11-04-2023 дата публикации
Номер: CN115950362A
Принадлежит:
The invention provides a micro-displacement sensing device based on broadband light spatial domain-spectral domain microscopic interferometry, which comprises a broadband light source, a Kohler illumination system, a microscope tube, an interference objective lens, a measured piece, a precise electric control platform, a beam splitter, a scientific CCD (Charge Coupled Device), a light guide optical fiber, a multi-channel spectrograph and a computer, and also relates to a micro-displacement measuring method. According to the device and the method, non-contact displacement sensing is adopted, damage to a measurement piece is avoided, axial scanning is not needed in the measurement process, the measurement efficiency is high, the time is short, and instant measurement can be achieved; according to the measurement method, a spatial domain interference method and a spectral domain interference method of broadband light are combined, small displacement sensing is carried out through spatial domain ...
Подробнее