04-01-2018 дата публикации
Номер: US20180005794A1
Принадлежит:
The present disclosure relates to the production and use of a multi-layer X-ray source target. In certain implementations, layers of X-ray generating material may be interleaved with thermally conductive layers. To prevent delamination of the layers, various mechanical, chemical, and structural approaches are related, including approaches for reducing the internal stress associated with the deposited layers and for increasing binding strength between layers. 1. An X-ray source , comprising:an emitter configured to emit an electron beam; and at least one X-ray generating layer comprising X-ray generating material, wherein the X-ray generating material within each X-ray generating layer varies in density within the respective X-ray generating layer; and', 'at least one thermally-conductive layer in thermal communication with each X-ray generating layer., 'a target configured to generate X-rays when impacted by the electron beam, the target comprising2. The X-ray source of claim 1 , further comprising a thermally-conductive substrate on which a bottommost X-ray generating layer is formed.3. The X-ray source of claim 1 , wherein the X-ray generating material comprises one or more of tungsten claim 1 , molybdenum claim 1 , titanium-zirconium-molybdenum alloy (TZM) claim 1 , tungsten-rhenium alloy claim 1 , copper-tungsten alloy claim 1 , chromium claim 1 , iron claim 1 , cobalt claim 1 , copper claim 1 , silver.4. The X-ray source of claim 1 , wherein the thermally-conductive layers comprise one or more of highly ordered pyrolytic graphite (HOPG) claim 1 , diamond claim 1 , beryllium oxide claim 1 , silicon carbide claim 1 , copper-molybdenum claim 1 , copper claim 1 , tungsten-copper alloy claim 1 , or silver-diamond.5. The X-ray source of claim 1 , wherein each X-ray generating layer varies in density so as to have greater density in earlier deposited regions than in at least a portion of the later deposited regions.6. The X-ray source of claim 1 , further comprising ...
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