31-03-2022 дата публикации
Номер: US20220102245A1
Принадлежит:
A semiconductor package includes a plurality of semiconductor chips. At least one of the semiconductor chips includes a semiconductor substrate including a semiconductor layer and a passivation layer having a third surface, a backside pad on the third surface, and a through-via penetrating through the semiconductor substrate. The backside pad includes an electrode pad portion, on the third surface, and a dam structure protruding on one side of the electrode pad portion and surrounding a side surface of the through-via. The dam structure is spaced apart from the side surface of the through-via. 1. A semiconductor package comprising:a plurality of semiconductor chips electrically connected to each other and stacked in a first direction, a semiconductor substrate including a semiconductor layer having a first surface and a second surface that are opposite each other;', 'a passivation layer on the first surface and having a third surface that is opposite the first surface;', 'a circuit structure on the second surface;', 'a frontside pad on the circuit structure;', 'a backside pad on the third surface; and', 'a through-via in the semiconductor substrate and extending between the second surface and the third surface to be electrically connected to the backside pad and the frontside pad,, 'wherein at least one of the plurality of semiconductor chips includeswherein the backside pad includes an electrode pad portion, on the third surface, and a dam structure protruding toward the first surface on one side of the electrode pad portion and surrounding a side surface of the through-via, andwherein the dam structure is spaced apart from the side surface of the through-via.2. The semiconductor package of claim 1 ,wherein the dam structure penetrates the third surface of the passivation layer,wherein a ratio of a height of the dam structure in the first direction to a maximum thickness of the passivation layer is within a range of about 0.5:1 to about 0.8:1,wherein the through- ...
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