09-04-2015 дата публикации
Номер: US20150099331A1
Принадлежит:
Even when a stiffener is omitted, the semiconductor device which can prevent the generation of twist and distortion of a wiring substrate is obtained. 1. A method of manufacturing a semiconductor device , comprising:(a) preparing a semiconductor chip having a main surface over which a plurality of pad electrodes are formed,wherein a plurality of metal bumps are formed on the plurality of pad electrodes, respectively;(b) mounting the semiconductor chip to a first main surface of a wiring substrate such that the main surface of the semiconductor chip faces to the first main surface of the wiring substrate and electrically connecting the plurality of pad electrodes of the semiconductor chip to a plurality of parts of wirings of the wiring substrate via the plurality of metal bumps, respectively;{'sub': '2', '(c) after the step (b), supplying Oplasma the semiconductor chip and the wiring substrate; and'}(d) after the step (c), pouring an under-filling resin between the main surface of the semiconductor chip and the first main surface of the wiring substrate.2. The method of manufacturing a semiconductor device according to claim 1 ,wherein, the step (b), each of the plurality of metal bumps of the semiconductor chip is electrically connected to each of the plurality of parts of the wirings of the wiring substrate in a state of being melted the plurality of metal bumps without flux.3. The method of manufacturing a semiconductor device according to claim 1 ,wherein an organic resin film is formed over the main surface of the semiconductor chip and first main surface of the wiring substrate. This Application is a Continuation Application of U.S. Ser. No. 14/338,175 filed Jul. 22, 2014; which is a Continuation of U.S. Ser. No. 14/044,497 filed Oct. 2, 2013 now U.S. Pat. No. 8,822,269; which is a Divisional of U.S. Ser. No. 13/863,241 filed Apr. 15, 2013, now U.S. Pat. No. 8,581,410; which is a Continuation of U.S. Ser. No. 13/648,876 filed Oct. 10, 2012 now U.S. Pat. No. 8, ...
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