07-04-2023 дата публикации
Номер: CN115939003A
Принадлежит:
The invention discloses a low-pollution wafer transmission system which comprises a transfer manipulator, a wafer feeding device, a wafer discharging device, a wafer calibration device and a dismounting device, the wafer feeding device, the wafer discharging device, the wafer calibration device and the dismounting device are all arranged on the outer side of the transfer manipulator, and material transfer is achieved through the transfer manipulator. The dismounting and mounting device comprises a clean cavity, a lifting mechanism, a bearing seat and a slide glass disc calibration mechanism, the bearing seat is arranged in the clean cavity, the lifting mechanism penetrates through the bearing seat, the slide glass base comprises a base body and a cover plate, the base body is provided with an opening, the cover plate covers the opening, the bevel edge of the slide glass base is arranged on the base body, and the slide glass disc calibration mechanism is arranged on the cover plate. And ...
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