13-03-2014 дата публикации
Номер: US20140071762A1
According to one embodiment, a nonvolatile semiconductor memory device includes a memory cell and a select gate transistor formed on a semiconductor substrate. The memory cell includes a first gate insulating film, a first charge storage layer, a first intergate insulating film, and a first control gate. The first gate insulating film, the first charge storage layer, the first intergate insulating film, and the first control gate are formed on the semiconductor substrate in order. The select gate transistor includes a second gate insulating film, a first gate electrode, a second intergate insulating film, and a second control gate. The second gate insulating film, the first gate electrode, the second intergate insulating film, and the second control gate are formed on the semiconductor substrate in order. The second intergate insulating film different first and second thicknesses. 1. A nonvolatile semiconductor memory device comprising: a first gate insulating film formed on the semiconductor substrate,', 'a first charge storage layer formed on the first gate insulating film,', 'a first intergate insulating film formed on the first charge storage layer, and', 'a first control gate formed on the first intergate insulating film; and, 'a memory cell formed on a semiconductor substrate, the memory cell comprising'} a second gate insulating film formed on the semiconductor substrate,', 'a first gate electrode formed on the second gate insulating film,', 'a second intergate insulating film formed on the first gate electrode and having different first and second thicknesses, and', 'a second control gate formed on the second intergate insulating film., 'a select gate transistor formed on the semiconductor substrate, the select gate transistor comprising'}2. The device according to claim 1 , whereinthe first thickness is the same as the thickness of the first intergate insulating film, and the second thickness is smaller than the first thickness.3. The device according to ...
Подробнее