документации РСТ (указывается индексами МПК) Е16К 1/00 - Е16К 51/00 5.2 Другая проверенная документация в той мере, в какой она включена в поисковые подборки: 5.3 Электронные базы данных, использованные при поиске (название базы, и если, возможно, поисковые термины): РЕРАТБ пе О\У/РТ, Езрасепе, РАТЕМТЗСОРЕ, Рабзеагсв 6. ДОКУМЕНТЫ, ОТНОСЯЩИЕСЯ К ПРЕДМЕТУ ПОИСКА Кате- Наименование документа с указанием (где необходимо) частей, Относится к гория* относящихся к предмету поиска ...

System for inflating tyres.

System for inflating tyres comprised of a pressure air supply apparatus with a series of push-buttons (2) for different pressures and completed with a series of collars (6) which may be mounted on the outside of the valve of the tyre with identification on characteristics which match those of one of the push-buttons. The pressure air supply apparatus includes a control unit (12) which acts on a pressure inlet electrovalve (93) or on a pressure discharge electro-valve (95), said control unit (12) having an amplifier (14), a transducer (13), a converter (15) and a zero adjusting circuit formed by to potentiometers (16). Two air supply hoses (9) are each fitted at their ends with a mouthpiece (10) terminated by clamping elements which tend to move towards one of the inclined grooves (20) through the action of a pushing element (22) biased by a spring (23).

Improvements in or relating to pressure controllers

Method for regulating and/or controlling the pressure in a vessel

Die Erfindung bezieht sich auf eine Einrichtung zur Regelung und/oder Steuerung des Druckes in einem Rezipienten (1) mit Hilfe einer Vakuumpumpe (3), die über einen Membrandruckregler (2) mit Referenzdruckkammer (4) an den Rezipienten (1) angeschlossen ist. Um die Integration des Membrandruckreglers in ein automatisches Steuerungssystem zu ermöglichen, ist an die Referenzdruckkammer (4) ein Gaseinlaßventil (7) zur Erhöhung und ein Gasaustrittsventil (8) zur Erniedrigung des Referenzdruckes angeschlossen; zur Betätigung der Ventile (7, 8) ist ein Regler (11) vorgesehen, dem eine Sollwertvorgabe (12) und mindestens ein Meßglied (13 oder 14) zugeordnet sind. The invention relates to a device for regulating and / or controlling the pressure in a recipient (1) with the aid of a vacuum pump (3) which is connected to the recipient (1) via a diaphragm pressure regulator (2) with a reference pressure chamber (4). In order to enable the membrane pressure regulator to be integrated into an automatic control system, a gas inlet valve (7) for increasing and a gas outlet valve (8) for lowering the reference pressure are connected to the reference pressure chamber (4); A controller (11) is provided for actuating the valves (7, 8), to which a setpoint specification (12) and at least one measuring element (13 or 14) are assigned.

System to control pressure in a test device

Embodiments of the present invention are directed toward pressure controllers and calibrators for setting or measuring pressures in test devices. In one embodiment, the pressure controller contains a dual reference pressure controller. The dual reference pressure controller is operable to maintain two different pressures relative to a reference pressure. The first pressure being a relatively fixed amount greater than the reference pressure and the second pressure being a relatively fixed amount less than the reference pressure.

Pressure regulator esp. for braking cylinder

A braking system regulator for use in road vehicles compares the monitored pressure signal (Vist) with the command (Usoll) to generate an error (delta U) fed to the regulator stage (9), typically a PI type. The output is produced by a drive stage as pulse of a variable mark/space ratio to operate the poppet valves (MV1,MV2) of the system. The command value is differentiated (13) to supply a trailing edge delay stage (14) controlling the switching of a power supply (iv). This provides a bias current for the valve coils that eliminates delay.

METHOD FOR REGULATING THE PRESSURE IN AT LEAST ONE WHEEL BRAKE AND DEVICE FOR CARRYING OUT SAID METHOD

Control circuit for regulating the pressure in vacuum systems

A control circuit for regulating the pressure in vacuum systems, with pressure transducers and with actuators connected operatively to these, has a first pressure transducer, reference numeral (6) in the accompanying drawing, with a time constant low in comparison with the control time constant of the control circuit, and a second pressure transducer (12) with a long-time pressure-indicating stability high in comparison with the first pressure transducer, the compensation of brief pressure fluctuations being controlled essentially by the first pressure transducer, whilst the second pressure transducer compensates essentially slow pressure fluctuations. The drift of the first pressure transducer, which causes such pressure fluctuations, is thus compensated. A gas-friction vacuum meter is suitable for preference as a second pressure transducer. <IMAGE>

Method and device for pressure stabilization of analyzer evaluation devices

Precision reference pressure supply system

A closed loop, selectively variable precision pressure reference system for testing pneumatic apparatus comprising all solid state digital control of a precision valve for establishing and maintaining the selected or desired reference pressure as a ratio between a positive pressure and a vacuum, the pressure ratio being sensed by a precision pressure sensor of the vibrating diaphragm type. The desired reference pressure is expressed as a binary word and the output of the pressure sensor is converted to a binary word, these two words being digitally compared and the difference therebetween being converted to an analog signal for adjusting the valve thereby closing the loop to maintain the selected pressure. The system is also capable of providing a precision pressure rate reference. The system automatically compensates for the inherent non-linear characteristics of the pressure sensor over its range of operation.

Apparatus and method for feeding a process medium

The apparatus (1) according to the invention for regulating a process medium flow (2) to be fed to a process medium consumer (28), comprising a) a process medium path (3), by means of which a process medium source (27) can be connected to the process medium consumer (28), and b) a control gas path (4), by means of which a control gas pressure can be built up with a control gas, wherein the process medium path (3) comprises a pneumatic pressure regulator (5), the control input (6) of which is connected to the control gas path (4), wherein means (7) for regulating the control gas pressure are embodied, is distinguished by the fact that the means (7) for regulating the control gas pressure comprise a delivery valve (8) for connecting the control gas path (4) to a control gas pressure source (9) and a discharge valve (10) for decreasing pressure in the control gas path (4). The apparatus (1) according to the invention and the method according to the invention advantageously permit precise regulation of the process medium flow (2) from a process medium source (27) to a process medium consumer (28) using simple means. On account of the magnetic valves (8, 10, 19) used such as, for example, the magnetic 5/3-way directional valve (19) for increasing or decreasing a control gas pressure in a control gas path (4), corresponding regulation can even be used in areas at risk of an explosion, such as, for example, in ultra-clean rooms, in implanters (18) or the like.

Patent DE8815427U1

Fluid pressure control device

A pilot pressure supply solenoid valve ( 36 ) is disposed in a flow path connecting an inlet port ( 16 ) and a pilot chamber ( 48 ), and a pilot pressure discharge solenoid valve ( 38 ) is disposed in a flow path through which a pressure fluid in the pilot chamber is discharged to the exterior. A flow path, through which the pressure fluid that has passed through a supply valve ( 26 ) is discharged to the exterior, is not provided.

Fluid pressure control device

입구 포트(16)와 파일럿 챔버(48)를 접속하는 유로에 파일럿압 공급용 전자 밸브(36)가 설치되고, 파일럿 챔버의 압력유체를 외부로 배출하는 유로에 파일럿압 배출용 전자 밸브(38)가 설치되며, 공급 밸브(26)를 통과한 압력유체가 외부로 배출되는 유로를 가지지 않는다.

Pressure regulating circuit

The invention relates to a pressure regulating circuit having at least one switching valve for controlling a consumer pressure. The switching valve has a valve member that can be actuated in a ballistic manner. The duration of the switched-on time of the switching valve or a duration of the ballistic actuation is a function of a pressure specification.

Pressure control device and control method for periodic chemical dissolution reaction in enclosure

IMPROVEMENTS IN APPARATUS FOR INFLATING TIRE

Pressure control system

Pneumatic tyre inflator - automatically inflates and adjusts to manually pre-set air pressure

The tyre valve is connected to an air feed line (5) coming from the junction point (9) to which three pneumatic valves are connected (2, 3, 4). The first valve (2) receives air from a compressor sensor (19) the second valve (4) leads to a pressure sensor (13) and the third valve (3) is an unloaded valve with an outlet to atmosphere (23). The desired pressure is set by a manual valve (10) in conjuction with the pressure gauge (11), should the tyre pressure be below the desired value, the membrane (14) in the pressure sensor moves upwards to unload the pressure switch (16) which causes the feed valve (2) to open to admit air to the tyre for a pre-set time, after which the feed valve closes and the second valve (4) opens to the pressure sensors. The process is repeated until the tyre pressure exceeds the desired setting, this causes the push rod (15) in the pressure sensor to vent the pressure switch (16) to give an impuse to the unloader valve (3) which remains open until the pressure is equal on both sides of the completion of the process.

IMPROVEMENT IN FURNITURE HINGES

System for regulating pressure in a container which is the seat of an intermittent dissolution chemical reaction

System for regulating pressure in a container (1) which is the seat of dissolution reactions, leading to pressure peaks, followed by recombination reactions of the gases during which the pressure decreases. A first valve (21) is arranged on a first circuit for injection of gas into the enclosure and a second valve (22) is arranged on a second exhausted gas circuit. The first valve (21) is controlled to rapidly vary the injected gas flow rate within a range of operation away from the extreme opening and closing values. When it is required to leave the range of operation, a feedback system modifies the opening of the second valve (22), whose time constant is greater and which can allow a larger flow rate to pass. Application to dissolvers of nuclear fuels in nitric acid.

Air dispensing apparatus

Control air pressure controlling method for control air system for adjusting braking torque of e.g. water retarder, in motor vehicle, involves opening inlet and outlet valve to discharge compressed air through air inlet and delivery pipe

The method involves increasing control air pressure in a workspace of a control air system by closing an outlet valve (5), opening an inlet valve (3) and guiding compressed air through a compressed air inlet pipe (2). The pressure is decreased by opening the valve (5) and closing the valve (3) and guiding the air from the space through a compressed air delivery pipe. The valves (5, 3) are opened to discharge the air through the pipes. An independent claim is also included for a control air system for adjusting a braking torque of a hydrodynamic retarder.

Low power regulator system and method

Methods are disclosed for collecting sensor data in a pressure regulator system including a controller and a plurality of sensors (34, 35, 44, 48, 58 ). The controller and each of the individual sensors are activated as required to collect sensor data during a sampling period thereby reducing the amount of power consumed by the pressure regulator system. Further power conservation measures are implemented by using a battery sensor to monitor the capacity o f the pressure regulator battery and placing the pressure regulator in reduced power consumption operating modes as the capacity of the battery is reduced.

Pressure control device and flow rate control device

Eine Drucksteuervorrichtung (40), umfassend:ein elektromagnetisches Ventil (43) für die Versorgung mit Druckgas, das mit einer Gasversorgungsquelle verbunden ist und in einem Öffnungs- und Schließbetrieb auf Grundlage eines Pulssignals (Db) mit einer vorbestimmten Periode betrieben wird, undein elektromagnetisches Ventil (44) für den Gasausstoß, das über eine Verbindungsleitung (46) mit dem elektromagnetischen Ventil (43) für die Versorgung mit Druckgas verbunden ist und in einem Öffnungs- und Schließbetrieb auf Grundlage eines Pulssignals (Db) mit der vorbestimmten Periode betrieben wird, undeine Ableitung (35), die das Gas aus der Verbindungsleitung (46) ableitet, undein Druckerfassungsmittel (72), das den Druck (Pd) des Gases in der Verbindungsleitung (46) oder in der Ableitung (35) erfasst, undeinen Druckcontroller (41) mit einem ersten Pulserzeugungsmittel und einem zweiten Pulserzeugungsmittel, wobeidas erste Pulserzeugungsmittel das Pulssignal basierend auf einer Abweichung (ΔP) zwischen dem erfassten Druck (Pd) und dem Zieldruck (Pt) des Gases erzeugt, wobei mit dem Pulssignal (Db) für jede Periode das elektromagnetische Ventil (43) für die Druckgasversorgung sowie auch das elektromagnetische Ventil (44) für den Gasausstoß betrieben werden, um anhand des Druckerfassungsmittels (72) den erfassten Druck (Pd) des Gases auf den Zielwert (Pt) zu bringen, unddas zweite Pulserzeugungsmittel das Pulssignal (Db), das aufgrund des ersten Pulserzeugungsmittels erzeugt wurde, unter der Bedingung ändert, dass die Abweichung (ΔP) zwischen dem erfassten Druck (Pd) des Gases und dem Zieldruck (Pt) während einer Periode, in der das elektromagnetische Ventil (43) für die Versorgung mit Druckgas sowie das elektromagnetische Ventil (44) für den Gasausstoß betrieben werden, mehr als ein Entscheidungswert (Rp) beträgt, so dass die Abweichung (ΔP) vermindert wirddadurch gekennzeichnet, dass das zweite Pulserzeugungsmittel das aufgrund des ersten Pulserzeugungsmittels erzeugte ...

The method for checking gas supply system

本发明提供一种检查气体供给系统的方法。一实施方式中，在基板处理装置的腔室经由气体供给管路及气体导入口连接有气化器。在气体供给管路连接有排气装置。基板处理装置具备获取气体供给管路的压力的测定值的压力传感器。一实施方式的方法包括：从气化器经由气体供给管路向腔室供给处理气体的工序；及在已停止向气体供给管路供给处理气体的状态下，对通过压力传感器获取的测定值的变化进行监控的工序。

PROCEDURE AND SYSTEM FOR THE REGULATION OF A PRESSURE FLUID AND SET OF VALVES FOR THE APPLICATION OF THE SAME.

SE PRESENTA UN METODO Y UN SISTEMA PARA CONTROLAR UN FLUIDO A PRESION TAL COMO GAS NITROGENO QUE PUEDE ESTAR INICIALMENTE ALMACENADO A UNA PRESION DE HASTA 20000 PSI. EN EL METODO Y SISTEMA SE UTILIZA UN DISPOSITIVO DE VALVULA QUE INCLUYE UN DISPOSITIVO ELECTRICO DE DOSIFICACION TAL COMO UNA SERVOVALVULA NEUMATICA (14) Y UN PAR DE VALVULAS NEUMATICAS, ACOPLADAS MEDIANTE FLUIDO (16 Y 18) QUE ESTAN CONTROLADAS POR LA SERVOVALVULA (14) PARA REGULAR LA PRESION DEL GAS NITROGENO A PRESION. EN EL METODO Y SISTEMA LA SERVOVALVULA (14) FUNCIONA EN FORMA DE CIRCUITO CERRADO UTILIZANDO LA RETROALIMENTACION DE UN DISPOSITIVO DE RETROALIMENTACION TAL COMO UN TRANSDUCTOR DE PRESION (40). UN CONTROLADOR (46) EN EL CIRCUITO CERRADO ES SENSIBLE A UNA SEÑAL DE PRESION DEL TRANSDUCTOR DE PRESION (40) Y A UNA SEÑAL DE REFERENCIA PRESELECCIONADA PARA SUMINISTRAR UNA SEÑAL DE CONTROL DE ERROR PARA LA SERVOVALVULA (14). A METHOD AND SYSTEM IS PRESENTED TO CONTROL A PRESSURE FLUID SUCH AS GAS NITROGEN THAT CAN BE INITIALLY STORED AT A PRESSURE OF UP TO 20,000 PSI. A VALVE DEVICE IS INCLUDED IN THE METHOD AND SYSTEM THAT INCLUDES AN ELECTRIC DOSAGE DEVICE SUCH AS A PNEUMATIC SERVOVALVULA (14) AND A PAIR OF PNEUMATIC VALVES, COUPLED BY FLUID (16 AND 18) THAT ARE CONTROLLED BY (SERVOVAL) 14 TO REGULATE THE PRESSURE OF PRESSURE NITROGEN GAS. IN THE METHOD AND SYSTEM THE SERVOVALVULA (14) WORKS IN THE FORM OF A CLOSED CIRCUIT USING THE FEEDBACK OF A FEEDBACK FEEDING DEVICE AS A PRESSURE TRANSDUCER (40). A CONTROLLER (46) IN THE CLOSED CIRCUIT IS SENSITIVE TO A PRESSURE TRANSDUCER PRESSURE SIGNAL (40) AND A PRESELECTED REFERENCE SIGNAL TO SUPPLY AN ERROR CONTROL SIGNAL FOR THE SERVO VALVE (14).

Concentrating vortex shaker

A concentrating vortex shaker for the simultaneous shaking and concentration of a multiplicity of liquid samples comprises a heat-conductive block having a plurality of openings for receiving laboratory vessels containing sample liquids and removably mounted on a base provided with an adjustable eccentric drive for displacing the block in a gyrating motion. An airtight cover is removably mounted on the block and forms a chamber above the samples which can be controllably evacuated. The samples can be heated or cooled by a temperature-controlled liquid which is fed through a channel formed in the block or heated by an adjustable electrical heater provided in the block mounting or cooled by a cooling plate, upon which the block mounts.

Control of the atmosphere in an enclosure

ABSTRACT A method of controlling an atmosphere in an enclosure to which gas is being supplied includes the steps of monitoring two parameters, being atmospheric pressure within the enclosure and the rate of gas flow to or from the enclosure, comparing the monitored values of these parameters with respective adjustable set points to obtain pressure and rate of flow error values, deriving two or more variation values from the error values in accordance with pre-determined functions, and adjusting gas inflow and exhaust valves for the enclosure in dependence upon the variation values Also disclosed is an installation having a control system arranged to perform this method.

ELECTRONEUMATIC CONVERTER WITH SOLENOID VALVE CONTROL.

UN CONVERSOR ELECTRONEUMATICO CONTROLADO MEDIANTE VALVULAS DE SOLENOIDE (1,4), EN DONDE DICHAS VALVULAS DE SOLENOIDE (1,4) SE ENCUENTRAN CONECTADAS RESPECTIVAMENTE A LA PRESION DE ALIMENTACION (3) Y A LA ATMOSFERA (5), CADA UNA A TRAVES DE UN REGULADOR DE LA PRESION (22,27) CONTROLADO POR UN DISPOSITIVO DE MEDIDA DE LA DIFERENCIA DE PRESION (23,28) CONECTADO A TRAVES DE LA VALVULA SOLENOIDE CORRESPONDIENTE (1,4) PARA ASI MANTENER UNA DIFERENCIA DE PRESION CONSTANTE A TRAVES DE DICHAS VALVULAS DE SOLENOIDE (1,4). TAMBIEN SE DESCRIBEN LOS ASPECTOS PREFERENTES DE LA INVENCION. AN ELECTRONEUMATIC CONVERTER CONTROLLED THROUGH SOLENOID VALVES (1,4), WHERE SUCH SOLENOID VALVES (1,4) ARE CONNECTED RESPECTIVELY TO THE SUPPLY PRESSURE (3) AND TO THE ATMOSPHERE (5), EACH ONE THROUGH A PRESSURE REGULATOR (22,27) CONTROLLED BY A PRESSURE DIFFERENCE MEASURING DEVICE (23,28) CONNECTED THROUGH THE CORRESPONDING SOLENOID VALVE (1,4) TO MAINTAIN A CONSTANT PRESSURE DIFFERENCE THROUGH THESE SOLENOID VALVES (1,4). THE PREFERRED ASPECTS OF THE INVENTION ARE ALSO DESCRIBED.

Pressure regulator for a mobile agricultural discharge device

Pressure controller

IMPROVED ELECTRO-PNEUMATIC CONVERTER WITH SOLENOID VALVE CONTROL

Automatic pneumatic pressure control apparatus and method of controlling same

When a steplike reference signal is supplied while a switch is open, an offset signal for compensating for the dead time of a pneumatic device is generated by an offset generator and supplied as a manipulated variable for the pneumatic device. When a feedback increases in level and a speed higher than a reference speed is detected by a speed detector, the switch is closed by a switching signal, switching from a PD control mode to a PID control mode. The pneumatic device thus controlled has a reduced response time and can made a quick response.

Pilot operated gas regulator with diaphragm protection

A method of controlling a regulator with a pilot device includes periodically detecting an outlet pressure at an outlet of the regulator with a feedback pressure sensor. The method also includes comparing each detected outlet pressure with a set-point control pressure. Additionally, the method includes opening an exhaust valve of the pilot device when a detected outlet pressure is determined to be greater than the set-point control pressure such that a loading gas in the pilot device, which is applied to a top surface of a diaphragm of the regulator, exhausts out through the exhaust valve to reduce loading on the diaphragm. The method further includes sensing a loading pressure in the outlet port of the pilot valve with the loading pressure sensor after opening the exhaust valve and comparing the loading pressure to a predetermined minimum threshold pressure. When the loading pressure is determined to be equal to or less than the predetermined minimum threshold value, the method includes closing the exhaust valve.

System to control pressure in a test device

Embodiments of the present invention are directed toward pressure controllers and calibrators for setting or measuring pressures in test devices. In one embodiment, the pressure controller contains a dual reference pressure controller. The dual reference pressure controller is operable to maintain two different pressures relative to a reference pressure. The first pressure being a relatively fixed amount greater than the reference pressure and the second pressure being a relatively fixed amount less than the reference pressure.

System for inflating tyres

System for inflating tyres comprised of a pressure air supply apparatus with a series of push-buttons (2) for different pressures and completed with a series of collars (6) which may be mounted on the outside of the valve of the tyre with identification on characteristics which match those of one of the push-buttons. The pressure air supply apparatus includes a control unit (12) which acts on a pressure inlet electrovalve (93) or on a pressure discharge electrovalve (95), said control unit (12) having an amplifier (14), a transducer (13), a converter (15) and a zero adjusting circuit formed by to potentiometers (16). Two air supply hoses (9) are each fitted at their ends with a mouthpiece (10) terminated by clamping elements which tend to move towards one of the inclined grooves (20) through the action of a pushing element (22) biased by a spring (23).

DEVICE FOR REGULATING THE FLOW AND / OR PRESSURE OF A FLUID

La présente invention concerne un dispositif de régulation du débit et/ ou de la pression d'un fluide transféré d'un réservoir (H) à haute pression vers un réservoir (S). Une première vanne (1) munie d'une commande (2) est montée dans un conduit (10, 11, 12) reliant les deux réservoirs (H, S). Une tuyère de Laval (3) située en aval de la première vanne (1) et munie d'un capteur électrique de perte de charge (4). Une seconde vanne (5) munie d'une commande (6) est branchée entre la partie avale de la tuyère de Laval et un orifice d'échappement (R). Un système micro-programmé (7) conçu pour recevoir les valeurs lues par le capteur de perte de charge (4) et piloter les deux commandes (2, 6) des deux vannes (1, 5) permet d'assurer la régulation du débit et/ ou de la pression du fluide transféré du premier réservoir (H) vers le second réservoir (S). The present invention relates to a device for regulating the flow rate and / or the pressure of a fluid transferred from a high pressure reservoir (H) to a reservoir (S). A first valve (1) provided with a control (2) is mounted in a conduit (10, 11, 12) connecting the two reservoirs (H, S). A Laval nozzle (3) located downstream of the first valve (1) and fitted with an electrical pressure drop sensor (4). A second valve (5) provided with a control (6) is connected between the downstream part of the Laval nozzle and an exhaust port (R). A micro-programmed system (7) designed to receive the values read by the pressure drop sensor (4) and to control the two controls (2, 6) of the two valves (1, 5) makes it possible to regulate the flow and / or the pressure of the fluid transferred from the first reservoir (H) to the second reservoir (S).

Method and apparatus for conditional control of an electronic pressure regulator

An intelligent pressure regulator in a process control system is controlled according to a profile constructed by a user on a computer connected to the device. The profile is a multi- step command sequence. The profile includes at least one conditional statement and, optionally, at least one branching statement. That is, the profile includes at least one statement that, depending on whether the statement is true or false, causes the device to execute a first command or a second command, respectively. The profile may also include a statement (e.g., a "goto" statement) that causes the device to skip one or more commands in the profile.

Electropneumatic converter

Programmable pressure regulator for titanium superplastic forming apparatus

Disclosed is a programmable pressure regulator for a titanium superplastic forming apparatus. The regulator meters an inert gas, such as argon, into and out of a forming chamber to vary the pressure according to a preselected pressure profile. A profile generator generates high and low set point pressure signals which vary in accordance with the preselected pressure profile. A pressure transducer provides an electrical signal representative of the pressure in the forming chamber. A comparator circuit compares the electrical signal from the pressure transducer with the high and low set point signal and energizes pressure and bleed gas solenoid valves to maintain the pressure in the chamber within the pressure limits defined by the set point signals.

Device for introducing precursors into an enclosure, in a pulsed mode with measurement and control of the flow rate

Un dispositif d'introduction (1) dans une enceinte d'au moins un précurseur comporte au moins un réservoir (2) contenant le précurseur, des moyens pour maintenir le réservoir (2), à une pression plus élevée que celle de l'enceinte, et au moins un injecteur (3) connecté au réservoir (2). Il comporte également un dispositif de mesure de débit moyen (6), disposé entre le réservoir (2) et l'injecteur (3) et un filtre passe-bas mécanique (7) disposé entre le dispositif de mesure du débit (6) et l'injecteur (3). Le circuit de commande (4) comporte des sorties connectées respectivement au réservoir (2) et à l'injecteur (3) pour contrôler ladite pression P et/ou le temps d'injection Finj et/ou la fréquence d'injection Finj, de manière à injecter périodiquement, dans l'enceinte des gouttelettes de précurseur. Le circuit de commande (4) comporte également une entrée de régulation connectée à la sortie du dispositif de mesure de débit moyen (6), de manière à contrôler ladite pression Pgaz et/ou le temps d'injection tinj et/ou la fréquence d'injection Finj afin de conserver le débit moyen à une valeur de consigne prédéterminée.

Device for controlling or regulating the flow of a compressed gas between two compressed gas devices.

Pressure controller

Device for the remote control of pneumatically operated mechanisms, which has fast, high resolution response over a broad range of pressures and which is insensitive to position or vibration

An electropneumatic transducer which operates quickly and accurately over a broad range of pressures to control high pressure, high flow devices at their point of operation. The transducer is lightweight and insensitive to position or vibration, and can be readily mounted to the device to be controlled at its workpoint and operated remotely by a process controller or other electrical device. There is also provided both internal and external feedback whereby the repeated accurate operation of the transducer is assured.

GAS DOSING DEVICE, IN PARTICULAR FOR MEDICAL APPARATUS.

METHOD AND SYSTEM FOR CONTROLLING A PRESSURIZED FLUID AND VALVE ASSEMBLY FOR USE THEREIN

초기에 압력 20,000psi로 저장될 수 있는 질소가스와 같은 가압된 유체를 제어하는 방법 및 시스템에 제공되었다. 밸브조립체가 본 방법 및 시스템에 이용되며 가압된, 질소가스의 압력을 조절하기 위해 서보밸브(14)에 의해 파일럿되는 한 쌍의 공압적으로 작동되고, 유체적으로 결합된 한쌍의 밸브(16 및 18)와 공압서보밸브(14)와 같은 전기적 프로포셔닝 디바이스를 포함한다. 본 방법 및 시스템에서, 서보밸브(14)는 압력 트랜스듀서(40)와 같은 피드백 디바이스로부터의 피드백을 이용하여 페루프방식으로 작동한다. 폐루프에서의 제어기(46)는 압력 트랜스듀서(40)로부터의 압력신호에 응답하여 에러제어신호를 서보밸브(14)로 제공하기 위해 프리셋 기준신호에 응답한다.

Fluid flow control method and apparatus for minimizing particle contamination

A fluid flow control for use with a process chamber. In the disclosed embodiment, the process chamber is for ion implantation of a workpiece and the fluid flow control is to assure the flow rates are maintained at values which are efficient in evacuating and pressurizing the chamber but are not high enough to dislodge particulate contaminants from the process chamber walls. In the disclosed design, the invention has utility both in instances in which wafers are directly inserted into the process chamber for ion implantation and in which the wafers are inserted into the chamber by use of a load-lock which avoids the requirement that the process chamber be cyclicly pressurized and depressurized.

Self-centering magnet assembly for use in a linear travel measurement device

A magnet assembly is disclosed for use with a magnetic flux sensor to provid e a position sensor adapted to detect a position of a moveable member. The magnet assembly comprises a magnet housing defining an inner surface. A magn et is provided that is sized for insertion into the magnet housing and adapted for movement with the moveable member, the magnet having a north pole and a south pole, wherein the magnet generates a magnetic flux. A centering ring i s positioned between the magnet and the magnet housing, the centering ring including a biased wall acting to center the magnet in the magnet housing.</ SDOAB>

Self-centering magnetic assembly for device for measuring linear displacement

FIELD: engineering of device for measuring linear displacement, possible use for adjusting flow of a substance. SUBSTANCE: pressure adjuster contains main body with inlet and outlet apertures, throttling element, throttling element position indicator, magnetic flow indicator. Magnetic assembly for magnetic flow indicator consists of magnetic body, magnet, centering ring, positioned between magnet and magnetic body. Centering ring has shifted wall for centering magnet in magnetic body. EFFECT: increased device operation reliability. 2 cl, 15 dwg

METHOD FOR CONTROLLING THE PRESSURE IN AT LEAST ONE WHEEL BRAKE AND DEVICE FOR CARRYING OUT SAID METHOD

L'invention concerne, notamment, un procédé de régulation de la pression dans au moins un frein de roue, mis en oeuvre dans un régulateur permettant une régulation progressive de la pression. Selon l'invention, le régulateur forme la valeur du signal de commande, au nombre d'au moins un (Iauf, Iab) pour un système de valves agissant sur la pression, sur la base du point de fonctionnement actuel (Pist) du système de valves. The invention relates in particular to a method for regulating the pressure in at least one wheel brake, implemented in a regulator allowing progressive regulation of the pressure. According to the invention, the regulator forms the value of the control signal, at least one in number (Iauf, Iab) for a valve system acting on the pressure, on the basis of the current operating point (Pist) of the system valves.

Compensating pressure controller for fluid dispenser and method

A fluid dispensing system having a fluid dispenser supporting a barrel containing liquid to be dispensed. The barrel has a slidable piston therein with the liquid on a forward piston side and a chamber on a rear piston side. Positive and negative pressure fluid circuits have components operable to apply respective positive and negative fluid pressures to the rear side of the piston. A pressure transducer is operable to sense a fluid pressure in the chamber; and a dispenser control is operative to store a pressure-time relationship during a first dispensing cycle and thereafter, operate a component in the positive pressure fluid circuit to maintain the pressure-time relationship during a subsequent dispensing cycle.

PRESSURE REGULATOR FOR TIRE PRESSURES IN PARTICULAR FOR VEHICLES

Pressure control apparatus and method of establshing a desired level of pressure within at least one processing chamber

A desired level of pressure is established in at least one chamber that forms part of a closed atmosphere, such as in a semiconductor device processing facility. A pressure control system includes at least one space increase/decrease device that has a partition which is movable to increase and/or decrease the volume of free space within the chamber(s), a pressure sensor for detecting the pressure within the chamber(s), and a controller for controlling the movement of the partition based on the detected pressure. A chamber is provided with positive or negative pressure to increase or decrease the pressure therein while the pressure in the chamber is monitored. As soon as the pressure within the chamber equals a predetermined pressure, the providing of the positive or negative pressure is stopped. The partition is moved to vary the effective volume of free space in the chamber(s) to change the pressure in the chamber from the predetermined pressure to the desired pressure.

Low power regulator system and method

A battery powered pressure regulator is disclosed, which is used for controlling the fluid in a pipeline. A battery sensor is provided for monitoring the capacity of the pressure regulator battery, and is utilised to place the pressure regulator into reduced power consumption modes as the capacity of the battery is reduced.

Outlet pressure control device

Device for providing a fluid having regulated output pressure

A device for providing an output fluid at a regulated output pressure includes a pressure control unit controlled via a pilot control pressure and a pilot control unit that provides the pilot control pressure. The pressure control unit includes an inlet chamber for an input fluid having an input pressure, an outlet chamber for the output fluid having the regulated output pressure and a first valve unit that acts between the inlet chamber and the outlet chamber. A first diaphragm of the pressure control unit is acted upon by the pilot control pressure. A second diaphragm, which is mechanically coupled to the first diaphragm is acted upon by the output fluid having the output pressure acts. At least the second diaphragm mechanically acts on the first valve unit.

Pressure regulation method for wheel brakes

The pressure regulation method involves using a valve device for adjusting the actual pressure for at least one wheel brake to obtain the required pressure. The control signal for the valve device is provided in dependence on the difference between the actual and required pressures and a variable relationship between the control signal and the pressure ratio in the vicinity of the valve device. A correction signal may be provided by a pressure regulator in dependence on the difference between the actual and the required pressure, with correction of the correction signal via a base control signal or a required signal provided by the driver.

METHOD AND DEVICE FOR MANAGING THE FLOW OF A FLUID IN A PROCESS CONTROL SYSTEM

Method and device for controlling at least one valve

提出了用于控制至少一个阀的方法和装置，此时当在包含有该阀的系统中确认有渗漏时产生一个控制信号，该信号短时地开启该阀用于冲洗并重新关闭或者使阀球以大的速度移动到阀座上。

pressure regulator, and magnet assembly for use with a magnetic flow sensor to provide a position sensor suitable for detecting a position of a moving member

"regulador de pressão, e, conjunto de magneto para uso com um sensor de fluxo magnético para proporcionar um sensor de posição apropriado para detectar uma posição de um membro móvel". um conjunto de magneto é apresentado para uso com um sensor de fluxo magnético para proporcionar um sensor de posição apropriado para detectar uma posição de um membro móvel. o conjunto de magneto compreende um alojamento de magneto definido uma superfície interna. um magneto é provido que é dimensionado para inserção no interior do alojamento de magneto e adaptado para deslocamento com o membro móvel, o magneto tendo um pólo norte e um pólo sul, onde o magneto gera um fluxo magnetico. um anel centralizador é posicionado entre o magneto e o alojamento de magneto, o anel centralizador incluindo uma parede polarizada atuando para centralizar o magneto no alojamento de magneto. "pressure regulator, and, magnet assembly for use with a magnetic flow sensor to provide a position sensor suitable for detecting a position of a moving member". A magnet assembly is presented for use with a magnetic flow sensor to provide a position sensor suitable for detecting a position of a moving member. The magnet assembly comprises a magnet housing defined on an inner surface. a magnet is provided that is sized for insertion into the magnet housing and adapted for displacement with the moving member, the magnet having a north pole and a south pole, where the magnet generates a magnetic flux. a centering ring is positioned between the magnet and the magnet housing, the centering ring including a polarized wall acting to center the magnet in the magnet housing.

Improvements in and relating to air regulation control

An air regulator system for a powder coating system and method of operating the system whereby air regulators constructed with inexpensive, on-off servo control valves are positioned side by side and secured to a common bracket and are operated with a pulse width modulating circuitry that quickly and accurately controls the regulator. The circuitry is carried on a circuit board which is also mounted to the common bracket.

Pneumatic control and measuring apparatus and seat comfort system

Pneumatic Control and Measuring Device as well as Seat Comfort System

气动的控制与测量装置（2）和具有这种装置的座椅舒适性系统。所述气动的控制与测量装置（2）包括阀（4）和压力传感器（16），其中所述阀（4）包括输入通道（24）、压力通道（54、58、60）、输出通道（30）以及由执行器（38）开关的或者能够由该执行器开关的密封元件。所述密封元件被设置用于使所述输入通道（24）与所述压力通道（54、58、60）相连接，从而在所述阀（4）的与所述压力通道（54、58、60）流体连通的输出接口（32）处提供或者能够提供在所述压缩空气供给通道中所提供的供给压力。用于检测施加在所述输出接口（32）上的压力的压力传感器（16）是集成于印刷电路板的压力传感器（16）。

DEVICE FOR REGULATING THE FLOW AND / OR PRESSURE OF A FLUID