11-11-2021 дата публикации
Номер: US20210352835A1
Принадлежит:
A method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine, wherein a computer-supported process is used to determine the presence and/or position and/or orientation of the substrate. Further, a system designed to execute the method. The computer-supported process includes an artificial neural network. 1. Method for processing substrates , in particular wafers , masks or flat panel displays , with a semi-conductor industry machine , wherein an artificial neural network is used to determine the presence and/or position and/or orientation and/or type of a substrate ,to determine the presence and/or position and/or orientation and/or type of the substrate based on at least one image, which shows a location in or on the semi-conductor industry machine or in the environment of the machine where a substrate may be located when operating the semi-conductor industry machine,wherein the at least one image is taken by at least one acquisition unit,and wherein the artificial neural networkgenerates and/or allows for an information data set comprising information about the determined presence and/or position and/or orientation and/or type of the substrate and/or generates and/or allows for a control command, which is used todirectly control the semi-conductor industry machine, or that is used by the machine's control system,or is passed on to a higher-level control system,or is passed on to a user who draws conclusions from this information for his actions operating the machine,or who passes on this information to control systems or other users,or is saved for later or further evaluation.2. Method according to claim 1 , wherein the artificial neural network forms at least one model that comprises at least one convolutional layer and/or at least one neuronal layer claim 1 , and may comprise additional components claim 1 , such as activation layers claim 1 , and wherein the artificial neural network can be taught ...
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