ТОНКОПЛЕНОЧНЫЙ ДЕТЕКТОР ДЛЯ ДЕТЕКТИРОВАНИЯ ПРИСУТСТВИЯ

... 1. Способ формирования датчика (800), содержащий следующие действия: ! формируют мембрану (830) поверх передней подложки (615); ! формируют пьезоэлектрический слой (820) поверх мембраны (830); ! формируют структурированный электропроводный слой, включающий в себя первый и второй электроды (840, 845), поверх активного участка (821) пьезоэлектрического слоя (820); и ! формируют структуру задней подложки, имеющую держатели (822, 824), расположенные на соседних сторонах активного участка (821). ! 2. Способ по п.1, в котором высота держателя (826) из держателей (822, 824) больше, чем комбинированная высота (828) пьезоэлектрического слоя и структурированного электропроводного слоя. ! 3. Способ по п.1, в котором действие формирования задней подложки включает в себя следующие действия: ! формируют держатели (822, 824) на задней подложке (640); и ! закрепляют держатели (822, 824) к местам, прилегающим к активному участку (821). ! 4. Способ по п.3, в котором действие формирования держателей (822, ...

ПЬЕЗОЭЛЕКТРИЧЕСКИЙ ЭЛЕМЕНТ, МНОГОСЛОЙНЫЙ ПЬЕЗОЭЛЕКТРИЧЕСКИЙ ЭЛЕМЕНТ, ГОЛОВКА ДЛЯ ВЫБРОСА ЖИДКОСТИ, УСТРОЙСТВО ДЛЯ ВЫБРОСА ЖИДКОСТИ, УЛЬТРАЗВУКОВОЙ ДВИГАТЕЛЬ, ОПТИЧЕСКОЕ УСТРОЙСТВО И ЭЛЕКТРОННОЕ УСТРОЙСТВО

... 1. Пьезоэлектрический элемент, содержащий:первый электрод;второй электрод; ипьезоэлектрический материал, включающий в свой составоксид металла типа перовскита, представленный общей формулой (1) (BaCa)(TiZr)O(где 1,00≤a≤1,01, 0,02≤x≤0,30, 0,020≤y<0,095 и y≤x) (1), икомпонент марганца,причем содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,40 весовые части или менее,причем пьезоэлектрический материал образован кристаллическими зернами, имеющими средний круговой эквивалентный диаметр больше, чем 1 мкм и меньше, чем 10 мкм, ипричем пьезоэлектрический материал имеет относительную плотность 93,0% или более и 100% или менее.2. Пьезоэлектрический элемент по п. 1, в котором x и y в основном компоненте пьезоэлектрического материала удовлетворяет условиям 0,125≤x≤0,175 и 0,055≤y≤0,09, соответственно, и содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа ...

ПЬЕЗОЭЛЕКТРИЧЕСКИЙ ЭЛЕМЕНТ, МНОГОСЛОЙНЫЙ ПЬЕЗОЭЛЕКТРИЧЕСКИЙ ЭЛЕМЕНТ, ГОЛОВКА ДЛЯ ВЫБРОСА ЖИДКОСТИ, УСТРОЙСТВО ДЛЯ ВЫБРОСА ЖИДКОСТИ, УЛЬТРАЗВУКОВОЙ ДВИГАТЕЛЬ, ОПТИЧЕСКОЕ УСТРОЙСТВО И ЭЛЕКТРОННОЕ УСТРОЙСТВО

... 1. Пьезоэлектрический элемент, содержащий:первый электрод;второй электрод; ипьезоэлектрический материал, включающий в свой составв качестве основного компонента оксид металла типа перовскита, представленный общей формулой (1), имарганец, включенный в состав оксида металла типа перовскита(BaCa)(TiZr)O(где 1,00≤a≤1,01, 0,02≤x≤0,30, 0,020≤y<0,095 и y≤x) (1),причем содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,40 весовые части или менее,причем содержание вспомогательного компонента, не являющегося марганцем, по отношению к 100 весовым частям оксида металла типа перовскита составляет менее 2,1 весовых частей на оксидной основе,причем пьезоэлектрический материал образован кристаллическими зернами, имеющими средний круговой эквивалентный диаметр больше, чем 0,8 мкм и меньше, чем 182,0 мкм,причем пьезоэлектрический материал имеет относительную плотность 89,0% или более и 100% или менее.2.

PIEZOELEKTRISCHE VIBRATOR-PUMPE.

Piezoelektrisches Element, Tintenstrahlkopf, Winkelgeschwindigkeitssensor, Verfahren zu dessen Herstellung und Tintenstrahlaufzeichnungsvorrichtung

Piezoelektrische Vorrichtung, Piezoelektrisches Stellglied, Festplattenlaufwerk, Tintenstrahldrucker-Einrichtung und Piezoelektrischer Sensor

Piezoelektrische Vorrichtung (100; 100'; 101; 101'), welche umfasst:- eine erste Elektrodenschicht (8),- eine piezoelektrische Schicht (10), welche auf der ersten Elektrodenschicht (8) bereitgestellt ist, wobei die piezoelektrische Schicht (10) PZT (Blei-Zirkonat-Titanat), KNN (Kalium-Natrium-Niobat), BT (Barium-Titanat), LN (Lithium-Niobat), BNT (Bismut-Natrium-Titanat), ZnO (Zinkoxid) oder AIN (Aluminiumnitrid) umfasst;-eine zweite Elektrodenschicht (12), welche auf der piezoelektrischen Schicht (10) bereitgestellt ist, wobei die zweite Elektrodenschicht (12) Palladium (Pd), Platin (Pt), Rhodium (Rh), Gold (Au), Ruthenium (Ru), Iridium (Ir), Molybdän (Mo), Titan (Ti) oder Tantal (Ta) umfasst; und- eine zweite Belastungssteuerungsschicht (14), welche auf der zweiten Elektrodenschicht (12) bereitgestellt ist,wobei die zweite Belastungssteuerungsschicht (14)oanorganische Materialen, ausgewählt aus Pd, Co, Ni, Au, Cu, Ag und Ti, umfasst;oLegierungen aus Elementen, ausgewählt aus Ni, Fe, Co ...

Piezoelektrischer Aktor

Piezoelektrischer Aktor (1), aufweisend: ein Piezoelement (2); und eine Elektrodenstruktur (5), wobei diese mit deren Elektroden ausschließlich auf einer Seite des Piezoelements (2) angeordnet ist; und zumindest ein Aufsatzelement (6), wobei das Aufsatzelement (6) auf dem Piezoelement (2) und auf der Seite der Elektrodenstruktur (5) des Piezoelements (2) angebracht ist, und das Aufsatzelement (6) die Elektrodenstruktur (5) des piezoelektrischen Aktors (1) zumindest teilweise umfasst, und wobei das Aufsatzelement (6) ausschließlich in Kontakt mit dem Piezoelement (2) steht, und wobei das Aufsatzelement (6) an die einseitig angebrachte Elektrodenstruktur (5) des piezoelektrischen Aktors (1) derart angepasst ist, dass das Aufsatzelement (6) eine Ausdehnung in der Ebene des Piezoelements (2) in die Richtungen weitgehend begrenzt, in die sich das Piezoelement (2) aufgrund der Konfiguration der Elektrodenstruktur (5) überwiegend ausdehnt.

Dielektrisches Element, piezoelektrisches Element, Tintenstrahlkopf, Tintenstrahlaufzeichnungsgerät sowie deren Herstellungsverfahren

Dielektrisches Element, piezoelektrisches Element, Tintenstrahlkopf und Verfahren zu Herstellung dieses Kopfes

Forming an oxide piezoelectric element(s) and upper electrode layer(s) of an inkjet printhead microactuator using a photoresist film(s) and etching process

Initially, a lower electrode 3 (Fig.4A), an oxide piezoelectric sheet 4 and an electrode layer 5 are laminated over a vibrating plate 2 with an integral chamber plate 1. A photoresist film 6 (Fig.4B) is coated over the upper surface of the electrode layer. Some film is removed (Fig.4C) through baking, exposure to light and rinsing to remove unnecessary portions thereof. The electrode layer is then etched (Fig.4D) at exposed portions, and patterned using the remaining film as a mask, to form upper electrodes of a desired pattern. The remaining film, which is left on the patterned upper electrodes, is completely removed using a rinsing solution (Fig.4E). Another photoresist film (6,Fig.1F) is coated over the entire upper surface of the resulting structure, i.e. the exposed upper surface portions of the oxide piezoelectric sheet 4 and the upper surfaces of the upper electrodes 5. Some film is removed through baking, exposure to light and rinsing to remove unnecessary portions thereof such ...

A piezoelectric thin film element

A piezoelectric actuator comprises a multiple piezoelectric layer laminate that has layers that are doped with different dopants. The dopants in a first layer may be a donor and the dopant in a second layer may be an acceptor. The device may also comprise double doped layers and undoped layers. The dopants may be compensating, isolvalent or arranged on A and B sites and the piezoelectric materials may be PZT or KNN. The dopants may have a concentration gradient throughout the device layer structure to provide a gradient in mechanical, piezoelectric and electrical properties. The layers may be deposited using sol gel deposition and the actuator may be used in an ink jet print head.

PIEZOELECTRIC CERAMIC(S) ELEMENT AND OF CONSTRUCTION UNITS FROM IT

SMALL PIEZOELECTRIC OR ELECTROSTRICTIVE LINEAR MOTOR

PROCEDURE FOR THE PRODUCTION OF A PIEZOELECTRIC ACTUATOR

ELECTRICALACTIVE POLYMERS

PIEZOELECTRIC CONTROL MEMBER AND THIS EXHIBITING FLUID INJECTION HEAD

PIEZOELECTRIC THIN FILM, PROCEDURE FOR THE PRODUCTION OF A PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT AND INKJETAUFZEICHNUNGSKOPF

PROCEDURE FOR THE PRODUCTION OF AN MICRO-ELECTROMECHANICAL MECHANISM WITH PIEZOELECTRIC BLOCKS

PIEZOELECTRIC STRUCTURE, FLUID JET HEAD AND PROCEDURE FOR THE PRODUCTION

Membrane and membrane separation system

Described herein is a method for altering the characteristics of a membrane comprising a dielectric material. The method comprises heating the membrane and applying an electric field in a direction out of the plane of the membrane to at least a portion of the dielectric material. At least a portion of the dielectric material becomes aligned with the applied electric field. In some embodiments, the membrane is piezoelectric and application of an electric signal to the membrane causes out of plane movement of the membrane. Also disclosed are membranes and systems and apparatuses comprising such membranes.

A tunable microlens with a variable structure element

The present invention relates to a transparent optical device element comprising a microlens and a method of providing stress and thermal compensation and tuning mechanical strength and curvature of a tunable microlens.

A piezoelectric audio transducer

ORTHOTROPIC BIMORPH FOR IMPROVED PERFORMANCE SYNTHETIC JET

Piezoelectric actuators for synthetic jets and other devices are disclosed having orthotropic piezoelectric bimorphs with increased out-of-plane displacements for greater responsiveness to applied electric fields. In some embodiments, the piezoelectric actuators may include interdigitated electrodes applied to a surface of a piezoelectric plate to produce greater in-plane strains in the plate and greater out-of-plane displacements of a flexible diaphragm of the synthetic jet. In other embodiments, the actuator includes an orthotropic piezoceramic plate having a greater d coupling coefficient in one in-plane direction and in the other in- plane direction to cause desired diaphragm out-of-plane displacements when an electric field is applied by electrodes.

Multiple layer piezoelectric deformable bimorphic mirror

Piezoelectric Element, Method Of Forming Piezoelectric Element, And Ultrasonic Device

Dielectrics element, piezoelectrics element, ink jet head and producing method thereof

Piezoelectric element, inkjet head, inkjet printer and method for producing piezoelectric element

High molecular actuator and using this high-molecular actuator valve

With either a coplanar electrode piezo-electric actuator

The piezoelectric thin film element, piezoelectric actuator, piezoelectric sensor, the hard disk drive and ink-jet printing apparatus

The piezoelectric element, the multi-layer piezoelectric element, liquid ejecting head, the liquid discharging device, the ultrasonic motor, the optical device and electronic device

Piezoelectric actuator and fluid ejection head having the same

Electromechanical transducing device and manufacturing method thereof, and liquid droplet discharging head and liquid droplet discharging apparatus

MICRO-ACTIONNEUR AND MANUFACTORING PROCESS ASSOCIATE

PIEZOELECTRIC MEMBRANE HAS ACTUATION OPTIMIZES AND MANUFACTORING PROCESS OF THE MEMBRANE

L'invention concerne une membrane comprenant sur un substrat (10) un empilement de couches comportant au moins une couche de matériau piézoélectrique (30) disposée entre une couche d'électrode supérieure (Esup) et une couche d'électrode inférieure (Einf), caractérisée en ce qu'elle comprend au moins une première zone (R1C,R11, R12) et au moins une seconde zone (R2C, R21, R22) , au moins une des couches d'électrodes (Eisup, Ei,inf) étant discontinue dans la seconde zone de manière à créer un ensemble d'électrodes élémentaires dans un même plan pour l'application d'un champ électrique parallèle au plan des couches, le champ électrique applicable dans la première zone étant perpendiculaire au plan des couches et les zones étant telles que la déformation dans le plan des couches, du matériau piézoélectrique dans la première zone est de signe opposé à la déformation dans ledit plan, du matériau piézoélectrique dans la deuxième zone. L'invention concerne aussi un procédé de fabrication de la ...

DEVICE MICROELECTROMECANIQUE WITH STRUCTURE Of ACTUATION PIEZOELECTRIC

Dispositif microélectromécanique comportant : - un substrat (SS) ; - une première couche (C1) d'un premier matériau semi-conducteur , déposée sur une surface dudit substrat ; - une deuxième couche (C2) d'un deuxième matériau semi-conducteur piézoélectrique différent dudit premier matériau semi-conducteur, déposée sur ladite première couche, lesdites première et deuxième couches formant une hétérostructure susceptible de confiner un gaz bidimensionnel de porteurs (2DEG) ; - au moins un élément suspendu (ES), formé par des prolongements desdites couches s'étendant au-delà d'un bord (B) dudit substrat ; et - une première (E1) et une deuxième (E2) électrodes d'actionnement pour établir une différence de potentiel entre ledit gaz bidimensionnel de porteurs et ladite première couche de manière à former une structure d'actionnement piézoélectrique dudit élément suspendu ; caractérisé en ce qu'une couche diélectrique (CD) est prévue entre ladite deuxième électrode d'actionnement et ladite deuxième ...

METHOD FOR REALISING A PIEZOELECTRIC TRANSDUCER DEVICE

AERODYNAMIC DEVICE OF MOTOR VEHICLE COMPRISING a MEMBRANE WHICH IS USED At the same time Of ACTUATOR AND SENSOR.

Dispositif aérodynamique de véhicule automobile comportant une membrane qui sert à la fois d'actionneur et de capteur. Le dispositif est destiné à être intégré dans un élément de carrosserie du véhicule. Il comporte une paroi externe (4) délimitant une orifice (6), une chambre (2) dont le volume est variable et au moins une membrane (8) mise en mouvement par réaction d'un matériau de la membrane (10) à l'application d'une tension électrique. La membrane (8, 10) sert à fois d'actionneur et de capteur.

PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC VIBRATION APPARATUS AND PORTABLE TERMINAL

... [과제] 보다 큰 굴곡 진동이 얻어지는 압전 액추에이터, 압전 진동 장치 및 휴대 단말을 제공한다. [해결 수단] 본 발명의 압전 액추에이터(1)는 내부 전극(2) 및 압전체층(3)이 적층된 적층체(4)와, 적층체(4) 중 적어도 한쪽 주면에 내부 전극(2)과 전기적으로 접속된 표면 전극(5)을 구비하고, 내부 전극(2)은 제 1 극(21)과 제 2 극(22)을 포함함과 아울러 적층체(4)는 내부 전극(2)의 제 1 극(21) 및 제 2 극(22)이 적층 방향으로 겹쳐지는 활성부(41)와 활성부(41) 이외의 불활성부(42)를 포함하고, 한쪽 주면측에 배치된 내부 전극(2)은 활성부(41)와 불활성부(42)의 경계 근방에 위치하는 단부가 다른쪽 주면측을 향해서 만곡되어 있는 것을 특징으로 한다.

Manufacturing method for Flexible MEMS transducer

PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC VIBRATION APPARATUS AND PORTABLE TERMINAL

... [과제] 플렉시블 기판의 배선 도체가 장기 구동에 있어서도 단선되는 일없이 장기간 안정적으로 구동하는 압전 액추에이터, 압전 진동 장치 및 휴대 단말을 제공한다. [해결 수단] 본 발명의 압전 액추에이터(1)는 내부 전극(2) 및 압전체층(3)이 적층된 적층체(4)와, 적층체(4)의 한쪽 주면에 내부 전극(2)과 전기적으로 접속된 표면 전극(5)을 구비한 압전 소자(10)와, 한쪽 주면에 도전성 접합 부재(7)를 통하여 일부가 접합되고, 표면 전극(5)과 전기적으로 접속된 배선 도체(61)를 구비한 플렉시블 기판(6)을 갖고 있고, 플렉시블 기판(6)에 의해 덮이는 압전 소자(10)의 코너부(11)가 모따기되어 있는 것을 특징으로 한다.

PIEZOELECTRIC ELEMENT, FABRICATING METHOD THEREOF, LIQUID INJECTION HEAD, FABRICATING METHOD THEREOF AND LIQUID INJECTION APPARATUS TO OBTAIN DESIRABLE ELECTRICAL RESISTANCE AND WITHSTAND VOLTAGE

PURPOSE: A piezoelectric element is provided to form a piezoelectric element having desirable electrical resistance and a withstand voltage while extending a lifetime by doping predetermined dopants. CONSTITUTION: A lower electrode is formed on a substrate. After a piezoelectric precursor film is baked, the piezoelectric precursor film which contains Pb, Zr and Ti wherein a composition ratio of Pb, Zr and Ti is Pb/(Zr+Ti)=1.0-1.3 is formed on the lower electrode. After at least one dopant of a group of Mn, Ni and Sr is doped, the piezoelectric precursor film is baked at a temperature of 650~750 deg.C for an interval of half an hour to 3 hours to form a piezoelectric layer. An upper electrode is formed on the piezoelectric layer. The quantity of the dopants is not greater than 10 mole percent of the piezoelectric layer. © KIPO 2006 ...

PIEZOELECTRIC MATERIAL, PIEZOELECTRIC ELEMENT, AND ELECTRONIC APPARATUS

TRANSDUTOR DE MODULO DE CISALHAMENTO PARA SISTEMAS DE JATO DE TINTA

Piezoelectric material, piezoelectric element, and electronic apparatus

Provided is a lead-free piezoelectric material having satisfactory piezoelectric constant and mechanical quality factor in a device driving temperature range (-30 DEG C to 50 DEG C). The piezoelectric material includes a main component containing a perovskite-type metal oxide represented by Formula 1, a first auxiliary component composed of Mn, and a second auxiliary component composed of Bi or Bi and Li. The content of Mn is 0.040 parts by weight or more and 0.500 parts by weight or less based on 100 parts by weight of the metal oxide on a metal basis. The content of Bi is 0.042 parts by weight or more and 0.850 parts by weight or less and the content of Li is 0.028 parts by weight or less (including 0 parts by weight) based on 100 parts by weight of the metal oxide on a metal basis. (Ba1-xCax)a(Ti1-yZry)O3... (1), wherein, 0.030 x < 0.090, 0.030 y 0.080, and 0.9860 a 1.0200.

Actuator

An actuator for using in a micro-fluid transmission device is disclosed and comprises a suspension plate, a frame and at least one supporting part, the suspension plate has a first thickness, the frame is disposed surrounding the outside of the suspension plate and has a third thickness, the at least one supporting part couples between the square suspension plate and the frame and has a forth thickness, wherein the third thickness is larger than the first thickness, and the first thickness is larger than the forth thickness, through the etch procedure, the suspension plate, the frame and the supporting part can form an step structure with different height, so as to reduce the thickness of the supporting part, increase the elasticity of the supporting part, increase the vertical displacement of the suspension plate and increase the efficiency of the micro-fluid transmission device.

PIEZOELECTRIC MOVEMENT OF A LENS

The invention relates to an apparatus (1), comprising a lens (10) and a piezoelectric element (11). The piezoelectric element is configured to bend in response to a voltage applied thereto. The lens and the piezoelectric element are arranged so that the bending causes at least a portion of the lens to move in at least one movement direction. The invention further relates to an according method and computer-readable medium.

PIEZOELECTRIC DIAPHRAGM ASSEMBLY WITH CONDUCTORS ON FLEXIBLE FILM

A laminated piezoelectric composite comprises a metallic substrate (20); a piezoelectric wafer (32) having a first surface and a second surface; a first adhesive carrier layer (100) between the first surface of the piezoelectric wafer (32) and the substrate (22); a first conductive lead (100) carried by the first adhesive carrier layer (100) and connected to a first surface of the piezoelectric wafer (32); and, a second conductive lead (100') connected to the second surface of the piezoelectric wafer (32). The first adhesive carrier layer (100) serves both to adhere the first surface of the piezoelectric wafer (32) to the substrate (22) and to carry a first conductive lead (110) for supplying an electrical signal or voltage to the first surface of the piezoelectric wafer (32). The second conductive lead (110') supplies an electrical signal or voltage to the second surface of the piezoelectric wafer (32). The first adhesive carrier layer can comprise a high dielectric soluble aromatic polyimide ...

PIEZOELECTRIC FILM DEVICE

Disclosed is a piezoelectric film device (10) comprising a substrate (11), a lower electrode (12), a piezoelectric film (15) and an upper electrode (16). The substrate (11) comprises a thin diaphragm portion (11a) and a thick portion (11b) surrounding the diaphragm portion. The lower electrode (12) is so formed on the substrate (11) as to extend over the thin diaphragm portion (11a) and the thick portion (11b). The piezoelectric film (15) is formed on the lower electrode (12). The upper electrode (16) is so formed on the piezoelectric film (15) as to face the thin diaphragm portion (11a), and comprises an upper electrode main body (16a) and a connecting portion (16b). The upper electrode main body (16a) has a planar shape generally analogous to that of the thin diaphragm portion (11a).

PZT PRECURSOR SOLUTION, METHOD FOR PRODUCING PZT PRECURSOR SOLUTION, METHOD FOR PRODUCING PZT FILM, METHOD FOR PRODUCING ELECTROMECHANICAL TRANSDUCER ELEMENT, AND METHOD FOR PRODUCING LIQUID DISCHARGE HEAD

A PZT precursor solution is used for forming a PZT film by a sol-gel method. The PZT precursor solution includes a solvent; a component that forms a crystal of PZT by crystallization, the component being dissolved in the solvent; and an element that inhibits crystal growth of PZT, the element being dissolved in the solvent.

Electroactive polymer actuator and diaphragm pump using the same

An electroactive polymer actuator, which has the capability of improving response speed and operation reliability of a device utilizing an electroactive effect, comprises a laminate formed by alternately placing a plurality of ring members of an electroactive polymer material having different diameters and a plurality of ring electrodes having different diameters such that each of the ring members is positioned between inner and outer peripheral surfaces of adjacent ring electrodes, and a voltage applying unit for applying a voltage(s) between odd-numbered ring electrodes and even-numbered ring electrodes in the case of counting the ring electrodes in order from an innermost ring electrode of the laminate, to thereby cause a deformation in the laminate. This actuator is preferably used as a diaphragm drive unit of a diaphragm pump.

Piezoelectric vibration component and portable terminal

A piezoelectric vibration component and a portable terminal each include a piezoelectric vibration element 14 and a power supply line 51. The piezoelectric vibration element 14 includes at least: a layered structure 20 in which a plurality of internal electrodes and piezoelectric layers are layered in a first direction; and surface electrodes 33 and 31 electrically connected to the internal electrodes. The piezoelectric vibration element 14 bends and vibrates, and its amplitude changes in a second direction perpendicular to the first direction. The power supply line 51 includes at least: a conductive path 53 including a connection part 56 bonded to a surface electrode 33; and a conductive path 52 including a connection part 57 bonded to a surface electrode 31. The connection part 56 has a plurality of partial electrodes 56a and 56b that extend in a third direction perpendicular to both the first direction and the second direction.

Piezoelectric actuator, method for manufacturing the same, ink jet head, and ink jet recording apparatus

A piezoelectric actuator includes a vibration plate 26, a common electrode 27 formed on the vibration plate 26, a piezoelectric element 29 formed on the common electrode 27, a crystal control layer 28 formed on the piezoelectric element 29, a separate electrode 33 formed on the crystal control layer 28, and an electrode line 34 formed on the piezoelectric element 29. The crystal control layer 28 is formed in the displacement region. The crystalline structure of a piezoelectric element 29a in the displacement region is a perovskite structure, and that of a piezoelectric element 29b in the wiring region is a pyrochlore structure.

Ceramic element, method for producing ceramic element, display device, relay device, and capacitor

A ceramic element including a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t≦2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p.

MEMS SENSOR

Embodiments of the invention provide a MEMS sensor, including a flexible substrate having a vibrator and a sensor, a mass body coupled with the flexible substrate, and a support part supporting the flexible substrate. The vibrator includes a multilayer piezoelectric part and an electrode part connected to the multilayer piezoelectric part, and the sensor includes a piezoelectric material and an electrode part. The multilayer piezoelectric part is polled in the same direction and one of the piezoelectric materials contacting each other is expanded or contracted in an opposite direction to the other piezoelectric material. An uppermost layer of the vibrator and an uppermost layer of the sensor with respect to a stacking direction in which the piezoelectric material and the electrode part of the vibrator and the sensor are each stacked, are disposed on the same surface.

Method of manufacturing multilayered piezoelectric/electrostrictive ceramic actuator by sintering at low temperature

A manufacturing method for a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature, making feasible a high quality image and high speed printing, as large displacement and high speed actuation are feasible because it can get greater displacement and driving speed, even with small variation in driving voltage, because of piezoelectric/electrostrictive layer and upper electrode being alternately heaped to produce a multilayer structure.

Oil feeder

A pump includes a piezoelectric element that deforms when a drive voltage is applied to it, and a reservoir that has a capacity to store lubricating oil and that is at least partially deformed elastically to change in the capacity when the piezoelectric element deforms. The pump discharges the lubricating oil when the reservoir decreases in the capacity. A drive circuit unit is switchable between an application state where the drive circuit unit applies the drive voltage to the piezoelectric element, and a release state where the drive circuit unit releases the drive voltage applied to the piezoelectric element. A controller controllably switches the drive circuit unit between the application state and the release state. An electric power storage unit stores electric power that is output from the piezoelectric element when the drive voltage applied to the piezoelectric element is released.

MULTILAYER PIEZOELECTRIC ELEMENT, PIEZOELECTRIC VIBRATION APPARATUS, AND ELECTRONIC DEVICE

In an embodiment, a multilayer piezoelectric element includes a multilayer piezoelectric body and multiple internal electrodes. The multilayer piezoelectric body has a pair of principal faces in a first-axis direction, a pair of end faces in a second-axis direction crossing at right angles with the first-axis direction and defining the longitudinal direction, and a pair of side faces in a third-axis direction crossing at right angles with the first-axis direction and second-axis direction. The multiple internal electrodes are placed inside the multilayer piezoelectric body and stacked in the first-axis direction. Among the multiple internal electrodes, a center internal electrode placed at the center part of the multilayer piezoelectric body is such that its first cross-sectional shape, as viewed from the third-axis direction, has undulations greater than the undulations of the second cross-sectional shape of the center internal electrode as viewed from the second-axis direction.

LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

A liquid ejecting head includes a plate which is composed of a material containing silicon, a titanium oxide layer which is disposed above the plate, a bismuth-containing layer which is disposed above the titanium oxide layer and contains bismuth, a first electrode which is disposed above the bismuth-containing layer and composed of platinum, a piezoelectric layer which is disposed above the first electrode and composed of a piezoelectric material containing at least bismuth, and a second electrode which is disposed above the piezoelectric layer.

METHODS FOR MANUFACTURING LIQUID EJECTING HEAD AND PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC ELEMENT

A method for manufacturing a piezoelectric element comprising forming a titanium film containing titanium; forming a platinum film containing platinum on the titanium film; forming a piezoelectric precursor film containing bismuth, lanthanum, iron and manganese on the platinum film; crystallizing the piezoelectric precursor film to form a piezoelectric layer by firing the piezoelectric precursor film in an atmosphere of an inert gas; and forming an electrode on the piezoelectric layer.

PIEZOELECTRIC SUBSTANCE AND MANUFACTURING METHOD THEREOF, PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD USING SUCH PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE APPARATUS

The present invention provides a piezoelectric substance of single crystal or uniaxial crystal type in which three lattice lengths a, b and c of a unit lattice of the piezoelectric substance are smaller than lattice length a₀, b₀ and c₀ of a unit lattice of a bulk state of single crystal having the same temperature and same composition, respectively, and a volume of the unit lattice of the piezoelectric substance is smaller than a volume of the unit lattice of the bulk state of single crystal having the same temperature and same composition.

Interdigitated electrode for electronic device and electronic device using the same

Provided are an interdigitated electrode (IDE) for an electronic device, which includes a plurality of anodes and a plurality of cathodes arranged radially in an alternating fashion for electrical insulation from one another, and an electronic device using the same. The IDE in which the anodes and the cathodes are arranged radially in an alternating fashion is fabricated and applied to the electronic device, so that the entire fabrication process can be simplified compared to that of a typical electronic device in which an upper electrode is different from a lower electrode. Also, circular or polygonal IDEs can be applied to systems that are driven or measure values on their central axes, thereby enhancing the performance and efficiency of the systems. Furthermore, the circular or polygonal IDEs can be employed in systems such as acoustic sensors, pressure sensors, micro-speakers, biological sensors, and acceleration sensors, so that the structure and operation of the systems can be simplified ...

Piezoelectric element

A piezoelectric element including an upper electrode, a piezoelectric and/or electrostrictive material and a lower electrode, characterized in that the piezoelectric and/or electrostrictive material is a composite oxide constituted by ABO3 as general formula and the piezoelectric and/or electrostrictive material has a twin crystal.

Method for manufacturing a piezoelectric element

A piezoelectric element includes a support body having a displacing part capable of undergoing displacement, a lower electrode layer having a lower main electrode body and a lower electrode wire part with the lower main electrode body being formed on the support body and provided within the displacing part in a plan view and the lower electrode wire part being connected to the lower main electrode body and provided across an interior and an exterior of the displacing part, a first piezoelectric layer provided on the lower main electrode body, an upper electrode layer provided across the interior and exterior of the displacing part with at least a part of the upper electrode layer being layered on the first piezoelectric layer and insulated from the lower electrode layer, and a second piezoelectric layer provided on the support body to cover at least a part of the lower electrode wire part.

Piezoelectric/electrostrictive element having a specific coverage area of electrode on substrate, and manufacturing method of the same

There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element comprising a substrate, a lower electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the lower electrode layer, and the coverage of the lower electrode layer with respect to the substrate is 98% or less.

LIQUID-EJECTING HEAD, LIQUID-EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE

There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic sensor

A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

Acoustic perfusion devices

Acoustic perfusion devices for separating biological cells from other material in a fluid medium are disclosed. The devices include an inlet port, an outlet port, and a collection port that are connected to an acoustic chamber. An ultrasonic transducer creates an acoustic standing wave in the acoustic chamber that permits a continuous flow of fluid to be recovered through the collection port while keeping the biological cells within the acoustic chamber to be returned to the bioreactor from which the fluid medium is being drawn.

Sol-gel precursors and methods for making lead-based perovskite films

A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications.

Piezoelectric actuator and electronic apparatus

Piezoelectric actuator (51) includes a piezoelectric element (11) that performs expansion/contraction movement in accordance with the state of an electrical field, a base (21) with the piezoelectric element (11) adhered to one surface thereof, and a support member (46) for supporting the piezoelectric element (11) and the base (21), the piezoelectric element (11) and base (21) vibrating up and down in accordance with the expansion/contraction movement of the piezoelectric element (11). The base (21) is connected to the support member (46) by way of a vibration film (31) having less rigidity than the base (21). In addition, the piezoelectric element (11) and support member (46) have different outline shapes.

WAFER LEVEL ULTRASONIC CHIP MODULE AND MANUFACTURING METHOD THEREOF

A wafer level ultrasonic chip module includes a substrate, a composite layer, a conducting material, and a base material. The substrate has a through slot that passes through an upper surface of the substrate and a lower surface of the substrate. The composite layer includes an ultrasonic body and a protective layer. A lower surface of the ultrasonic body is exposed from the through slot. The protective layer covers the ultrasonic body and a partial upper surface of the substrate. The protective layer has an opening, from which a partial upper surface of the ultrasonic body is exposed. The conducting material is in contact with the upper surface of the ultrasonic body. The base material covers the through slot, such that a space is formed among the through slot, the lower surface of the ultrasonic body and an upper surface of the base material.

Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus

A piezoelectric material is expressed as a mixed crystal including a complex oxide having a perovskite structure and a rhombohedral structure and a complex oxide having a perovskite structure and a tetragonal structure, and the molar ratio of the complex oxide having a rhombohedral structure to the complex oxide having a tetragonal structure (rhombohedral crystal/tetragonal crystal) is 0.54 to less than 1.20.

Portable electronic device using a tactile vibrator

Examples of portable electronic devices including a piezo actuated vibrator for providing tactile feedback to the user are described. Portable electronic devices according to the present disclosure may include tactile feedback devices, which may be driven by a piezoelectric actuator/vibrator that is operatively coupled to or embedded into the housing of a portable electronic device. In some examples, the housing of the electronic device itself can be made of piezoelectric ceramic material. The piezoelectric element may be coupled to the housing of the product to cause the housing to deflect and/or vibrate. In some examples, the housing of the portable electronic device, which may be a portable media player device, may be configured for placement directly or indirectly in contact with the user's skin such that vibrations of the housing may be felt directly (without audible feedback) by the user.

DEVICE USING A PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

An ink jet print head includes: a pressure chamber (cavity) ; a movable film formation layer arranged on the pressure chamber and including a movable film A defining a ceiling surface portion of the pressure chamber ; a piezoelectric element formed on the movable film A and including a lower electrode , a piezoelectric film formed on the lower electrode , and an upper electrode formed on the piezoelectric film ; and first upper wiring . The upper electrode includes a main electrode portion A constituting the piezoelectric element and an extension portion B as second upper wiring drawn out of the main electrode portion A and connected to the first upper wiring . The first upper wiring has a portion arranged between the extension portion B and the movable film formation layer , and, within this portion, the extension portion B is connected to the first upper wiring 1. A device using a piezoelectric element comprising:a cavity;a movable film formation layer arranged on the cavity and including a movable film defining a ceiling surface portion of the cavity;a piezoelectric element formed on the movable film and including a lower electrode, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film; andfirst upper wiring arranged on the movable film formation layer and in the outer region of a peripheral edge of the ceiling surface portion of the cavity in plan view as seen from the direction of the normal with respect to a main surface of the movable film,wherein the upper electrode includes a main electrode portion constituting the piezoelectric element and an extension portion as second upper wiring drawn out of the main electrode portion and connected to the first upper wiring, andthe first upper wiring has a portion arranged between the extension portion and the movable film formation layer, and, within this portion, the extension portion is connected to the first upper wiring.2. The device using a piezoelectric ...

PIEZOELECTRIC DEVICE, LIQUID EJECTING APPARATUS, AND METHOD OF DRIVING PIEZOELECTRIC DEVICE and LIQUID EJECTING HEAD

A piezoelectric device comprises a piezoelectric element including a piezoelectric layer formed of a complex oxide having a perovskite structure including bismuth, iron, barium, and titanium, and a pair of electrodes placing the piezoelectric layer therebetween. The piezoelectric element is driven with a first drive mode and a second drive mode. In the first drive mode, the piezoelectric element is driven at a first speed, and is held to a first voltage V1 in a first hold process during a first time defined based on a natural period Tc. In the second drive mode, the piezoelectric element is driven at a higher speed than the first speed, and is held to the first voltage V1 in the first hold process during a second time shorter than the first time, and an intermediate voltage Vm is set to be equal to or lower than a voltage corresponding to the coercive electric field Ec.

Method for forming an ultrasonic transducer, and associated apparatus

A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

Actuator device, liquid jet head and liquid jet apparatus

Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50 ) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55 ) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between ...

Piezoelectric material, piezoelectric device, and electronic apparatus

A piezoelectric material that has good insulating properties and piezoelectricity and is free of lead and potassium and a piezoelectric element that uses the piezoelectric material are provided. The piezoelectric material contains copper and a perovskite-type metal oxide represented by general formula (1): (1−x){(NayBa1−z)(NbzTi1−z) O3}-xBiFeO3 (where 0 Подробнее

SOL-GEL PRECURSORS AND METHODS FOR MAKING LEAD-BASED PEROVSKITE FILMS

A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications.

Piezoelectric element and liquid ejecting head

Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. An atom concentration NK1(atm %) of potassium contained in grain boundaries of the crystal grains and an atom concentration NK2(atm %) of potassium contained in the crystal grains satisfy a relationship of 1.0 Подробнее

Piezoelectric element, ink jet recording head and method for manufacturing piezoelectric element

In a piezoelectric element having a piezoelectric film sandwiched between a lower electrode and an upper electrode, the lower electrode and/or the upper electrode and the piezoelectric film comprise perovskite oxide and a contact interface between the lower electrode and/or the upper electrode and the piezoelectric film does not exist and a region where crystals of the lower electrode and/or the upper electrode and crystals of the piezoelectric film are mixed exists between the lower electrode and/or the upper electrode and the piezoelectric film.

Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus

In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1, and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.

Piezoelectric device and method of manufacturing piezoelectric device

A piezoelectric device (10, 50, 90, 100, 150, 160) includes: a substrate (12, 30, 110, 170); a first electrode (14, 32, 114) which is layered over the substrate (12, 30, 110, 170); a first piezoelectric film (16, 34, 116) which is layered over the first electrode (14, 32, 114); a metal oxide film (18, 36, 62A, 62B, 118) which is layered over the first piezoelectric film (16, 34, 116); a metal film (20, 38, 64A, 64B, 120) which is layered over the metal oxide film (18, 36, 62A, 62B, 118); a second piezoelectric film (22, 44, 74, 122) which is layered over the metal film (20, 38, 64A, 64B, 120); and a second electrode (24, 46, 82, 124) which is layered over the second piezoelectric film (22, 44, 74, 122).

Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same

A piezoelectric element includes a first electrode (2); a piezoelectric layered film (10) composed of a first piezoelectric film (3) formed on the first electrode film and a second piezoelectric film (4) that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film (5) formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.

Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone

Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus

Disclosed are a piezoelectric element, which has a high withstand voltage and a longer durability life, a manufacturing method of the piezoelectric element, a liquid-jet head, a manufacturing method of the liquid-jet head, and a liquid-jet apparatus. The manufacturing method of a piezoelectric element includes the steps of: forming a piezoelectric layer by forming, on the lower electrode, a piezoelectric precursor film in which Pb, Zr and Ti are contained and the composition ratio of Pb, Zr and Ti becomes Pb/(Zr+Ti)=1.0 to 1.3 after the piezoelectric precursor film has been baked, and to which at least any one dopant selected from the group consisting of manganese, nickel and strontium is doped, and by then baking the piezoelectric precursor film for half an hour to three hours at 650 to 750°C; and forming an upper electrode on the piezoelectric layer.

Dielectric element, piezoelectric element, ink jet head and method for producing the same head

Multilayered piezoelectric/electrostrictive device

A multilayered piezoelectric/electrostrictive device includes a substrate 1, a plurality of piezoelectric/electrostrictive portions 2 and 3, and a plurality of electrodes 4, 5, and 6; the piezoelectric/electrostrictive portions 2 and 3 and the electrodes 4, 5, and 6 being alternately layered on the substrate 1, and the piezoelectric/electrostrictive portion 12 positioned in the lowermost layer being anchored to the substrate 1 directly or through the electrode 4. The ratio α given by the average particle size (A) (µm) of the piezoelectric/electrostrictive ceramic used for forming the piezoelectric/electrostrictive portion to the thickness (B) (µm) of the piezoelectric/electrostrictive portion satisfies the relationship expressed by "0.02 ≤ α ≤ 0.6" in each of the piezoelectric/electrostrictive portions 2 and 3.

PIEZOELECTRIC ELEMENT

Method of manufacturing piezoelectric actuator and method of manufacturing liquid transporting apparatus

A recess is formed on an upper surface of a vibration plate at a position corresponding to a pressure chamber. Next, a low-elasticity material having a lower modulus of elasticity than the vibration plate is filled in the recess. Then, aerosol including a piezoelectric material particles and carrier gas is sprayed on the upper surface of the vibration plate to form a piezoelectric layer. At this time, the particles of the piezoelectric material do not adhere to a surface of the low-elasticity material filled in the recess, and hence the piezoelectric layer can be formed only in an area excluding the surface of the low-elasticity material. Thus, there is provided a method of manufacturing a piezoelectric actuator, the method capable of easily preventing, when forming the piezoelectric layer by an aerosol deposition method, formation of the piezoelectric layer on a surface of the recess.

Surface light-emitting element and self-scanning type light-emitting device

A lower electrode on a substrate is continuously formed from one thick portion at the periphery to a thin diaphragm portion. An auxiliary electrode is continuously formed from a position of the thin diaphragm portion independent of the lower electrode to the other thick portion at the periphery. A piezoelectriclelectrostrictive film is formed over the lower electrode and auxiliary electrode. Since an incompletely bonded portion that can cause variation and time-dependent changes is not structured to extend over the thin diaphragm portion and the thick portions, it is possible to provide an element which has stable characteristics and which can be used under any condition. Further, since the incomplete bonded portion does not reside at ends of the thin diaphragm portion where the piezoelectric/electrostricitve film is likely to crack in the structure, it is possible to completely prevent the piezoelectric/electrostrictive film from cracking regardless of the type and characteristics of the ...

Multi-layer ink jet recording head

PIEZOELECTRIC / ELECTROSTRICTIVE FILM ELEMENT

PROBLEM TO BE SOLVED: To provide a piezoelectric / electrostrictive film element having a bending displacement level and durability that are equal to or higher than the conventional piezoelectric / electrostrictive element, in addition, having a extremely large resonant frequency with excellent quick-response. SOLUTION: In a piezoelectric / electrostrictive film element having a piezoelectric / electrorstrictive activation section, which includes a substrate comprising ceramics; at least one piezoelectric / electrostrictive layer provided on the substrate; and at least one pair of electrodes that are stacked on the piezoelectric / electrostrictive layer and connected to the piezoelectric / electrostrictive layer, a highly water-repellent surface is formed on at least either one of outer surfaces of the piezoelectric / electrorstrictive layer and the upper electrode. COPYRIGHT: (C)2004,JPO ...

PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a highly reliable piezoelectric element to be hardly damaged, having an even and small piezoelectric substance grain size and its manufacturing method. SOLUTION: The piezoelectric element 100 comprises a base 10, a lower electrode 20 provided on the base 10, a lower dummy electrode 22 provided on the base 10 so as to be separated and electrically insulated from the lower electrode 20 by a slit 24, having a function of making smaller the grain size of a piezoelectric substance layer 30 formed thereon and a function of improving the crystal orientation of the piezoelectric substance, the piezoelectric substance layer 30 formed on the base 10, the lower electrode 20 and the lower dummy electrode 22, preferably as a perovskite oxide represented by a general formula ABO3, and an upper electrode 40 provided on the piezoelectric substance layer 30. COPYRIGHT: (C)2008,JPO&INPIT ...

液体噴射ヘッド、液体噴射装置および圧電素子

液滴噴射装置及び圧電アクチュエータ

Poling of a piezoelectric thin film element in a preferred electric field driving direction

PIEZOELECTRIC BIMORPH OR MONOMORPH BENDER STRUCTURE

OSCILLATION DEVICE AND ELECTRONIC APPARATUS

An oscillation device includes: a piezoelectric vibrator () in which electrode layers () are formed over top and bottom surfaces of a piezoelectric layer (); a vibrating member () having at least atop surface to which the piezoelectric vibrator () is bonded; and a resin member () formed continuously in a circumferential direction over at least the outer side surface of the piezoelectric vibrator (). Therefore, since it is possible to increase the working area of the piezoelectric vibrator, it is possible to realize both an increase in the sound pressure level of the output and miniaturization of the apparatus. 1. An oscillation device comprising:a piezoelectric vibrator in which electrode layers are formed over top and bottom surfaces of a piezoelectric layer;a vibrating member having at least a top surface to which the piezoelectric vibrator is bonded; anda resin member formed continuously in a circumferential direction over at least an outer side surface of the piezoelectric vibrator.2. The oscillation device according to claim 1 ,wherein the resin member is also in close contact with the top surface of the vibrating member in at least a portion connected to the outer side surface of the piezoelectric vibrator.3. The oscillation device according to claim 1 ,wherein a softening point of the resin member is higher than a polarization temperature of the piezoelectric layer.4. The oscillation device according to claim 3 ,wherein the softening point of the resin member is equal to or higher than 80° C.5. The oscillation device according to claim 1 , wherein the piezoelectric vibrator is formed in a polygonal planar shape having a plurality of corners and a plurality of sides claim 1 , andthe resin member is formed in a planar shape that is thicker at a position of the corner than at a position of the side of the piezoelectric vibrator.6. The oscillation device according to claim 5 ,wherein the piezoelectric vibrator is formed in a rectangular planar shape having four ...

Piezoelectric thin film element and method of manufacturing the same, droplet discharge head and inkjet recording device using the piezoelectric thin film element

A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.

ELECTROMECHANICAL CONVERSION ELEMENT, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC TYPE ACTUATOR, LIQUID DROPLET JETTING HEAD, AND INKJET RECORDING APPARATUS

An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film, wherein the metal film is solid. 1. An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal , the electromechanical conversion element comprising:a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated;an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; anda top electrode disposed on the electromechanical conversion film, whereinthe metal film is solid.2. The electromechanical conversion element according to claim 1 , whereinthe conductive oxide film is made of a material having a lattice constant that matches a lattice constant of the metal film, andan average particle diameter in a horizontal direction in the conductive oxide film is larger than an average particle diameter in a horizontal direction in the metal film.3. The electromechanical conversion element according to claim 1 , whereinthe metal film is a platinum film, andthe conductive oxide film is a strontium ruthenate film.4. The electromechanical conversion element according to claim 3 , whereinthe strontium ruthenate film has a perovskite structure, and(111) is preferentially oriented in the strontium ruthenate film.5. The electromechanical conversion element according to claim 1 , whereinthe metal film has a thickness of less than or equal to 250 nm.6. A piezoelectric type actuator comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1 ...

PIEZOELECTRIC OSCILLATION DEVICE AND TOUCH PANEL DEVICE

In a piezoelectric oscillation device in which a support substrate is oscillated using a bimorph-type piezoelectric oscillation element, the click sensation when the support substrate is operated is improved, and shock resistance of a control panel is improved. Provided is a piezoelectric oscillation device in which wiring is not easily broken. On the rear side of a touch panel (), one main surface of a bimorph-type piezoelectric oscillation element () is entirely bonded via an elastic body () having a tensile elasticity of 20-100 MPa as measured according to JIS K7161. The piezoelectric oscillation element () has surface electrode layers (A, B) connected to terminal electrodes (A, B) via wiring lines (A, B). The wiring lines (A, B) are formed on top of a wiring protection layer () made of an elastic body provided on the rear side of the touch panel (), and because the wiring lines can move following the displacement and are therefore resistant to breakage. When the piezoelectric oscillation element () is displaced toward the touch panel (), it can transmit a greater amount of displacement to the touch panel () than when it is displaced to the opposite side. 1. A piezoelectric oscillation device , comprising: a support substrate; and a piezoelectric oscillation element that causes the support substrate to vibrate ,wherein the piezoelectric oscillation element is a bimorph piezoelectric oscillation element, andwherein one main surface of the piezoelectric oscillation element is entirely bonded to the support substrate through an elastic body having a tensile elasticity of 20 to 100 MPa as measured in accordance with JIS K7161.2. The piezoelectric oscillation device according to claim 1 , wherein a thickness of the elastic body is 50 to 160 μm.3. The piezoelectric oscillation device according to claim 1 , further comprising:a terminal substrate disposed on the same surface of the support substrate as a surface to which the piezoelectric oscillation element is bonded, ...

ACTUATOR USING ELECTRO-ACTIVE POLYMER AND ELECTRONIC DEVICE THEREWITH

An actuator using an electro-active polymer is provided. The actuator includes a vibration plate fixed to an electronic device; at least one electro-active polymer attached to the vibration plate, and activated when electric voltage is applied thereto; and at least one mass joined to at least one a combination member disposed on the vibration plate. 1. An actuator including an electro-active polymer , comprising:a vibration plate having both ends fixed to an electronic device;an electro-active polymer attached to a lower surface of the vibration plate, and activated when electric voltage is applied to the electro-active polymer; anda mass joined to a combination member disposed on the vibration plate between both ends of the vibration plate, and having two ends suspended with respect to the combination member over the vibration plate.2. The actuator as claimed in claim 1 , wherein a distance between each of the two ends of the mass and the vibration plate gradually increases as the mass extends from the combination member toward both ends of the vibration plate claim 1 , and the two ends of the mass are moved further apart from and closer to both ends of the vibration plate with respect to the combination member repeatedly to vibrate when the electro-active polymer is activated.3. The actuator as claimed in claim 2 , wherein both sides of the actuator are symmetric to each other with respect to the combination member.4. The actuator as claimed in claim 1 , wherein the vibration plate is formed to be curved convexly.5. The actuator as claimed in claim 1 , further comprising a second electro-active polymer disposed between the mass and the vibration plate claim 1 , which is activated along with the electro-active polymer when electric voltage is applied to the electro-active polymer and the second electro-active polymer.6. The actuator as claimed in claim 5 , wherein the vibration plate is formed to be curved convexly claim 5 , and the electro-active polymer and the ...

LARGE-DEFLECTION MICROACTUATORS

Actuators using piezoelectric drives, S-drives, or S-flexures are disclosed. The actuators can include S-drives connected in series to deflect substantially in a common deflection direction. The actuators can also include pairs of piezoelectric elements connected together for rotation in the plane of the pairs. An arm assembly and a forearm assembly can each have a plurality of S-flexures for deflection along substantially orthogonal axes. 1. An actuator , comprising: i) four piezoelectric elements disposed substantially in a respective common plane of the S-drive and arranged as a first and a second pair of the piezoelectric elements, the piezoelectric elements in each pair spaced apart and mechanically coupled at their ends, and the first and second pairs mechanically connected in series to define the first and second ends of the S-drives; and', 'ii) first and second electrodes arranged so that voltage applied to the first electrode causes deformation of a first piezoelectric element of the first pair and a second piezoelectric element of the second pair, and voltage applied to the second electrode causes deformation of a second piezoelectric element of the first pair and a first piezoelectric element of the second pair;', 'iii) one or more common electrode(s), each common electrode arranged opposite the first electrode or opposite the second electrode in a direction substantially normal to the respective common plane; and, 'a) a plurality of S-drives, each having a first end and a second end, the S-drives mechanically connected in series at their first ends and second ends alternately, each S-drive includingb) a controller adapted to selectively apply voltage of a first polarity between the first electrode and at least one of the common electrode(s) facing the first electrode, and contemporaneously apply voltage of a second polarity opposite to the first polarity between the second electrode and at least one of the common electrode(s) facing the second electrode, ...

Electronic device and method of manufacturing the same

An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory alloy film.

PIEZOELECTRIC DEVICE, LIQUID EJECTION HEAD, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE

A piezoelectric device includes a first substrate having an empty chamber, a diaphragm defining a surface of the empty chamber, a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber, and a second substrate provided on the side of the first substrate opposite to the diaphragm. The thickness of at least a part of the first substrate in an opening peripheral area of the empty chamber is thicker than the thickness in an area outside the opening peripheral area. 1. A piezoelectric device comprising:a first substrate having an empty chamber;a diaphragm defining a surface of the empty chamber;a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber; anda second substrate provided on the side of the first substrate opposite to the diaphragm,wherein the thickness of at least a part of the first substrate in an opening peripheral area of the empty chamber is thicker than the thickness in an area outside the opening peripheral area.2. The piezoelectric device according to claim 1 , wherein the thickness in the entire periphery of the opening peripheral area is thicker than the thickness in the area outside the opening peripheral area.3. A piezoelectric device comprising:a first substrate having an empty chamber;a diaphragm defining a surface of the empty chamber;a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber; anda second substrate provided on the side of the first substrate opposite to the ...

MEMS DEVICE AND PROCESS

The application describes MEMS transducer structures comprising a membrane structure having a flexible membrane layer and at least one electrode layer. The electrode layer is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure which extends between the first electrode layer and the flexible membrane layer. 1. A MEMS transducer comprising a membrane structure , the membrane structure comprising a flexible membrane layer and a first electrode layer , the first electrode layer being supported relative to the flexible membrane layer so as to be spaced from the flexible membrane layer.2. A MEMS transducer as claimed in claim 1 , wherein at least one air volume extends between the material of the first electrode layer and the membrane layer.3. A MEMS transducer as claimed in claim 1 , wherein the membrane structure comprises a second electrode layer claim 1 , said second electrode layer being disposed on the opposite side of the flexible membrane to the first electrode.4. A MEMS transducer as claimed in claim 3 , wherein the second electrode layer is supported relative to the flexible membrane layer so as to be spaced from the flexible membrane layer.5. A MEMS transducer as claimed in claim 1 , wherein the first electrode layer comprises a continuous sheet of material.6. A MEMS transducer as claimed in claim 1 , wherein the first electrode layer comprises one or more openings.7. MEMS transducer as claimed in claim 1 , wherein the first electrode layer comprises a lattice structure.8. A MEMS transducer as claimed in claim 1 , wherein the first electrode layer is supported relative to the flexible membrane by means of a support structure which extends between the first electrode layer and the flexible membrane layer.9. A MEMS transducer as claimed in claim 3 , wherein the second ...

Speaker Apparatus

An apparatus is described, the apparatus including a case, a display assembly, a chassis connected to the display assembly, a suspension component between the display assembly and the case, wherein the suspension component is configured to allow the display assembly to move relative to the case, at least one vibrating element configured to actuate the chassis to move the display assembly relative to the case to generate at least one of acoustic waves or haptic/tactile effect, and an internal cavity below the display, wherein electronic components of the apparatus are located at the internal cavity. 123-. (canceled)24. An apparatus comprising:a case;a display assembly;a flexible element positioned between the display assembly and the case and configured allow the display assembly to move relative to the case;at least one vibrating element configured to move the display assembly relative to the case to generate at least one of acoustic waves or haptic/tactile effect; andan internal cavity below the display, wherein electronic components of the apparatus are located at the internal cavity;wherein driving the at least one vibrating element allows the flexible element to control the movement of the display assembly; andwherein an interaction of the case, the display assembly, the flexible element, and the at least one vibrating element at least partially form a speaker.25. The apparatus as claimed in wherein the flexible element comprises at least one of:a flexible gasket;a floating gasket;a flexible membrane;a resilient folded surface;a bellows; ora pleated material suspension.26. The apparatus as claimed in further comprising a display frame within which the display assembly is located claim 24 , wherein the display frame couples the display assembly to the flexible element.27. The apparatus as claimed in wherein the internal cavity comprises a controlled acoustic cavity.28. The apparatus as claimed in further comprising at least one hole which is coupled to the ...

A PIEZOELECTRIC THIN FILM ELEMENT

There is disclosed a piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between characterised in that the thin film element has at least two of: 1. A piezoelectric thin film element comprising a first electrode , a second electrode and one or more piezoelectric thin films characterised in that the thin film element has at least two of:a piezoelectric thin film adjacent to the first electrode in which a layer of the piezoelectric thin film near to the first electrode has a piezoelectric displacement constant which is lower than that of a layer of the piezoelectric thin film further from the first electrode;a piezoelectric thin film adjacent to the first electrode in which a layer of the piezoelectric thin film near to the first electrode has an elastic modulus which is lower than that of a layer of the piezoelectric thin film further from the first electrode; andan electrode arrangement in which electrodes are arranged with the one or more piezoelectric thin films so that an electric field applied to a piezoelectric thin film or a portion of a piezoelectric thin film adjacent to the first electrode is lower than an electric field applied to a piezoelectric thin film or a portion of a piezoelectric thin film further from the first electrode when the piezoelectric thin film element is actuated.2. A piezoelectric thin film element according to claim 1 , wherein the element comprises said electrode arrangement and a piezoelectric thin film adjacent to the first electrode in which a layer of the piezoelectric thin film near to the first electrode has a piezoelectric displacement constant and/or an elastic modulus which are lower than those of a layer of the piezoelectric thin film further from the first electrode.3. A piezoelectric thin film element according to claim 1 , wherein the electrode arrangement comprises one or more additional electrodes.4. (canceled)5. (canceled)6. A piezoelectric ...

ACOUSTIC PERFUSION DEVICES

Acoustic perfusion devices for separating biological cells from other material in a fluid mixture are disclosed. The devices include an inlet port, an outlet port, and a collection port that are connected to an acoustic chamber. An ultrasonic transducer creates an acoustic standing wave in the acoustic chamber that permits a continuous flow of fluid to be recovered through the collection port while keeping the biological cells within the acoustic chamber to be returned to the bioreactor from which the fluid mixture is being drawn. 1. An acoustic perfusion device , comprising:an acoustic chamber;at least one ultrasonic transducer coupled to the acoustic chamber;at least one reflector opposite the at least one ultrasonic transducer across the acoustic chamber;the at least one ultrasonic transducer configured to be excited to generate an acoustic standing wave with the at least one reflector;a flow path arranged in the acoustic chamber to bring a fluid and particle mixture proximate to the acoustic standing wave, such that a perfusate turbidity is reduced by about 50% or greater.2. The device of claim 1 , wherein the flow path is shaped to generate a tangential flow path proximate to the acoustic standing wave.3. The device of claim 1 , wherein a pressure rise and an acoustic radiation force on cells are generated at an upstream interface region of the acoustic standing wave to clarify fluid passing through the acoustic standing wave.4. The device of claim 1 , wherein the at least one reflector is made of a transparent material.5. The device of claim 1 , wherein the at least one ultrasonic transducer further comprises two or more ultrasonic transducers.6. The device of claim 5 , where the at least one reflector is located between the two or more ultrasonic transducers.7. The device of claim 1 , wherein the acoustic standing wave generates an acoustic radiation force with an axial force component and a lateral force component that are of the same order of magnitude.8. ...

PIEZOELECTRIC ACTUATOR

A piezoelectric actuator is provided, including a vibration plate, a piezoelectric layer, a plurality of individual electrodes arranged in two arrays, first and second common electrodes which have first and second facing portions facing parts of the individual electrodes and first and second connecting portions connecting the first and second facing portions respectively, and first and second wiring portions which are arranged on the vibration plate and which are connected to the first and second common electrodes respectively via first and second connecting wirings, wherein one of the first connecting wirings connects the first connecting portion and one of the first wiring portion while striding over the second connecting portion. 1. A piezoelectric actuator comprising:a piezoelectric layer;a common electrode arranged on an upper surface of the piezoelectric layer;two individual electrode arrays, each of the two individual electrode arrays including a plurality of individual electrodes aligned in an array direction; andtwo common traces connected to the common electrode and extending in the array direction.2. The piezoelectric actuator according to claim 1 , wherein the two individual electrode arrays are arranged between the two common traces in an orthogonal direction orthogonal to the array direction.3. The piezoelectric actuator according to further comprising a first connecting trace connecting the two common traces.4. The piezoelectric actuator according to claim 3 , wherein the first connecting trace extends in the array direction.5. The piezoelectric actuator according to further comprising a second connecting trace connecting the two common traces.6. The piezoelectric actuator according to claim 5 , wherein the first connecting trace is located at one side claim 5 , of the two individual electrode arrays claim 5 , in the array direction claim 5 , and the second connecting trace is located at the other side claim 5 , of the two individual electrode arrays ...

Orthotropic Bimorph for Improved Performance Synthetic Jet

Piezoelectric actuators for synthetic jets and other devices are disclosed having orthotropic piezoelectric bimorphs with increased out-of-plane displacements for greater responsiveness to applied electric fields. In some embodiments, the piezoelectric actuators may include interdigitated electrodes applied to a surface of a piezoelectric plate to produce greater in-plane strains in the plate and greater out-of-plane displacements of a flexible diaphragm of the synthetic jet. In other embodiments, the actuator includes an orthotropic piezoceramic plate having a greater d coupling coefficient in one in-plane direction and in the other in-plane direction to cause desired diaphragm out-of-plane displacements when an electric field is applied by electrodes. 1. A piezoelectric actuator comprising:a first plate having a planar first plate surface and an oppositely disposed planar second plate surface separated by a first plate thickness;a first electrode disposed on one of the planar first plate surface and the planar second plate surface and having a plurality of first fingers;a second electrode disposed on the same one of the planar first plate surface and the planar second plate surface and having a plurality of second fingers alternated with the plurality of first fingers; anda flexible diaphragm having a first diaphragm surface and an oppositely disposed second diaphragm surface, wherein one of the planar first plate surface and the planar second plate surface of the first plate faces and is rigidly secured to the first diaphragm surface,wherein a first electric field applied through the first electrode and the second electrode causes in-plane tensile stresses to elongate the first plate in a first direction, causes in-plane compressive stresses in a second direction, and causes transverse compressive stresses in a third direction, and wherein a second electric field applied through the first electrode and the second electrode causes compressive stresses to compress ...

Fluid device

A fluid device with a fluid chamber, the fluid device including a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element. The membrane element is fixed with a peripheral edge region to the device housing, wherein a membrane working section of the membrane element which is framed by the peripheral edge region can be deflected by a piezoactuator whilst carrying out a stroke movement, in order to change the volume of the fluid chamber. The membrane element is a functional constituent of the piezoactuator by way of it directly forming an electrically conductive electrode of the electrode arrangement of the piezoactuator.

MULTILAYERED PIEZOELECTRIC THIN FILM ELEMENT

A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer. 137-. (canceled)38. A piezoelectric thin film element comprising:a first electrode;a second electrode; and{'sub': '3', 'a piezoelectric thin film having a perovskite ABOcrystal structure, the piezoelectric thin film being arranged between the electrodes and in contact with the electrodes,'} 'the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is singly doped by a first donor dopant and a second thin film layer is singly doped by a second dopant selected from one of dopant type consisting of one of donor dopants, acceptor dopants and isovalent dopants, wherein the second dopant is different from the first donor dopant; and', 'wherein'}the piezoelectric thin film is configured to be deformed upon application of a predetermined drive voltage between the first and second electrodes.39. A piezoelectric thin film element according to claim 38 , in which the second dopant is selected from the dopant type consisting of acceptor dopants.40. A piezoelectric thin film element according to claim 38 , wherein the first donor dopant is one of Nb and Hf and the second dopant is one of Mn claim 38 , Mn claim 38 , and Mn.41. A piezoelectric thin film element according to claim 38 , in which all thin film layers comprise lead zirconate titanate (PZT).42. A piezoelectric thin film element according to claim 38 , in which the first dopant and the second dopant occupy the same or different co-ordination sites (A-site or B-site) in the perovskite ...

ACTUATOR SUPPORT STRUCTURE AND PUMP DEVICE

A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion. 1. (canceled)3. The actuator structure according to claim 2 , wherein the beam portion has a substantially straight shape.4. The actuator structure according to claim 2 , wherein the beam portion has an arc shape or substantially arc shape.5. The actuator structure according to claim 2 , wherein claim 2 , in each of the plurality of elastic support portions claim 2 , the side wall connection portion is connected to an end of the beam portion.6. The actuator structure according to claim 2 , whereineach of the plurality of elastic support portions includes two of the side wall connection portions; andin each of the plurality of elastic support portions, the actuator connection portion is located between the two side wall connection portions.7. The actuator structure according to claim 2 , wherein the beam portion is configured such that a beam portion length is provided without folding the beam portion.8. The actuator structure according to claim 2 , wherein the actuator has a disc shape.10. The pump device according to claim 9 , wherein the beam portion has a substantially straight shape.11. The pump device according to claim 9 , wherein the beam portion has an arc shape or ...

PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC VIBRATION APPARATUS, AND PORTABLE TERMINAL

A piezoelectric actuator includes a stacked body composed of internal electrodes and piezoelectric layers which are stacked on each other; and a surface electrode disposed on at least one of main surfaces of the stacked body so as to be electrically connected to the internal electrodes. The internal electrodes each includes a first electrode and a second electrode. The stacked body has an active section in which the first electrodes and the second electrodes of the internal electrodes are arranged so as to overlap each other in a stacking direction thereof, and an inactive section which is every section of the stacked body other than the active section. An internal electrode placed on a one-main-surface side of the internal electrodes is configured so that its end part situated near a boundary between the active section and the inactive section is curved toward the other main surface. 1. A piezoelectric actuator , comprising:a stacked body having a longitudinal direction and a width direction, the stacked body composed of internal electrodes and piezoelectric layers which are stacked on each other; anda surface electrode disposed on at least one of main surfaces orthogonal to a stacking direction of the stacked body so as to be electrically connected to the internal electrodes,the internal electrodes each including a first electrode and a second electrode,the stacked body comprising an active section in which the first electrodes and the second electrodes of the internal electrodes are arranged so as to overlap each other in a stacking direction thereof, and an inactive section which is every section of the stacked body other than the active section,an internal electrode placed on a one-main-surface side of the internal electrodes being configured so that its end part situated near a boundary between the active section and the inactive section is curved toward the other main surface,the surface electrode being disposed to extend from the active section to the ...

PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING THE SAME, AND PIEZOELECTRIC ELEMENT-APPLIED DEVICE

A piezoelectric element includes a first electrode; a piezoelectric layer, placed on or above the first electrode, containing potassium, sodium, niobium, titanium, and oxygen; and a second electrode placed on or above the piezoelectric layer. 1. A piezoelectric element comprising:a first electrode;a piezoelectric layer, placed on or above the first electrode, containing a perovskite-type composite oxide including potassium, sodium, and niobium; anda second electrode placed on or above the piezoelectric layer,wherein the piezoelectric layer further includes titanium.2. The piezoelectric element according to claim 1 ,wherein at least one of the first electrode and the second electrode contains titanium.3. The piezoelectric element according to claim 1 ,{'sup': −6', '2, 'wherein the density of a leakage current is 1×10A/cmor less when an electric field with an intensity of 200 kV/cm is applied to the piezoelectric layer.'}4. The piezoelectric element according to claim 1 , {'br': None, 'i': U={', 'I', '−I', 'I', '+I, 'sub': MAX', 'MIN', 'MAX', 'MIN, '2×()/()}×100'}, 'wherein an unevenness of titanium in the piezoelectric layer is indicated by a U-value and the U-value is 140% or less and satisfies the following formula{'sub': MAX', 'MIN, 'where Iis the maximum intensity of a signal from the titanium in a predetermined zone of the piezoelectric layer as analyzed from the second electrode side in a depth direction by secondary ion mass spectroscopy and Iis the minimum intensity of the signal from the titanium in the predetermined zone of the piezoelectric layer as analyzed from the second electrode side in the depth direction by secondary ion mass spectroscopy.'}5. The piezoelectric element according to claim 4 ,wherein the U-value is in the range of 70% and 140%.6. The piezoelectric element according to claim 1 ,wherein the piezoelectric layer is predominantly oriented in the (100), (110), or (111) plane.7. The piezoelectric element according to claim 1 , {'br': None, ' ...

DIELECTRIC ELASTOMER VIBRATION SYSTEM AND POWER SUPPLY DEVICE

A dielectric elastomer vibration system includes a dielectric elastomer vibrator with a dielectric elastomer layer and a pair of electrode layers, and a power supply device producing a potential difference across the electrode layers. The vibrator exhibits various modes or regions of relationship between potential difference and deformation induced by the potential difference: a high-response region in which a relatively large deformation is induced; a low-response region of lower-potential difference in which a relatively small deformation is induced; and a low-response region of higher-potential difference in which a relatively small deformation is induced or in which a break point of the dielectric elastomer layer is included. The power supply device produces the potential difference by applying across the electrode layers a vibration signal voltage, which is generated by combining an AC voltage with a bias DC voltage corresponding to a potential difference falling in the high-response region. 1. A dielectric elastomer vibration system , comprising:a dielectric elastomer vibrator that includes a dielectric elastomer layer and a pair of electrode layers sandwiching the dielectric elastomer layer; anda power supply device that produces a potential difference across the pair of electrode layers,wherein the dielectric elastomer vibrator exhibits a relationship between the potential difference across the pair of electrode layers and an amount of deformation induced by the potential difference, the relationship having: a high-response region in which a relatively large deformation is induced in response to change of the potential difference; a low-response region of lower-potential difference corresponding to a lower potential difference than the high-response region and in which a relatively small deformation is induced in response to change of the potential difference; and a low-response region of higher-potential difference corresponding to a higher potential ...

CONFIGURABLE ULTRASONIC IMAGER

An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor. 1. A portable programmable imaging device , comprising:a transducer configured to produce an ultrasonic image;control circuitry;communication circuitry;programmable memory;wherein the transducer further comprises a planar array of piezoelectric elements, andeach said piezoelectric element configured to operate in a plurality of modes of operation, each said mode of operation corresponding to one or more configuration profiles stored in the programmable memory and executable by the control circuitry.2. The portable programmable imaging device of claim 1 , wherein the communication circuitry is configured to communicatively couple the portable programmable imaging device to a display unit claim 1 , said display unit configured to display the ultrasonic image and further configured to receive a user input.3. The portable programmable imaging device of claim 2 , wherein the communication circuitry is configured to communicatively couple the portable programmable imaging device to the display unit through at least one electrically-conductive cable.4. The portable programmable imaging device of claim 2 , wherein the communication circuitry further comprises transceiver circuitry configured to send and receive wireless signals to communicatively couple the portable programmable imaging device to the display unit through at least one wireless signal.5. The portable programmable ...

CONFIGURABLE ULTRASONIC IMAGER

An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor. 1. An imaging device , comprising: a piezoelectric layer;', 'a bottom electrode disposed on a bottom side of the piezoelectric layer; and', 'a first top electrode disposed on a top side of the piezoelectric layer; and, 'a two dimensional array of piezoelectric elements, each piezoelectric element including at least one sub piezoelectric element and comprisingan application-specific integrated circuit (ASIC) chip comprising an array of circuits for driving the two dimensional array of piezoelectric elements, each of the circuits being electrically coupled to a corresponding piezoelectric element,wherein a first column or line of the imaging device including a portion of piezoelectric elements in a first column of the two dimensional array is formed by simultaneously turning on a portion of the circuits that control the portion of the piezoelectric elements in the first column of the two dimensional array.2. The imaging device of claim 1 , wherein a number of the transmit driver circuits in the ASIC chip is same or less as a number of the piezoelectric elements in the two dimensional array of piezoelectric elements.3. The imaging device of claim 1 , wherein a second line including a portion of piezoelectric elements in a second column of the two dimensional array is formed by turning on a portion of the circuits that control the portion of the piezoelectric elements in the ...

ROBUST PIEZOELECTRIC FLUID MOVING DEVICES AND METHODS

A method of making a piezoelectric fluid moving device, (e.g., a fan or synthetic jet actuator) includes forming at least a first electrode on a base substrate and disposing a spacer frame about the first electrode. A piezoelectric substrate is placed within the frame and over the first electrode. A cover substrate is located on the spacer frame. The cover substrate and spacer frame are laminated to each other and to the base substrate encapsulating the piezoelectric substrate between the cover substrate and the base substrate for a long life device. 1. A method of making a piezoelectric fluid moving device , the method comprising:forming at least a first electrode on a base substrate;disposing a spacer frame about the first electrode;placing a piezoelectric substrate within the frame and over the first electrode;placing a cover substrate on the spacer frame; andlaminating the cover substrate and spacer frame to each other and to the base substrate encapsulating the piezoelectric substrate between the cover substrate and the base substrate.2. The method of in which the base substrate is an elongate fan blade.3. The method of in which the base substrate forms a synthetic jet actuator.4. The method of further including forming an electrode on the inside of the cover substrate contacting the piezoelectric substrate.5. The method of further including forming a first electrode lead on the base substrate claim 4 , forming a partial second electrode lead on the base substrate claim 4 , and forming a partial second electrode lead on the inside of the cover substrate contacting the partial second electrode lead on the base substrate after lamination.6. The method of further including forming an electrode on an opposite side of the base substrate and including a spacer frame claim 1 , a piezoelectric substrate claim 1 , and a cover substrate laminated on the opposite side of the base substrate.7. The method of in which the base substrate includes first and second electrodes ...

ACTUATOR, INK-JET HEAD, AND INK-JET DEVICE

An actuator includes a piezoelectric layer, a vibration plate, and a reduction inhibition layer. The piezoelectric layer includes an oxide material. The vibration plate is disposed below the piezoelectric layer, and configured to deform when the piezoelectric layer deforms. The reduction inhibition layer is disposed between the piezoelectric layer and the vibration plate, and configured to inhibit reduction reaction in the piezoelectric layer. 1. An actuator comprising:a piezoelectric layer including an oxide material;a vibration plate disposed below the piezoelectric layer, the vibration plate being configured to deform when the piezoelectric layer deforms; anda reduction inhibition layer disposed between the piezoelectric layer and the vibration plate, the reduction inhibition layer being configured to inhibit reduction reaction in the piezoelectric layer.2. The actuator according to claim 1 , further comprising an insulating layer between the vibration plate and the piezoelectric layer.3. The actuator according to claim 1 , further comprising an insulating layer between the piezoelectric layer and an electrode disposed above the piezoelectric layer.4. The actuator according to claim 1 , wherein the piezoelectric layer is formed of a material including lead zirconate titanate.5. The actuator according to claim 1 , wherein the reduction inhibition layer is formed of a material including Ni.6. The actuator according to claim 1 , wherein:the vibration plate serves as an electrode disposed below the piezoelectric layer; anda flow-path forming layer for forming a flow path of ink is provided opposite to the piezoelectric layer with the vibration plate interposed between the flow-path forming layer and the piezoelectric layer.7. The actuator according to claim 6 , wherein the vibration plate includes a plurality of layers among which the reduction inhibition layer is provided.8. The actuator according to claim 7 , wherein the vibration plate includes a layer containing ...

Packaged Electronic Components

A package for an electronic component wherein the package comprises a front end, a back end, and an active membrane layer sandwiched between front and back electrodes of conducting material; the active membrane being mechanically supported by the front end and covered by a back end comprising at least one back cavity having organic walls and lid, with filled through vias traversing the organic lid and walls for coupling to the electrodes by an internal routing layer; the vias being coupleable by external solderable bumps to a circuit board for coupling the package in a ‘flip chip’ configuration. 1. A package for an electronic component wherein the package comprises a front end , a back end , and an active membrane layer sandwiched between front and back electrodes of conducting material; the active membrane being mechanically supported by the front end and covered by a back end comprising at least one back cavity having organic walls and lid , with filled through vias traversing the organic lid and walls for coupling to the electrodes by an internal routing layer; the vias being coupleable by external solderable bumps to a circuit board for coupling the package in a ‘flip chip’ configuration.2. The package of claim 1 , further comprising at least one of the following limitations:the package comprises at least one front cavity in the front end on an opposite side of the active film from the at least one back cavity;the active membrane layer comprises a piezoelectric membrane; andthe package comprises an electronic component.3. The package of comprising resonators or arrays of resonators providing a filter.4. The package of wherein the electronic component comprises an RF filter comprising a plurality of resonators in series and shunt claim 3 , each resonator having dedicated back and front cavities.5. The package of wherein the active membrane layer comprises a piezoelectric membrane selected from the group comprising BaSrTiOhenceforth BST claim 1 , c-axis ScAlN ...

MICROELECTROMECHANICAL APPARATUS FOR GENERATING A PHYSICAL EFFECT

A microelectromechanical apparatus for generating a physical effect, including an array of moving elements, each coupled to a mechanical support by at least one flexure which is associated with at least one piezoelectric member which is operable to be strained by an electrical field applied to the piezoelectric member, thereby flexing the flexure to which the piezoelectric member is coupled; an electrical wiring, including a group of electrodes, wherein each electrode out of the group of electrodes is coupled to at least one of the piezoelectric members; wherein the electrical wiring is operable to concurrently transfer different sequences of electric fields to different piezoelectric members, thereby controllably inducing movement of moving elements of the array for creating the physical effect; and a motion restriction mechanism for maintaining a maximal motion distance for each of the moving elements when actuated via the corresponding flexure and piezoelectric member. 1. A microelectromechanical apparatus for generating a physical effect , the microelectromechanical apparatus comprising:an array of moving elements, each of the moving elements being constructed of a non-piezoelectric material and being coupled to a mechanical support by at least one flexure which is associated with at least one piezoelectric member which is operable to be strained by an electrical field applied to the piezoelectric member, thereby flexing the flexure to which the piezoelectric member is coupled;an electrical wiring, comprising a group of electrodes, wherein each electrode out of the group of electrodes is coupled to at least one of the piezoelectric members; wherein the electrical wiring is operable to concurrently transfer different sequences of electric fields to different piezoelectric members, thereby controllably inducing movement of moving elements of the array for creating the physical effect; anda motion restriction mechanism for maintaining a maximal motion distance for ...

LIQUID DISCHARGE HEAD, LIQUID DISCHARGE APPARATUS, AND METHOD OF MANUFACTURING LIQUID DISCHARGE HEAD

A liquid discharge head includes a first substrate in which a nozzle is formed, a second substrate disposed above the first substrate, an energy generation element that generates energy for discharging a liquid by a drive signal being applied, and a vibration plate that vibrates by the energy generated by the energy generation element and that is stacked on the second substrate, in which the vibration plate has a first area and a second area positioned at a position different from the first area and having a lower elastic modulus than an elastic modulus of the first area. 1. A liquid discharge head , comprising:a first substrate in which a nozzle is formed;a second substrate disposed above the first substrate;an energy generation element that generates energy for discharging a liquid by a drive signal being applied; anda vibration plate that vibrates by the energy generated by the energy generation element and that is stacked on the second substrate, whereinthe vibration plate has a first area and a second area positioned at a position different from the first area and having a lower elastic modulus than an elastic modulus of the first area.2. The liquid discharge head according to claim 1 , whereinin a space positioned between the first substrate and the vibration plate and formed by a wall surface of the second substrate, the second area is closer to the wall surface than the first area.3. The liquid discharge head according to claim 2 , whereinthe second area overlaps the wall surface in plan view viewed from a thickness direction of the vibration plate, andthe first area does not overlap the wall surface in the plan view.4. The liquid discharge head according to claim 1 , whereinin a space positioned between the first substrate and the vibration plate and formed by a wall surface of the second substrate, the second area is closer to an end of the energy generation element than the first area.5. The liquid discharge head according to claim 4 , whereinthe second ...

POWER GENERATOR WITH AN ELECTRICAL COMPONENT MADE FROM INERTIAL MASS AND CONTROL CIRCUIT THEREOF

A force generator for introducing vibrational forces into a structure for vibration control of the structure includes an inertial mass, at least one actuator for generating a vibratory movement of the inertial mass relative to the structure, and a drive circuit constructed from components for driving the at least one actuator. At least part of the inertial mass is formed by one component of the drive circuit. 1. A drive circuit for a force generator for introducing vibrational forces into a structure , the drive circuit comprising:at least one component that is a vibrating mass.2. The drive circuit of claim 1 , wherein the drive circuit includes a piezo amplifier and wherein the vibrating mass includes at least one of an inductor claim 1 , a transformer claim 1 , a capacitor claim 1 , or an electric resistor of the piezo amplifier.3. A force generator for introducing vibrational forces into a structure for vibration control of the structure claim 1 , the force generator comprising:an inertial mass;at least one actuator configured to generate a vibratory movement of the inertial mass relative to the structure; anda drive circuit constructed from components and configured to drive the at least one actuator,wherein at least part of the inertial mass is formed by one component of the drive circuit.4. The force generator of claim 3 , wherein the drive circuit comprises at least one component that is a vibrating mass.5. The force generator of claim 4 , wherein the drive circuit includes a piezo amplifier and wherein the vibrating mass includes at least one of an inductor claim 4 , a transformer claim 4 , a capacitor claim 4 , or an electric resistor of the piezo amplifier.6. The force generator of claim 3 , wherein the at least one actuator is at least one piezoelectric actuator.7. The force generator of claim 6 , wherein the at least one actuator is a piezo disc actuator having at least one of a piezoelectric disc-shaped flexural element or a d31 disc bender.8. The force ...

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC MEMBER, LIQUID DISCHARGE HEAD, AND RECORDING DEVICE EACH USING PIEZOELECTRIC ELEMENT

The present invention aims at providing a piezoelectric element with less characteristic variations with time, and a liquid discharge head and a recording device each using the piezoelectric element. The piezoelectric element of the present invention is the piezoelectric body (piezoelectric ceramic layer ) containing a potassium sodium niobate composition as a primary component. The piezoelectric body extends in a planar direction. A compressive stress is applied in the planar direction. A phase transition point between a tetragonal crystal system and an orthorhombic crystal system is −20° C. or below. 1. A piezoelectric element comprising:a piezoelectric body containing a potassium sodium niobate composition as a primary component,wherein the piezoelectric body extends in a planar direction and is subjected to a compressive stress in the planar direction, and a phase transition point between a tetragonal crystal system and an orthorhombic crystal system is −20° C. or below.2. The piezoelectric element according to claim 1 , wherein when the potassium sodium niobate composition is expressed by a composition formula: (1-x) {(KNa)Li}(NbTaSb)O+xB1(AlA2)O claim 1 ,0.0024≦x≦0.008,0.66≦a+3×b≦0.74,0.02≦b≦0.10,0.980≦c≦1.000,0.04≦d≦0.10,0≦e≦0.08,2/3≦α≦1, and1/3≦β≦2/3, andwherein A1 is at least one selected from an element group consisting of Mg, Cu, and Zn, A2 is at least one selected from an element group consisting of Nb, Ta, Sb, Ti, Zr, Hf, Ge, Sn, and Ce, and B1 is at least one selected from an element group consisting of Bi, Ca, Ba, and Sr.3. The piezoelectric element according to claim 1 , wherein a crystal axis ratio c/a in the tetragonal crystal system of the potassium sodium niobate composition is 1.01 or more.4. A piezoelectric member comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the piezoelectric element according to ; and'}a support body that is connected to the piezoelectric body and has a larger coefficient of thermal expansion than the ...

ARTIFICIAL COCHLEA

An artificial cochlea device for processing audio signals by electro-mechanical amplitude changes may be provided. The device comprises a micro-electro-mechanical system (MEMS) microphone comprising a membrane, an electro-mechanical feedback loop embedded in the MEMS microphone. Thereby, the electro-mechanical feedback loop comprises a piezo-electric actuator acting on the MEMS microphone by influencing the membrane's way to swing, such that an electro-mechanical amplitude change of an output signal is achieved. 1. A artificial cochlea device for processing audio signals by electro-mechanical amplitude changes , said device comprisinga micro-electro-mechanical system (MEMS) microphone, comprising a membrane configured to convert an acoustic signal to an electrical signal, andan electro-mechanical feedback loop embedded in said MEMS microphone,wherein said electro-mechanical feedback loop comprises a piezo-electric actuator configured to mechanically act on said membrane of said MEMS microphone with an amount of force derived from said electrical signal converted from said acoustic signal and configured to alter a mechanical aspect of a mechanical to electrical conversion by said MEMS microphone.2. The artificial cochlea according to claim 1 , wherein an amplitude change of an output signal is an amplification or an attenuation.3. The artificial cochlea according to claim 1 , wherein said MEMS microphone comprises a piezo-resistive element and wherein a bottom electrode of said MEMS microphone is mechanically coupled to said piezo-electric actuator.4. The artificial cochlea according to claim 1 , wherein said MEMS microphone is a capacitive microphone and wherein said MEMS microphone is mechanically coupled to said piezo-electric actuator.5. The artificial cochlea according to claim 1 , wherein said membrane of said microphone embeds a piezo-electric film to which a first pair of contacts and a second pair of contacts is attached claim 1 , wherein said first pair of ...

ACOUSTIC WAVE DEVICE

An acoustic wave device includes a piezoelectric substrate made of LiNbOor LiTaOand including first and second main surfaces that face each other, a functional electrode provided on the first main surface of the piezoelectric substrate to excite acoustic waves, and a LiCOlayer provided on the second main surface of the piezoelectric substrate. 1. An acoustic wave device comprising:{'sub': 3', '3, 'a piezoelectric substrate made of LiNbOor LiTaOand including first and second main surfaces that face each other;'}a functional electrode provided on the first main surface of the piezoelectric substrate to excite acoustic waves; and{'sub': 2', '3, 'a LiCOlayer provided on the second main surface of the piezoelectric substrate.'}2. The acoustic wave device according to claim 1 , wherein the LiCOlayer is provided on the entire or substantially the entire second main surface of the piezoelectric substrate.3. The acoustic wave device according to claim 1 , wherein the LiCOlayer is provided on a portion of the second main surface of the piezoelectric substrate.4. The acoustic wave device according to claim 1 , wherein the functional electrode is an IDT electrode.5. The acoustic wave device according to claim 1 , further comprising:a frame-shaped support layer provided on the first main surface of the piezoelectric substrate and surrounding the IDT electrode; anda cover on a surface of the support layer on an opposite side from a surface of the support layer closest to the piezoelectric substrate so as to close an opening of the support layer; whereina hollow portion is defined by the first main surface of the piezoelectric substrate, the support layer, and the cover.6. The acoustic wave device according to claim 5 , further comprising:a wiring line electrode provided on the second main surface of the piezoelectric substrate and electrically connected to the functional electrode.7. The acoustic wave device according to claim 6 , whereina through hole is provided that penetrates ...

METHOD FOR POLING PIEZOELECTRIC ACTUATOR ELEMENTS

A method of poling piezoelectric elements of an actuator comprises applying an electric pulse heating waveform to the piezoelectric element(s) in order to increase the temperature thereof to a poling temperature (S), applying an electric field poling waveform to the piezoelectric element(s) for a poling time period (S), and apply an electric field holding poling waveform to the piezoelectric element(s) to maintain poling whilst the temperature of the actuator decreases (S). 1. A method for poling piezoelectric elements of two or more piezoelectric actuators , the method comprising:applying a heating waveform to one or more of the piezoelectric elements to increase the temperature of the piezoelectric actuators from a first temperature to a poling temperature;applying a poling waveform to one or more of the piezoelectric elements when the poling temperature has been reached, for a poling time period, to pole the one or more piezoelectric elements; andafter expiry of the poling time period, applying a holding poling waveform to the one or more piezoelectric elements to which the poling waveform was applied until the temperature of the piezoelectric actuators has decreased from the poling temperature to a second temperature.2. The method of claim 1 , wherein the holding poling waveform comprises a holding poling and heating waveform claim 1 , and wherein the holding poling and heating waveform comprises a heating effect less than that needed to maintain the poling temperature.3. The method of claim 1 , wherein the holding poling waveform comprises a first holding poling and heating waveform and a second holding poling waveform claim 1 , and wherein the first holding poling and heating waveform comprises a heating effect less than that needed to maintain the poling temperature claim 1 , the method further comprising:applying the first holding poling and heating waveform until the temperature of the piezoelectric actuators has decreased from the poling temperature to an ...

HIGH VOLTAGE MEMS, AND A PORTABLE ULTRASOUND DEVICE COMPRISING SUCH A MEMS

An improved high voltage MEMS, and a portable ultrasound device comprising such a MEMS, and use of such a portable device for detecting a liquid volume. Microelectromechanical systems (MEMS) relate to a technology of very small devices. Piezoelectricity relates at one hand to accumulation of electric charge in certain solid materials in response to an applied mechanical stress. 1. A portable ultrasound device comprising:at least one ultrasound transducer, the transducer comprising at least one MEMS, the MEMS comprising at least one piezoelectric element, a cavity, and one or more of an ultrasound absorbing layer, and an ultrasound reflecting layer,a voltage source for applying a voltage to the transducer,a means for providing electrical energy, anda detector for detecting reflected ultrasound, a top electrode layer,', 'a piezoelectric layer, and', 'a bottom electrode layer, wherein the top electrode covers the piezoelectric layer completely or partially, and wherein the piezoelectric layer covers the bottom electrode completely or partially., 'wherein the MEMS comprises a stack of layers, the stack comprising at least two piezoelectric elements poled in a same direction, each piezoelectric element comprising2. The ultrasound device according to claim 1 , additionally comprising a voltage splitter for applying a voltage to an individual piezoelectric element.3. The ultrasound device according to claim 1 , comprising 2-20 transducers.4. The ultrasound device according to claim 1 , additionally comprising at least one of a transceiver claim 1 , a unique identification code claim 1 , at least one threshold claim 1 , the threshold for determining a pre-set unique amount of liquid claim 1 , and at least one apodization filter.5. The ultrasound device according to claim 1 , wherein the at least one cavity comprises an ultrasound absorbing material claim 1 , the voltage source and the at least one transducer in direct contact claim 1 , and the portable device consists of ...

ELECTROMECHANICAL TRANSDUCER, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE APPARATUS, AND METHOD FOR MANUFACTURING ELECTROMECHANICAL TRANSDUCER

An electromechanical transducer includes an electromechanical transducer film of laminated layers including a perovskite-type complex oxide represented by a general formula of ABO; and a pair of electrodes opposed to each other with the electromechanical transducer film interposed between the pair of electrodes. In the general formula of ABO, A includes Pb and B includes Zr and Ti. A variable ratio ΔPb of Pb, determined by Pb(max)−Pb(min), is 6% or less and a variable ratio ΔZr of Zr, determined by Zr(max)−Zr(min), is 9% or less, where an atomic weight ratio of Pb in the electromechanical transducer film is denoted by Pb/B, an atomic weight ratio of Zr in the electromechanical transducer film is denoted by Zr/B, a maximum value and a minimum value of the atomic weight ratio of Pb in a film thickness direction of the electromechanical transducer film are denoted by Pb(max) and Pb(min), respectively, and a maximum value and a minimum value of the atomic weight ratio of Zr in the film thickness direction of the electromechanical transducer film are denoted by Zr(max) and Zr(min), respectively. 1. An electromechanical transducer comprising:{'sub': '3', 'an electromechanical transducer film of laminated layers including a perovskite-type complex oxide represented by a general formula of ABO; and'}a pair of electrodes opposed to each other with the electromechanical transducer film interposed between the pair of electrodes,{'sub': '3', 'wherein, in the general formula of ABO, A includes Pb and B includes Zr and Ti,'}wherein a variable ratio ΔPb of Pb, determined by Pb(max)−Pb(min), is 6% or less and a variable ratio ΔZr of Zr, determined by Zr(max)−Zr(min), is 9% or less,where an atomic weight ratio of Pb in the electromechanical transducer film is denoted by Pb/B, an atomic weight ratio of Zr in the electromechanical transducer film is denoted by Zr/B, a maximum value and a minimum value of the atomic weight ratio of Pb in a film thickness direction of the ...

PIEZOELECTRIC MEMS MICROPHONE

A piezoelectric microelectromechanical systems microphone can be mounted on a printed circuit board. The microphone can include a substrate with an opening between a bottom end of the substrate and a top end of the substrate. The microphone can include a single piezoelectric film layer disposed over the top end of the substrate and defining a diaphragm structure, the single piezoelectric film layer being substantially flat with substantially zero residual stress and formed from a piezoelectric wafer. The microphone can include one or more electrodes disposed over the diaphragm structure. The diaphragm structure is configured to deflect when subjected to sound pressure via the opening in the substrate. 1. A piezoelectric microelectromechanical systems microphone , comprising:a substrate defining an opening between a bottom end of the substrate and a top end of the substrate;a single piezoelectric film layer formed by thinning a piezoelectric wafer disposed over the top end of the substrate and defining a diaphragm structure, the single piezoelectric film layer being substantially flat with substantially zero residual stress; andan electrode disposed over the diaphragm structure,wherein the diaphragm structure is configured to deflect when subjected to sound pressure via the opening in the substrate.2. The microphone of wherein the diaphragm structure has a circular shape.3. The microphone of wherein the electrode disposed over the diaphragm structure includes a circumferential electrode disposed over a circumference of the diaphragm structure and a center electrode disposed generally over a center of the diaphragm structure claim 2 , at least a portion of the center electrode spaced apart from the circumferential electrode.4. The microphone of wherein the diaphragm structure has a rectangular shape.5. The microphone of wherein the electrode disposed over the diaphragm structure include a peripheral electrode having side electrode portions disposed adjacent side edges ...

ULTRASONIC IMAGING DEVICE WITH PROGRAMMABLE ANATOMY AND FLOW IMAGING

An imaging device includes a transducer that includes an array of piezoelectric elements formed on a substrate. Each piezoelectric element includes at least one membrane suspended from the substrate, at least one bottom electrode disposed on the membrane, at least one piezoelectric layer disposed on the bottom electrode, and at least one top electrode disposed on the at least one piezoelectric layer. Adjacent piezoelectric elements are configured to be isolated acoustically from each other. The device is utilized to measure flow or flow along with imaging anatomy. 1. An imaging device comprising:a transducer;a two-dimensional (2D) array of piezoelectric elements arranged in rows and columns on the transducer, each piezoelectric element having at least two terminals, each piezoelectric element being physically isolated from each adjacent piezoelectric element to reduce cross talk,a first column of piezoelectric elements of the array, each piezoelectric element having a first top electrode connected to a respective receive amplifier, each of the piezoelectric elements to be electronically programmed as if connected together to form a first column, anda second column of piezoelectric elements of the array, each piezoelectric element having a second top electrode connected to a respective transmit driver, each of the piezoelectric elements to be electronically programmed as if connected together to form a second column,wherein the electronically programmed connections of the piezoelectric elements enables connection of an arbitrary number of piezoelectric elements in a column.2. The imaging device of claim 1 , wherein elements and sub-elements of columns are controlled as separate claim 1 , independent columns.3. The imaging device of claim 1 , wherein each piezoelectric element exhibits multiple modes of vibration enabling Anatomy and Doppler imaging over a large bandwidth with electronic steering and focus control of an elevation plane.4. The imaging device of claim 1 ...

FLUID DRIVING DEVICE

A fluid driving device includes a vibration unit, a signal transmission layer, a piezoelectric element, and a plane unit. The signal transmission layer includes a first conductive zone and a second conductive zone. The piezoelectric element includes a first electrode and a second electrode electrically isolated from each other. The first electrode of the piezoelectric element is electrically connected to the first conductive zone of the signal transmission layer, and the second electrode of the piezoelectric element is electrically connected to the second conductive zone of the signal transmission layer. The plane unit has at least one hole. The signal transmission layer, the piezoelectric element, and the plane unit are located at one side of the vibration unit and sequentially stacked with each other. 1. A fluid driving device comprising:a vibration unit;a signal transmission layer comprising a first conductive zone and a second conductive zone;a piezoelectric element comprising a first electrode and a second electrode electrically isolated from each other, the first electrode of the piezoelectric element being electrically connected to the first conductive zone of the signal transmission layer, the second electrode of the piezoelectric element being electrically connected to the second conductive zone of the signal transmission layer; anda plane unit having at least one hole, the signal transmission layer, the piezoelectric element, and the plane unit being respectively located on one side of the vibration unit and sequentially stacked together.2. The fluid driving device of claim 1 , further comprising:a transmission unit located between the vibration unit and the piezoelectric element, the transmission unit being a flexible printed circuit board.3. The fluid driving device of claim 2 , further comprising:a frame, wherein the vibration unit includes a first central zone and a first peripheral zone, and the frame is disposed between the first peripheral zone and ...

APPARATUS AND METHODS FOR PROVIDING TACTILE STIMULUS INCORPORATING TRI-LAYER ACTUATORS

An apparatus provides tactile stimulus to a human user using a tri-layer actuator comprising: first and second polymer layers which are electronically and ionically conductive and have one or more dimensions which vary in dependence on insertion of ions therein and withdrawal of ions therefrom; and a deformable layer located between the first and second polymer layers to physically separate the first and second polymer layers from one another, the deformable layer electronically insulating and ionically conductive. Application of first and second voltages between the first and second polymer layers creates corresponding first and second distributions of ions within the first and second polymer layers. Changing between application of the first and second voltages causes corresponding deformation of the tri-layer actuator between corresponding first and second shapes, a difference or transition between the first and second shapes detectable by a sense of touch of a human user. 1. An apparatus for providing tactile stimulus to a human user , the apparatus comprising:a plurality of tri-layer actuators arranged along a surface and spaced apart from one another in a transverse direction, the transverse direction generally tangential to the surface; first and second conductive layers, the first and second conductive layers electronically and ionically conductive, the first and second conductive layers having one or more dimensions which vary in dependence on insertion of ions therein and withdrawal of ions therefrom;', 'a deformable layer located between and in contact with the first and second conductive layers to physically separate the first and second conductive layers from one another, the deformable layer electronically insulating and ionically conductive; and, 'each tri-layer actuator comprising wherein, for each tri-layer actuator:', 'application of first and second voltages between the first and second conductive layers creates corresponding first and second ...

ACTUATOR DEVICE AND LIQUID EJECTION APPARATUS

An actuator device includes: an actuator including piezoelectric elements arranged in a first direction and first contacts arranged in the first direction; a protector including a first wall opposed to the piezoelectric elements and a second wall coupled to the first wall and joined to a region of the actuator at which the first contacts are disposed; first connection terminals disposed on the first; and first through electrodes formed in the second wall to bring the first contacts and the first connection terminals into conduction with each other. A distance between two of the first through electrodes which respectively correspond to two of the piezoelectric elements which are adjacent to each other in the first direction is greater than a distance in the first direction between the two of the piezoelectric elements which are adjacent to each other in the first direction. 1. An actuator device , comprising:an actuator comprising a plurality of piezoelectric elements arranged in a first direction and a plurality of first contacts respectively drawn from the plurality of piezoelectric elements and arranged in the first direction;a protector configured to cover the protector;a plurality of first connection terminals disposed on a surface of the protector, which surface is located on an opposite side of the protector from the actuator; anda plurality of first through electrodes respectively provided in a plurality of first through holes formed in the protector, the plurality of first through electrodes being configured to respectively bring the plurality of first contacts and the plurality of first connection terminals into conduction with each other,wherein a distance between two of the plurality of first through electrodes which respectively correspond to particular two of the plurality of piezoelectric elements, which are nearest to each other in the first direction among the plurality of piezoelectric elements, is greater than a distance in the first direction ...

Piezoelectric functional film, actuator, and ink-jet head

A piezoelectric functional film includes a base layer and a piezoelectric layer. The piezoelectric layer contains niobium-doped lead zirconate titanate. The base layer contains one of niobium-doped lead titanate, (niobium, lanthanum)-doped lead titanate, and (niobium, lanthanum, magnesium)-doped lead titanate.

Piezoelectric Actuator, Liquid Ejecting Head, And Liquid Ejecting Apparatus

A piezoelectric actuator includes: a diaphragm plate; a first electrode provided on or over the diaphragm plate; a piezoelectric substance layer provided on or over the first electrode; and a second electrode provided on or over the piezoelectric substance layer; wherein the piezoelectric substance layer includes a plurality of active portions sandwiched between the first electrode and the second electrode, either one of the first electrode and the second electrode is an individual electrode provided individually for each of the plurality of active portions, the other of the first electrode and the second electrode is a common electrode that is common to the plurality of active portions, and lead-out wiring is multiple-connected to the individual electrode. 1. A piezoelectric actuator , comprising:a diaphragm plate;a first electrode provided on or over the diaphragm plate;a piezoelectric substance layer provided on or over the first electrode; anda second electrode provided on or over the piezoelectric substance layer; whereinthe piezoelectric substance layer includes a plurality of active portions sandwiched between the first electrode and the second electrode,either one of the first electrode and the second electrode is an individual electrode provided individually for each of the plurality of active portions,the other of the first electrode and the second electrode is a common electrode that is common to the plurality of active portions, andlead-out wiring is multiple-connected to the individual electrode.2. The piezoelectric actuator according to claim 1 , wherein the active portion is not provided at a center region of the diaphragm.3. The piezoelectric actuator according to claim 2 , wherein either the first electrode or the second electrode is claim 2 , or both are claim 2 , absent at the center region.4. The piezoelectric actuator according to claim 2 , wherein the piezoelectric substance layer is not provided at the center region.5. The piezoelectric ...

PIEZOELECTRIC ACTUATOR

A piezoelectric actuator is provided, including a vibration plate, a piezoelectric layer, a plurality of individual electrodes arranged in two arrays, first and second common electrodes which have first and second facing portions facing parts of the individual electrodes and first and second connecting portions connecting the first and second facing portions respectively, and first and second wiring portions which are arranged on the vibration plate and which are connected to the first and second common electrodes respectively via first and second connecting wirings, wherein one of the first connecting wirings connects the first connecting portion and one of the first wiring portion while striding over the second connecting portion. 1. An ink-jet head comprising: a first pressure chamber; and', 'a second pressure chamber;, 'a channel body defining at leastan insulating layer arranged over the channel body in a height direction, wherein portions of the insulating layer are arranged over the first pressure chamber and the second pressure chamber;a piezoelectric layer arranged over the insulating layer in the height direction, wherein portions of the piezoelectric layer are arranged over the first pressure chamber and the second pressure chamber; a first portion arranged over the piezoelectric layer in the height direction, wherein the first portion is arranged over the first pressure chamber in the height direction;', 'a second portion arranged over the piezoelectric layer in the height direction, wherein the second portion is arranged over the second pressure chamber in the height direction;', 'a third portion arranged on a surface extending away from the insulating layer in the height direction;', 'a fourth portion arranged on a surface extending away from the insulating layer in the height direction; and,', 'a fifth portion arranged over the piezoelectric layer in the height direction, wherein the fifth portion is connected with the first portion, the second ...

Pump

A pump ( 10 ) includes: a flat plate ( 20 ); a piezoelectric element ( 21 ); a flat plate ( 30 ); a side wall ( 40 ); a support member ( 22 ); a support member ( 32 ); a shielding plate ( 500 ); a ventilation hole ( 23 ); a ventilation hole ( 33 ); a film valve ( 61 ); and a film valve ( 62 ). The film valve ( 61 ) is arranged in a region where the flat plate ( 20 ) and the shielding plate ( 500 ) face each other. The film valve ( 62 ) is arranged in a region where the flat plate ( 30 ) and the shielding plate ( 500 ) face each other. A center side of one of the film valve ( 61 ) and the film valve ( 62 ) is fixed in a state in which an outer edge side is movable, and the outer edge side of the other is fixed in a state in which the center side is movable.

ULTRA-MINIATURE ANTENNAS

Systems and methods for operating a communication device. The methods comprise: immersing an antenna in an electric field of an incident radio wave; producing a net change in electrical charge on a surface of an electrodeformative element that acoustically vibrates when the antenna is immersed in the electric field of the incident radio wave; harvesting the electrical charge produced on the surface of the electrodeformative element to provide an antenna receive function; and providing the harvested electrical charge from the antenna to a receiver circuit of the communication device. 1. A method for operating a communication device , comprising:immersing an antenna in an electric field of an incident radio wave;producing a net change in electrical charge on a surface of an electrodeformative element that acoustically vibrates when the antenna is immersed in the electric field of the incident radio wave;harvesting the electrical charge produced on the surface of the electrodeformative element to provide an antenna receive function; andproviding the harvested electrical charge from the antenna to a receiver circuit of the communication device.2. The method according to claim 1 , wherein the communication device is a navigation receiver claim 1 , a radio claim 1 , or a smart phone.3. The method according to claim 2 , wherein the navigation receiver is an eLoran receiver.4. The method according to claim 1 , wherein a frequency of the radio wave is between 50 kHz and 200 kHz.5. The method according to claim 1 , wherein the electrodeformative element is acoustically suspended in a housing of the antenna by a plurality of suspension members.6. The method according to claim 5 , wherein the plurality of suspension members comprise at least one of a coil spring claim 5 , a wire carrier claim 5 , a compressible pad and an elastomeric element.7. The method according to claim 5 , wherein at least one of said suspension members resides on all sides of the electrodeformative ...

REFLECTION MINIMIZATION FOR SENSOR

An electronic device includes a substrate layer having a front surface and a back surface opposite the front surface, a plurality of ultrasonic transducers formed on the front surface of the substrate layer, wherein the plurality of ultrasonic transducers generate backward waves during operation, the backward waves propagating through the substrate layer, and a plurality of substrate structures formed within the back surface of the substrate layer, the plurality of substrate structures configured to modify the backward waves during the operation. 1. An electronic device comprising:a substrate layer having a front surface and a back surface opposite the front surface; anda plurality of ultrasonic transducers formed on the front surface of the substrate layer, wherein the plurality of ultrasonic transducers generate backward waves during operation, the backward waves propagating through the substrate layer; anda plurality of substrate structures formed within the back surface of the substrate layer, the plurality of substrate structures configured to modify the backward waves during the operation.2. The electronic device of claim 1 , wherein the plurality of substrate structures comprises scattering structures configured to modify a direction of the backward waves during the operation.3. The electronic device of claim 2 , wherein the scattering structures are dimensioned to create destructive interference of the backward waves.4. The electronic device of claim 1 , wherein the plurality of substrate structures comprises absorption structures comprising acoustic absorption material to modify an amplitude of the backward waves during the operation.5. The electronic device of claim 1 , wherein the plurality of ultrasonic transducers are Piezoelectric Micromachined Ultrasonic Transducer (PMUT) devices.6. The electronic device of claim 5 , wherein a PMUT device of the plurality of ultrasonic transducers comprises:a support structure connected to the substrate layer; and a ...

ELECTROACOUSTIC CONVERSION FILM WEB, ELECTROACOUSTIC CONVERSION FILM, AND METHOD FOR MANUFACTURING SAME

Provided are an electroacoustic conversion film web, an electroacoustic conversion film, and manufacturing methods thereof in which costs can be reduced by reducing the number of operations without damage to thin film electrodes, the points of electrode lead-out portions can be freely determined, and thus high productivity can be achieved. A preparation step of preparing an electrode laminated body in which a single thin film electrode and a single protective layer are laminated and a lamination step of laminating the electrode laminated body and an piezoelectric layer are included. A non-adhered portion that is not adhered to the piezoelectric layer is provided in at least one end portion of the thin film electrode in a case where the electrode laminated body and the piezoelectric layer are laminated in the lamination step. 1. A manufacturing method of an electroacoustic conversion film web including a piezoelectric layer having dielectric properties , two thin film electrodes respectively formed on both surfaces of the piezoelectric layer , and two protective layers respectively formed on the two thin film electrodes , the method comprising:a preparation step of preparing an electrode laminated body in which one of the thin film electrodes and one of the protective layers are laminated; anda lamination step of laminating the electrode laminated body and the piezoelectric layer,wherein, in the lamination step, in a case where the electrode laminated body and the piezoelectric layer are laminated, at least one end portion of the thin film electrode is provided with a non-adhered portion that is not adhered to the piezoelectric layer.2. The manufacturing method of an electroacoustic conversion film web according to claim 1 ,wherein the lamination step is a first lamination step of forming the piezoelectric layer by applying a coating composition that is to become the piezoelectric layer onto the thin film electrode of the electrode laminated body and thereafter ...

ACTUATOR

The actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric plate. The suspension plate includes a first surface and a second surface and is capable of bending and vibrating. The outer frame surrounds a periphery of the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for supporting the suspension plate. The piezoelectric plate includes a first electrode and a second electrode made of silver palladium alloy doped with graphene. The first electrode is coated with a conducting layer made of graphene-doped paint, and the second electrode is coated with an adhesive layer made of graphene-doped epoxy glue. The adhesive layer is configured to attach and in adhesion with the first surface of the suspension plate. A voltage is applied to the first electrode and the second electrode to make the suspension plate bend and vibrate. 1. An actuator comprising:a suspension plate having a first surface and a second surface and being capable of bending and vibrating;an outer frame arranged around a periphery of the suspension plate;at least one bracket connected between the suspension plate and the outer frame for elastically supporting the suspension plate; anda piezoelectric plate having a first electrode and a second electrode made of silver palladium alloy doped with graphene, wherein the first electrode is coated with a conducting layer made of a graphene-doped paint, the second electrode is coated with an adhesive layer made of a graphene-doped epoxy glue, the adhesive layer is configured to attach and in adhesion with the first surface of the suspension plate, and a voltage is applied to the first electrode and the second electrode to make the suspension plate bend and vibrate.2. The actuator according to claim 1 , wherein the actuator further comprises:a gas inlet plate disposed on the side of the second surface of the suspension plate and having at least one gas inlet, at least ...

PIEZOELECTRIC DEVICE

A piezoelectric device that includes a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a lower electrode arranged below the piezoelectric layer in at least the membrane part; and an upper electrode that is arranged above the piezoelectric layer so as to face at least part of the lower electrode with the piezoelectric layer interposed therebetween in the membrane part. A heater is arranged above the piezoelectric layer so as to be separate from the upper electrode or at least part of the upper electrode doubles as a heater. 1. A piezoelectric device comprising:a substrate defining an opening therein;a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate;a first electrode that is arranged between the piezoelectric layer and the substrate in at least the membrane part;an second electrode that is arranged above the piezoelectric layer so as to face at least part of the first electrode with the piezoelectric layer interposed therebetween in the membrane part; anda heater arranged above the piezoelectric layer and separate from the upper electrode.2. The piezoelectric device according to claim 1 , wherein the opening in the substrate is a through hole and the membrane part is provided so as to be superimposed over the through hole.3. The piezoelectric device according to claim 1 , further comprising a protective film that covers the second electrode and the piezoelectric layer.4. The piezoelectric device according to claim 3 , wherein a main material of the protective film is AlN.5. The piezoelectric device according to claim 1 , wherein a main material of the piezoelectric layer is AlN.6. The piezoelectric device according to claim 1 , further ...

USING PIEZOELECTRIC ELECTRODES AS ACTIVE SURFACES FOR ELECTROPLATING PROCESS

Microelectromechanical systems (MEMS) mesh-membrane nebulizers are described. The MEMS mesh-membrane nebulizers may include a piezoelectric MEMS mesh membrane. The piezoelectric MEMS mesh membrane may include a piezoelectric active layer patterned with openings for making droplets. One electrode of the piezoelectric MEMS mesh membrane may serve as an electrode for electroplating. Activation of the piezoelectric MEMS mesh membrane may generate droplets suitable for delivery of medicines or other uses. 1. A microelectromechanical systems (MEMS) mesh membrane nebulizer , comprising:a thin film piezoelectric active layer comprising a plurality of openings;first and second electrodes on opposite sides of the thin film piezoelectric active layer; anda metal layer on the second electrode having a thickness greater than the second electrode.2. The MEMS mesh membrane nebulizer of claim 1 , wherein the thin film piezoelectric active layer comprises Aluminum Nitride (AlN).3. The MEMS mesh membrane nebulizer of claim 1 , wherein the metal layer has a thickness in a range of 40 μm-100 μm.4. The MEMS mesh membrane nebulizer of claim 1 , wherein at least some of the plurality of openings have a diameter in the range of 1-6 μm.5. A microelectromechanical systems (MEMS) nebulizer device claim 1 , comprising:a piezoelectric layer comprising a plurality of openings;a first electrode on the piezoelectric layer; anda metal layer on the first electrode.6. The MEMS nebulizer device of claim 5 , wherein the piezoelectric layer comprises a thin film Aluminum Nitride (AlN) layer.7. The MEMS nebulizer device of claim 5 , wherein the metal layer has a thickness in a range of 40 μm-100 μm.8. The MEMS nebulizer device of claim 5 , wherein the metal layer has a thickness greater than the first electrode.9. The MEMS nebulizer device of claim 5 , wherein the metal layer has a thickness greater than a combined thickness of the piezoelectric layer and the first electrode.10. The MEMS nebulizer device ...

MULTIFUNCTION MAGNETIC AND PIEZORESISTIVE MEMS PRESSURE SENSOR

Aspects of the subject technology relate to an apparatus including a housing, one or more piezoresistive elements and a magnetic actuator. The housing includes a membrane, and the piezoresistive elements are disposed on the membrane to sense a displacement due to a deflection of the membrane. The magnetic actuator is disposed inside a cavity of the housing. The magnetic actuator exerts a repulsive force onto the membrane to reduce the deflection of the membrane. 1. An apparatus comprising:a housing including a membrane;one or more piezoresistive elements disposed on the membrane and configured to sense a displacement due to a deflection of the membrane; anda magnetic actuator disposed inside a cavity of the housing, wherein:the magnetic actuator is configured to exert a repulsive force onto the membrane to reduce the deflection of the membrane.2. The apparatus of claim 1 , wherein the one or more piezoresistive elements are configured to sense an ambient pressure.3. The apparatus of claim 2 , wherein the magnetic actuator comprises a pair of planar magnetic coils claim 2 , wherein a first coil and a second coil of the pair of planar magnetic coils are attached to an internal surface of the membrane and an internal surface of the cavity opposite from the membrane claim 2 , respectively.4. The apparatus of claim 3 , wherein the magnetic actuator is further configured to measure an ambient pressure by sensing a change of mutual induction of the pair of planar magnetic coils due to the deflection of the membrane.5. The apparatus of claim 1 , wherein the magnetic actuator is further configured to extend a range of pressure measurement by reducing the deflection of the membrane and preventing deflection saturation of the membrane.6. The apparatus of claim 1 , wherein the magnetic actuator and the one or more piezoresistive elements are configured to enable detection of presence of a contaminant by sensing a change in a damping parameter of the membrane due to a mass of ...

LIQUID DISCHARGE HEAD, LIQUID DISCHARGE APPARATUS, PIEZOELECTRIC DEVICE, AND ULTRASONIC SENSOR

A liquid discharge head includes a pressure chamber that accommodates a liquid, a diaphragm that forms a wall surface of the pressure chamber, and a piezoelectric element that is provided on an opposite side of the pressure chamber with the diaphragm interposed between the piezoelectric element and the pressure chamber and vibrates the diaphragm. The diaphragm includes a silicon oxynitride layer formed with including silicon oxynitride. 1. A liquid discharge head comprising:a pressure chamber that accommodates a liquid;a diaphragm that forms a wall surface of the pressure chamber; anda piezoelectric element that is provided on an opposite side of the pressure chamber with the diaphragm interposed between the piezoelectric element and the pressure chamber and vibrates the diaphragm,wherein the diaphragm includes a silicon oxynitride layer formed with including silicon oxynitride.2. The liquid discharge head according to claim 1 ,wherein the diaphragm includes a silicon nitride layer which is formed of silicon nitride and is stacked on the silicon oxynitride layer.3. The liquid discharge head according to claim 2 ,wherein the silicon oxynitride layer is stacked between a polysilicon layer formed by polysilicon and the silicon nitride layer.4. The liquid discharge head according to claim 1 ,wherein the diaphragm includes an adhesive layer positioned on an outermost layer on the piezoelectric element side, andthe adhesive layer is formed on a surface of the silicon oxynitride layer which is formed with including the silicon oxynitride and is provided in the diaphragm.5. The liquid discharge head according to claim 1 ,wherein the piezoelectric element is formed on a surface of the silicon oxynitride layer which is formed with including the silicon oxynitride and is provided in the diaphragm.6. The liquid discharge head according to claim 1 ,{'sup': −6', '−6, 'wherein a linear expansion coefficient of the silicon oxynitride layer is from 1.0×10/K to 2.0×10/K.'}7. The ...

Piezoelectric Device, Liquid Ejection Head, And Printer

A piezoelectric device includes: a first electrode provided above a substrate; a piezoelectric layer provided above the first electrode; and a second electrode provided above the piezoelectric layer. The piezoelectric layer includes a plurality of layers that includes a composite oxide of a Perovskite structure containing potassium, sodium, and niobium. The piezoelectric layer has a first region and a second region in a μm× μm region of a plane perpendicular to a thickness direction of the piezoelectric layer. The first region is a region in which the ratio of an atomic concentration (atm %) of potassium with respect to the sum of the atomic concentration (atm %) of potassium and an atomic concentration (atm %) of sodium is to 0.45, and the second region is a region in which the ratio is 0.55 to 0.75. 1. A piezoelectric device comprising:a first electrode provided above a substrate;a piezoelectric layer provided above the first electrode; anda second electrode provided above the piezoelectric layer,the piezoelectric layer including a plurality of layers that includes a composite oxide of a Perovskite structure containing potassium, sodium, and niobium,the piezoelectric layer having a first region and a second region in a 3 μm×3 μm region of a plane perpendicular to a thickness direction of the piezoelectric layer, wherein the first region is a region in which a ratio of an atomic concentration (atm %) of potassium with respect to a sum of the atomic concentration (atm %) of potassium and an atomic concentration (atm %) of sodium is 0.30 to 0.45, and the second region is a region in which the ratio is 0.55 to 0.75.2. The piezoelectric device according to claim 1 , wherein the second region has an area ratio of 0.50 to 0.60 with respect to an area of the 3 μm×3 μm region.3. The piezoelectric device according to claim 1 , wherein the piezoelectric layer has a plurality of crystal grains claim 1 , and the plurality of crystal grains has an average particle size of 1 μm ...

ACOUSTIC TRANSDUCER AND RELATED FABRICATION AND PACKAGING TECHNIQUES

An acoustic transducer includes a first flexible structure having a top surface and a bottom surface. A transducer is attached to the top surface of the first flexible structure, wherein the transducer causes deformation of the first flexible structure when an input electrical signal is applied to the transducer. A second flexible structure has a convex top surface and a concave bottom surface. The convex top surface of the second flexible structure is in contact with the bottom surface of the first flexible structure. Deformation of the first flexible structure causes deformation of the second flexible structure. 1. An acoustic transducer , comprising:a first flexible structure having a top surface and a bottom surface;a transducer attached to the top surface of the first flexible structure, wherein the transducer causes deformation of the first flexible structure when an input electrical signal is applied to the transducer; anda second flexible structure having a convex top surface and a concave bottom surface, the convex top surface of the second flexible structure being in contact with the bottom surface of the first flexible structure;wherein deformation of the first flexible structure causes deformation of the second flexible structure.2. The acoustic transducer according to claim 1 , wherein the concave bottom surface of the second flexible structure is fluidically connected to an ambient environment.3. The acoustic transducer according to claim 1 , wherein the concave bottom surface of the second flexible structure pushes air away during deformation of the second flexible structure.4. The acoustic transducer according to claim 1 , wherein the second flexible structure comprisesa first layer, the first layer including a first material, the first material having a first thermal expansion coefficient;a second layer, the second layer including a second material, the second material having a second thermal expansion coefficient;wherein the first thermal expansion ...

SPEAKER APPARATUS

A speaker including a case, a display configured to display an image, at least one vibrating element configured to actuate the display to move the display relative to the case to generate acoustic waves, a gasket interfacing the case and the display, and a transceiver located within a speaker internal 123-. (canceled)24. A method comprising:providing a case;providing a display assembly;connecting a chassis to a display support via a flexible gasket, the chassis being located to form an air gap between the chassis and the display support;sealing a space between the case and the display assembly and the display support with the flexible gasket, and allowing the display assembly and the display support to move with respect to the case;providing at least one vibrating element configured to actuate the display assembly to move the display assembly relative to the case to generate acoustic waves;providing a transceiver located within an internal volume of a speaker; andproviding at least one hole in the case permitting equalization of the internal and external pressure of the speaker.25. The method as claimed in claim 24 , wherein the at least one vibrating element comprises at least one piezo actuator.26. The method as claimed in claim 24 , wherein the flexible gasket comprises a suspension part coupled at one end to the case and at another end to the display assembly claim 24 , wherein the suspension part is configured to suspend the display assembly relative to the case by the bending force of the suspension part.27. The method as claimed in claim 26 , wherein the suspension part is a resilient folded surface claim 26 , configured to suspend the display assembly relative to the case by the bending force of the resilient folded surface.28. The method as claimed in wherein the flexible gasket comprises at least one of:a first support part configured to lock the flexible gasket position within the speaker so as to provide a fixed suspension in the direction of movement of ...

METHOD FOR ELECTROHYDRODYNAMIC JET PRINTING CURVED PIEZOELECTRIC CERAMICS

The present invention provides a method for electrohydrodynamic jet printing curved piezoelectric ceramics. First, a stable pressure is provided for a piezoelectric ceramic slurry to ensure that the slurry flows out from a nozzle at a fixed flow rate, and at the same time, an electric field is applied to the piezoelectric ceramic slurry at the nozzle to form a stable fine jet; then a curved substrate is fixed on a fixture of a curved substrate six-axis linkage module to ensure that the curved substrate is always perpendicular to the jet of the nozzle and keeps a constant distance from the nozzle during a printing process; fine jet drop on demand is realized through cooperative control of the changes of the curved substrate six-axis linkage module, the electric field and a flow field, and electrohydrodynamic jet printing and molding of curved piezoelectric ceramics is finally realized. 1. A method for electrohydrodynamic jet printing curved piezoelectric ceramics , wherein a curved piezoelectric ceramics electrohydrodynamic jet printing and forming device comprising an electrohydrodynamic jet piezoelectric ceramic module and a curved substrate six-axis linkage module is used to realize the printing of curved piezoelectric ceramics; first , a stable pressure is provided by the electrohydrodynamic jet piezoelectric ceramic module for a piezoelectric ceramic slurry to ensure that the piezoelectric ceramic slurry flows out from a nozzle at a fixed flow rate , and at the same time , an electric field is applied to the piezoelectric ceramic slurry at the nozzle to form a fine jet; then a curved substrate is fixed on a replaceable fixture of the curved substrate six-axis linkage module to ensure that the curved substrate is always perpendicular to the fine jet and keeps a constant distance from the nozzle during a printing process; fine jet drop on demand is realized through cooperative control of the changes of the curved substrate six-axis linkage module , the electric ...

ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, LIQUID DISCHARGE APPARATUS, AND METHOD OF MAKING ELECTROMECHANICAL TRANSDUCER ELEMENT

An electromechanical transducer element includes a first electrode on a diaphragm, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film has a stacking structure. The electromechanical transducer film has a linear tapered shape that narrows from a first side facing the first electrode to a second side facing the second electrode in a cross section along a stacking direction. 1. An electromechanical transducer element , comprising:a first electrode on a diaphragm;an electromechanical transducer film on the first electrode; anda second electrode on the electromechanical transducer film,the electromechanical transducer film having a stacking structure,the electromechanical transducer film having a linear tapered shape that narrows from a first side facing the first electrode to a second side facing the second electrode in a cross section along a stacking direction.2. The electromechanical transducer element according to claim 1 ,wherein, when a region in which a diaphragm vibrates is defined as a vibration region, a length of the electromechanical transducer film in a surface direction on the first side facing the first electrode is equal to or less than a length in the surface direction in the vibration region of the diaphragm, in the cross section along the stacking direction.3. The electromechanical transducer element according to claim 1 ,wherein, when a region in which a diaphragm vibrates is defined as a vibration region, the electromechanical transducer film has a maximum thickness at a center position of a length in a surface direction in the vibration region of the diaphragm, in the cross section along the stacking direction.4. The electromechanical transducer element according to claim 1 ,wherein, when a region in which the diaphragm vibrates is defined as a vibration region, a center position of a length in a surface direction in a portion of the ...

LAYERED STRUCTURE AND METHOD FOR FABRICATING SAME

Methods and techniques for fabricating layered structures, such as capacitive micromachined ultrasound transducers, as well as the structures themselves. The layered structure has a membrane that includes a polymer-based layer and a top electrode on the polymer-based layer. The membrane is suspended over a closed cavity and may be actuated by applying a voltage between the top electrode and a bottom electrode that may be positioned along or be a bottom of the closed cavity. The layered structure may be fabricated using a wafer bonding process. 1. A layered structure , comprising:(a) a substrate assembly that functions as a bottom electrode;(b) a first polymer-based layer suspended above a closed cavity, wherein the closed cavity is between the first polymer-based layer and the substrate assembly;(c) a second polymer-based layer placed on the first polymer-based layer, wherein a portion of the second polymer-based layer that is on the first polymer-based layer is thicker than the first polymer-based layer; and(d) a top electrode between the first and second polymer-based layers.2. The structure of claim 1 , wherein the top electrode is embedded within the first and second polymer-based layers.3. The structure of claim 1 , wherein the portion of the second polymer-based layer that is on the first polymer-based layer is at least five times thicker than the first polymer-based layer.4. The structure of claim 1 , wherein the cavity has a height selected such that an operating voltage of the structure is no more than 50 Volts.5. The structure of claim 1 , wherein the cavity has a height of no more than 0.3 μm.6. The structure of claim 1 , wherein the cavity is watertight.7. The structure of claim 1 , wherein the substrate assembly comprises a conductive substrate.8. The structure of claim 1 , wherein the substrate assembly comprises a non-conductive substrate and a conductive bottom electrode on the substrate.9. The structure of claim 1 , wherein the substrate assembly ...

PIEZOELECTRIC DEVICE AND AN APPARATUS

A piezoelectric device comprises at least one element comprising at least one sheet of piezoelectric material. The element is mounted on a circuit board comprising at least one conductive layer having at least one opening. The element is located on the opening and supported by edges of the opening in such a manner that the opening extends laterally beyond the area of the sheet of piezoelectric material. The element is sandwiched between an overlay and the circuit board in such a manner that vibrations of the sheet of piezoelectric material are sufficient to cause vibration of the overlay. 15060705854. A piezoelectric device ( , , ) that comprises at least one element () that comprises at least one sheet () of piezoelectric material defining an area , characterized in that:{'b': 58', '30', '78', '51', '701', '702', '703', '704', '35', '37', '81', '82', '51', '701', '702', '703', '704, 'the element () has been mounted or placed on a circuit board (, ) comprising at least one conductive layer (; , , , ) with at least one opening (, ; , ) in the conductive layer (; , , , );'}{'b': 58', '35', '37', '81', '82', '35', '37', '81', '82', '35', '37', '81', '82', '54, 'the element () being located on the opening (, ; , ) and supported by edges of said at least one opening (, ; , ), in such a manner that the opening (, ; , ) extends laterally beyond the area of the sheet () of piezoelectric material; and'}{'b': 58', '503', '30', '78', '54', '503, 'the element () is sandwiched between an overlay () and the circuit board (, ) in such a manner that vibrations of the sheet () of piezoelectric material are sufficient to cause tactile vibration of the overlay ().'}250607090353781825170235378182355835. The piezoelectric device ( claim 1 , claim 1 , claim 1 , ) according to claim 1 , wherein: said at least one opening ( claim 1 , ; claim 1 , ) in the conductive layer (; ) comprises a circular part () and at least one extension (; claim 1 , ) to the circular part (); and wherein the ...

LIQUID EJECTION APPARATUS AND METHOD FOR MANUFACTURING LIQUID EJECTION APPARATUS

A liquid ejection apparatus is disclosed. One apparatus includes a piezoelectric element. The piezoelectric element includes an upper electrode and a lower electrode. The lower electrode has a partial overlapping portion and a non-overlapping portion. The partial overlapping portion at least partially overlaps the pressure chamber. The partial overlapping portion of the lower electrode has two ends in the transverse direction. The upper electrode has two ends in the transverse direction. A distance from the center of the pressure chamber in the transverse direction to one of the two ends of the upper electrode in the transverse direction is smaller than a distance from the center of the pressure chamber in the transverse direction to a corresponding one of the two ends of the partial overlapping portion in the transverse direction. 1. A liquid ejection apparatus comprising:a pressure chamber;a piezoelectric element corresponding to the pressure chamber, the piezoelectric element comprising a first electrode, a piezoelectric film and a second electrode, the first electrode, the piezoelectric film and the second electrode being stacked in a stacked direction, the first electrode being between the pressure chamber and the second electrode in the stacked direction;a common trace connecting to the second electrode and an electrode of another piezoelectric element; andwherein a maximum width of the first electrode in a direction orthogonal to the stacked direction and parallel to a shortest virtual line connecting the pressure chamber to a closest adjacent pressure chamber of the liquid ejection apparatus is greater than a maximum width of the second electrode in the direction.2. The liquid ejection apparatus according to claim 1 ,wherein a maximum width of the piezoelectric film in the direction is greater than the maximum width of the second electrode in the direction.3. The liquid ejection apparatus according to claim 1 ,wherein the piezoelectric film has a first ...

Piezoelectric Actuator

There is provided piezoelectric actuator including: vibration plate; first and second piezoelectric layers; a plurality of individual electrodes arranged on actuator surface, of the second piezoelectric layer, on first side in first direction of the second piezoelectric layer; first and second common electrodes; first surface electrode arranged on the actuator surface at an end portion in second direction orthogonal to the first direction; second surface electrode arranged on the actuator surface; and non-conductive electrodes arranged at end portions in the second direction of at least two of the actuator surface, and the first and second boundary surfaces, and which are not in conduction with any of the individual electrodes, and the first and second common electrodes. The non-conductive electrodes are arranged at least in an area of an end portion in the second direction of a stack of the vibration plate, and the first and second piezoelectric layers. 1. A piezoelectric actuator comprising:a vibration plate having insulation performance at least on a first surface, of the vibration plate, disposed on a first side in a first direction of the vibration plate;a first piezoelectric layer arranged on the first surface of the vibration plate;a second piezoelectric layer arranged on a first surface, of the first piezoelectric layer, disposed on the first side in the first direction of the first piezoelectric layer;a plurality of individual electrodes arranged on an actuator surface, of the second piezoelectric layer, disposed on the first side in the first direction of the second piezoelectric layer;a first common electrode which is arranged on a first boundary surface between the vibration plate and the first piezoelectric layer and which is common to the plurality of individual electrodes;a second common electrode which is arranged on a second boundary surface between the first piezoelectric layer and the second piezoelectric layer and which is common to the plurality ...

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, ULTRASONIC PROBE, ULTRASONIC DEVICE, ELECTRONIC APPARATUS, LIQUID JET HEAD, AND LIQUID JET DEVICE

A piezoelectric element includes a piezoelectric element main body as a laminated body of a first electrode layer, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer, and a metal layer disposed on the second electrode layer via an insulating layer, the piezoelectric layer extends from an inner side of at least a part of an overlapping part of an outer peripheral edge of the second electrode layer overlapping an outer peripheral edge of the piezoelectric element main body to an outer side, and the metal layer and the insulating layer extend from an inner side of at least a part of the overlapping part to an outer side to overlap the piezoelectric layer on an outer side of an outer peripheral edge of the second electrode layer. 1. A piezoelectric element comprising:a piezoelectric element main body having a first electrode layer, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer; anda metal layer disposed on the second electrode layer via an insulating layer,wherein the piezoelectric layer has an extending part extending from the piezoelectric element main body beyond an outer peripheral edge of the second electrode layer in a plan view, andthe metal layer and the insulating layer are disposed from the second electrode layer to the extending part of the piezoelectric element main body in the plan view.2. The piezoelectric element according to claim 1 , whereinthe metal layer is formed of at least one of Pt, Ir, Ti, Zr, Au, Ni, NiCr, and TiW.3. The piezoelectric element according to claim 1 , wherein{'sub': 2', '3', 'x', 'x', '2, 'the insulating layer is formed of at least one of AlO, TaO, HfO, and SiO.'}4. An electronic apparatus comprising:a piezoelectric element main body having a first electrode layer, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the ...

PIEZOELECTRIC ELEMENT, ACTUATOR, AND LIQUID DROPLET EJECTION HEAD

A piezoelectric element includes a lower electrode, an upper electrode, and a piezoelectric layer disposed between the lower and upper electrodes. The piezoelectric layer contains (niobium, manganese)-doped lead zirconate titanate. In the (niobium, manganese)-doped lead zirconate titanate, a ratio of the number of moles of niobium to a total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 10% and is not more than 25%. The ratio of the number of moles of manganese to the total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 0.3% and is not more than 1.2%. This piezoelectric element decreases an internal electric field therein. 1. A piezoelectric element comprising:a lower electrode;an upper electrode; anda piezoelectric layer disposed between the lower electrode and the upper electrode,wherein the piezoelectric layer contains (niobium, manganese)-doped lead zirconate titanate,wherein, in the (niobium, manganese)-doped lead zirconate titanate, a ratio of the number of moles of niobium to a total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 10% and is not more than 25%, andwherein a ratio of the number of moles of manganese to the total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 0.3% and is not more than 1.2%.2. The piezoelectric element of claim 1 , wherein the ratio of the number of moles of manganese to the total of the number of moles of niobium claim 1 , manganese claim 1 , zirconium claim 1 , and titanium is not less than 0.5%.3. An actuator comprising:a substrate; anda piezoelectric element disposed on the substrate, a lower electrode;', 'an upper electrode; and', 'a piezoelectric layer disposed between the lower electrode and the upper electrode,, 'wherein the piezoelectric element includeswherein the piezoelectric layer contains (niobium, manganese)-doped lead zirconate titanate,wherein, in the ( ...

MOBILE PHONE AND OTHER COMPUTE DEVICE COOLING ARCHITECTURE

A system for cooling a mobile phone and method for using the system are described. The system includes an active piezoelectric cooling system, a controller and an interface. The active piezoelectric cooling system is configured to be disposed in a rear portion of the mobile phone distal from a front screen of the mobile phone. The controller is configured to activate the active piezoelectric cooling system in response to heat generated by heat-generating structures of the mobile phone. The interface is configured to receive power from a mobile phone power source when the active piezoelectric cooling system is activated.

FLUID CONTROL DEVICE

A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other. 1. A fluid control device comprising:a first main plate having a first principal surface and a second principal surface;a second main plate having a third principal surface, a fourth principal surface, and a first aperture that connects the third principal surface and the fourth principal surface, the second main plate being disposed such that the third principal surface faces the first principal surface of the first main plate;a side wall member that is substantially annular and connected to an outer edge of the third principal surface of the second main plate;a driving body provided on the first main plate and configured to vibrate the first main plate;a first frame disposed outside an outer peripheral end of the first main plate;first connecting portions that connect the first main plate and the first frame;second apertures, each of which is formed between adjacent ones of the first connecting portions and connects the first principal surface and the second principal surface;a second frame disposed outside an outer peripheral end of the first frame;a pump chamber between the second main plate, the second frame, and the side wall member, the pump chamber communicating with the ...

VIBRATOR OF VIBRATORY DRIVE UNIT, VIBRATORY DRIVE UNIT, INTERCHANGEABLE LENS, IMAGING DEVICE, AND AUTOMATIC STAGE

A vibrator including an electro-mechanical transducer and an elastic body that is fixed to the electro-mechanical transducer and that is provided with a projection, the projection having a hollow structure. The projection includes a contact portion having a first surface at a tip, the first surface being parallel to a first plane, a wall portion projecting towards an opposite side with respect to the electro-mechanical transducer, and a connection portion connecting the wall portion and the contact portion to each other. The connection portion having a spring property, and the contact portion includes a portion of which a cross-sectional area in a second plane that is parallel to the first plane increases as an increase of a distance between the portion and the first surface. 1. A vibrator of a vibratory drive unit , comprising:an electro-mechanical transducer; andan elastic body that is fixed to the electro-mechanical transducer and that is provided with a projection having a hollow structure, a contact portion having a first surface at a tip, the first surface being parallel to a first plane;', 'a wall portion projecting towards an opposite side with respect to the electro-mechanical transducer; and', 'a connection portion connecting the wall portion and the contact portion to each other, the connection portion having a spring property, and, 'wherein the projection includeswherein the contact portion includes a portion of which a cross-sectional area in a second plane that is parallel to the first plane increases as a distance between the portion and the first surface increases.2. The vibrator according to claim 1 , whereina cross-sectional shape of the contact portion in a third plane that is perpendicular to the first plane has a substantially trapezoid shape.3. The vibrator according to claim 1 , whereinthe hollow structure of the projection is formed in a cylindrical shape.4. The vibrator according to claim 3 , whereina change in a spring stiffness of the ...

EJECTOR DEVICES, METHODS, DRIVERS, AND CIRCUITS THEREFOR

In a piezoelectric ejector assembly, a piezoelectric actuator is attached to an ejector mechanism, while a drive signal generator and a controller are coupled to the actuator. The drive signal generator is configured to generate a drive signal for driving the actuator to oscillate the ejector assembly. The controller is configured to control the drive signal generator to drive the actuator at a resonant frequency of the ejector assembly, and an auto-tuning circuit is provided to define the optimum drive signal frequency. 119-. (canceled)20. A system comprising:a droplet ejector assembly including a piezoelectric actuator coupled to a droplet generator plate having a plurality of openings therethrough, the droplet generator plate defining a fluid-filled droplet generator plate when the openings are filled with fluid;a drive signal generator electrically coupled to the piezoelectric actuator, the drive signal generator being configured to generate a drive signal for driving the piezoelectric actuator, anda controller electrically coupled to the actuator and the drive signal generator, wherein the controller is configured to control the drive signal to drive the piezoelectric actuator at a resonance frequency of the droplet generator assembly;wherein the controller is configured to determine the resonance frequency based on a decay signal from the piezoelectric actuator.21. (canceled)22. The system of claim 20 , wherein the controller includes a capacitor and an ADC to determine a time-energy product (TEP) of the decay signal.23. The system of claim 20 , wherein the controller comprises a resonant measurement and control circuit configured to determine the resonance frequency of the piezoelectric ejector by controlling the drive signal generator to produce a set of frequency signals across a range of frequencies and monitoring the effect on the decay signal.24. The system of claim 23 , wherein the each frequency signal is repeated multiple times and the resultant TEP ...

ACTUATOR DEVICE BASED ON AN ELECTROACTIVE MATERIAL

An actuator device has an ionic electroactive material actuator unit includes a unitary membrane with first and second actuation electrodes on the unitary membrane. A DC drive signal is applied between the actuation electrodes to cause migration of charges from one part of the unitary membrane towards another part of the unitary membrane. In addition, a pair of closely spaced measurement electrodes is provided on the first surface of the unitary membrane. In particular, the measurement electrodes are spaced apart by a spacing which is less than ten times the thickness of the unitary membrane at a location between the measurement electrodes. A local surface-effect impedance change is used as the basis of a signal measurement, for providing feedback relating to the state of actuation of the device. 1. An actuator device comprising:an ionic electroactive material actuator unit comprising a unitary membrane, with first and second actuation electrodes on the unitary membrane for receiving a DC drive signal to cause migration of charges from one part of the unitary membrane towards another part of the unitary membrane; anda pair of measurement electrodes on a first surface of the unitary membrane for measurement of an impedance of the unitary membrane between the measurement electrodes, the impedance representing an actuation level of the actuator device, wherein the measurement electrodes are spaced apart by a spacing which is less than ten times the thickness of the unitary membrane at a location between the measurement electrodes.2. The actuator device as claimed in claim 1 , wherein the spacing is less than five times claim 1 , less than two times claim 1 , or less than one times the thickness of the unitary membrane at a location between the measurement electrodes.3. The actuator device as claimed in claim 1 , wherein the first and second actuation electrodes are on opposite first and second surfaces claim 1 , respectively claim 1 , of the unitary membrane.4. The ...

PIEZOELECTRIC CERAMIC COMPOSITION AND PIEZOELECTRIC ACTUATOR

In a piezoelectric ceramic composition including potassium sodium niobate, a transition temperature at which a phase transition between an orthorhombic crystal structure and a tetragonal crystal structure occurs lies in a temperature range of −20° C. or higher and 60° C. or lower. In the piezoelectric ceramic composition, αt/αO is 0.72 or more, where αO represents a coefficient of linear expansion determined when a crystal structure is orthorhombic in the temperature range, and αt represents a coefficient of linear expansion determined when a crystal structure is tetragonal in the temperature range. 1. A piezoelectric ceramic composition comprising:potassium sodium niobate,wherein a transition temperature at which a phase transition between an orthorhombic crystal structure and a tetragonal crystal structure occurs lies in a temperature range of −20° C. or higher and 60° C. or lower, andαt/αO is 0.72 or more,where αO represents a coefficient of linear expansion determined when a crystal structure is orthorhombic in the temperature range, and αt represents a coefficient of linear expansion determined when a crystal structure is tetragonal in the temperature range.2. The piezoelectric ceramic composition according to claim 1 ,wherein αt/αO is more than 0.85.3. The piezoelectric ceramic composition according to claim 1 , being represented by a composition formula ABO claim 1 , K, Na, and Li that account for 90% or more of an amount of A-site elements,', 'Nb, Ta, and Sb that account for 90% or more of an amount of B-site elements,', 'Ag at an A-site, and', 'Fe at a B-site., 'wherein the piezoelectric ceramic composition comprises'}4. The piezoelectric ceramic composition according to claim 3 , being represented by a composition formula{'br': None, 'sub': 1-u-v', 'u', 'v', '1-w-α', 'w', 'α', 'x', '1-y-z', 'y', 'z', '1-β-γ-δ', 'β', 'γ', 'δ', '3, '{(KNaLi)AgA1}{(NbTaSb)B1B2Fe}O'}wherein A1 is Bi, La, Ce, Nd, or Sm or a combination thereof,B1 is Zn, Mg, Yb, Fe, Cu, Co, or ...

CONTROL METHOD OF FLUID DEVICE

The present disclosure provides a control method of a fluid device. The control method includes the steps of (a) providing the fluid device, which includes a plurality of flow guiding units manufactured by a micro-electro-mechanical-system process; (b) dividing the flow guiding units into a plurality of groups, which are electrically connected to and controlled by a control module; and (c) generating a driving signal by the control module for a corresponding one of the groups, wherein the control module generates a high level signal to a specific one of the groups, so that the flow guiding units of the specific one of the groups are driven to transport fluid, and thereby controlling the fluid device to discharge a specific amount of fluid. 1. A control method of a fluid device , comprising steps of:(a) providing the fluid device, which is integrally manufactured by a micro-electro-mechanical-system process, wherein a plurality of flow guiding units are manufactured by the micro-electro-mechanical-system process and are connected to each other so as to integrally form the fluid device;(b) dividing the flow guiding units into a plurality of groups so as to be controlled group by group, wherein the groups are electrically connected to a control module, and wherein any two adjacent ones of the flow guiding units are controlled to be driven asynchronously; and(c) generating a driving signal by the control module for a corresponding one of the groups, wherein the control module generates a high level signal to a specific one of the groups, so that the flow guiding units of the specific one of the groups are driven to transport fluid, and thereby controlling the fluid device to discharge a specific amount of fluid.2. The control method of the fluid device according to claim 1 , wherein each of the flow guiding units includes:an inlet plate having at least one inlet aperture;a substrate;a resonance membrane being a suspension structure manufactured by a surface ...

COMPOSITE SUBSTRATE FOR PREVENTING BONDING FAILURE BETWEEN SUBSTRATES

A composite substrate has: a first substrate having a first bump protruding therefrom; and a second substrate having a first surface in contact with the first bump, and a second surface opposite to the first surface, the second surface having a second bump protruding therefrom, the second substrate being laminated on the first substrate in a thickness direction perpendicular to the first surface. The first bump and the second bump are partially overlapped with each other as viewed in the thickness direction. The second bump has a rigidity which is lower than a rigidity of the first bump. 1. A composite substrate comprising:a first substrate having a first bump protruding therefrom; anda second substrate having a first surface in contact with the first bump, and a second surface opposite to the first surface, the second surface having a second bump protruding therefrom, the second substrate being laminated on the first substrate in a thickness direction perpendicular to the first surface; whereinthe first bump and the second bump are partially overlapped with each other as viewed in the thickness direction, the second bump has a rigidity which is lower than a rigidity of the first bump.2. The composite substrate according to claim 1 , wherein the second substrate further comprises an electrically conductive through-electrode extending from the first surface to the second surface in the thickness direction claim 1 , the second bump and the through-electrode being partially overlapped with each other as viewed in the thickness direction.3. The composite substrate according to claim 2 , wherein the second bump comprises a core claim 2 , and an electrically conductive film formed on the core and in contact with the through-electrode.4. The composite substrate according to claim 3 , wherein the core has a center offset from a center of the through-electrode as viewed in the thickness direction.5. The composite substrate according to claim 4 , wherein the second bump ...

PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC DRIVE DEVICE, ROBOT, ELECTRONIC COMPONENT TRANSPORT APPARATUS, AND PRINTER

A piezoelectric actuator includes a vibration portion, a support portion that is integrally configured with the vibration portion and supports the vibration portion, and a piezoelectric element that is disposed on the vibration portion. The piezoelectric element includes a piezoelectric film including columnar crystal grains extending in a thickness direction. When a thickness of the piezoelectric film is referred to as T [μm] and an average diameter of the crystal grains in the width direction is referred to as D [μm], T/D is within a range of 10 to 100. The thickness T of the piezoelectric film is larger than or equal to 2 μm. A standard deviation of diameters of the crystal grains in the width direction is less than or equal to 1.8 μm. 1. A piezoelectric actuator comprising:a vibration portion;a support portion that is integrally configured with the vibration portion and supports the vibration portion; anda piezoelectric element that is disposed on the vibration portion,wherein the piezoelectric element includes a piezoelectric film including columnar crystal grains extending in a thickness direction,wherein, when a thickness of the piezoelectric film is referred to as T [μm] and an average diameter of the crystal grains in the width direction is referred to as D [μm], T/D is within a range of 10 to 100,wherein the thickness T of the piezoelectric film is larger than or equal to 2 μm, andwherein a standard deviation of diameters of the crystal grains in the width direction is less than or equal to 1.8 μm.2. The piezoelectric actuator according to claim 1 ,wherein the piezoelectric film is formed of a material having a perovskite type crystal structure and has a (100) orientation ratio which is larger than or equal to 90%.3. The piezoelectric actuator according to claim 1 ,wherein a dielectric loss of the piezoelectric film is less than or equal to 2%.4. The piezoelectric actuator according to claim 1 ,wherein the thickness T of the piezoelectric film is within a ...

Sonic sensors and packages

Embodiments relate to integrated sonic sensors having a transmitter, a receiver and driver electronics integrated in a single, functional package. In one embodiment, a piezoelectric signal transmitter, a silicon microphone receiver and a controller/amplifier chip are concomitantly integrated in a semiconductor housing. The semiconductor housing, in embodiments, is functional in that at least a portion of the housing can comprise the piezoelectric element of the transmitter, with an inlet aperture opposite the silicon microphone receiver.

METHOD AND LOCALIZED HAPTIC RESPONSE SYSTEM PROVIDED ON AN INTERIOR-FACING SURFACE OF A HOUSING OF AN ELECTRONIC DEVICE

A housing for an electronic device allows a haptic feedback response that is localized to a specific area on a back panel of the housing of the electronic device. For example, a user holding the mobile electronic device may directly receive haptic feedback in his/her fingers that are supporting the back side of the mobile electronic device. Those specific areas on the back panel may be locations where the panel material is thinned, or locations where the panel material has been removed and replaced by a suitably selected membrane material having favorable mechanical properties. The membrane material may be introduced as an embossment of a membrane layer. In addition, a force-sensing resistor type material may be used as a replacement material, so as to sense the pressure of a user's finger pressing on the embossed structure at the specific locations to which EMP actuators are bonded. 1. In a housing of an electronic device , a structure comprising:a portion of the structure that includes a dividing wall separating an interior space within the housing and an exterior space outside of the housing, and a cavity in connection with the interior space, the cavity being separated from the exterior space by the dividing wall; andan electromechanical polymer (EMP) actuator that is positioned within the cavity and in contact with the dividing wall such that when the EMP actuator is activated, a mechanical vibration is initiated in the dividing wall.2. The structure of claim 1 , wherein the dividing wall comprises a thinned portion of the structure.3. The structure of claim 1 , further comprising a membrane lining the cavity claim 1 , wherein the dividing wall is formed by a portion of the membrane.4. The structure of claim 3 , wherein the dividing wall comprises an embossed portion of the membrane.5. The structure of claim 1 , wherein a thickness of the dividing wall determines the magnitude of the mechanical vibration experienced at the dividing wall facing the exterior ...

OIL FEEDER

A pump includes a piezoelectric element that deforms when a drive voltage is applied to it, and a reservoir that has a capacity to store lubricating oil and that is at least partially deformed elastically to change in the capacity when the piezoelectric element deforms. The pump discharges the lubricating oil when the reservoir decreases in the capacity. A drive circuit unit is switchable between an application state where the drive circuit unit applies the drive voltage to the piezoelectric element, and a release state where the drive circuit unit releases the drive voltage applied to the piezoelectric element. A controller controllably switches the drive circuit unit between the application state and the release state. An electric power storage unit stores electric power that is output from the piezoelectric element when the drive voltage applied to the piezoelectric element is released. 1. An oil feeder provided for a rotating device and configured to feed lubricating oil to the rotating device , the oil feeder comprising:a pump including a piezoelectric element and a reservoir, the piezoelectric element deforming when a drive voltage is applied to the piezoelectric element, the reservoir having a capacity to store the lubricating oil, the reservoir being at least partially deformed elastically to change in the capacity when the piezoelectric element deforms, the pump discharging the lubricating oil when the reservoir decreases in the capacity;a drive circuit unit switchable between an application state where the drive circuit unit applies the drive voltage to the piezoelectric element, and a release state where the drive circuit unit releases the drive voltage applied to the piezoelectric element;a controller configured to controllably switch the drive circuit unit between the application state and the release state; andan electric power storage unit configured to store electric power that is output from the piezoelectric element when the drive voltage applied ...

Piezoelectric Element, Liquid Ejection Head, And Printer

A piezoelectric element includes a first electrode provided at a base body, a piezoelectric layer provided at the first electrode and containing a composite oxide that contains potassium, sodium, and niobium and that has a perovskite structure, and a second electrode provided at the piezoelectric layer, wherein the first electrode is a platinum layer, the first electrode is preferentially oriented to (111), and the first electrode has an average crystal grain diameter of 200 nm or more. 1. A piezoelectric element , comprising:a first electrode provided at a base body;a piezoelectric layer provided at the first electrode and containing a composite oxide that contains potassium, sodium, and niobium and that has a perovskite structure; and the first electrode is a platinum layer,', 'the first electrode is preferentially oriented to (111), and', 'the first electrode has an average crystal grain diameter of 200 nm or more., 'a second electrode provided at the piezoelectric layer, wherein'}2. The piezoelectric element according to claim 1 , whereinthe first electrode has a surface roughness Rq of 2.20 nm or more.3. The piezoelectric element according to claim 1 , whereinthe base body includes a zirconium oxide layer, andthe first electrode is provided at the zirconium oxide layer.4. A liquid ejection head claim 1 , comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the piezoelectric element according to ; and'}a nozzle plate provided with a nozzle hole for ejecting a liquid, whereinthe base body includes a flow path forming substrate provided with a pressure generating chamber whose volume is changed by the piezoelectric element, andthe nozzle hole communicates with the pressure generating chamber.5. A printer claim 1 , comprising:{'claim-ref': {'@idref': 'CLM-00004', 'claim 4'}, 'the liquid ejection head according to ;'}a conveyance mechanism for relatively moving a recording medium with respect to the liquid ejection head; anda control unit that controls the ...

Electromechanical Oscillatory System

An oscillatory system comprises: a target member; a transducer coupled to the target member; and circuitry for applying a voltage to the transducer for imparting a vibrational force to the target member. 1. A lens structure system , comprising:a housing;a plurality of lenses supported by an interior of the housing;a terminal lens coupled to an opening of the housing;a single-segment transducer coupled to the housing and to the terminal lens;a photodetector, positioned to receive light through the plurality of lenses and the terminal lens, for generating image signaling in response to the received light; andcircuitry to apply a voltage to the transducer for imparting a vibrational force to the terminal lens.2. The system of claim 1 , wherein imparting the vibrational force comprises imparting standing wave patterns.3. The system of claim 1 , wherein the terminal lens has a resonant frequency within 10 percent of a predetermined frequency claim 1 , and frequency of the vibrational force is the predetermined frequency.4. The system of claim 1 , wherein the transducer has a resonant frequency within 10 percent of a predetermined frequency claim 1 , and frequency of the vibrational force is the predetermined frequency.5. The system of claim 1 , wherein the terminal lens comprises a fisheye lens.6. The system of claim 5 , wherein the terminal lens and the plurality of lenses comprise a focusing lens stack through which the light passes.7. The system of claim 1 , wherein the terminal lens comprises a flat lens.8. The system of claim 1 , wherein the terminal lens has a resonant frequency within 10 percent of a predetermined frequency claim 1 , and the transducer has a resonant frequency within 10 percent of the predetermined frequency.9. The system of claim 8 , wherein frequency of the vibrational force is the predetermined frequency.10. The system of claim 1 , further comprising an adhesive coupling the transducer to the terminal lens.11. The system of claim 1 , wherein ...

TRANSPARENT ULTRASOUND TRANSDUCERS

A transparent ultrasound transducer has a transparent substrate and a transparent transducer structure. The transducer structure has a bottom electrode, a top electrode electrically insulated from the bottom electrode, and an array of acoustically active elements within a separating layer between the top electrode and the bottom electrode. The top electrode and bottom electrode have a conductive transparent material. One or both of the top electrode and the bottom electrode have a composite layer made from the conductive transparent material and a supplemental material that has a greater conductivity of the conductive transparent material. A majority of an area of the composite layer comprises the conductive transparent material. 1. A transparent ultrasound transducer , comprising:a transparent substrate; anda transparent transducer structure comprising a bottom electrode adjacent to the substrate, a top electrode electrically insulated from the bottom electrode, and an array of acoustically active elements within a separating layer between the top electrode and the bottom electrode; the top electrode and the bottom electrode comprising a conductive transparent material;', 'the top electrode, the bottom electrode, or both the top electrode and the bottom electrode comprise a composite layer made from the conductive transparent material and a supplemental material that has a conductivity greater than a conductivity of the conductive transparent material; and', 'a majority of an area of the composite layer comprises the conductive transparent material., 'wherein2. The transparent ultrasound transducer of claim 1 , wherein the supplemental material comprises strips of metal.3. The transparent ultrasound transducer of claim 1 , wherein the supplemental material comprises less than about 30% of the area of the composite layer.4. The transparent ultrasound transducer of claim 1 , having a transparency of at least 70% within a selected range of wavelengths.5. The ...

Transducer, Transducer Array, and Method of Making the Same

A transducer comprising a transducer element including a plate with a through-hole and a collar projecting from the plate and defining an interior cavity in communication with the through-hole. A piezoelectric bender includes at least first and second wafer layers stacked together. The bender is coupled to a peripheral end face of the collar. The first and/or second piezoelectric wafer layers bend at a resonant frequency and generate ultrasonic waves that flow through the collar interior cavity and the plate through-hole and create an in-air pressure pattern and acoustic field at a location spaced from the transducer. A plurality of transducers may be made by providing a monolithic transducer element structure including a plurality of the transducer elements formed thereon, coupling either a plurality of benders or a monolithic bender to the plurality of transducer elements, and then cutting the monolithic transducer element structure to define a plurality of individual transducers. 1. A transducer comprising:a transducer element including a plate defining a through-hole and a collar projecting from the plate and defining an interior cavity in communication with the through-hole; anda piezoelectric bender including at least first and second wafer layers stacked together, the piezoelectric bender being coupled to the transducer element in a relationship with a peripheral end face of the collar abutted against an exterior surface of one of the first and second wafer layers;whereby the first and/or second wafer layers are adapted to bend at a resonant frequency and generate ultrasonic waves flowing through the collar interior cavity and the plate through-hole and create an in-air pressure pattern and in-air acoustic field at a location spaced from the transducer.2. The transducer of claim 1 , wherein the first and second wafer layers are made of different materials.3. The transducer of claim 1 , wherein the first and second wafer layers are both made of a piezoelectric ...

METHOD OF MANUFACTURING AN OSCILLATOR, METHOD OF MANUFACTURING AN OSCILLATORY WAVE DRIVING APPARATUS, AND METHOD OF MANUFACTURING AN OPTICAL APPARATUS

Provided is a method of manufacturing an oscillator, including: arranging an electrode on a piezoelectric ceramics free from being subjected to polarization treatment, to thereby provide a piezoelectric element; bonding the piezoelectric element and a diaphragm to each other at a temperature T; bonding the piezoelectric element and a power supply member to each other at a temperature T; and subjecting the piezoelectric ceramics to polarization treatment at a temperature T, in which the temperature T, the temperature T, and the temperature T satisfy a relationship T>T and a relationship T>T 1. A method of manufacturing an oscillator , comprising , in sequence:arranging an electrode on a piezoelectric ceramics free from being subjected to polarization treatment, to thereby provide a piezoelectric element;{'b': '1', 'bonding the piezoelectric element and an elastic body to each other at a temperature T;'}{'b': '2', 'bonding the piezoelectric element and a power supply member to each other at a temperature T; and'}{'b': '3', 'subjecting the piezoelectric ceramics to polarization treatment at a temperature T,'}{'b': 1', '2', '3', '1', '3', '2', '3, 'wherein the temperature T, the temperature T, and the temperature T satisfy a relationship T>T and a relationship T>T.'}212. The method according to claim 1 , wherein the oscillator comprises a first adhesive portion having a glass transition temperature Tg between the piezoelectric element and the elastic body and a second adhesive portion having a glass transition temperature Tg between the piezoelectric element and the power supply member claim 1 , and{'b': 1', '2', '3', '1', '3', '2', '3, 'wherein the glass transition temperature Tg, the glass transition temperature Tg, and the temperature T satisfy a relationship Tg>T and a relationship Tg>T.'}3123123. The method of according to claim 1 , wherein the temperature T claim 1 , the temperature T claim 1 , and the temperature T satisfy a relationship T>T>T.41. The method ...

METHOD OF MANUFACTURING AN INKJET PRINT HEAD AND AN INKJET PRINT HEAD WITH INDUCED CRYSTAL PHASE CHANGE ACTUATION

A method for manufacturing an inkjet print head includes determining a misfit strain—electric field crystal phase relation for at least one composition of a piezoelectric material; selecting a misfit strain value and a composition of the piezoelectric material based on the determined misfit strain—electric field crystal phase relation for said at least one composition; and based on the selected misfit strain and the selected composition of the piezoelectric material, forming a base layer and an actuator stack on the base layer, the actuator stack including the piezoelectric material, wherein the base layer and the actuator stack have predetermined properties providing the selected misfit strain value and the selected composition. Thus, an inkjet print head having a piezoelectric actuator that is operated on the basis of a crystal phase change is reliably manufacturable. 1. A method for manufacturing an inkjet print head , wherein the method comprises the steps of:determining a misfit strain—electric field crystal phase relation for at least one composition of a piezoelectric material;selecting a misfit strain value and a composition of the piezoelectric material based on the determined misfit strain—electric field crystal phase relation for said at least one composition such that, with a predetermined change in electric field, a crystal phase change in the piezoelectric material is induced; andbased on the selected misfit strain value and the selected composition of the piezoelectric material, forming a base layer and an actuator stack on the base layer, the actuator stack comprising the piezoelectric material, wherein the base layer and the actuator stack have predetermined properties providing the selected misfit strain value and the selected composition of the piezoelectric material.2. The method according to claim 1 , wherein the step of selecting comprises selecting from the misfit strain—electric field crystal phase relation a misfit strain value and a related ...

PIEZOELECTRIC MEMS-BASED ACTIVE COOLING FOR HEAT DISSIPATION IN COMPUTE DEVICES

An active cooling system and method for using the active cooling system are described. The active cooling system includes a cooling element having a first side and a second side. The first side of the cooling element is distal to a heat-generating structure and in communication with a fluid. The second side of the cooling element is proximal to the heat-generating structure. The cooling element is configured to direct the fluid using a vibrational motion from the first side of the cooling element to the second side such that the fluid moves in a direction that is incident on a surface of the heat-generating structure at a substantially perpendicular angle and then is deflected to move along the surface of the heat-generating structure to extract heat from the heat-generating structure. 1. An active cooling system comprising:a first side of a cooling element, the first side being distal to a heat-generating structure and in communication with a fluid; anda second side of the cooling element, the second side being proximal to the heat-generating structure, the cooling element being configured to direct the fluid from the first side to the second side using vibrational motion such that the fluid moves in a direction that is incident on a surface of the heat-generating structure to extract heat from the heat-generating structure.2. The active cooling system of claim 1 , further comprising:an orifice plate having at least one orifice therein, the orifice plate being disposed between the cooling element and the heat-generating structure, each of the at least one orifice having an axis oriented at an angle from a normal to the surface of the heat-generating structure, the angle being selected from substantially zero degrees and a nonzero acute angle.3. The active cooling system of claim 2 , wherein the cooling element includes an entry path for the fluid from the first to the second side.4. The active cooling system of claim 2 , wherein the orifice plate is at least fifty ...

PIEZOELECTRIC DEVICE

A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary. 1. A piezoelectric device comprising:a base portion; anda membrane portion that is indirectly supported by the base portion, is located on an upper side relative to the base portion, and includes a plurality of layers; whereinthe membrane portion does not overlap with the base portion and includes a single crystal piezoelectric layer, an upper electrode layer provided on an upper side of the single crystal piezoelectric layer, and a lower electrode layer that faces at least a portion of the upper electrode layer with the single crystal piezoelectric layer interposed between the upper electrode layer and the lower electrode layer;the membrane portion is provided with a through-groove penetrating in an up-down direction;the through-groove includes a first step portion provided in a thickest layer among the plurality of layers defining the membrane portion; anda width of the through-groove is narrower on a lower side than on an upper side with the first step portion defining a boundary.2. The piezoelectric device according to claim 1 , whereinthe through-groove further includes a second step portion provided in any one layer of the plurality of layers defining the membrane portion above the first step ...

Ultrasound transducer and ultrasound diagnostic apparatus

An ultrasound transducer in which a plurality of pMUT cells are arranged. The pMUT cells have a plurality of resonance frequencies. Each of the pMUT cells includes a piezoelectric film that is polarized in a first direction that is a thickness direction or a second direction that is opposite to the first direction.

HEAT-DISSIPATING COMPONENT FOR MOBILE DEVICE

A heat-dissipating component for a mobile device includes a case body, a micro pump, and a heat dissipation tube plate. The case body has a vent hole and a positioning accommodation trough. The bottom of the positioning accommodation trough is in communication with the vent hole. The micro pump is disposed in the positioning accommodation trough and corresponds to the vent hole The heat dissipation tube plate has cooling fluid inside. One end of the heat dissipation tube plate is fixed on the positioning accommodation trough and contacts a heating element of the mobile device. The gas transmitted by the micro pump forms gas flow so as to perform heat exchange with heat absorbed by the heat dissipation tube plate, and the gas flow is discharged out through the vent hole. 1. A heat-dissipating component for a mobile device , comprising:a case body having a vent hole and a positioning accommodation trough, wherein the positioning accommodation trough corresponds to the vent hole, and a bottom of the positioning accommodation trough is in communication with the vent hole;a micro pump disposed in the positioning accommodation trough, wherein the micro pump corresponds to the vent hole in communication with the bottom of the positioning accommodation trough, whereby gas transmitted by the micro pump is discharged out through the vent hole during operation; anda heat dissipation tube plate having cooling fluid inside, wherein one end of the heat dissipation tube plate is fixed on the positioning accommodation trough and contacts a heating element of the mobile device so as to perform liquid convective heat exchange with heat generated by the heating element;wherein the gas transmitted by the micro pump forms gas flow so as to perform heat exchange with heat absorbed by the heat dissipation tube plate, and the gas flow is discharged out through the vent hole.2. The heat-dissipating component according to claim 1 , wherein the micro pump comprises:a nozzle plate comprising a ...

DIAPHRAGM ACTUATOR AND METHOD FOR PRODUCING A DIAPHRAGM ACTUATOR

A diaphragm actuator has a first frame part and a second frame part, between which at least two diaphragm layers are disposed in a stacked manner and formed as electro-active polymer layers. Furthermore, a method for producing a diaphragm actuator is described. 1. A diaphragm actuator which has a first frame part and a second frame part , and having at least two diaphragm layers which are disposed in a stacked manner and formed as electro-active polymer layers and are arranged between said first frame part and said second frame part.2. The diaphragm actuator as claimed in wherein said diaphragm layers are arranged so as to be immediately adjacent.3. The diaphragm actuator as claimed in wherein said first frame part contacts a first surface of said diaphragm layers and/or said second frame part contacts a second surface of said two diaphragm layers which is opposite to said first surface.4. The diaphragm actuator as claimed in wherein a first connecting part is provided which mechanically contacts said first surface of said diaphragm layers and/or wherein a second connecting part is provided which mechanically contacts said second surface of said diaphragm layers.5. The diaphragm actuator as claimed in wherein said first connecting part and/or said second connecting part is/are arranged centrally on said surface.6. The diaphragm actuator as claimed in wherein said diaphragm layers each have an opening which is provided centrally in said diaphragm layer.7. The diaphragm actuator as claimed in wherein said opening is circular.8. The diaphragm actuator as claimed in wherein said diaphragm layers have one of a circular or substantially rectangular shape.9. The diaphragm actuator as claimed in wherein at least one of said first and second frame parts has one of a circular or substantially rectangular shape.10. The diaphragm actuator as claimed in wherein at least one of said first and second frame parts is at least partially flexible.11. The diaphragm actuator as claimed ...

PIEZOELECTRIC ACTUATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR

A piezoelectric actuator includes a substrate, a first electrode arranged on the substrate, a piezoelectric body stacked on the first electrode, a second electrode superimposed on a surface of the piezoelectric body on a side opposite to the first electrode, and a wiring connected to the first electrode. The first electrode has a connecting portion which is arranged to protrude from an end portion of the piezoelectric body and to which the wiring is connected, and a first conductive portion is provided so that the first conductive portion overlaps with the first electrode while extending over from an area overlapped with the end portion of the piezoelectric body up to the connecting portion of the first electrode. 1. A piezoelectric actuator comprising:a substrate, the substrate having a first end and a second end in a first direction which is along a planer direction of the substrate;a first conductive layer at least partially overlapping with the substrate in a second direction which is orthogonal to the planar direction of the substrate, the first conductive layer having a third end and a fourth end in the first direction;a second conductive layer at least partially overlapping with the first conductive layer and the substrate in the second direction, the second conductive layer having a fifth end and a sixth end in the first direction;a piezoelectric body at least partially overlapping with the substrate, the first conductive layer, and the second conductive layer in the second direction, the piezoelectric body having a seventh end and an eighth end in the first direction, wherein the first conductive layer is at least partially positioned between the piezoelectric body and the substrate in the second direction; anda wiring connected to the first conductive layer;wherein the third end of the first conductive layer is positioned between the first end of the substrate and the fourth end of the first conductive layer in the first direction;wherein the fifth end of ...

MINIATURE PNEUMATIC DEVICE

A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve film and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve film is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed. 1. A miniature pneumatic device , comprising: a gas inlet plate comprising at least one inlet, at least one convergence channel and a central cavity, wherein a convergence chamber is defined by the central cavity, wherein after a gas is introduced into the at least one convergence channel through the at least one inlet, the gas is guided by the at least one convergence channel and converged to the convergence chamber;', 'a resonance plate having a central aperture corresponding to the convergence chamber of the gas inlet plate;', 'a piezoelectric actuator comprising a suspension plate, an outer frame and a piezoelectric ceramic plate, wherein a length of the suspension plate is in a range between 2 mm and 4.5 mm, a width of the suspension plate is in a range between 2 mm and 4.5 mm, and a thickness of the suspension plate is in a range between 0.1 mm and 0.3 mm, wherein the outer frame comprises at least one bracket, and the suspension plate and the outer frame are connected with each other through the at least one bracket, wherein the piezoelectric ...

MINIATURE FLUID CONTROL DEVICE

A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes an inlet, a convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. The gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through a vacant space between the bracket of the piezoelectric actuator, and exited from the miniature fluid control device. 1. A miniature fluid control device for use with a miniature pneumatic device , the miniature fluid control device comprising:a gas inlet plate comprising at least one inlet, at least one convergence channel and a central cavity, wherein a convergence chamber is defined by the central cavity, wherein after a gas is introduced into the at least one convergence channel through the at least one inlet, the gas is guided by the at least one convergence channel and converged to the convergence chamber;a resonance plate having a central aperture corresponding to the convergence chamber of the gas inlet plate; anda piezoelectric actuator comprising a suspension plate, an outer frame and a piezoelectric ceramic plate, wherein a length of the suspension plate is in a range between 2 mm and 4.5 mm, a width of the suspension plate is in a range between 2 mm and 4.5 mm, and a thickness of the suspension plate is in a range between 0.1 mm and 0.3 mm, wherein the outer frame comprises at least one bracket, and the suspension plate and the outer frame are connected with each other through ...

MINIATURE PNEUMATIC DEVICE

A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. The length and width of the gas collecting plate are between 4 mm and 10 mm. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve film and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve film is correspondingly opened or closed and the gas is transferred in one direction. 1. A miniature pneumatic device , comprising: a gas inlet plate;', 'a resonance plate having a central aperture;', 'a piezoelectric actuator; and', 'a gas collecting plate, wherein a length of the gas collecting plate is in a range between 4 mm and 10 mm, a width of the gas collecting plate is in a range between 4 mm and 10 mm, and a length/width ratio of the gas collecting plate is in a range between 0.4 and 2.5,', 'wherein the gas inlet plate, the resonance plate, the piezoelectric actuator and the gas collecting plate are stacked on each other sequentially, and a gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber, wherein when the piezoelectric actuator is actuated, a gas is fed into the miniature fluid control device through the gas inlet plate, transferred through the resonance plate, introduced into the first chamber, and further transferred; and, 'a miniature fluid control device comprisinga miniature valve device comprising a valve film and a gas outlet plate, wherein the gas collecting plate, the valve film and ...

PIEZOELECTRIC MEMS DEVICE HAVING A SUSPENDED DIAPHRAGM AND MANUFACTURING PROCESS THEREOF

A MEMS device comprising a body, having a first surface and a second surface; a diaphragm cavity in the body extending from the second surface of the body; a deformable portion in the body between the first surface and the diaphragm cavity; and a piezoelectric actuator, extending on the first surface of the body, over the deformable portion. The MEMS device is characterized in that it comprises a recess structure extending in the body and delimiting a stopper portion for the deformable portion. 1. A MEMS device , comprising:a body having a first surface and a second surface and a first thickness between the first and second surfaces;a cavity in the body and extending into the body from the second surface, the cavity being delimited by walls of the body;a deformable portion in the body between the first surface and the cavity;a piezoelectric actuator on the deformable portion; anda recess in the walls of the body at the cavity and forming a flexible portion of the body, the flexible portion of the body being between the deformable portion and the recess, wherein the flexible portion of the body is configured to flex when a force above a particular threshold is applied to the deformable portion.2. The device according to claim 1 , wherein the body comprises a substrate of semiconductor material and a structural layer claim 1 , wherein the substrate has a second thickness claim 1 , the structural layer extending over the substrate and defining the first surface claim 1 , the deformable portion being formed in the structural layer claim 1 , and the cavity being a through opening in the substrate.3. The device according to claim 1 , wherein the cavity has a quadrangular shape claim 1 , and wherein the recess is a ring-shaped recess or a polygonally-shaped recess.4. The device according to claim 1 , wherein the recess is formed by a plurality of extending parts that extend at an angular distance of 45° from each other.5. The device according to claim 1 , wherein the ...

PIEZOELECTRIC FILM AND METHOD FOR MANUFACTURING SAME

Provided is a piezoelectric film having a perovskite type crystal structure represented by the following Formula (P), in which a piezoelectric constant d(pm/V), a relative dielectric constant ∈ (−), and a dielectric loss tan δ (−) satisfy (d)/(∈×tan δ×1000)>3. In addition, a method for manufacturing the above piezoelectric film is provided. 1. A piezoelectric film having a perovskite type crystal structure represented by the following Formula (P):{'br': None, 'sub': x', 'a', '1-a', '1-y', 'y', 'z, 'Pb[(ZrTi)Nb]O\u2003\u2003(P)'}where x represents a lead content, y represents a Nb content·B site doping amount, z represents an oxygen content, a represents a Zr/Ti ratio, and y>0.14, and although x=1.0 and z=3 is standard, numerical values of x and z may deviate from 1.0 and 3, respectively, within a range where a perovskite structure can be adopted,wherein the piezoelectric film has a thickness of 2 μm or more, and{'sup': '2', 'the number of particles containing carbon and having a particle size of 200 nm or more, which are deposited on a surface of the piezoelectric film, is 1000 particle/μmor less.'}2. The piezoelectric film as defined in claim 1 , wherein the piezoelectric film has a thickness of 3 μm or more.3. A method for manufacturing a piezoelectric film claim 1 , {'br': None, 'sub': x', 'a', '1-a', '1-y', 'y', 'z, 'Pb[(ZrTi)Nb]O\u2003\u2003(P)'}, 'the piezoelectric film having a perovskite type crystal structure represented by the following Formula (P)where x represents a lead content, y represents a Nb content·B site doping amount, z represents an oxygen content, a represents a Zr/Ti ratio, and y>0.14, and although x=1.0 and z=3 is standard, numerical values of x and z may deviate from 1.0 and 3, respectively, within a range where a perovskite structure can be adopted,the method comprisingforming a piezoelectric film with a sputtering method using a raw material target which has a composition corresponding to a film composition for forming the piezoelectric ...

PIEZOELECTRIC DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS

A piezoelectric device including a flow path forming substrate in which pressure chambers are formed, a diaphragm, and piezoelectric actuators. Active portions, each having a piezoelectric layer interposed between a first electrode and a second electrode, are each, in plan view, provided from an edge portion opposing the pressure chamber to a portion outside the pressure chamber, and a ratio of a film thickness of the piezoelectric layer to a film thickness of the diaphragm is 4.7 or less. 1. A piezoelectric device comprising:a substrate in which a plurality of recessed portions are formed;a diaphragm formed on a surface of the substrate on one side; anda piezoelectric actuator formed on a surface of the diaphragm on a side opposite the substrate, the piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode, whereinthe piezoelectric actuator includes an active portion in which the piezoelectric layer is interposed between the first electrode and the second electrode,in plan view viewed in a direction in which the first electrode, the piezoelectric layer, and the second electrode are layered, the active portion is provided from an edge portion to a portion outside a recessed portion of the plurality of recessed portions, the edge portion being, in an area that opposes the recessed portion, an area other than a middle portion, and{'sub': f', 's', 'f', 's, 'in an area where the active portion and the diaphragm overlap each other in plan view, a ratio t/tof a film thickness tof the piezoelectric layer to a film thickness tof the diaphragm is 4.7 or less.'}2. The piezoelectric device according to claim 1 , wherein the ratio t/tis 2.5 or less.3. The piezoelectric device according to claim 1 , wherein the ratio t/tis larger than zero and is smaller than (E/E) claim 1 , where Eis a Young's modulus of the piezoelectric layer and Eis a Young's modulus of the diaphragm.4. The piezoelectric device according to claim 1 , wherein the ...

SOUND GENERATING DEVICE

A sound generating device includes a case and a diaphragm fixed to the inner surfaces of first to fourth side wall portions of the case via a support member. An air chamber surrounded by a top plate, the diaphragm, and portions of the first to fourth side wall portions is formed. A sound emitting chamber that extends between the air chamber and the atmosphere outside of the case terminates at a sound emitting hole which extends across a plurality of surfaces of the case 1. A sound generating device comprising:a case that includes a top wall and a side wall extending downwardly from the top wall;a diaphragm fixed to an inner surface of the case at a location spaced from the top wall and cooperating with the top wall and the side wall to bound an air chamber; anda sound emitting hole extending through both the top wall and the side wall and being in gaseous communication with the air chamber for allowing sound waves located in the air chamber to exit the case.2. The sound generating device according to claim 1 , further comprising a duct that extends from the air chamber to the sound emitting hole and allows sound waves located in the air chamber to travel to the sound emitting hole.3. The sound generating device according to claim 2 , wherein the duct extends along the side wall of the case.4. The sound generating device according to claim 3 , wherein at least a portion of the duct protrudes outward from the side wall of the case.5. The sound generating device according to claim 2 , wherein the duct extends along the top wall of the case.6. The sound generating device according to claim 5 , wherein at least a portion of the duct protrudes above the top wall of the case.7. The sound generating device according to claim 2 , wherein the duct has a rectangular cross section.8. The sound generating device according to claim 2 , wherein the duct includes first and second opposed walls claim 2 , one of the opposed walls being defined by the top wall of the case.9. The sound ...

INTERDIGITAL TRANSDUCERS ON A PIEZOELECTRIC THIN-FILM FOR SIGNAL COMPRESSION

A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer (IDT) having first interdigitated electrodes is disposed at different locations along the horizontal axis and on the first side of the piezoelectric thin-film. Each opposing pair of the first interdigitated electrodes is to selectively transduce a particular frequency range of an input electrical signal that varies in frequency over time into an acoustic wave of a laterally vibrating mode based on a pitch between electrodes of the opposing pair. An output IDT that includes second interdigitated electrodes is disposed at different locations along the horizontal axis and on the second side of the piezoelectric thin-film. Each opposing pair of the second interdigitated electrodes is to convert the acoustic wave transduced by the respective opposing pair of the first interdigitated electrodes into a compressed pulse. 1. An apparatus , comprising:a piezoelectric thin-film suspended above a carrier substrate, the piezoelectric thin-film having a horizontal axis orientated along a length of the piezoelectric thin-film and a center axis orientated along a width of the piezoelectric thin-film, wherein the horizontal axis is perpendicular to the center axis, and wherein the piezoelectric thin-film comprises a first side and a second side with respect to the center axis;an input interdigital transducer (IDT) comprising first interdigitated electrodes disposed at different locations along the horizontal axis and on the first side of the piezoelectric thin-film, wherein each opposing pair of the first interdigitated electrodes is to selectively transduce a particular frequency range of an input electrical signal that varies in frequency over time into an acoustic wave of a laterally vibrating mode based on a pitch between electrodes of the opposing pair; andan output IDT comprising second interdigitated electrodes disposed at different locations along the horizontal axis and on the ...

Read/write device for a hard-disk memory system, and corresponding manufacturing process

Various embodiments of the present disclosure provide a read/write device for a hard-disk memory system. The read/write device includes a fixed structure; a membrane region including a first and a second membrane, which are constrained to the fixed structure, and a central portion, interposed between the first and second membranes; a first and a second piezoelectric actuator, mechanically coupled, respectively, to the first and second membranes; and a read/write head, which is fixed to the central portion of the membrane region. The first and second piezoelectric actuators can be controlled so as to cause corresponding deformations of the first and second membranes, said deformations of the first and second membranes causing corresponding movements of the read/write head with respect to the fixed structure.

FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND INKJET RECORDING APPARATUS

Disclosed is a method of fabricating an electromechanical transducer film. The method includes treating a surface of a first electrode to be liquid-repellent, the first electrode being formed on one surface of a substrate, irradiating the surface of the first liquid-repellent electrode with an energy ray while moving an irradiation position in accordance with a shape of the electromechanical transducer film to be formed and a shape of an alignment mark to be formed, and forming the alignment mark by applying an application liquid to an area including a portion irradiated with the energy ray in accordance with the shape of the alignment mark in the irradiating step, the application liquid being applied by an inkjet method. 1. A method of fabricating an electromechanical transducer film , the method comprising:treating a surface of a first electrode to be liquid-repellent, the first electrode being formed on one surface of a substrate;irradiating the surface of the first liquid-repellent electrode with an energy ray while moving an irradiation position in accordance with a shape of the electromechanical transducer film to be formed and a shape of an alignment mark to be formed; andforming the alignment mark by applying an application liquid to an area including a portion irradiated with the energy ray in accordance with the shape of the alignment mark in the irradiating step, the application liquid being applied by an inkjet method.2. The method as claimed in claim 1 , further comprising:detecting a print position based on the alignment mark formed in the forming the alignment mark step;forming the electromechanical transducer film by applying a sol-gel liquid to the area including the portion irradiated with the energy ray in accordance with the shape of the electromechanical transducer film in the irradiating step, the sol-gel liquid being applied by the inkjet method.3. The method as claimed in claim 2 , whereinthe forming the electromechanical transducer film is ...

LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC ELEMENT

Provided is A piezoelectric element comprising a first electrode; a piezoelectric body layer provided on the first electrode, the piezoelectric body layer including 50 mol % or more of at least bismuth and iron, and the piezoelectric body layer having a current-time curve obtained by applying a voltage to the first electrode and the second electrode including a plurality of inflection points; and a second electrode provided on the piezoelectric body layer. 1. A piezoelectric element comprising:a first electrode;a piezoelectric body layer provided on the first electrode, the piezoelectric body layer including 50 mol % or more of at least bismuth and iron, and the piezoelectric body layer having a current-time curve obtained by applying a voltage to the first electrode and the second electrode including a plurality of inflection points; anda second electrode provided on the piezoelectric body layer.2. The piezoelectric element according to claim 1 ,wherein, one of the plurality of inflection points is convex upwards with respect to an absolute value of an amount of a current.3. The piezoelectric element according to claim 1 ,wherein, one of the plurality of inflection points is convex downwards with respect to an absolute value of an amount of a current.4. The piezoelectric element according to claim 1 ,wherein, the plurality of inflection points includes a first inflection point which is convex downwards with respect to an absolute value of an amount of a current and a second inflection point which is convex downwards with respect to an absolute value of an amount of a current.5. The piezoelectric element according to claim 4 ,wherein, an absolute value of an amount of a current at the first inflection point is greater than or equal to an absolute value of an amount of a current at the second inflection point.6. The piezoelectric element according to claim 1 ,wherein the piezoelectric body layer is formed by firing films including at least bismuth and iron, in a ...

BROADBAND ULTRASOUND TRANSDUCERS AND RELATED METHODS

Broadband ultrasound transducers and related methods are disclosed herein. An example ultrasonic transducer disclosed herein includes a substrate and a first membrane supported by the substrate. The first membrane is to exhibit a first frequency response when oscillated. The example ultrasonic transducer includes a second membrane supported by the substrate. The second membrane is to exhibit a second frequency response different from the first frequency response when oscillated. The example ultrasonic transducer includes a third membrane supported by the substrate. The third membrane is to exhibit one of the second frequency response or a third frequency response different from the first frequency response and the second frequency response when oscillated. A shape of the first membrane is to differ from a shape of the second membrane and a shape of the third membrane. 1. An ultrasonic transducer , comprising:a substrate;a first membrane supported by the substrate, the first membrane to exhibit a first frequency response when oscillated;a second membrane supported by the substrate, the second membrane to exhibit a second frequency response different from the first frequency response when oscillated; anda third membrane supported by the substrate, the third membrane to exhibit one of the second frequency response or a third frequency response different from the first frequency response and the second frequency response when oscillated, a shape of the first membrane to differ from a shape of the second membrane and a shape of the third membrane.2. The ultrasonic transducer of claim 1 , wherein the first membrane claim 1 , the second membrane claim 1 , and the third membrane are disposed along an axis passing through the first membrane.3. The ultrasonic transducer of claim 2 , wherein the third membrane is associated with the second frequency response.4. The ultrasonic transducer of claim 2 , wherein the third membrane is disposed opposite the second membrane relative ...

ELECTRONIC DEVICE, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, LIQUID DISCHARGE APPARATUS, AND ELECTRONIC APPARATUS

An electronic device includes a switching element, a first common-electrode wiring, at least a part of the first common-electrode wiring being covered with the switching element, a plurality of second common-electrode wirings branched from the part of the first common-electrode wiring covered with the switching element, a plurality of individual power-output terminals arranged in a row in the switching element, and a plurality of individual-electrode wirings arranged in a row, the plurality of individual-electrode wirings being connected to the plurality of individual power-output terminals, respectively. Each of the plurality of second common-electrode wirings is disposed between the plurality of individual-electrode wirings. 1. An electronic device comprising:a switching element;a first common-electrode wiring, at least a part of the first common-electrode wiring being covered with the switching element;a plurality of second common-electrode wirings branched from the part of the first common-electrode wiring covered with the switching element;a plurality of individual power-output terminals arranged in a row in the switching element; 'each of the plurality of second common-electrode wirings is disposed between the plurality of individual-electrode wirings;', 'a plurality of individual-electrode wirings arranged in a row, the plurality of individual-electrode wirings being connected to the plurality of individual power-output terminals, respectively, and'}a plurality of drive elements connected to the plurality of individual-electrode wirings, respectively; anda wiring substrate mounting the switching element, the first common-electrode wiring and the plurality of second common-electrode wirings are formed on the wiring substrate; and a common electrode connected to each of the plurality of second common-electrode wirings,', 'a plurality of individual electrodes connected to the plurality of individual-electrode wirings, respectively, and', 'a sheet resistance of ...