04-07-2019 дата публикации
Номер: US20190206822A1
Принадлежит:
Embodiments include semiconductor packages and a method of forming the semiconductor packages. A semiconductor package includes a resist layer disposed on a conductive layer. The semiconductor package also has a bump disposed on the conductive layer. The bump has a top surface and one or more sidewalls. The semiconductor package further includes a surface finish disposed on the top surface and the one or more sidewalls of the bump. The semiconductor package may have the surface finish surround the top surface and sidewalls of the bumps to protect the bumps from Galvanic corrosion. The surface finish may include a nickel-palladium-gold (NiPdAu) surface finish. The semiconductor package may also have a seed disposed on a top surface of the resist layer, and a dielectric disposed on the seed. The dielectric may surround the sidewalls of the bump. The semiconductor package may include the seed to be an electroless copper seed. 1. A semiconductor package , comprising:a resist layer on a conductive layer;a bump on the conductive layer, wherein the bump has a top surface and one or more sidewalls; anda surface finish on the top surface and the one or more sidewalls of the bump.2. The semiconductor package of claim 1 , wherein the surface finish surrounds the top surface and the one or more sidewalls of the bump to protect the bump from corrosion.3. The semiconductor package of claim 1 , wherein the surface finish is a nickel-palladium-gold (NiPdAu) surface finish.4. The semiconductor package of claim 1 , further comprising:a seed on a top surface of the resist layer; anda dielectric on the seed, wherein the dielectric surrounds the one or more sidewalls of the bump.5. The semiconductor package of claim 4 , wherein the seed is an electroless copper seed.6. The semiconductor package of claim 4 , further comprising a gap opening formed between the dielectric and the one or more sidewalls of the bump claim 4 , wherein the one or more sidewalls of the bump are exposed by the ...
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