07-04-2023 дата публикации
Номер: CN115933776A
Принадлежит:
The invention relates to the technical field of semiconductors, in particular to a temperature control system and method.The temperature control system comprises a heat exchange device, a water tank and a branch pipeline, an outlet of a heat release channel of the heat exchange device communicates with an inlet of the water tank, an outlet of the water tank communicates with a load through a first main pipeline, and the first main pipeline is provided with a first heater; the load communicates with an outlet of the heat release channel of the heat exchange device through a second main pipeline, and the two ends of a branch pipeline communicate with an outlet of the first heater and the second main pipeline correspondingly. The temperature control system is a temperature control device which can restrain return water temperature fluctuation aiming at the situation that return water has large disturbance, the return water temperature fluctuation is reduced to a large extent, and the water ...
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