26-03-2020 дата публикации
Номер: WO2020056590A1
Принадлежит:
Provided is a method for processing an array micro-nano structure using an ultrafast laser combined pulse sequence, the method comprising the following steps: grinding, polishing, cleaning and drying a surface of a workpiece, and then fixing the workpiece on an ultra-precision platform; starting a laser generator using an industrial control computer by means of a laser controller to emit a laser beam to the surface of the workpiece to perform laser focusing, and then adjusting the ultra-precision platform to determine a workpiece processing region; during processing, selecting, by means of the laser controller, a femtosecond laser device or a picosecond laser device to emit laser beams to achieve free combination of ultrafast laser pulses by means of an optical path switching module, and performing processing according to the desired micro-nano structure; and after processing, taking down the workpiece, and cleaning and drying the workpiece to obtain a finished product. The present invention ...
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