04-08-1995 дата публикации
Номер: JP0007202013A
Принадлежит:
PURPOSE: To achieve the smallest horizontal size, without losing insulation effects by forming an insulating sidewall in an opening for an insulating body, and isolating a gate contact terminal from each contact terminal of a source and a drain. CONSTITUTION: A gate stack is constituted of a gate oxide layer 102, a polysilicon layer 110 and a nitride layer 120, and the doping of the polysilicon layer is carried out, and an interposed layer 124 is formed as an oxide layer as an etch stop material, and an opening is opened to the gate laminate in a region which is a field insulating part. Then, the opening is stopped on the oxide layer 102, and a sidewall formed at the side part insulates the gate stack from a strap connection working as a mask for implant of a source or a drain. Then, when the polysilicon layer is deposited in the opening and the nitride layer 120 is removed, an insulating layer 113 for protecting a polysilicon contact terminal 115 is grown, a gate 110 is exposed, and a ...
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