COMPOSITION FOR FORMING METAL OXIDE FILM, METHOD FOR PRODUCING METAL OXIDE FILM USING SAME, AND METHOD FOR REDUCING VOLUME CONSTRAINATION OF METAL OXIDE FILM

Provided are: a metal oxide film-forming composition which provides a metal oxide film in which volume shrinkage is suppressed when heated at 400 DEG C or less; a method for producing a metal oxide film using the same; and a method for reducing the volume shrinkage rate of the metal oxide film. The metal oxide film-forming composition provides a metal oxide film in which volume shrinkage is suppressed when heated at 400 DEG C or less. A metal oxide film-forming composition according to the present invention contains a metal oxide nanocluster having a size of 5 nm or less, a capping agent containing at least one substance selected from the group consisting of an alkoxysilane, a phenol, an alcohol, a carboxylic acid and a carboxylic acid halide, a base material, and a solvent. In the solid component of the metal oxide film-forming composition, the ratio of the mass of the inorganic component to the total mass of the inorganic component and the organic component is 25 mass% or more.