27-12-2012 дата публикации
Номер: WO2012174993A1
Принадлежит:
A method for manufacturing a particle source (100), including: placing a metal wire into a vacuum environment and injecting active gas and catalytic gas therein, adjusting the temperature of the metal wire and applying a positive high voltage V on the metal wire, dissociating the active gas on the surface of the metal wire, producing an etching band on the side of the head of the metal wire, and then field etching taking place within the etching band; the field etching strengthening the surface electric field of the top end of the head of the metal wire, until it surpasses the field evaporation electric field of the material of the metal wire, and making the metal atoms here evaporate; after the field etching triggers field evaporation, the two mechanisms mutually adjust until the shape of the head of the metal wire becomes composed of a pedestal (120) and a needle tip (110) on the pedestal (120), wherein the field etching takes place on the side, forming the pedestal (120), and field evaporation ...
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