12-09-2018 дата публикации
Номер: KR101897027B1
According to an embodiment of the present invention, provided is a deposition chamber integrated Raman analyzer capable of preventing a deposition unit from being oxidized or denatured when the deposition unit moves from a deposition process to a Raman analysis process while performing a deposition process and a Raman analysis process in one space. According to an embodiment of the present invention, the deposition chamber integrated Raman analyzer comprises: a deposition chamber; a stage unit combined with a lower wall of the deposition chamber, and supporting a substrate to be deposited; a shower head unit combined with an upper wall of the deposition chamber, and injecting a gas into the deposition chamber; an analysis light source unit coupled to the other side wall of the deposition chamber, and irradiating analysis light toward a deposition unit formed by depositing deposition materials on the substrate; a Raman lens unit for collecting scattered light reflected and scattered from ...
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